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    MICROFABRICATION
    103.
    发明公开
    MICROFABRICATION 审中-公开
    一种制备微腔的具有限定轮廓过程

    公开(公告)号：EP1940733A2

    公开(公告)日：2008-07-09

    申请号：EP06808341.9

    申请日：2006-10-20

    Applicant: BAE Systems plc

    Inventor： HUCKER, Martyn, John ,  WARSOP, Clyde

    IPC: B81C5/00

    CPC classification number: B81C1/00103 ,  B81B2201/038 ,  B81B2203/033 ,  B81B2203/0376 ,  B81B2203/0384 ,  B81C2201/034

    Abstract: A method of forming a surface of micrometer dimensions conforming to a desired contour for a MEMS device, the method comprising providing a crystalline silicon substrate with a recess in an upper surface, providing a thinner layer of crystalline silicon over the upper surface of the substrate, fusion bonding the layer to the substrate under vacuum conditions, and applying heat to the layer and applying atmospheric pressure on the layer, such as to plastically deform the diaphragm within the recess to the desired contour. The substrate may form the fixed electrode of an electrostatic MEMS actuator, operating on the zip principle.

    MICROMACHINE AND METHOD OF MANUFACTURING THE SAME
    105.
    发明公开
    MICROMACHINE AND METHOD OF MANUFACTURING THE SAME 有权
    微器件及其制造方法

    公开(公告)号：EP1041036A4

    公开(公告)日：2005-03-09

    申请号：EP99947884

    申请日：1999-10-13

    Applicant: SEIKO EPSON CORP

    Inventor： KAMIJIMA SHUNJI ,  YONEKUBO MASATOSHI ,  TAKEDA TAKASHI ,  NISHIKAWA TAKAO

    IPC: B81B3/00 ,  B81C1/00 ,  G02B26/02 ,  B81B1/00

    CPC classification number: B81C1/00182 ,  B81B2201/045 ,  B81C2201/034 ,  G02B26/02

    Abstract: A micromachine and a method of manufacturing the same which are suitable as or for a micromachine having a first dynamic fine structural portion constituting a driving portion, and a second static fine structural portion performing a switching function or a function of an optical element, the method comprising forming the second static fine structural portion on the first dynamic fine structural portion, or superposing the second static fine structural portion thereon and die transferring the same thereto, whereby the method enables the second fine structure to be formed without using at least a complicated step, such as a silicon process in an intermediate stage of the method, and into a complicated shape easily with a high reproducibility, and contributes to the improvement of the productivity. Especially, when a plurality of elements are arranged in an arrayed state as in a spatial light modulator, the die transfer techniques enable the second fine structure to be reproduced stably as compared with the techniques using a silicon process for forming all parts of a micromachine, whereby the subject method reduces the probability of occurrence of defects to a remarkably low level and contributes to the improvement of the yield.

    INJECTION MOLDING A FLASH FREE MICROFLUIDIC STRUCTURE
    106.
    发明公开
    INJECTION MOLDING A FLASH FREE MICROFLUIDIC STRUCTURE 审中-公开
    注塑成型的毛刺微流体设计

    公开(公告)号：EP1414632A1

    公开(公告)日：2004-05-06

    申请号：EP02765828.5

    申请日：2002-07-10

    Applicant: Aclara BioSciences, Inc.

    Inventor： POLOSKY, Quentin, F.

    IPC: B29B7/00 ,  B29C45/00 ,  B28B1/48

    CPC classification number: B81C99/0085 ,  B01L3/502707 ,  B01L2200/12 ,  B29C33/76 ,  B29C45/2628 ,  B81B2201/058 ,  B81B2203/0338 ,  B81C2201/019 ,  B81C2201/034

    Abstract: Injection molding techniques form a microfluidic structure or substrate having at least one flash-free aperture. A method comprises injecting a polymeric material into a cavity of a mold. The mold includes at least one pin extending a length into the cavity wherein the length is greater than a depth of the cavity such that the pin is compressed when the mold is closed. Material injected into the cavity is shut off from the space occupied by the pin and consequently, undesirable flash is avoided. The mold is opened and the substrate is removed from the mold. The pin may be integral with the mold, discrete, or be comprised of individual components which can be combined together when the mold is closed to form a solid body. Preferably, the length of the pin is at least about 60 microns greater than the depth of the cavity.

    A METHOD OF PRODUCING A DETECTOR BELONGING TO A GAS SENSOR, AND A DETECTOR PRODUCED IN ACCORDANCE WITH THE METHOD
    107.
    发明公开
    A METHOD OF PRODUCING A DETECTOR BELONGING TO A GAS SENSOR, AND A DETECTOR PRODUCED IN ACCORDANCE WITH THE METHOD 有权
    一种用于生产检测装置包括气体传感器以及与此过程中产生的探测装置

    公开(公告)号：EP1057006A1

    公开(公告)日：2000-12-06

    申请号：EP99906636.8

    申请日：1999-02-04

    Applicant: Martin, Hans Göran Evald ,  Öhman, Per Ove

    Inventor： Martin, Hans Göran Evald ,  Öhman, Per Ove

    IPC: G01N21/35 ,  G01N21/03 ,  H01L27/16 ,  H01L35/32

    CPC classification number: B81C1/0046 ,  B81B2201/0214 ,  B81B2203/0136 ,  B81C2201/034 ,  G01J5/12 ,  G01N21/3504 ,  G02B6/3652 ,  G02B6/3696 ,  G02B6/4219 ,  G02B6/423 ,  G02B6/4246 ,  H01L21/4803 ,  H01L35/08 ,  H01L35/34

    Abstract: The present invention relates to a method of producing a gas sensor co-acting detector intended for the detection of electromagnetic waves, such as infrared light rays, that pass through a gas cell. The gas cell (2) includes a cavity (21), which functions to enclose a gas volume (G) for measuring of evaluating purposes. The surface or parts of the surface forming walls within the gas cell or the cavity is/are coated with one or more different metal layers (M1, M2) with the intention of providing a highly reflective surface for reflection of said electromagnetic waves. The detector (3) is comprised of a thermal element and is formed on a base structure (31). That part of the base structure that shall form said detector is comprised of one or more topographically structured surface regions. At least said surface region or surface regions is/are coated with a first and a second electrically conductive metal layer (M1 and M2 respectively) which are intended to form said thermocouple. The first metal layer (M1) is applied at a first angle other than 90°, and the second metal layer (M2) is applied at a second angle which is also other than 90° and which differs from the first angle. The topographical structure and/or configuration including the thus coated electrically conductive layers provides the function of one or more thermocouples, by virtue of the first and the second metal layers (M1, M2) overlapping each other within discrete detector-associated surface parts.

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