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公开(公告)号：KR1020130115846A
公开(公告)日：2013-10-22
申请号：KR1020120038553
申请日：2012-04-13
Applicant: 한국기계연구원
CPC classification number: H01L22/12 , H01L21/02164 , H01L21/02181 , H01L21/02186 , H01L21/02189 , H01L21/02282
Abstract: PURPOSE: An organic light emitting display device and a method for manufacturing the same are provided to easily form a refraction layer by a solution process, thereby simplifying a manufacturing process. CONSTITUTION: A refraction layer (300) is located on a substrate. A first electrode (710) is located on the refraction layer. A light emitting layer (720) is formed on the first electrode. A second electrode (730) is formed on the light emitting layer. The refractive index of the refraction layer gradually increases or decreases from the substrate to the first electrode.
Abstract translation: 目的：提供一种有机发光显示装置及其制造方法，通过溶液法容易地形成折射层，从而简化制造工序。 构成：折射层（300）位于基底上。 第一电极（710）位于折射层上。 在第一电极上形成发光层（720）。 在发光层上形成第二电极（730）。 折射层的折射率从衬底到第一电极逐渐增加或减小。
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公开(公告)号：KR1020130071152A
公开(公告)日：2013-06-28
申请号：KR1020110138507
申请日：2011-12-20
Applicant: 한국기계연구원
CPC classification number: Y02E10/50
Abstract: PURPOSE: A recessed metal pattern forming method is provided to easily make a recessed metal pattern by successively laminating a photopolymer resin layer and a thermoplastic resin layer. CONSTITUTION: A recessed metal pattern forming method is as follows. A thermoplastic resin layer is laminated on a photopolymer resin layer(S120). The thermoplastic resin layer is patterned. A recessed area is formed on the photopolymer resin layer(S130). A metal layer is deposited on the upper side of the thermoplastic resin layer and within the recessed area of the photopolymer resin layer(S140). The metal layer, which is laminated on the thermoplastic resin layer and on the upper side of the thermoplastic resin layer, is removed(S150). [Reference numerals] (AA) Start; (BB) End; (S110) Photopolymer resin layer laminating step; (S111) Application step; (S112) Pre-hardened step; (S120) Thermoplasticity resin layer laminating step; (S130) Complex printing step; (S131) Heating/pressurizing step; (S132) Hardening step; (S140) Metal layer laminating step; (S150) Removing step
Abstract translation: 目的：提供凹陷金属图案形成方法，通过依次层压光聚合物树脂层和热塑性树脂层来容易地形成凹陷的金属图案。 构成：凹陷金属图案形成方法如下。 在光聚合物树脂层上层压热塑性树脂层（S120）。 图案化热塑性树脂层。 在光聚合物树脂层上形成凹陷区域（S130）。 在热塑性树脂层的上侧和光聚合物树脂层的凹陷区域内沉积金属层（S140）。 除去热塑性树脂层和热塑性树脂层的上侧层叠的金属层（S150）。 （附图标记）（AA）开始; （BB）结束; （S110）光聚合物树脂层层叠工序; （S111）应用步骤; （S112）预硬化工序; （S120）热塑性树脂层层叠工序; （S130）复印机步骤; （S131）加热/加压步骤; （S132）硬化步骤; （S140）金属层层叠工序; （S150）拆卸步骤
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公开(公告)号：KR101269917B1
公开(公告)日：2013-05-31
申请号：KR1020110005152
申请日：2011-01-18
Applicant: 한국기계연구원
Abstract: 본발명은하나의마스터스탬프를이용하여제작한복수개의플렉시블몰드를이용하여대면적나노템플레이트를제작함으로서특히디스플레이용기판에나노임프린트기술을적용함에있어서공정의양산성을향상시킬수 있도록하는멀티스탬프를이용한대면적나노템플레이트제작방법에관한것으로, 하나의마스터스탬프를사용하여복수개의플렉시블몰드를제작하는준비단계; 대면적기판상에써멀레지스트(thermal resist)를코팅하는코팅단계; 코팅된상기기판위에복수개의상기플렉시블몰드를패턴면을하단으로하여이웃하는몰드를서로겹치게배열하는정렬단계; 정렬된상기기판과상기플렉시블몰드를고온, 고압으로가열하여패턴을전사하는임프린트단계; 임프린트된면에대해폴리머복제하여대면적나노템플레이트를완성하는복제단계;를포함하는것을특징으로한다.
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公开(公告)号：KR1020120082266A
公开(公告)日：2012-07-23
申请号：KR1020110003659
申请日：2011-01-13
Applicant: 한국기계연구원
CPC classification number: B29C33/424 , B29C33/38 , B29C59/022 , B29C2033/426 , G03F7/0002
Abstract: PURPOSE: A method for producing nano-templates having a large area through side bonding is provided to manufacture a large area template which size an operator wants by controlling the number of unit stamps and the area of a substrate. CONSTITUTION: A method for producing nano-templates having a large area through side bonding is as follows. A plurality of unit stamps(10) is manufactured. The unit stamps are arranged on a substrate(20) to be contacted with each other. The unit stamps are absorbed in the substrate by vacuum-pumping a patterned surface formed on the unit stamps. Bonding resin(30) is injected and cured on the upper portion of the unit stamps. A polymer replication for the side-bonded stamp is applied to side bonded stamps for forming a large area template(40).
Abstract translation: 目的：提供一种具有大面积通过侧面接合的纳米模板的制造方法，通过控制单位印章的数量和基板的面积来制造操作者想要的尺寸的大面积模板。 构成：通过侧面接合的面积大的纳米模板的制造方法如下。 制造多个单位印章（10）。 单元印章被布置在彼此接触的基板（20）上。 通过对形成在单位印章上的图案化表面进行真空抽吸，将单位印记吸收在基板中。 粘合树脂（30）在单位印章的上部注入并固化。 用于侧粘合印模的聚合物复制物被施加到用于形成大面积模板（40）的侧边贴合的邮票上。
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公开(公告)号：KR1020120071067A
公开(公告)日：2012-07-02
申请号：KR1020100132656
申请日：2010-12-22
Applicant: 한국기계연구원
CPC classification number: B29C33/3842 , B29C33/40 , C08J5/005 , G03F7/0002
Abstract: PURPOSE: A manufacturing method of a stamp for nano-imprinting is provided to manufacture stamps which have desired physical properties by surface treating the same without damaging the stamps. CONSTITUTION: A manufacturing method of a stamp for nano-imprinting comprises a step of processing a substrate which has polymer layer with nano-scaled fine patterns using a monomer or polymer which is represented by chemical formula 1 or 2 . Chemical formula 1 is as follows: A-B-D, and chemical formula 2 is as follows: A-D. In the chemical formula 1 or 2, A indicates a fluorocarbon group or hydro carbon group. B indicates a hydro carbon group or Si(R1)2-O-n-Si(R1)2-R2. R1 is independently an alkyl group with 1-10 carbons, R2 is an alkylene group with 1-10 carbons, and n indicates integers of 1-100. D is an acrylate group, methacrylate group, vinyl ether group, amine radical (R3 here is NR32 H, and CH3 or C6H5), epoxy radical, glycidyl group, glycidyl ether group, isocyanate radical (NCO), ester radical(R4 here COOR4 H or CH3), or thiol group(SH).
Abstract translation: 目的：提供用于纳米压印的印模的制造方法，以通过对其进行表面处理来制造具有所需物理性质的印章而不损坏印章。 构成：用于纳米压印的印模的制造方法包括使用由化学式1或2表示的单体或聚合物来处理具有纳米级精细图案的聚合物层的基板的步骤。 化学式1如下：A-B-D，化学式2如下：A-D。 在化学式1或2中，A表示碳氟基或碳氢基。 B表示氢碳基团或Si（R1）2-O-n-Si（R1）2-R2。 R1独立地为具有1-10个碳的烷基，R2是具有1-10个碳的亚烷基，n表示1-100的整数。 D为丙烯酸酯基，甲基丙烯酸酯基，乙烯基醚基，胺基（R3为NR32H，CH3或C6H5），环氧基，缩水甘油基，缩水甘油醚基，异氰酸酯基（NCO），酯基（R4为COOR4 H或CH 3）或硫醇基（SH）。
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Patent Agency Ranking
公开(公告)号：KR1020120009326A
公开(公告)日：2012-02-01
申请号：KR1020100071518
申请日：2010-07-23
Applicant: 한국기계연구원
IPC: B82B3/00 , H01L21/205
CPC classification number: H01L21/205 , G03F7/0002 , H01L21/0274 , H01L21/30604 , H01L21/7806
Abstract: PURPOSE: A method for forming three-dimensional graphene patterns is provided to facilitate a three-dimensional graphene pattern forming process by forming thickness stepped parts in an oxide layer. CONSTITUTION: A method for forming three-dimensional graphene patterns includes the following: an oxide layer(120) is stacked on the upper side of a substrate(110); a part of the oxide layer is recessed to form a thickness stepped part; the recessed region(121) of the oxide layer forms the stepped part by coating a metal layer(130) on the outer surface of the oxide layer; and a first graphene film(140) is deposited on the outer surface of the metal layer. The stepped part forming process is based on either a lithography technique or a nano-imprint technique. The graphene depositing process is based on a chemical vapor deposition technique. The first graphene film is further bonded with a second graphene film to form channels after the graphene depositing process.
Abstract translation: 目的：提供一种形成三维石墨烯图案的方法，以通过在氧化物层中形成厚度阶梯部分来促进三维石墨烯图案形成过程。 构成：形成三维石墨烯图案的方法包括以下：氧化物层（120）层叠在基板（110）的上侧; 氧化物层的一部分被凹入以形成厚度阶梯部分; 氧化物层的凹陷区域（121）通过在氧化物层的外表面上涂覆金属层（130）而形成台阶部分; 并且第一石墨烯膜（140）沉积在金属层的外表面上。 阶梯部分形成工艺基于光刻技术或纳米压印技术。 石墨烯沉积工艺基于化学气相沉积技术。 第一石墨烯膜进一步与第二石墨烯膜结合，以在石墨烯沉积工艺之后形成通道。
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公开(公告)号：KR101090399B1
公开(公告)日：2011-12-06
申请号：KR1020100123029
申请日：2010-12-03
Applicant: 한국기계연구원
IPC: H01L31/04 , H01L31/0236
CPC classification number: Y02E10/50 , H01L31/04 , H01L31/0236
Abstract: PURPOSE: A method for fabricating a solar cell using nano structure texturing is provided to prevent a nano island from being melted by heat which is generated in ion reaction etching by having a cooling down period between processes. CONSTITUTION: A solar cell board, which is doped with a first conductive impurity, is prepared(S100). The colloidal suspension including a silver nano-particle is coated on the one side of a substrate(S200). A nano silver particle is processed by heat for forming a separated nano island(S300). The substrate is etched by ion reaction etching using the nano island as a mask(S400). An emitter layer is formed by injecting a second conductive impurity into the etched side of the substrate(S500). An electrode is respectively formed in the both sides of the substrate(S600).
Abstract translation: 目的：提供一种使用纳米结构纹理制造太阳能电池的方法，以通过在工艺之间具有冷却期来防止纳米岛被在离子反应蚀刻中产生的热熔化。 构成：制备掺杂有第一导电杂质的太阳能电池板（S100）。 包含银纳米颗粒的胶体悬浮液涂覆在基材的一侧（S200）。 通过加热处理纳米银颗粒以形成分离的纳米岛（S300）。 通过使用纳米岛作为掩模的离子反应蚀刻对基板进行蚀刻（S400）。 通过将第二导电杂质注入基板的蚀刻侧而形成发射极层（S500）。 在基板的两侧分别形成电极（S600）。
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公开(公告)号：KR101022016B1
公开(公告)日：2011-03-16
申请号：KR1020080082721
申请日：2008-08-25
Applicant: 한국기계연구원
Abstract: 본 발명은 계층화 구조물의 형상, 그 형상에 따른 계층화 구조물의 공학적 효과, 그 공학적 효과의 증대 방법, 신규 소재 또는 부품에 대한 계층화 구조물의 응용 방법, 계층화 구조물의 대량 제조 방법에 관한 것이다.
본 발명은 계층화 구조물 및 그 제조 방법에 관한 것으로서, 내부의 기지(Matrix)에 나노(Nano) 스케일 영역의 특성 길이를 가지는 적어도 하나 이상의 나노 오브젝트(Object)가 일정한 패턴(Pattern)에 의해 배열된 것을 특징으로 하는 계층화 구조물을 포함한다.
본 발명에 따르면, 나노 스케일 영역에서 발생하는 우수한 특성을 거시적인 스케일 영역의 구조물에서도 활용할 수 있으며, 크기 스케일이 서로 다른 구조물들을 상이한 크기 스케일에 무관하게 간편히 연계할 수 있다.
계층화, 나노 스케일, 기지, 리소그라피-
公开(公告)号：KR101009340B1
公开(公告)日：2011-01-19
申请号：KR1020090051025
申请日：2009-06-09
Applicant: 한국기계연구원
Abstract: 본 발명은 나노입자 박막 제조방법 및 이를 이용하는 나노 임프린트용 스탬프 제작방법에 관한 것으로서, 본 발명의 나노입자 박막 제조방법은, 나노입자와 폴리머 매트릭스가 혼합된 나노입자 혼합레진을 기판 상에 적층하는 혼합레진 적층단계; 상기 나노입자 혼합레진에서 용매를 제거하는 용매 제거단계; 및 무패턴 평판으로 상기 나노입자 혼합레진을 가압 및 경화시킴으로써, 이웃하는 나노입자들이 상기 폴리머 매트릭스 내에서 이격되게 배열되는 나노입자 박막을 성형하는 가압경화단계;를 포함하는 것을 특징으로 한다.
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公开(公告)号：KR1020100132363A
公开(公告)日：2010-12-17
申请号：KR1020090051150
申请日：2009-06-09
Applicant: 한국기계연구원
IPC: H05K3/20
Abstract: PURPOSE: A manufacturing method is provided to easily form a metal micro pattern by using a stamp. CONSTITUTION: A substrate(110) is prepared. A metal layer(120) is formed on the substrate. A micro metal pattern(125) is formed in the metal layer by pressing the metal layer on a stamp formed into a micro pattern. The stamp is removed. A process of forming the micro pattern includes a step which exposures the substrate into a space between the metal layers by deforming the metal layer. A process of forming the metal micro pattern comprises a step of forming a hole in the metal layer.
Abstract translation: 目的：提供一种通过使用印模容易地形成金属微图案的制造方法。 构成：准备衬底（110）。 在基板上形成金属层（120）。 通过在形成为微图案的印模上压制金属层，在金属层中形成微金属图案（125）。 邮票被删除。 形成微图案的工艺包括通过使金属层变形而将基板暴露在金属层之间的空间中的步骤。 形成金属微图案的工艺包括在金属层中形成孔的步骤。
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