Abstract:
PROBLEM TO BE SOLVED: To prevent degradation of reliability of an actuator due to temperature dependency. SOLUTION: The actuator according to the present embodiment includes a plurality of electrode sections electrically insulated each other and further has a driving electrode 25 for driving a movable section 23, and controls the magnitude of an electrostatic force working on the movable section 23 by selectively applying a driving voltage to a part of the plurality of electrode sections. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a method for manufacturing a micro-actuator with a media stage. SOLUTION: The method for manufacturing the micro-actuator with the media stage having a media loading surface and a coil for driving the media stage, on the bottom of the media loading surface is provided. The method for manufacturing the micro-actuator comprises: (a) a stage for forming a groove with a predetermined depth and area on a first substrate; (b) a stage for forming the coil on a second substrate; (c) a stage for bonding the surface in which the coil is formed on the second substrate to the surface in which the groove is formed on the first substrate; and (d) a stage for processing the rear surface of the surface bonded to the first substrate in the second substrate as the media loading surface. COPYRIGHT: (C)2007,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a one-dimensional piezoelectric actuator array where large displacement is obtained at a lower voltage, a generated power is large, being excellent in mountability, and higher integration is possible. SOLUTION: A one-dimensional piezoelectric actuator array 1 comprises a piezoelectric element 35 which comprises a plate-like or columner piezoelectric body 4 and electrodes 18 and 19 and is driven by piezoelectric effect of the piezoelectric body 4, and the piezoelectric element 35 is arrayed in plane. The piezoelectric element 35 is molded to be a planer comb shape as a whole, with a comb teeth 26 connected by its end part, so that the part of comb teeth 26 acts as a plurality of driving parts 31, constituting a piezoelectric element board 3. A guide board 2 comprises a housing recess 9 in which at least a part of the piezoelectric element board 3 is housed in a prescribed position. A guide board 2 and the piezoelectric element board 3 are integrated to allow lamination in hierarchy. COPYRIGHT: (C)2004,JPO&NCIPI
Abstract:
Embodiments of the present disclosure are directed toward techniques and configurations for a magnetic MEMS apparatus that in some instances may comprise a magnetic circuit and a MEMS device. The magnetic circuit may include two magnets that may be disposed on the substantially flat base and magnetized vertically to the base and in opposite directions to each other to produce a substantially horizontal magnetic field between the magnets. The MEMS device may comprise a mirror and a conductor to pass electric current to interact with the magnetic field created by the magnets. The MEMS device may be disposed substantially between the magnets of the magnetic circuit and above a plane formed by top surfaces of the magnets, to provide an unobstructed field of view for the mirror. The MEMS device may include a ferromagnetic layer to concentrate the magnetic field toward the conductor. Other embodiments may be described and/or claimed.
Abstract:
A compliant micro device transfer head and head array are disclosed. In an embodiment a micro device transfer head includes a spring portion that is deflectable into a space between a base substrate and the spring portion.
Abstract:
Liquid crystal elastomer actuator (1) apt to move in a fluid, wherein the actuator includes a body (10) having a dimension comprised between 100 nm and 800 μιη so as to be considered a body having a low Reynolds number. The body (10) comprises: at least a first (2;2a;2b; 20) and a second (3;2c;2d; 30) spatially separated volumes, the first and second volume of the body both comprising a liquid crystal elastomer. The first volume is doped with a first photoactive doping substance apt to absorb electromagnetic radiation at a first wavelength, and the second volume is doped with a second photoactive doping substance apt to absorb electromagnetic radiation at a second wavelength. The first and second volumes are apt to change shape as a consequence of the light absorption at first or second wavelength, so that in the body a first (2j;20j) and a second joint (3j;30j) are defined. Moreover, a first absorbance of the first volume at a given wavelength is different than a second absorbance of the second volume at said given wavelength, the first and second absorbance are measured in the same time interval.
Abstract:
According to the present invention there is provided an actuator comprising, a movable member, the movable member comprising a support frame which is configured such that it can oscillate about a first oscillation axis and a mirror which is fixed to the support frame such that oscillation of the support frame will effect oscillation of the mirror; an coil, which cooperates with the support frame; one or more boundary portions provided between the support frame and the mirror which reduce the influence of warp transmitted from an edge of the support frame to the mirror, as the support frame oscillates about the first oscillation axis; wherein the support frame further comprises one or more cut-out regions, wherein the one or more cut-out regions are configured to be parallel to at least a portion of the coil, to reduce stress on the coil as the support frame oscillates about the first oscillation axis and/or to reduce the temperature dependence of the properties of the actuator.