公开(公告)号：WO1998020790A1

公开(公告)日：1998-05-22

申请号：PCT/JP1997003977

申请日：1997-10-31

Applicant: CITIZEN WATCH CO., LTD. ,  EGAWA, Shunji

Inventor： CITIZEN WATCH CO., LTD.

IPC: A61B05/00

CPC classification number: G01J5/04 ,  G01J5/045 ,  G01J5/049 ,  G01J5/08 ,  G01J5/0818 ,  G01J5/0875 ,  G01J2005/066 ,  G01J2005/068 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: A light guide tube (15) which guides an infrared radiation from a measured object, a 1st infrared sensor (10) which detects the infrared radiation from the light guide tube (15), a temperature sensor (12) which generates a reference temperature signal, a reference cavity (17) which shows a temperature status approximately the same as the temperature status of the light guide tube (15) and is closed so as to prevent the incidence of an external infrared radiation, a 2nd infrared sensor (11) which detects an infrared radiation from the reference cavity (17), a temperature calculating means (13) which calculates the temperature of the object in accordance with the signals from the 1st infrared sensor (10), the 2nd infrared radiation sensor (11) and the temperature sensor (12) and a display (14) which displays the temperature in accordance with a signal from the temperature calculating means (13) are provided. The diameter of at least one of the light guide tube (15) and the reference cavity (17) is gradually reduced from the side of the 1st and 2nd infrared sensors (10 and 11) toward the light incidence opening of the light guide tube (15).

Abstract translation: 引导来自测量对象的红外辐射的导光管（15），检测来自导光管（15）的红外辐射的第一红外传感器（10），产生参考温度信号的温度传感器 ，参考空腔（17），其显示与导光管（15）的温度状态大致相同的温度状态，并且被封闭以防止外部红外线辐射的入射，第二红外线传感器（11） 根据来自第一红外线传感器（10），第二红外线传感器（11）和第二红外线传感器（11）的信号，检测来自基准空腔（17）的红外线辐射，温度计算装置（13） 提供了根据来自温度计算装置（13）的信号显示温度的温度传感器（12）和显示器（14）。 导光管（15）和基准空腔（17）中的至少一个的直径从第一和第二红外线传感器（10和11）的侧面朝向导光管的光入射开口逐渐减小 15）。

公开(公告)号：WO1994008506A1

公开(公告)日：1994-04-28

申请号：PCT/US1992008644

申请日：1992-10-12

Applicant: YELDERMAN, Mark, L. ,  GOLDBERGER, Daniel, S. ,  BRAIG, James, R.

IPC: A61B05/00

CPC classification number: G01J5/04 ,  A61B1/227 ,  G01J5/02 ,  G01J5/028 ,  G01J5/045 ,  G01J5/049 ,  G01J5/08 ,  G01J5/0812 ,  G01J5/0862 ,  G01J5/14 ,  G01J2005/066 ,  G01J2005/068

Abstract: A noncontact infrared tympanic thermometer which does not require environmental stabilization or waveguide temperature control because it utilizes an optically stabilized infrared detector for detecting the infrared energy emitted by the tympanic membrane. This stability is accomplished by locating a neutral density filter (164) over half of the optical aperture (162) of the detector package (16) such that the neutral density filter (164) ''shadows'' only one of two thermopile channels (163) for detecting the infrared energy emitted by the tympanic membrane. The two thermopile channels (163) are connected in series opposition such that any optical signal equally present in both channels will yield a zero net output. Since the infrared energy emitted by the walls (161) of the detector package (16) reach each detector (163) equally, the effects of these emissions on the temperature measurement are eliminated.

Abstract translation: 一种非接触红外鼓膜温度计，其不需要环境稳定或波导温度控制，因为它使用光学稳定的红外检测器来检测由鼓膜发射的红外能量。 这种稳定性是通过将中性密度滤光器（164）定位在检测器封装（16）的光学孔（162）的一半上而实现的，使得中性密度滤光片（164）仅“阴影”两个热电堆通道中的一个 163），用于检测由鼓膜发射的红外能量。 两个热电堆通道（163）串联连接，使得两个通道中同样存在的任何光信号将产生零净输出。 由于检测器封装（16）的壁（161）发射的红外能量同样到达每个检测器（163），消除了这些排放对温度测量的影响。

公开(公告)号：EP3365644A1

公开(公告)日：2018-08-29

申请号：EP16763517.6

申请日：2016-09-12

Applicant: Robert Bosch GmbH

Inventor： HERRMANN, Ingo ,  GROSS, David ,  UTERMOEHLEN, Fabian

IPC: G01J5/20 ,  G01J5/08 ,  G01J1/42

CPC classification number: G01J5/20 ,  G01J1/429 ,  G01J5/0853 ,  G01J5/0896 ,  G01J2005/066 ,  G01J2005/206

Abstract: The invention relates to a radiation sensor array (21), comprising a radiation sensor (2), comprising a cantilevered element (5), which comprises an optical absorber (6) and a resistance structure (3), and a holding structure (4) that holds the cantilevered element (5) at a distance to a substrate (1), and which represents a connection between the cantilevered element (5) and the substrate (1), and comprising an evaluation unit for detecting an absorbed radiation from the change of an electrical resistance of the resistance structure (3), characterized by a wavelength-selective design of the optical absorber (6).

公开(公告)号：EP3204742A1

公开(公告)日：2017-08-16

申请号：EP15848474.1

申请日：2015-10-09

Applicant: Robert Bosch GmbH

Inventor： ROCZNIK, Thomas ,  PURKL, Fabian ,  O'BRIEN, Gary ,  FEYH, Ando ,  KIM, Bongsang ,  SAMARAO, Ashwin ,  YAMA, Gary

IPC: G01J5/10 ,  G01J5/22 ,  G01J5/00

CPC classification number: G01J5/06 ,  G01J5/0809 ,  G01J5/0853 ,  G01J5/20 ,  G01J5/24 ,  G01J2005/066 ,  G01J2005/067

Abstract: A semiconductor sensor system, in particular a bolometer, includes a substrate, an electrode supported by the substrate, an absorber spaced apart from the substrate, a voltage source, and a current source. The electrode can include a mirror, or the system may include a mirror separate from the electrode. Radiation absorption efficiency of the absorber is based on a minimum gap distance between the absorber and mirror. The current source applies a DC current across the absorber structure to produce a signal indicative of radiation absorbed by the absorber structure. The voltage source powers the electrode to produce a modulated electrostatic field acting on the absorber to modulate the minimum gap distance. The electrostatic field includes a DC component to adjust the absorption efficiency, and an AC component that cyclically drives the absorber to negatively interfere with noise in the signal.

Abstract translation: 半导体传感器系统，特别是辐射热测量计，包括衬底，由衬底支撑的电极，与衬底隔开的吸收器，电压源和电流源。 电极可以包括镜子，或者该系统可以包括与电极分离的镜子。 吸收体的辐射吸收效率基于吸收体和反射镜之间的最小间隙距离。 电流源在吸收器结构上施加DC电流以产生指示吸收器结构吸收的辐射的信号。 电压源为电极供电以产生作用在吸收器上的调制静电场以调节最小间隙距离。 静电场包括调整吸收效率的直流分量和循环驱动吸收器的交流分量，以消极地干扰信号中的噪声。

公开(公告)号：EP3035015A1

公开(公告)日：2016-06-22

申请号：EP15198490.3

申请日：2015-12-08

Applicant: Melexis Technologies NV

Inventor： VAN DER WIEL, Appolonius Jacobus

IPC: G01J5/04 ,  G01J1/16 ,  G01J5/02 ,  G01J5/06 ,  G01J5/12 ,  G01J5/14 ,  G01J1/42 ,  G01J5/20

CPC classification number: G01J1/4228 ,  G01J1/1626 ,  G01J5/0225 ,  G01J5/024 ,  G01J5/0285 ,  G01J5/045 ,  G01J5/06 ,  G01J5/061 ,  G01J5/12 ,  G01J5/14 ,  G01J5/20 ,  G01J2005/0048 ,  G01J2005/063 ,  G01J2005/065 ,  G01J2005/066 ,  G01J2005/068

Abstract: A semiconductor device (1) for measuring IR radiation is disclosed. It comprises a substrate (2) and a cap (3) enclosing a cavity (12,), a sensor pixel (10) in the cavity, comprising a first absorber (11) for receiving said IR radiation, a first heater (13), first temperature measurement means (14) for measuring a first temperature (Ts); a reference pixel (10) in the same cavity, comprising a second absorber (21) shielded from said IR radiation, a second heater (23), and second temperature measurement means (24) for measuring a second temperature (Tr); a control circuit (4) for applying a first/second power (Ps, Pr) to the first/second heater (13, 23) such that the first temperature (Ts) equals the second temperature (Tr); and an output circuit (5) for generating an output signal indicative of the IR radiation (Pir) based on a difference between the first and second power (Ps, Pr).

公开(公告)号：EP1972911A3

公开(公告)日：2011-01-19

申请号：EP08250712.0

申请日：2008-03-01

Applicant: Lasermet Limited

Inventor： Hewinson, John ,  Ward, Stuart

IPC: G01J1/42 ,  G01J5/12

CPC classification number: G01J1/4257 ,  G01J5/12 ,  G01J2005/066

Abstract: A measuring apparatus (1) is provided comprising a detector device for detecting a variable to be measured, and control means (19) operative to control the detector means and generate an output signal indicative of the magnitude of the variable being measured. The detector means comprises a housing (3) on which are mounted two Peltier-Seebeck detectors (11, 13), the detectors (11, 13) being arranged on the housing (3) such that only the first Peltier-Seebeck detector (11) is exposed, in use, to the variable to be measured. The control means (19) being operative to generate the output signal based on the output of the first Peltier-Seebeck detector (11) and the output of the second Peltier-Seebeck detector (13) The output signal generated therefore accounts for the effect of the ambient heat on each Peltier-Seebeck detector (11, 13).

公开(公告)号：EP1721136A1

公开(公告)日：2006-11-15

申请号：EP05734192.7

申请日：2005-03-04

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ,  ULIS

Inventor： OUVRIER-BUFFET, Jean-Louis ,  CARLE, Laurent ,  VIALLE, Claire ,  VILAIN, Michel

IPC: G01J5/10

CPC classification number: G01J5/10 ,  G01J5/02 ,  G01J5/024 ,  G01J5/06 ,  G01J5/20 ,  G01J2005/066 ,  G01J2005/068

Abstract: The invention relates to a passive microbolometer (12), comprising a reflective screen (17) and a suspended membrane with the function of radiation absorber, thermometer and electrical connection. The membrane is supported by at least two anchor elements (15) fixed to a support substrate (16). The reflective screen (17) may be embodied by at least one layer (18) of metallic material with a thickness of the order of 500Å to 2000Å. The screen (17) is arranged beneath the membrane in electrical contact with the membrane absorber element (13) such as to reduce the area resistance of the unit made up of the screen (17) and the absorbing element (13) and to avoid the absorption of radiation by the latter.

公开(公告)号：EP0875197A1

公开(公告)日：1998-11-04

申请号：EP97909713.6

申请日：1997-10-31

Applicant: CITIZEN WATCH CO. LTD.

Inventor： EGAWA, Shunji

IPC: A61B5/00

CPC classification number: G01J5/04 ,  G01J5/045 ,  G01J5/049 ,  G01J5/08 ,  G01J5/0818 ,  G01J5/0875 ,  G01J2005/066 ,  G01J2005/068 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: A light guide tube (15) which guides an infrared radiation from a measured object, a first infrared sensor (10) which detects the infrared radiation from the light guide tube (15), a temperature sensor (12) which generates a reference temperature signal, a reference cavity (17) which shows a temperature status approximately the same as the temperature status of the light guide tube (15) and is closed so as to prevent the incidence of an external infrared radiation, a second infrared sensor (11) which detects an infrared radiation from the reference cavity (17), a temperature calculating means (13) which calculates the temperature of the object in accordance with the signals from the first infrared sensor (10), the second infrared radiation sensor (11) and the temperature sensor (12) and a display (14) which displays the temperature in accordance with a signal from the temperature calculating means (13) are provided. The diameter of at least one of the light guide tube (15) and the reference cavity (17) is gradually reduced from the side of the first and second infrared sensors (10 and 11) toward the light incidence opening of the light guide tube (15).

Abstract translation: 引导来自测量对象的红外辐射的导光管（15），检测来自导光管（15）的红外辐射的第一红外线传感器（10），产生参考温度信号的温度传感器 ，参考空腔（17），其显示与导光管（15）的温度状态大致相同的温度状态，并且被封闭以防止外部红外线辐射的入射;第二红外线传感器（11），其 检测来自参考空腔（17）的红外线辐射;温度计算装置（13），其根据来自第一红外线传感器（10），第二红外线辐射传感器（11）和第二红外线传感器 提供了根据来自温度计算装置（13）的信号显示温度的温度传感器（12）和显示器（14）。 导光管（15）和基准空腔（17）中的至少一个的直径从第一和第二红外线传感器（10和11）的侧面逐渐朝向导光管的入射孔 15）。

公开(公告)号：EP0856278A3

公开(公告)日：1998-11-04

申请号：EP97310723.8

申请日：1997-12-24

Applicant: Brown, David Lloyd

Inventor： Brown, David Lloyd

IPC: A61B5/00

CPC classification number: G01J5/0022 ,  A61B5/01 ,  A61B5/6853 ,  A61B5/6855 ,  G01J5/0025 ,  G01J5/02 ,  G01J5/025 ,  G01J5/026 ,  G01J5/047 ,  G01J5/08 ,  G01J5/0862 ,  G01J5/089 ,  G01J2005/066

Abstract: A system for locating inflamed plaque in an artery of a patient includes a catheter with an expander mounted at a catheter distal end. An infrared carrier, e.g., an optical fiber is mounted on the catheter with a carrier distal end attached to the expander. A sensor is connected to a carrier proximal end to measure infrared radiation transmitted through the carrier from the carrier distal end. In use, the expander is operable to selectively move the carrier distal end into contact with the arterial wall. Infrared radiation can then be measured to determine the temperature at the arterial wall. Temperatures at various locations can be taken, with elevated temperatures being indicative of inflamed plaque.

公开(公告)号：EP0539984A3

公开(公告)日：1994-04-13

申请号：EP92118509.6

申请日：1992-10-29

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Moslehi,Mehrdad M.

IPC: G02B5/00 ,  G01J5/52 ,  G01J5/00

CPC classification number: G01J5/0003 ,  G01J5/0007 ,  G01J5/08 ,  G01J5/0818 ,  G01J5/0834 ,  G01J5/0896 ,  G01J2005/0048 ,  G01J2005/066

Abstract: In one embodiment, a system for measuring the temperature of a first object, such as wafer 112, in the presence of a second radiating object, such as a heating lamp 118, is disclosed herein. A heating lamp 118 is provided for heating the wafer 112 for device processing. Both the wafer 112 and the lamp 118 emit radiation. A first detector 120 detects radiation emitted by both the wafer 112 and the lamp 118. A second detector 122 which detects radiation from only the heating lamp 118 may also be used. A modulation source 126 is provided for modulating the heater 118 to a selected modulation depth M L such that the temperature of the lamp 118 varies with the selected AC modulation and the temperature of the wafer 112 remains substantially constant. Also, circuitry is provided for determining the fraction of radiation emitted by the lamp and collected by the first detector 120 (lamp interference signal) based upon the heating lamp modulation and then calculating the precise temperature of the wafer 112. Other systems and methods are also disclosed.

Abstract translation: 在一个实施例中，本文公开了一种用于在诸如加热灯118的第二辐射物体的存在下测量诸如晶片112的第一物体的温度的系统。 加热灯118用于加热晶片112以进行器件处理。 晶片112和灯118都发射辐射。 第一检测器120检测由晶片112和灯118发出的辐射。也可以使用检测仅来自加热灯118的辐射的第二检测器122。 提供调制源126，用于将加热器118调制到选定的调制深度ML，使得灯118的温度随所选AC调制而变化，并且晶片112的温度保持基本恒定。 此外，还提供了用于基于加热灯调制确定由灯发射并由第一检测器120收集的辐射的部分（灯干扰信号）并且然后计算晶片112的精确温度的电路。其他系统和方法也是 披露。