公开(公告)号：JPH0381943A

公开(公告)日：1991-04-08

申请号：JP21734089

申请日：1989-08-25

Applicant: HITACHI LTD

Inventor： DOI HIROSHI ,  MAMADA MICHIRO

IPC: H01J49/08 ,  H01J49/26 ,  H01L21/66

Abstract: PURPOSE:To make identification and sensing of impurities in minute amount and measurement of compound and chemical bond condition while the surface of a specimen remains out of change, by irradiating the specimen with a primary electron beam and a primary ion beam emitted from respective charged particle sources either simultaneously or selectively, and preforming condition analysis of the secondary particles and mass spectrometry of the secondary ions. CONSTITUTION:Primary ion beam and/or a primary electron beam 2a, 2b emitted from a charged particle source 1a, 1b is turned into monochrome by a primary ion mass-spectrometer or a primary electron energy analyzer 3, respectively, and a specimen 6 is irradiated with this primary ion beam and/or primary electron beam 4. At this time, different secondary particles are emitted from the surface of the specimen 6. The secondary ions are subjected to mass separation by a mass spectral system M, and the elements constituting the surface of specimen can be identified. About the secondary electrons, an energy analyzing system N makes at the same time the identification of the elements and the energy condition of them can be known, which gives knowledge about the bond condition of element with other elements.

公开(公告)号：JPH0189453U

公开(公告)日：1989-06-13

申请号：JP18529887

申请日：1987-12-04

IPC: F16B43/00 ,  G01N27/00 ,  H01J37/04 ,  H01J49/08 ,  H01J49/10

公开(公告)号：JPS5945557U

公开(公告)日：1984-03-26

申请号：JP14152382

申请日：1982-09-18

IPC: G01N23/22 ,  G01N23/227 ,  H01J49/08 ,  H01J49/44

公开(公告)号：JPS5665433A

公开(公告)日：1981-06-03

申请号：JP14067679

申请日：1979-10-31

Applicant: TOKYO SHIBAURA ELECTRIC CO

Inventor： KAGEYAMA KATSUO

IPC: H01J49/08 ,  H01J1/20 ,  H01J49/10 ,  H05H1/22

Abstract: PURPOSE:To heat a cathode by a desired power source voltage, by arranging close to the cathode a conductive winding which is electrically insulated from said cathode, suppying an alternating current to the winding to apply an AC magnetic field to the cathode, and heating the cathode by a current induced by the magnetic field. CONSTITUTION:A cathode heating portion 14 is constituted with an airtight container 21, a winding container 22, a conductive winding 23, an epoxy resin 24, a shielding plate 25 and a mounting member 26. The winding container 22, which is made of a ring-shoped paramagnetic stainless steel, has a rectangular cross-section, and in it, the conductive winding 23, which is subjected to a treatment for insulating its wound lines from each other and from the winding container 22, is contained. Then, each end of lead wires of the conductive winding 23 is led out respectively to the other end side of pipe arrangements 12a, 12b of the cooling water through current leading portion materials 16a, 16b, and an AC magnetic field is impressed on a cathode 13 by charging the conductive winding 23 with AC, thereby, the cathode 13 is heated by an induced current.

公开(公告)号：JP2019204721A

公开(公告)日：2019-11-28

申请号：JP2018100057

申请日：2018-05-24

Applicant: 岳石電気株式会社 ,  株式会社リフトフォース

Inventor： 嶽石 康昭 ,  森 幸一 ,  デンプシー,エドワード

IPC: H01J49/10 ,  H01J49/08

Abstract: 【課題】腐食性ガス等による劣化を軽減させると共に、分析途中で発生するかもしれないフィラメントの断線等の不安要素を解消し、加えて熱電子の放出点を一定に保つことが可能な、質量分析の性能向上に寄与する質量分析計における電子線源を提供すること。 【解決手段】電子線放射材料は焼結金属中に仕事関数の低い材料を含浸させるか又は金属に仕事関数の低い物質を含有させて焼結したチップ状電子線放射材料(40)の外表面の対向する部分に一対の支持兼導電部材(41,42)の一端を固着すると共に、該一対の支持兼導電部材の他端を一対の電極(31a,31b)に固着し、電極から支持兼導電部材を通ってチップ状電子線放射材料に通電して電子線放射材料を加熱する。 【選択図】図3

公开(公告)号：JP6346965B2

公开(公告)日：2018-06-20

申请号：JP2016575356

申请日：2015-12-04

Applicant: コリア ベーシック サイエンス インスティチュート

Inventor： ヤン、 モ ,  キム、 スン ヨン ,  キム、 ヒョン シク ,  チョン、 ワン ソプ

IPC: H01J43/24 ,  H01J49/08 ,  H01J49/06 ,  H01J49/14 ,  H01J43/08 ,  G01N27/62 ,  H01J49/40

CPC classification number: H01J49/40 ,  H01J43/10 ,  H01J43/246 ,  H01J49/08 ,  H01J49/142 ,  H01J49/147

公开(公告)号：JP2002298775A

公开(公告)日：2002-10-11

申请号：JP2001103788

申请日：2001-04-02

Applicant: SUMITOMO HEAVY INDUSTRIES

Inventor： YOU KINHOU ,  SAKAI FUMIO ,  AOKI YASUSHI

IPC: H01J37/073 ,  H01J49/08 ,  H01J49/44

Abstract: PROBLEM TO BE SOLVED: To provide a compact short pulse electron beam generating device capable of generating a short pulse, in particular a pulse electron beam in a time period of sub picosecond, and a small-sized pulse electron spectroscopic analyzing device. SOLUTION: The short pulse electron beam generating device 10 is provided with a short pulse laser generating device 20 for generating an electron, a photo cathode high frequency electron gun 200, a synchronous circuit 40 for synchronizing a short pulse laser and a high frequency, and an α electromagnet 30 for reducing pulse duration of the short pulse electron beam. The small-sized pulse electron spectroscopic analyzing device is provided with the short pulse electron beam generating device 10, a spectroscopic short pulse laser generating device 80, a synchronous circuit for synchronizing the short pulse laser and the high frequency, and a measuring instrument for measuring the short pulse laser passing though a sample for spectroscopic analyzing.

公开(公告)号：JPH07220670A

公开(公告)日：1995-08-18

申请号：JP27874992

申请日：1992-10-16

Applicant: KRATOS ANALYTICAL LTD ,  KRATOS ANALYTICAL LTD

Inventor： ANDORIYUU RODERITSUKU UOOKAA ,  SHIMON CHIYAARUZU PEEJI

IPC: G01N23/225 ,  G01Q30/02 ,  G21K5/04 ,  H01J37/02 ,  H01J37/20 ,  H01J37/252 ,  H01J37/285 ,  H01J49/08 ,  H01J49/44

Abstract: PURPOSE: To lessen the distortion of energy spectrum for emitted particles by positively charging a specimen when the specimen of a charged particle energy analyzer is an insulator. CONSTITUTION: A means to enable introduction of charged particles to a specimen for correcting the charge of the specimen by a magnetic mirror image forming field is installed in this charged particle energy analyzer comprising a magnetic lens 21, a specimen S immersed in the magnetic mirror image forming field of the magnetic lens, a source R of radiation to emit charged particles out of the specimen, and an analyzing means 10 to analyze the energy of the particle which an inner focus of radiation from the specimen is conformed. A means enabling this may be an electric field generating means such as an electrode plate 23, a radiation source 27, or a pair of d.c. current biasing electrodes. These enabling means surely supply electrons to the specimen for correction.

公开(公告)号：JPH05135734A

公开(公告)日：1993-06-01

申请号：JP29281291

申请日：1991-11-08

Applicant: JEOL LTD

Inventor： KUDOU MASATO

IPC: H01J49/08 ,  H01J49/14

Abstract: PURPOSE:To continuously generate ions even when part of filaments is broken in an electron impact type ion source superimposed with the magnetic field on an ionization chamber portion and arranged with the filaments at the magnetic field center. CONSTITUTION:In a surface analyzer having an electron impact type ion source superimposed with the magnetic field on an ionization chamber portion and arranged with filaments at the magnetic field center, multiple filaments 1-1, 1-2 are connected in parallel, and a driving circuit driving multiple filaments 1-1, 1-2 in parallel to keep the emission current constant is provided. When part of multiple filaments 1-1, 1-2 is broken, the remaining filaments are continuously driven, the emission current can be kept constant, and stable ion generation is assured.

公开(公告)号：JPH03110745A

公开(公告)日：1991-05-10

申请号：JP24987589

申请日：1989-09-25

Applicant: SHIMADZU CORP

Inventor： NISHIHARA TAKAHARU

IPC: H01J49/08 ,  H01J49/44

Abstract: PURPOSE:To enable element analysis and structural analysis as well for the surface of a specimen by providing a means for detecting orientation distribution of auger electrons. CONSTITUTION:The surface of a specimen is fixed in an optional direction electron beams are radiated onto a specimen S so that the transmitted electron energy of an energy analyzer 2 is thereby changed, electron detecting signal provide the energy spectrums of electrons emitted from the specimen, out of which the peak of auger electron spectrums is detected, based on the detected energy, the element analysis of the specimen can thereby be made. In the second place, the transmitted electron energy of the energy analyzer 2 is combined with a detected auger electron peak energy, and 2 rotating mechanisms H and V in a specimen table 3 are driven so that change in the detected intensity of auger electrons is measured while the rotating angles of the mechanisms are used as a parameter. This thereby enables the analysis of crystal structures at the spot of the specimen is radiated by the electron beams to be carried out. By this constitution, both of the element and structural analyses of the specimen surface can thereby be made by one device.