公开(公告)号：US5061070A

公开(公告)日：1991-10-29

申请号：US184639

申请日：1988-04-22

Applicant: John S. Batchelder ,  Donald M. DeCain ,  Marc A. Taubenblatt ,  Hermantha K. Wickramasinghe ,  Clayton C. Williams

Inventor： John S. Batchelder ,  Donald M. DeCain ,  Marc A. Taubenblatt ,  Hermantha K. Wickramasinghe ,  Clayton C. Williams

IPC: G01N15/14 ,  G01J9/02 ,  G01N15/00 ,  G01N15/02 ,  G01N15/06 ,  G01N21/23 ,  G01N21/45 ,  G01N21/94

CPC classification number: G01N21/45 ,  G01J2009/0261 ,  G01N2015/0011 ,  G01N2015/0053 ,  G01N2015/0238 ,  G01N21/94

Abstract: A method and apparatus for monitoring process fluids used in the manufacture of semiconductor components and other microelectronic devices relies upon detection of the phase shift of a pair of optical energy beams encountering a bubble or particle in the fluid. The system distinguishes between bubbles and particles having indices of refraction greater than the surrounding fluid and between different types and sizes of particles.

公开(公告)号：US5037202A

公开(公告)日：1991-08-06

申请号：US547735

申请日：1990-07-02

Applicant: John S. Batchelder ,  Marc A. Taubenblatt

Inventor： John S. Batchelder ,  Marc A. Taubenblatt

IPC: G01J9/02 ,  G01N15/02 ,  G01N15/14 ,  G01N21/21 ,  G01N21/45

CPC classification number: G01N15/0205 ,  G01J2009/0261 ,  G01N15/1434 ,  G01N2015/0238 ,  G01N21/45

Abstract: An apparatus is described for classifying particles and includes an optical system for transmitting to a focal plane which includes at least one particle, two substantially parallel optical beams, the beams being initially mutually coherent but of different polarizations. The beams are displaced and focused in the focal plane. A further optical system is positioned in the path which the beam takes after depating from the focal plane and combines the beams so that a particle-induced phase shift in one beam is manifest by a change in elliptical polarization of the combined beams. A first detector is responsive to the beam's intensity along a first polarization axis to produce a first output and a second detector is responsive to the beams intensity along a second polarization axis to produce a second output. The first and second outputs are added to provide an extinction signal and, in a separate device, are subtracted to provide to phase shift signal. The extinction signal and phase shift signal are both fed to a processor which classifies a particle in accordance therewith.

公开(公告)号：US4907886A

公开(公告)日：1990-03-13

申请号：US297866

申请日：1989-02-06

Applicant: Rene Dandliker

Inventor： Rene Dandliker

IPC: G01B9/02 ,  G01J9/02 ,  G01J9/04

CPC classification number: G01B9/02007 ,  G01B9/02003 ,  G01B9/02027 ,  G01B9/02067 ,  G01J9/04 ,  G01B2290/70 ,  G01J2009/0207 ,  G01J2009/0253 ,  G01J2009/0261

Abstract: An apparatus for measuring changes in a variable interference section of an interferometer comprises a laser source for producing beams of the frequency n.sub.1 and the frequency n.sub.2, polarizing beam splitters for producing cross-polarized partial beams of frequency n.sub.1 or n.sub.2, modulators for displacing the frequency of one of the partial beams by frequency f.sub.1 or f.sub.2, a pair of deflecting mirrors in each case and polarizing beam splitters for combining the partial beam n.sub.1, n.sub.1 +f.sub.1, n.sub.2, n.sub.2 +f.sub.2. The apparatus further includes two photodetectors, upstream of which are arranged a polarizer, a Michelson interferometer, a non-polarizing beam splitter for splitting the partial beams in each case into a measuring light beam or a reference light beam. The reference light beam passes to an associated photodetector. The measuring light beam passes into the Michelson interferometer and then to the associated photodetector. The signals of the photodetectors are demodulated according to the amplitude and the phase difference between the two demodulated signals is determined. This phase difference is only dependent on the position of a measurement object and the equivalent wavelength of the difference n.sub.1 -n.sub.2. A method for measuring changes by determining positions or distances is performed by the apparatus.

Abstract translation: PCT No.PCT / CH88 / 00070 Sec。 371日期1989年2月6日 102（e）日期1989年2月6日PCT PCT 3月30日PCT公布。 第WO88 / 08519号公报 用于测量干涉仪的可变干涉部分的变化的装置包括用于产生频率n1和频率n2的光束的激光源，用于产生频率为n1的交叉偏振分光束的偏振分束器或 n2，用于通过频率f1或f2移位部分光束中的一个的频率的调制器，每种情况下的一对偏转镜和用于组合部分光束n1，n1 + f1，n2，n2 + f2的偏振光束分离器。 该装置还包括两个光电检测器，其上游设置有偏振器，迈克尔逊干涉仪，用于将每个情况下的部分光束分成测量光束或参考光束的非偏振分束器。 参考光束传递到相关联的光电检测器。 测量光束进入迈克尔逊干涉仪，然后进入相关的光电检测器。 光电探测器的信号根据振幅进行解调，确定两个解调信号之间的相位差。 该相位差仅取决于测量对象的位置和差值n1-n2的等效波长。 通过确定位置或距离来测量变化的方法由该装置执行。

公开(公告)号：US4906095A

公开(公告)日：1990-03-06

申请号：US147468

申请日：1988-01-25

Applicant: Roger G. Johnston

Inventor： Roger G. Johnston

IPC: G01J9/02 ,  G01N21/17 ,  G01N21/19

CPC classification number: G01J9/02 ,  G01N21/171 ,  G01J2009/0207 ,  G01J2009/0261 ,  G01J2009/0269 ,  G01N21/19

Abstract: The present apparatus includes a two-frequency, Zeeman-effect laser and matched, doubly refracting crystals in the construction of an accurate interferometer. Unlike other interferometric devices, the subject invention exhibits excellent phase stability owing to the use of single piece means for producing parallel interferometer arms, making the interferometer relatively insensitive to thermal and mechanical instabilities. Interferometers respond to differences in optical path length between their two arms. Unlike many interferometric techniques, which require the measurement of the location of interference fringes in a brightly illuminated background, the present invention permits the determination of the optical path length difference by measuring the phase of an electronic sine wave. The present apparatus is demonstrated as a differential thermooptic spectrometer for measuring differential optical absorption simply and accurately which is but one of many applications therefor. The relative intensities of the heating beams along each arm of the interferometer can be easily adjusted by observing a zero phase difference with identical samples when this condition is obtained.

Abstract translation: 本设备包括一个双频塞曼效应激光器和匹配的双折射晶体，构建精确的干涉仪。 与其他干涉仪装置不同，本发明由于使用用于产生平行干涉仪臂的单件装置显示出优异的相位稳定性，使得干涉仪对热和机械不稳定性相对不敏感。 干涉仪响应两臂之间光程长度的差异。 与需要在明亮照明背景中测量干涉条纹的位置的许多干涉测量技术不同，本发明允许通过测量电子正弦波的相位来确定光程长度差异。 本装置被证明是用于简单且精确地测量差分光吸收的差分热光谱仪，其仅是许多应用之一。 当获得该条件时，可以通过观察相同样品的零相位差来容易地调节沿着干涉仪的每个臂的加热束的相对强度。

公开(公告)号：US4688941A

公开(公告)日：1987-08-25

申请号：US743609

申请日：1985-06-11

Applicant: Michel Philbert

Inventor： Michel Philbert

IPC: G01J9/00 ,  G01J9/02 ,  G02B27/28 ,  G01B9/02

CPC classification number: G01J9/02 ,  G01J2009/0261

Abstract: An optical system for analyzing and correcting wave fronts comprising a deformable mirror for correcting wave fronts and a system for analyzing and detecting phase distortion, an interferometer with lateral duplication constituting the analysis system, receiving the wave front for analysis and duplicating it and deducing from two neighboring wave fronts obtained signals to control deformation of the deformable mirror, wherein this lateral duplication interferometer is a polarization interferometer consisting of a Wollaston double-refractive biprism with an angle .theta., the two prisms being assembled head to tail and cut parallel to the crystallographic axis such that the respective axes are parallel and perpendicular to the edges of the prisms, a polarizer and an analyzer on either side of the biprism and an oscillating optical member on the path of the biprism.

Abstract translation: 一种用于分析和校正波前的光学系统，包括用于校正波前的可变形反射镜和用于分析和检测相位失真的系统，具有构成分析系统的侧向复制的干涉仪，接收用于分析和复制的波阵面并从其中推导出 相邻波前获得用于控制可变形反射镜的变形的信号，其中该横向复制干涉仪是由具有角度θ的沃拉斯顿双折射双棱镜组成的偏振干涉仪，两个棱镜被组装成头部到尾部并平行于结晶轴切割 使得各个轴平行并垂直于棱镜的边缘，偏振器和分支器在双棱镜的任一侧上以及在双棱镜的路径上的振荡光学构件。

公开(公告)号：US4558952A

公开(公告)日：1985-12-17

申请号：US467847

申请日：1983-02-18

Applicant: Vladimir P. Kulesh ,  Leonid M. Moskalik ,  Anatoly A. Orlov ,  Jury A. Bliznjuk ,  Stanislav K. Shtandel

Inventor： Vladimir P. Kulesh ,  Leonid M. Moskalik ,  Anatoly A. Orlov ,  Jury A. Bliznjuk ,  Stanislav K. Shtandel

IPC: G01B9/02 ,  G01J9/02 ,  G01J9/04 ,  G01N21/45 ,  G01B11/02

CPC classification number: G01B9/02057 ,  G01B9/02002 ,  G01B9/02012 ,  G01J9/04 ,  G01N21/45 ,  G01B2290/25 ,  G01B2290/45 ,  G01B2290/70 ,  G01J2009/0219 ,  G01J2009/0234 ,  G01J2009/0261

Abstract: A method for measuring an optical length of light path based on use of multiple-beam interference of light and carried into effect by forming an original light beam with two collinear components having mutually independent polarizations and different frequencies in such a manner that when forming each of the following interfering light beams from the preceding one, polarizations of the light components having different frequencies are mutually converted, whereupon the interfered light is converted into an electric signal and its phase is measured, by which the light path optical length is determined. A laser interferometer carrying said method into effect comprises: a laser and arranged consecutively along the direction of run of the light beam: a device for offsetting the frequency of one of the light components, reflecting elements, a polarizing element for separating the light of the interfering beams according to polarization, and a photoelectric converter of the interfered light into an electric signal, as well as a unit for measuring the phase of an electric signal, connected to the photoelectric converter and also a birefringent plate located between the reflecting elements and adapted for mutual conversion of polarizations of the two light components.

Abstract translation: 一种用于基于使用光的多光束干涉来测量光路的光学长度的方法，其通过用具有相互独立的极化和不同频率的两个共线分量形成原始光束来实现，使得当形成 来自前述的以下干涉光束被相互转换，因此被干扰的光被转换为电信号，并且测量其相位，由此确定光路光学长度。 携带所述方法的激光干涉仪实现包括：沿着光束的行进方向连续布置的激光器：用于抵消一个光分量，反射元件的频率的装置，用于分离光束的光的偏振元件 根据偏振的干涉光束和被干扰的光的光电转换器变成电信号，以及连接到光电转换器的电信号的相位测量单元，以及位于反射元件之间的双折射板， 用于两个光分量的偏振的相互转换。

公开(公告)号：KR100873531B1

公开(公告)日：2008-12-11

申请号：KR1020070008207

申请日：2007-01-26

Applicant: 캐논 가부시끼가이샤

Inventor： 시오데요시히로

IPC: G01J4/04 ,  H01L21/027

CPC classification number: G03F7/706 ,  G01J4/00 ,  G01J2009/0261 ,  G03F7/70566

Abstract: 피검광학계에 편광방향이 서로 다른 복수의 직선 편광의 광을 조사하고, 상기 피검광학계의 복굴절량(R)과 진상축(φ)을 포함한 편광특성을 측정하는 방법은, 상기 피검광학계에 편광방향(θ)을 가진 직선편광의 광을 조사하는 스텝과, 상기 피검광학계를 투과한 광의 중심량(P)를 취득하는 스텝과, P=－R·cos(2θ-φ) 또는 P=R·cos(2θ-φ)로부터 상기 복굴절량(R)과 상기 진상축(φ)을 취득하는 스텝을 포함하고 있다.

公开(公告)号：KR1020070078394A

公开(公告)日：2007-07-31

申请号：KR1020070008207

申请日：2007-01-26

Applicant: 캐논 가부시끼가이샤

Inventor： 시오데요시히로

IPC: G01J4/04 ,  H01L21/027

CPC classification number: G03F7/706 ,  G01J4/00 ,  G01J2009/0261 ,  G03F7/70566 ,  G02B27/286

Abstract: A measurement method is provided to simply measure polarization property of a optical system to be detected without an optical device such as a wavelength plate and a polarizer. A measurement method includes the steps of illuminating linear polarization in a direction of 0° by an illumination optical system(1002), measuring a centroid amount of light transmitting a projection optical system to save the measured value into a data process system(1004), rotating a polarization unit to repeat a measurement by an illumination having a different polarization direction and repeating a store of the result in whole predetermined polarization directions(1006,1008), analyzing a polarization property on the data process system using the value of saved measurement results and each of the polarization directions corresponding to each of the saved measurement results to calculate an amount of correction of the optimized projection optical system, a reticle pattern, and an illumination optical system(1010), and saving the amount of correction into an exposure device as feedback(1012).

Abstract translation: 提供测量方法以简单地测量待检测的光学系统的偏振特性，而不需要波长板和偏振器等光学装置。 测量方法包括通过照明光学系统（1002）照亮0°方向的线偏振的步骤，测量透射投影光学系统的光的重心量，以将测量值保存到数据处理系统（1004）中， 旋转偏振单元以通过具有不同偏振方向的照明重复测量，并重复将结果存储在整个预定偏振方向上（1006,1008），使用保存的测量结果的值分析数据处理系统上的偏振特性 并且每个所述偏振方向对应于所保存的测量结果中的每一个，以计算优化的投影光学系统，标线图案和照明光学系统（1010）的校正量，并将校正量保存到曝光装置 作为反馈（1012）。

公开(公告)号：KR101429532B1

公开(公告)日：2014-08-12

申请号：KR1020090098055

申请日：2009-10-15

Applicant: 캐논 가부시끼가이샤

Inventor： 이시주카코

IPC: G01J3/45 ,  G02B27/10

CPC classification number: G01J9/0246 ,  G01J2009/0219 ,  G01J2009/0261 ,  G03F7/70775

Abstract: 본 발명의 파장 어긋남 측정장치는, 광원으로부터 사출된 광속의 파장의 어긋남을 측정하는 파장 어긋남 검출 센서(WLCD1)이며, 광원으로부터 사출된 광속을 복수의 광속으로 분할하고, 상기 복수의 광속 중의 2광속을 합성해서 간섭광을 생성하는 빔 스플리터(BS2)와, 빔 스플리터(BS2)에 의해 분할된 2광속의 광로 길이차가 일정하게 되도록 설치된 스페이서 부재(SP)와, 빔 스플리터(BS2)에 의해 생성된 간섭광을 검출하는 복수의 광전 센서(PD)를 포함한다. 상기 복수의 광전 센서(PD)는, 상기 간섭광에 근거해서 서로 위상이 어긋난 복수의 간섭 신호들을 출력하여, 상기 복수의 간섭 신호들을 이용해서 파장 어긋남을 산출한다.
파장 어긋남, 광원, 간섭 측정, 광전 센서, 빔 스플리터

公开(公告)号：KR1020100045919A

公开(公告)日：2010-05-04

申请号：KR1020090098055

申请日：2009-10-15

Applicant: 캐논 가부시끼가이샤

Inventor： 이시주카코

IPC: G01J3/45 ,  G02B27/10

CPC classification number: G01J9/0246 ,  G01J2009/0219 ,  G01J2009/0261 ,  G03F7/70775

Abstract: PURPOSE: A wavelength shift measuring device, a light source device, an interference measurement device, an exposure device, and a manufacturing method of the devices are provided to measure the precise light source wavelength. CONSTITUTION: A wavelength shift measuring device comprises an optical element, a spacer member and a photo electronic control sensor. The optical element partitions the flux injected from the light source into a plurality of fluxes. The optical element is created the coherent light and synthesizes 2 flux among a plurality of fluxes. The photo electronic control sensor outputs a plurality of interferential signals in which phase each other crosses each other based on the coherent light.

Abstract translation: 目的：提供波长偏移测量装置，光源装置，干涉测量装置，曝光装置和装置的制造方法以测量精确的光源波长。 构成：波长偏移测量装置包括光学元件，间隔件和照相电子控制传感器。 光学元件将从光源注入的磁通分成多个焊剂。 光学元件产生相干光并在多个通量中合成2个磁通。 照相电子控制传感器输出基于相干光彼此相交的多个干涉信号。