中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

869 records (took 0.019 seconds)

    MEMS ELEMENT AND METHOD OF PRODUCING THE SAME, AND DIFFRACTION TYPE MEMS ELEMENT
    92.
    发明公开
    MEMS ELEMENT AND METHOD OF PRODUCING THE SAME, AND DIFFRACTION TYPE MEMS ELEMENT 审中-公开
    MEMS-ELEMENT UND HERSTELLUNGSVERFAHREN DAVON，UND DIFFRAKTIONSARTIGES MEMS-ELEMENT

    公开(公告)号：EP1602624A1

    公开(公告)日：2005-12-07

    申请号：EP04708917.2

    申请日：2004-02-06

    Applicant: SONY CORPORATION

    Inventor： NANIWADA, Koji, c/o Sony Corporation

    IPC: B81B3/00 ,  B81C1/00 ,  G02B26/00

    CPC classification number: B81B3/0072 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/053 ,  G02B26/0808 ,  G02B26/0841

    Abstract: The present invention provides a MEMS device in which a warp that is deformation of a beam is reduced and which aims to improve the characteristic thereof, a method for manufacturing the MEMS device and a diffraction-type MEMS device.
    The MEMS device of the present invention includes a substrate-side electrode and a beam driven by a static electricity generated between the substrate-side and the beam, in which the beam is formed of a plurality of thin films including a driving-side electrode and is provided with deformation prevention means for preventing the deformation of the beam due to the warp of thin films caused by film stress.
    The diffraction-type MEMS device of the present invention is configured such that in the above-described configuration the substrate-side electrode is made common and a plurality of beams are provided independently to each other so as to be opposed to the substrate electrode.

    Abstract translation: 本发明提供了一种MEMS器件，其中减少了光束变形的翘曲，其目的在于提高其特性，制造MEMS器件的方法和衍射型MEMS器件。 本发明的MEMS器件包括基板侧电极和由在基板侧和光束之间产生的静电驱动的光束，其中光束由多个薄膜形成，该薄膜包括驱动 并且设置有变形防止装置，用于防止由薄膜应力引起的薄膜翘曲引起的梁的变形。 本发明的衍射型MEMS器件被构造成使得在上述配置中，将基板侧电极制成共同的并且多个光束彼此独立地设置成与 基板电极。

    BI-STABLE MICRO-ACTUATOR AND OPTICAL SWITCH
    95.
    发明公开
    BI-STABLE MICRO-ACTUATOR AND OPTICAL SWITCH 审中-公开
    双稳态微致动器和光开关

    公开(公告)号：EP1363850A2

    公开(公告)日：2003-11-26

    申请号：EP01977942.0

    申请日：2001-10-11

    Applicant: LITTON SYSTEMS, INC.

    Inventor： STEWART, Robert, E. ,  CHERBETTCHIAN, Agop, H. ,  FERSHT, Samuel, N. ,  HALL, David, B.

    IPC: B81B3/00 ,  B81B7/02 ,  G02B26/02

    CPC classification number: G02B26/0866 ,  B81B3/0024 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/051 ,  B81B2203/053 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/0841 ,  H01H2001/0042

    Abstract: A bi-stable micro-actuator is formed from a first and a second silicon-on-insulator wafer fused together at an electrical contact layer. A cover has a V-groove that defines an optical axis. A collimated optical signal source in the V-groove couples an optical signal to an optical port in the V-groove. A mirror surface on the transfer member blocks or reflects the optical signal. The transfer member has a point of support at the first and second end. The central portion of the transfer member carrying a mirror is displaced from the compressive axis with transfer member in a bowed first or second state. The mirror blocks or reflects the optical axis. An expandable structure applies a compressive force between the first and second point of support along the compressive axis to hold the transfer member in a bowed first state or a bowed second state. A control signal is applied to a heating element in the expandable structure to reduce the compressive force transferring the transfer member to a second state. The central portion of the transfer member moves from a bowed first state past the compressive axis into a bowed second state to clear the optical axis.

    Microelectromechanical actuator system
    96.
    发明公开
    Microelectromechanical actuator system 有权
    MikroelektromechanisechesBetätigungssystem

    公开(公告)号：EP1359118A2

    公开(公告)日：2003-11-05

    申请号：EP03252493.6

    申请日：2003-04-17

    Applicant: Xerox Corporation

    Inventor： Dunec, John L. ,  Volkel, Armin R. ,  Peeters, Eric ,  Rosa, Michel A. ,  DeBruyker, Dirk ,  Hantschel, Thomas

    IPC: B81B3/00

    CPC classification number: B81B3/0008 ,  B81B3/0021 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/058 ,  G02B26/0841 ,  H02N1/002

    Abstract: A MEMS system including a fixed electrode (504) and a suspended moveable electrode (508) that is controllable over a wide range of motion. In traditional systems where an fixed electrode (504) is positioned under the moveable electrode (508), the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode (508) moves too close to the fixed electrode (504). By repositioning the fixed electrode (504) from being directly underneath the moving electrode (508), a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.

    Abstract translation: 一种MEMS系统，包括可在宽的运动范围内控制的固定电极（504）和悬挂的可移动电极（508）。 在固定电极（504）位于可移动电极（508）下方的传统系统中，由于当可移动电极（508）移动得太靠近固定电极时，支撑可移动电极的支撑结构变得不稳定，所以运动范围受到限制 （504）。 通过将固定电极（504）重新定位在移动电极（508）的正下方，可实现更宽范围的可控制运动。 宽范围的可控运动在光开关应用中尤为重要。

    MICROELECTROMECHANICAL DEVICE WITH MOVING ELEMENT
    97.
    发明公开
    MICROELECTROMECHANICAL DEVICE WITH MOVING ELEMENT 审中-公开
    具有运动元件的微电子机械装置

    公开(公告)号：EP1218790A2

    公开(公告)日：2002-07-03

    申请号：EP00946255.7

    申请日：2000-07-20

    Applicant: Memlink Ltd.

    Inventor： CHERTKOW, Roberto, Igal

    IPC: G02B26/02

    CPC classification number: H04Q11/0005 ,  B81B3/0021 ,  B81B2201/045 ,  B81B2203/051 ,  B81C1/00214 ,  G02B6/266 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3584 ,  G02B6/423 ,  H01H2001/0084 ,  H04Q2011/0026 ,  H04Q2011/003 ,  H04Q2011/0056 ,  H04Q2011/0058

    Abstract: A microelectromechanical (MEMS) device (100) has a substrate (102) and a generally planar moving element (106), such as a mirror, disposed in parallel to the surface (108) of the substrate. An actuator is operatively engageable with the moving element (106) for selectively actuating the moving element (106) between a first position in a plane horizontal to the surface of the substrate and a second position in that plane. The MEMS device (100) may be effectively used as an optical switch. Various different actuators can be used. Preferably, the device is fabricated using a surface micromachining process.

    Abstract translation: 微机电（MEMS）器件（100）具有衬底（102）和平行于衬底的表面（108）设置的大致平面的移动元件（106），例如反射镜。 致动器可操作地与移动元件（106）接合，用于选择性地致动移动元件（106）在水平于基板表面的平面中的第一位置与该平面中的第二位置之间。 MEMS器件（100）可以有效地用作光开关。 可以使用各种不同的致动器。 优选地，该装置使用表面微机械加工工艺来制造。

Patent Agency Ranking