公开(公告)号：US20150316712A1

公开(公告)日：2015-11-05

申请号：US14314394

申请日：2014-06-25

Applicant: CORNING INCORPORATED

Inventor： James Gary Anderson ,  Dana Craig Bookbinder ,  Lisa Carine Chacon ,  Calvin Thomas Coffey ,  Adam James Ellison ,  Gregory Gerard Gausman ,  Rostislav Radiyevich Khrapko ,  Stephan Lvovich Logunov ,  Michael Thomas Murtagh ,  Clinton Damon Osterhout ,  Sabyasachi Sen ,  William Anthony Whedon

IPC: G02B6/02 ,  C03B37/018 ,  C03B37/027 ,  C03B37/014 ,  G02B6/028 ,  C03B37/012

CPC classification number: G02B6/0228 ,  C03B37/01211 ,  C03B37/0124 ,  C03B37/014 ,  C03B37/01413 ,  C03B37/01446 ,  C03B37/0146 ,  C03B37/01466 ,  C03B37/01473 ,  C03B37/01807 ,  C03B37/01815 ,  C03B37/01838 ,  C03B37/01853 ,  C03B37/027 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/22 ,  C03B2201/31 ,  C03B2201/50 ,  C03B2203/22 ,  C03B2203/26 ,  C03B2203/29 ,  C03B2207/90 ,  C03C3/06 ,  C03C13/045 ,  C03C13/046 ,  C03C13/048 ,  C03C2201/12 ,  C03C2201/31 ,  C03C2201/50 ,  G02B6/02242 ,  G02B6/02271 ,  G02B6/028 ,  G02B6/03611 ,  G02B6/03644 ,  G02B6/03694 ,  Y10T428/294

Abstract: Disclosed is an optical fiber having a core with an alkali metal oxide dopant in an peak amount greater than about 0.002 wt. % and less than about 0.1 wt. %. The alkali metal oxide concentration varies with a radius of the optical fiber. By appropriately selecting the concentration of alkali metal oxide dopant in the core and the cladding, a low loss optical fiber may be obtained. Also disclosed are several methods of making the optical fiber including the steps of forming an alkali metal oxide-doped rod, and adding additional glass to form a draw perform. Preferably, the draw preform has a final outer dimension (d2), wherein an outer dimension (d1) of the rod is less than or equal to 0.06 times the final outer dimension (d2). In a preferred embodiment, the alkali metal oxide-doped rod is inserted into the centerline hole of a preform to form an assembly.

Abstract translation: 公开了一种光纤，其具有具有大于约0.002重量％的峰值的碱金属氧化物掺杂剂的芯。 ％且小于约0.1wt。 ％。 碱金属氧化物浓度随着光纤的半径而变化。 通过适当地选择芯和包层中的碱金属氧化物掺杂剂的浓度，可以获得低损耗光纤。 还公开了几种制造光纤的方法，包括形成碱金属氧化物掺杂棒的步骤，并且添加额外的玻璃以形成拉伸性能。 优选地，拉伸预成型件具有最终外部尺寸（d2），其中杆的外部尺寸（d1）小于或等于最终外部尺寸（d2）的0.06倍。 在一个优选实施例中，将掺入碱金属氧化物的棒插入到预成型件的中心线孔中以形成组件。

公开(公告)号：US09086524B2

公开(公告)日：2015-07-21

申请号：US13603399

申请日：2012-09-04

Applicant: Chen Yang ,  Qingrong Han ,  Weijun Tong ,  Jie Luo ,  Yongtao Liu

Inventor： Chen Yang ,  Qingrong Han ,  Weijun Tong ,  Jie Luo ,  Yongtao Liu

IPC: C03B37/018 ,  C03B37/027 ,  G02B6/028 ,  C03B37/012 ,  C03B37/014 ,  G02B6/036 ,  G02B6/02 ,  C03C13/04

CPC classification number: G02B6/0285 ,  C03B37/01211 ,  C03B37/014 ,  C03B37/0183 ,  C03B37/01892 ,  C03B37/02754 ,  C03B2201/02 ,  C03B2201/04 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/86 ,  C03B2203/23 ,  C03B2205/09 ,  C03B2205/14 ,  C03C13/045 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/31 ,  C03C2203/40 ,  G02B6/02395 ,  G02B6/0283 ,  G02B6/03633 ,  Y02P40/57

Abstract: A method for manufacturing an optical fiber preform, including: a) providing a lining tube as a substrate tube, and doping and depositing by a PCVD or an MCVD process; b) in the reacting gas of silicon tetrachloride and oxygen, introducing a fluorine-containing gas for fluorine doping, introducing germanium tetrachloride for germanium doping, ionizing the reacting gas in the lining tube through microwaves to form plasma, depositing the plasma on the inner wall of the lining tube in the form of glass; c) after the completion of deposition, processing the deposited lining tube into a solid core rod by melting contraction through an electric heating furnace; d) sleeving the solid core rod into a pure quartz glass jacketing tube and manufacturing the two into an optical fiber preform; and e) allowing the effective diameter d of the optical fiber preform to become between 95 and 205 mm.

Abstract translation: 一种制造光纤预制棒的方法，包括：a）提供衬管作为衬底管，并通过PCVD或MCVD工艺进行掺杂和沉积; b）在四氯化硅和氧气的反应气体中，引入用于氟掺杂的含氟气体，引入用于锗掺杂的四氯化锗，通过微波将衬里管中的反应气体离子化以形成等离子体，将等离子体沉积在内壁上 的衬里管以玻璃的形式; c）沉积完成后，通过电加热炉熔化收缩将沉积的衬管加工成固体芯棒; d）将实心芯棒套入纯石英玻璃护套管并将其制造成光纤预制棒; 以及e）允许光纤预型件的有效直径d变为95至205mm。

公开(公告)号：US08735308B2

公开(公告)日：2014-05-27

申请号：US12718776

申请日：2010-03-05

Applicant: Akio Koike ,  Chikaya Tamitsuji ,  Kunio Watanabe ,  Tomonori Ogawa

Inventor： Akio Koike ,  Chikaya Tamitsuji ,  Kunio Watanabe ,  Tomonori Ogawa

IPC: C03C15/00 ,  C03C17/00 ,  C03C19/00 ,  C03C3/06

CPC classification number: C03C3/06 ,  C03B19/1423 ,  C03B19/1453 ,  C03B19/1461 ,  C03B25/02 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/42 ,  C03B2207/36 ,  C03C4/0085 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/42 ,  C03C2203/54

Abstract: The present invention relates to an optical member including a TiO2-containing silica glass having: a TiO2 concentration of from 3 to 10% by mass; a Ti3+ concentration of 100 wt ppm or less; a thermal expansion coefficient at from 0 to 100° C., CTE0-100, of 0±150 ppb/° C.; and an internal transmittance in the wavelength range of 400 to 700 nm per a thickness of 1 mm, T400-700, of 80% or more, in which the optical member has a ratio of variation of Ti3+ concentration to an average value of the Ti3+ concentration, ΔTi3+/Ti3+, on an optical use surface, is 0.2 or less.

Abstract translation: 本发明涉及一种含有TiO2含量为3〜10质量％的含TiO 2的二氧化硅玻璃的光学构件， Ti3 +浓度为100重量ppm以下; 0-100℃的热膨胀系数，CTE0-100，为0±150ppb /℃。 并且在400〜700nm的波长范围内的内部透射率，每1mm厚度，T400〜700，为80％以上，其中光学部件具有Ti 3+浓度的变化比与Ti 3+的平均值的比值， 在光学用表面上的浓度＆Dgr; Ti 3+ / Ti 3+为0.2以下。

公开(公告)号：US20120324960A1

公开(公告)日：2012-12-27

申请号：US13583605

申请日：2011-03-10

Applicant: Ralph Sattmann ,  Jan Vydra ,  Michael Huenermann

Inventor： Ralph Sattmann ,  Jan Vydra ,  Michael Huenermann

IPC: C03B37/027 ,  G02B6/036

CPC classification number: C03B37/02754 ,  C03B37/01211 ,  C03B37/01228 ,  C03B37/01242 ,  C03B37/018 ,  C03B37/027 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/30 ,  C03B2201/31 ,  C03B2203/22 ,  C03B2203/23 ,  C03B2205/30 ,  C03C13/045 ,  C03C2201/12 ,  G02B6/03633 ,  G02B6/0365 ,  Y10T428/2935

Abstract: Methods for producing an optical fiber by elongating a silica glass blank or a coaxial group of silica glass components, on the basis of which a fiber is obtained that comprises a core zone, an inner jacket zone enclosing the core zone and a ring zone surrounding the inner jacket zone, are known. In order to provide, proceeding from this, a method, a tubular semi-finished product and a group of coaxial components for the cost-effective production of an optical fiber, which is characterized by a high quality of the boundary between the core and jacket and by low bending sensitivity, according to the invention, the silica glass of the ring zone is provided in the form of a ring zone tube made of silica glass having a mean fluorine content of at least 6000 weight ppm and the tube has an inner tube surface and an outer tube surface, wherein via the wall of the ring zone tube, a radial fluorine concentration profile is adjusted which has an inner fluorine depletion layer with a layer thickness of at least 1 μm and no more than 10 μm, in which the fluorine content decreases toward the inner tube surface and is no more than 3000 weight ppm in a region close to the surface which has a thickness of 1 μm.

Abstract translation: 通过使二氧化硅玻璃坯料或同轴的二氧化硅玻璃成分组延长来制造光纤的方法，在此基础上获得包含芯区的纤维，包围芯区的内护套区和围绕该芯区的环带 内护套区域，已知。 为了提供一种用于成本有效地生产光纤的方法，管状半成品和一组同轴部件，其特征在于芯和夹套之间的边界质量高 并且通过低弯曲灵敏度，根据本发明，环区的石英玻璃以平均氟含量为至少6000重量ppm的石英玻璃制成的环形管的形式提供，并且管具有内管 表面和外管表面，其中通过环带管的壁，调节径向氟浓度分布，其具有层厚度为至少1μm且不大于10μm的内氟耗尽层，其中 氟含量向内管表面减少，并且在接近表面厚度为1μm的区域中不超过3000重量ppm。

公开(公告)号：US08047023B2

公开(公告)日：2011-11-01

申请号：US09844947

申请日：2001-04-27

Applicant: Bradford Giles Ackerman ,  Kenneth Edward Hrdina ,  Lisa Anne Moore ,  Nikki Jo Russo ,  C. Charles Yu

Inventor： Bradford Giles Ackerman ,  Kenneth Edward Hrdina ,  Lisa Anne Moore ,  Nikki Jo Russo ,  C. Charles Yu

IPC: C03B37/014

CPC classification number: C03C4/0085 ,  C03B19/1415 ,  C03B19/1453 ,  C03B19/1484 ,  C03B2201/12 ,  C03B2201/42 ,  C03B2207/32 ,  C03B2207/62 ,  C03B2207/70 ,  C03C3/06 ,  C03C3/076 ,  C03C2201/12 ,  C03C2201/42 ,  C03C2203/40 ,  Y02P40/57

Abstract: A method for producing a fused silica glass containing titania includes synthesizing particles of silica and titania by delivering a mixture of a silica precursor and a titania precursor to a burner, growing a porous preform by successively depositing the particles on a deposition surface while rotating and translating the deposition surface relative to the burner, and consolidating the porous preform into a dense glass.

Abstract translation: 一种制备含有二氧化钛的熔融石英玻璃的方法包括通过将二氧化硅前体和二氧化钛前体的混合物输送到燃烧器来合成二氧化硅和二氧化钛的颗粒，通过将颗粒依次沉积在沉积表面上同时旋转和平移来生长多孔预型体 沉积表面相对于燃烧器，并将多孔预成型件固结成致密的玻璃。

公开(公告)号：US20100251771A1

公开(公告)日：2010-10-07

申请号：US12679006

申请日：2008-09-18

Applicant: Andreas Langner ,  Thomas Kayser ,  Gerhard Schoetz ,  Mario Such ,  Johannes Kirchhof ,  Stephan Grimm ,  Volker Reichel

Inventor： Andreas Langner ,  Thomas Kayser ,  Gerhard Schoetz ,  Mario Such ,  Johannes Kirchhof ,  Stephan Grimm ,  Volker Reichel

IPC: C03C21/00

CPC classification number: C03B37/01282 ,  C03B19/06 ,  C03B19/063 ,  C03B19/066 ,  C03B19/1065 ,  C03B19/1095 ,  C03B20/00 ,  C03B2201/10 ,  C03B2201/12 ,  C03B2201/30 ,  C03B2201/34 ,  C03B2201/36 ,  C03B2201/40 ,  C03B2201/54 ,  C03C1/026 ,  C03C3/06 ,  C03C4/0071 ,  C03C4/10 ,  C03C13/045 ,  C03C14/008 ,  C03C23/0075 ,  C03C25/106 ,  C03C2201/12 ,  C03C2201/36 ,  C03C2203/20 ,  C03C2203/34

Abstract: The invention relates to a method allowing cost-effective production of doped quartz glass, particularly laser-active quartz glass, that is improved with regard to the homogeneity of the doping material distribution, in that a suspension is provided comprising SiO2 particles and an initial compound for at least one doping material in an aqueous fluid, the fluid being removed under formation of a doped intermediate product comprising particles of the doping material or particles of the precursor substance or the doping material, and the doped quartz glass is formed by sintering the doped intermediate product, wherein at least part of the particles of the doping material or the particles of the precursor substance of the same is generated in the suspension as a precipitate of a pH-value-controlled precipitation reaction of the initial compound.

Abstract translation: 本发明涉及一种允许成本有效地生产掺杂石英玻璃，特别是激光 - 活性石英玻璃的方法，其在掺杂材料分布的均匀性方面得到改进，因为提供了包含SiO 2颗粒和初始化合物 对于在水性流体中的至少一种掺杂材料，在形成包含掺杂材料的颗粒或前体物质的颗粒或掺杂材料的掺杂中间产物的情况下除去流体，掺杂的石英玻璃通过烧结掺杂的 中间产物，其中至少部分掺杂材料的颗粒或其前体物质的颗粒在悬浮液中作为初始化合物的pH值控制的沉淀反应的沉淀物产生。

公开(公告)号：US07592063B2

公开(公告)日：2009-09-22

申请号：US11514997

申请日：2006-09-05

Applicant: Yoshiaki Ikuta ,  Shinya Kikugawa

Inventor： Yoshiaki Ikuta ,  Shinya Kikugawa

IPC: B32B3/00 ,  B32B17/06 ,  B32B18/00 ,  B32B3/16 ,  C03C3/112 ,  C03C3/06 ,  C03C10/16 ,  G01N23/00

CPC classification number: C03B19/1453 ,  C03B2201/03 ,  C03B2201/12 ,  C03C3/06 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  Y10T428/166 ,  Y10T428/249969 ,  Y10T428/252

Abstract: For a substrate having fine convexoconcave patterns on its surface, the dimensions of the convexoconcave patterns in a vertical direction of a quartz glass substrate are controlled to be uniform with extreme accuracy and over the entire substrate surface. The quartz glass substrate is made to have a fictive temperature distribution of at most 40° C. and a halogen concentration of less than 400 ppm, and the etching rate of the surface of the quartz glass substrate is made uniform, whereby the dimensions of the convexoconcave patterns in a vertical direction of the quartz glass substrate are controlled to be uniform with good accuracy and over the entire substrate surface.

Abstract translation: 对于在其表面上具有细凹凸图案的基板，石英玻璃基板的垂直方向上的凸凹图案的尺寸被控制为以极高的精度和整个基板表面均匀。 使石英玻璃基板具有至多40℃的假想温度分布和小于400ppm的卤素浓度，并且使石英玻璃基板的表面的蚀刻速率均匀，由此， 在石英玻璃基板的垂直方向上的凸凹图案被控制为具有良好的精度和整个基板表面的均匀。

公开(公告)号：US20090122281A1

公开(公告)日：2009-05-14

申请号：US12351998

申请日：2009-01-12

Applicant: Yasutomi IWAHASHI ,  Akio Koike

Inventor： Yasutomi IWAHASHI ,  Akio Koike

IPC: G03B27/00 ,  C03C3/04

CPC classification number: C03B19/1415 ,  C03B19/1461 ,  C03B2201/12 ,  C03B2201/42 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/42 ,  C03C2203/40 ,  C03C2203/54

Abstract: A silica glass containing TiO2, which has a fictive temperature of at most 1,200° C., a F concentration of at least 100 ppm and a coefficient of thermal expansion of 0±200 ppb/° C. from 0 to 100° C.A process for producing a silica glass containing TiO2, which comprises a step of forming a porous glass body on a target quartz glass particles obtained by flame hydrolysis of glass-forming materials, a step of obtaining a fluorine-containing porous glass body, a step of obtaining a fluorine-containing vitrified glass body, a step of obtaining a fluorine-containing formed glass body and a step of carrying out annealing treatment.

Abstract translation: 含有TiO 2的二氧化硅玻璃，其假想温度为至多1200℃，F浓度为至少100ppm，热膨胀系数为0±200ppb /℃，为0〜100℃。 含有TiO 2的二氧化硅玻璃的制造方法，其包括在通过玻璃形成材料的火焰水解得到的目标石英玻璃粒子上形成多孔玻璃体的工序，得到含氟多孔玻璃体的工序， 获得含氟玻璃化玻璃体，获得含氟成形玻璃体的步骤和进行退火处理的步骤。

公开(公告)号：US07501367B2

公开(公告)日：2009-03-10

申请号：US11403267

申请日：2006-04-13

Applicant: Bodo Kuehn ,  Stephan Ochs ,  Steffen Kaiser ,  Denis Kassube

Inventor： Bodo Kuehn ,  Stephan Ochs ,  Steffen Kaiser ,  Denis Kassube

IPC: C03C3/06

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B19/1469 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03C4/0085 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  Y02P40/57

Abstract: To provide an optical component of quartz glass for use in a projection lens system for immersion lithography with an operating wavelength below 250 nm, which is optimized for use with linearly polarized UV laser radiation and particularly with respect to compaction and birefringence induced by anisotropic density change, it is suggested according to the invention that the quartz glass should show the combination of several properties: particularly a glass structure essentially without oxygen defects, a mean content of hydroxyl groups of less than 60 wt ppm, a mean content of fluorine of less than 10 wt ppm, a mean content of chlorine of less than 1 wt ppm. A method for producing such an optical component comprises the following method steps: producing and drying an SiO2 soot body under reducing conditions and treating the dried soot body before or during vitrification with a reagent reacting with oxygen defects of the quartz glass structure.

Abstract translation: 提供用于投影透镜系统的石英玻璃的光学部件，用于工作波长低于250nm的浸没式光刻，其被优化用于线偏振UV激光辐射，特别是关于由各向异性密度变化引起的压实和双折射 根据本发明，建议石英玻璃应显示几种性能的组合：特别是基本上没有氧缺陷的玻璃结构，羟基的平均含量小于60重量ppm，氟的平均含量小于 10重量ppm，氯的平均含量小于1重量ppm。 一种制造这种光学元件的方法包括以下方法步骤：在还原条件下制备和干燥SiO 2烟炱体，并在玻璃化之前或期间用与石英玻璃结构的氧缺陷反应的试剂处理干燥的烟炱体。

公开(公告)号：US20080274869A1

公开(公告)日：2008-11-06

申请号：US11597087

申请日：2005-05-11

Applicant: Wolfgang Englisch ,  Ralf Takke ,  Bodo Kuehn ,  Bruno Uebbing ,  Rainer Koeppler

Inventor： Wolfgang Englisch ,  Ralf Takke ,  Bodo Kuehn ,  Bruno Uebbing ,  Rainer Koeppler

IPC: C03C3/06 ,  C03B29/00

CPC classification number: C03B19/1469 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2201/42 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/42

Abstract: The present invention relates to a quartz glass blank for an optical component for transmitting radiation of a wavelength of 15 nm and shorter, the blank consisting of highly pure quartz glass, doped with titanium and/or fluorine, which is distinguished by an extremely high homogeneity. The homogeneity relates to the following features: a) micro-inhomogeneities caused by a local variance of the TiO2 distribution (

Abstract translation: 本发明涉及一种用于传输波长为15nm和更短的辐射的光学部件的石英玻璃坯料，该坯料由掺杂有钛和/或氟的高纯石英玻璃组成，其特征在于极高的均匀性 。 均匀性涉及以下特征：a）由TiO 2分布（<0.05％TIO 2 2）的局部方差引起的微不均匀性，其平均值在 （5umum）相对于TiO 2含量的平均值），b）主要功能方向上的热膨胀系数Deltaalpha的绝对最大不均匀性（ <5ppb / K），c）在石英玻璃坯料的可用表面上的热膨胀系数的径向变化不大于0.4ppb /（K.cm）; d）具有特定进展的2nm / cm 2的主要功能方向的633nm处的最大应力双折射（SDB） 和e）根据（b）在光学表面上平均的Deltaalpha的特定进展。 所述石英玻璃坯料只能通过将含有硅，钛和/或氟的化合物的火焰水解获得的掺杂石英玻璃作为大体积的棒状起始体形成为均匀的石英玻璃坯料，其中使用几个成形步骤 并均质化。