公开(公告)号：KR1020040046544A

公开(公告)日：2004-06-05

申请号：KR1020020074492

申请日：2002-11-27

Applicant: 전자부품연구원

Inventor： 이경일 ,  이대성 ,  황학인

IPC: H04R19/04

Abstract: PURPOSE: A method for fabricating a sound detection device is provided to reduce a fabricating cost by forming a metallic top electrode instead of a thick top electrode including polycrystalline silicon and a nitride oxide layer. CONSTITUTION: A silicon oxide layer(110) and a silicon nitride layer(120) are sequentially formed on a top part and a bottom part of a silicon substrate(100), respectively. A bottom electrode(131) is formed on a part of the silicon nitride layer. A first photoresist layer is formed on the silicon nitride layer and the lower electrode. A plurality of grooves are formed by etching the first photoresist layer. A seed layer is formed on the first photoresist layer and the grooves. The second photoresist layer is formed on the seed layer. A plurality of groove regions are formed by removing partially the second photoresist layer. A plurality of small grooves are formed on the bottom electrode. A metal layer is deposited on the grooves and the small grooves. A membrane is formed by etching sequentially the silicon nitride layer, the silicon oxide layer, and the silicon substrate. A top electrode(190) having a plurality of air holes(191) is formed by removing partially the first and the second photoresist layers and the seed layer.

Abstract translation: 目的：提供一种制造声音检测装置的方法，通过形成金属顶电极而不是包括多晶硅和氮氧化物层的厚顶电极来降低制造成本。 构成：分别在硅衬底（100）的顶部和底部依次形成氧化硅层（110）和氮化硅层（120）。 底部电极（131）形成在氮化硅层的一部分上。 在氮化硅层和下电极上形成第一光致抗蚀剂层。 通过蚀刻第一光致抗蚀剂层形成多个凹槽。 种子层形成在第一光致抗蚀剂层和沟槽上。 在种子层上形成第二光致抗蚀剂层。 通过部分地去除第二光致抗蚀剂层而形成多个凹槽区域。 在底部电极上形成多个小凹槽。 金属层沉积在凹槽和小凹槽上。 通过依次蚀刻氮化硅层，氧化硅层和硅衬底形成膜。 具有多个气孔（191）的顶部电极（190）通过部分地去除第一和第二光致抗蚀剂层和种子层而形成。

公开(公告)号：KR1020010045525A

公开(公告)日：2001-06-05

申请号：KR1019990048845

申请日：1999-11-05

Applicant: 전자부품연구원

Inventor： 박준식 ,  장세홍 ,  황학인 ,  최연식 ,  박광범 ,  이경일 ,  신상모 ,  김성진 ,  정재우 ,  서용교

IPC: H01L41/43 ,  C04B35/46

Abstract: PURPOSE: A method for manufacturing a low temperature sintering piezoelectric composition is provided to improve a physical property of a piezoelectric material composed of a substituted piezoelectric composition and to decrease a sintering temperature. CONSTITUTION: Mass regarding a composition of either a substituted low temperature sintering PZT-based piezoelectric material or composite 3-component low temperature sintering PZT-based piezoelectric material, is measured. The low temperature sintering PZT-based piezoelectric compositions of which mass is measured, are mixed while calcined. Mass of BaO-CuO as a low temperature sintering agent is measured and mixed with the calcined low temperature sintering PZT-based piezoelectric composition. The low temperature piezoelectric composition is heated to a predetermined temperature and sintered. An electrode is formed on the sintered low temperature piezoelectric material, and an electric field is applied to perform a polarization process. Power is applied to the electrode to determine a physical property of the low temperature piezoelectric material.

Abstract translation: 目的：提供一种制造低温烧结压电组合物的方法，以改善由取代的压电组合物构成的压电材料的物理性能并降低烧结温度。 组成：测量取代的低温烧结PZT基压电材料或复合三组分低温烧结PZT基压电材料的组成的质量。 测量质量的低温烧结PZT基压电组合物在煅烧时混合。 测量作为低温烧结剂的BaO-CuO的质量，并与煅烧的低温烧结PZT基压电组合物混合。 将低温压电组合物加热到预定温度并烧结。 在烧结的低温压电材料上形成电极，施加电场以进行极化处理。 对电极施加功率以确定低温压电材料的物理性质。

公开(公告)号：KR1020000031872A

公开(公告)日：2000-06-05

申请号：KR1019980048123

申请日：1998-11-11

Applicant: 전자부품연구원

Inventor： 황학인 ,  박준식 ,  이경일 ,  최연식

IPC: B41J2/045

Abstract: PURPOSE: A printer head is provided to reduce the size of the device a half when trying to obtain the same displacement since the displacement can be improved more than two times with the same material and driving voltage. CONSTITUTION: A printer head unit including an ink chamber and a nozzle is composed of a diaphragm covered with the ink chamber of the printer head unit, a piezoelectric film repeatedly arranged on the upper part of the diaphragm at a regular interval to form polarization in the same direction as a diaphragm face and an electrode repeatedly formed in a space between the both ends of the piezoelectric film. Herein, an electrode material(113) is sprayed in an empty space of a photo register by using a metal mask, and the remaining photo register is removed after spraying the electrode material. Then the electrode(113) is repeatedly formed in a series along with the piezoelectric film(107) and a silicon film(101).

Abstract translation: 目的：提供打印头，以便在尝试获得相同的位移时将设备的尺寸减小一半，因为在相同的材料和驱动电压下，位移可以提高两倍以上。 构成：包括墨水室和喷嘴的打印头单元由覆盖有打印头单元的墨室的隔膜组成，压电膜以规则的间隔重复地布置在隔膜的上部，以形成偏振 与膜面相同的方向和在压电膜的两端之间的空间中重复形成的电极。 这里，通过使用金属掩模将电极材料（113）喷射到照相寄存器的空的空间中，并且在喷射电极材料之后去除剩余的照片寄存器。 然后，与压电膜（107）和硅膜（101）一起重复形成电极（113）。

公开(公告)号：KR100256626B1

公开(公告)日：2000-05-15

申请号：KR1019970054035

申请日：1997-10-21

Applicant: 전자부품연구원

Inventor： 황학인 ,  최성호 ,  정석원 ,  신상모 ,  박순섭 ,  홍성제

IPC: G02B6/38

Abstract: PURPOSE: A manufacturing method of ferrule for an optical connector and a metal pattern used in the same are provided to have the precise of 1 micrometer of below and enable cost down and mass production by enabling the repeated manufacturing of the metal pattern as well as easily substitute conventional mechanical machining. CONSTITUTION: A ferrule part(5) having a plurality of optical fiber alignment grooves(1) and a plurality of guide pin alignment grooves(3) on both sides of the optical fiber alignment grooves(1) is formed on a metal board by an LIGA(Llgathografie Galvanoformung Abformung) process. Then, the metal board is cut so that ferrule part(5) can be vertically and horizontally divided. Next, the cut metal board is machined to form a supporter(7) matched to the guide pin alignment grooves(3) of the ferrule part(5) and supporting the ferrule part(5). Finally, the ferrule part(5) and supporter are covered with a cover plate.

Abstract translation: 目的：提供一种用于光连接器的套圈及其中使用的金属图案的制造方法，其精度可低于1微米，并且通过使金属图案的重复制造以及易于重复制造能够降低成本和大量生产 代替常规机械加工。 构成：在金属板上，在光纤取向槽（1）的两面上具有多个光纤排列槽（1）和多个导向销对准槽（3）的套圈部（5） LIGA（Llgathografie Galvanoformung Abformung）工艺。 然后，金属板被切割，使得套圈部分（5）可以被垂直和水平地分开。 接下来，加工切割金属板以形成与套圈部分（5）的引导销对准槽（3）匹配并支撑套圈部分（5）的支撑件（7）。 最后，套圈部分（5）和支撑物被盖板覆盖。

公开(公告)号：KR1019990032861A

公开(公告)日：1999-05-15

申请号：KR1019970054034

申请日：1997-10-21

Applicant: 전자부품연구원

Inventor： 신상모 ,  박순섭 ,  홍성제 ,  황학인 ,  최성호 ,  정석원

IPC: G02B6/38

Abstract: 본 발명의 다심 광커넥터용 페룰은 중앙 부분에 광섬유들를 정렬하기 위한 복수의 광섬유 정렬홈과, 상기 광섬유 정렬홈의 양측에 광 커넥터의 하우징과 결합하는데 이용되고 광커넥터와 광커텍터의 접속시 정렬의 기준이 되는 가이드핀 정렬홈을 갖는 하판과, 상기 하판과 대향하여 결합할 수 있는 동일한 구조의 상판을 포함한다. 상기 광섬유 정렬홈과 가이드핀 정렬홈 사이에 상기 하판과 상판의 결합이 용이하도록 하는 정렬키가 더 형성되어 있다. 상기 광섬유 정렬홈은 반원형 또는 V자형으로 이루어진다. 상기 가이드핀 정렬홈은 반원형 또는 밑부분이 좁은 U자형으로 이루어진다. 본 발명의 광커넥터용 페룰은 광섬유 정렬홈과 가이드핀 정렬홈을 갖는 하판과 이에 대응되는 상판으로 구성하여 광섬유를 삽입하기가 용이하다.