Actuator
    101.
    发明专利
    Actuator 有权
    执行器

    公开(公告)号:JP2008067549A

    公开(公告)日:2008-03-21

    申请号:JP2006244425

    申请日:2006-09-08

    Inventor: IKEHASHI TAMIO

    CPC classification number: B81B3/0021 B81B2201/038 H01H59/0009 H02N1/008

    Abstract: PROBLEM TO BE SOLVED: To prevent degradation of reliability of an actuator due to temperature dependency.
    SOLUTION: The actuator according to the present embodiment includes a plurality of electrode sections electrically insulated each other and further has a driving electrode 25 for driving a movable section 23, and controls the magnitude of an electrostatic force working on the movable section 23 by selectively applying a driving voltage to a part of the plurality of electrode sections.
    COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:为了防止由于温度依赖性导致的致动器的可靠性降低。 解决方案:根据本实施例的致动器包括彼此电绝缘的多个电极部分,并且还具有用于驱动可动部23的驱动电极25,并且控制作用在可动部23上的静电力的大小 通过选择性地向多个电极部分的一部分施加驱动电压。 版权所有(C)2008,JPO&INPIT

    Method for manufacturing micro-actuator equipped with media stage
    102.
    发明专利
    Method for manufacturing micro-actuator equipped with media stage 审中-公开
    制造配备有媒体阶段的微处理器的方法

    公开(公告)号:JP2007174891A

    公开(公告)日:2007-07-05

    申请号:JP2006319120

    申请日:2006-11-27

    Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a micro-actuator with a media stage.
    SOLUTION: The method for manufacturing the micro-actuator with the media stage having a media loading surface and a coil for driving the media stage, on the bottom of the media loading surface is provided. The method for manufacturing the micro-actuator comprises: (a) a stage for forming a groove with a predetermined depth and area on a first substrate; (b) a stage for forming the coil on a second substrate; (c) a stage for bonding the surface in which the coil is formed on the second substrate to the surface in which the groove is formed on the first substrate; and (d) a stage for processing the rear surface of the surface bonded to the first substrate in the second substrate as the media loading surface.
    COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种用于制造具有介质台的微致动器的方法。 提供了在介质装载面的底部上制造具有介质台的微致动器的方法,该介质载台具有介质装载面和用于驱动介质台的盘管。 微型致动器的制造方法包括:(a)在第一基板上形成具有预定深度和面积的槽的台; (b)在第二基板上形成线圈的平台; (c)将在第二基板上形成线圈的表面与形成有槽的表面接合在第一基板上的台阶; 和(d)用于处理结合到第二基板中的第一基板的表面的后表面作为介质装载表面的台。 版权所有(C)2007,JPO&INPIT

    ELECTROMAGNETIC MEMS DEVICE
    104.
    发明公开
    ELECTROMAGNETIC MEMS DEVICE 审中-公开
    电磁MEMS器件

    公开(公告)号:EP3213358A1

    公开(公告)日:2017-09-06

    申请号:EP15854529.3

    申请日:2015-08-11

    Abstract: Embodiments of the present disclosure are directed toward techniques and configurations for a magnetic MEMS apparatus that in some instances may comprise a magnetic circuit and a MEMS device. The magnetic circuit may include two magnets that may be disposed on the substantially flat base and magnetized vertically to the base and in opposite directions to each other to produce a substantially horizontal magnetic field between the magnets. The MEMS device may comprise a mirror and a conductor to pass electric current to interact with the magnetic field created by the magnets. The MEMS device may be disposed substantially between the magnets of the magnetic circuit and above a plane formed by top surfaces of the magnets, to provide an unobstructed field of view for the mirror. The MEMS device may include a ferromagnetic layer to concentrate the magnetic field toward the conductor. Other embodiments may be described and/or claimed.

    Abstract translation: 本公开的实施例针对用于在一些情况下可以包括磁电路和MEMS器件的磁性MEMS设备的技术和配置。 所述磁路可以包括两个磁体,所述两个磁体可以设置在所述基本上平坦的基座上并且垂直于所述基座磁化并且在彼此相反的方向上磁化以在所述磁体之间产生大致水平的磁场。 MEMS器件可以包括反射镜和导体以传递电流以与由磁体产生的磁场相互作用。 MEMS器件可以基本上设置在磁路的磁体之间并且位于由磁体的顶表面形成的平面之上,以为镜提供无障碍的视野。 MEMS器件可以包括铁磁层以将磁场集中到导体。 其他实施例可以被描述和/或要求保护。

    LIGHT DRIVEN LIQUID CRYSTAL ELASTOMER ACTUATOR
    106.
    发明公开
    LIGHT DRIVEN LIQUID CRYSTAL ELASTOMER ACTUATOR 审中-公开
    光驱动液晶弹性体执行器

    公开(公告)号:EP2926005A1

    公开(公告)日:2015-10-07

    申请号:EP12794303.3

    申请日:2012-11-27

    Abstract: Liquid crystal elastomer actuator (1) apt to move in a fluid, wherein the actuator includes a body (10) having a dimension comprised between 100 nm and 800 μιη so as to be considered a body having a low Reynolds number. The body (10) comprises: at least a first (2;2a;2b; 20) and a second (3;2c;2d; 30) spatially separated volumes, the first and second volume of the body both comprising a liquid crystal elastomer. The first volume is doped with a first photoactive doping substance apt to absorb electromagnetic radiation at a first wavelength, and the second volume is doped with a second photoactive doping substance apt to absorb electromagnetic radiation at a second wavelength. The first and second volumes are apt to change shape as a consequence of the light absorption at first or second wavelength, so that in the body a first (2j;20j) and a second joint (3j;30j) are defined. Moreover, a first absorbance of the first volume at a given wavelength is different than a second absorbance of the second volume at said given wavelength, the first and second absorbance are measured in the same time interval.

    Abstract translation: 液晶弹性体致动器(1)易于在流体中移动,其中所述致动器包括具有在100nm和800μm之间的尺寸的主体(10),从而被认为是具有低雷诺数的主体。 所述主体(10)包括:至少第一(2; 2a; 2b; 20)和第二(3; 2c; 2d; 30)空间分离体积,所述主体的所述第一和第二体积均包括液晶弹性体 。 第一体积掺杂有适于吸收第一波长的电磁辐射的第一光敏掺杂物质,第二体积掺杂适于吸收第二波长的电磁辐射的第二光敏掺杂物质。 由于第一或第二波长的光吸收,第一和第二体积易于改变形状,因此在体内限定第一(2j; 20j)和第二关节(3j; 30j)。 此外,第一体积在给定波长下的第一吸光度不同于第二体积在所述给定波长下的第二吸光度,第一和第二吸光度在相同时间间隔内测量。

    AN ACTUATOR
    108.
    发明公开
    AN ACTUATOR 审中-公开
    执行器

    公开(公告)号:EP2771732A1

    公开(公告)日:2014-09-03

    申请号:EP12775177.4

    申请日:2012-09-25

    Applicant: Lemoptix SA

    Abstract: According to the present invention there is provided an actuator comprising, a movable member, the movable member comprising a support frame which is configured such that it can oscillate about a first oscillation axis and a mirror which is fixed to the support frame such that oscillation of the support frame will effect oscillation of the mirror; an coil, which cooperates with the support frame; one or more boundary portions provided between the support frame and the mirror which reduce the influence of warp transmitted from an edge of the support frame to the mirror, as the support frame oscillates about the first oscillation axis; wherein the support frame further comprises one or more cut-out regions, wherein the one or more cut-out regions are configured to be parallel to at least a portion of the coil, to reduce stress on the coil as the support frame oscillates about the first oscillation axis and/or to reduce the temperature dependence of the properties of the actuator.

    Abstract translation: 根据本发明,提供了一种致动器,包括:一个可移动部件,该可移动部件包括一个支撑框架,该支撑框架构造成可以围绕第一摆动轴线摆动;以及镜子,固定在支撑框架上, 支架会影响反光镜的摆动; 与支撑框架配合的线圈; 当所述支撑框围绕所述第一摆动轴线摆动时,在所述支撑框架和所述镜子之间设置一个或多个边界部分,所述边界部分减少从所述支撑框架的边缘传输到所述镜子的翘曲的影响; 其中所述支撑框架还包括一个或多个切除区域,其中所述一个或多个切除区域被配置为平行于所述线圈的至少一部分,以在所述支撑框架围绕所述线圈振荡时减小所述线圈上的压力 第一摆动轴线和/或降低致动器的特性的温度依赖性。

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