Abstract:
A pressure sensor using an electric field effect of a carbon nanotube is provided to prevent damage to a CNT by adding a second grid, thereby improving the durability thereof. A pressure sensor includes a carbon nano tube array, a first grid (32), and a collector(40). The carbon nano tube array is formed on a metal layer(31). The first grid is located at an upper portion of the carbon nano tube array. The second grid is spaced apart from an upper portion of the first grid by a predetermined distance. The collector is spaced apart from the interior of the second grid by a predetermined distance. Electrons emitted from the carbon nano tube collides with gas molecules to be ionized. The ionized positive ions is detected by the collector to be output as an electrical signal.
Abstract:
A needle for oriental medicine with a sensor is provided to be inserted into a patient's body for treatment and to measure the blood pressure, brain pressure, organ pressure and bladder pressure directly. A needle for oriental medicine with a sensor includes optical fiber(2), a diaphragm(4), a first metal layer(6), a second metal layer(8), a radiating unit, a light measuring unit, and a measuring unit. The diaphragm(4) extends along the outer circumference of the optical fiber(2) from an end of the optical fiber, and is changed according to the pressure or the temperature. The first and second metal layers are formed at the ends of the optical fiber(2) and the diaphragm(4) respectively. The measuring unit measures the pressure or temperature from the measured change of the diaphragm, by measuring the ratio of intensity of reflected light measured by the light measuring unit to that of the light emitted by the radiating unit, and measuring the change of the diaphragm.
Abstract:
본 발명은 1 토르, 10 토르, 100 토르 겸용 진공게이지 교정장치에 관한 것이다. 이를 위해, 압력용기(120)의 내부에 표준압력계(140, 142)가 설치되어 모니터용 압력계(560)를 교정하기 위한 진공게이지 교정장치에 있어서, 압력용기(120)의 내부에 수직으로 설치되고, 복수개의 분동 거치대(138)가 축선을 따라 소정간격으로 형성되며, 하부에 표준압력계(140, 142)가 연결된 분동거치축(134); 분동 거치대(138) 사이 마다 설치되고, 복수개의 분동이 한 세트를 이루는 복수의 분동세트; 복수의 분동세트를 구성하는 각 분동을 분동 거치대(138)로부터 개별적으로 들어올리거나 분동 거치대(138)에 거치시키도록 하는 승강수단; 및 외부 명령에 따라 승강수단의 동작을 제어하는 제어수단이 제공된다. 진공, 압력, 게이지, 분동, 토르, 승강, 스텝모터, 거치축, 거치대
Abstract:
A device for calibrating a vacuum gauge for 1, 10, and 100 torr is provided to increase repeatability by detecting a hysteresis by applying the same pressure under the same condition repeatedly. In a device for calibrating a vacuum gauge for 1, 10, and 100 torr, a counter weight supporting axis(134) is vertically installed inside of a pressure vessel(120). A plurality of counter weight supporting rods(138) is formed along an axis line at a predetermined interval and a pair of standard pressure gauges(140,142) is connected to a bottom of the counter weight supporting axis. A plurality of counter weight sets is installed between the counter weight supporting rods. An elevating device individually elevates each counter weight from the counter weight supporting rods or supports each counter on the counter weight supporting rods. And, a control unit controls an operation of the elevating device according to an external command.