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    CROSS-VALIDATION BASED CALIBRATION OF A SPECTROSCOPIC MODEL
    101.
    发明公开
    CROSS-VALIDATION BASED CALIBRATION OF A SPECTROSCOPIC MODEL 审中-公开

    公开(公告)号：US20230349818A1

    公开(公告)日：2023-11-02

    申请号：US18345585

    申请日：2023-06-30

    Applicant: VIAVI Solutions Inc.

    Inventor： Chang Meng HSIUNG ,  Lan SUN

    IPC: G01N21/27 ,  G01J3/02

    CPC classification number: G01N21/274 ,  G01J3/0275 ,  G01N2201/129

    Abstract: A device may receive a master data set for a first spectroscopic model; receive a target data set for a target population associated with the first spectroscopic model to update the first spectroscopic model; generate a training data set that includes the master data set and first data from the target data set; generate a validation data set that includes second data from the target data set and not the master data set; generate, using cross-validation and using the training data set and the validation data set, a second spectroscopic model that is an update of the first spectroscopic model; and provide the second spectroscopic model.

    BLENDING PROCESS END POINT DETECTION
    102.
    发明公开
    BLENDING PROCESS END POINT DETECTION 审中-公开

    公开(公告)号：US20230204417A1

    公开(公告)日：2023-06-29

    申请号：US17646038

    申请日：2021-12-27

    Applicant: VIAVI Solutions Inc.

    Inventor： Chang Meng HSIUNG ,  Lan SUN ,  Michael KLIMEK

    IPC: G01J3/02

    CPC classification number: G01J3/0275 ,  G01J2003/2836

    Abstract: In some implementations, a device may identify, based on spectroscopic data, a pseudo steady state end point indicating an end of a pseudo steady state associated with the blending process. The device may identify a reference block and a test block from the spectroscopic data based on the pseudo steady state end point. The device may generate a raw detection signal associated with the reference block and a raw detection signal associated with the test block. The device may generate a statistical detection signal based on the raw detection signal associated with the reference block and the raw detection signal associated with the test block. The device may determine whether the blending process has reached a steady state based on the statistical detection signal.

    SYSTEM, APPARATUS, AND METHOD FOR SPECTRAL FILTERING
    103.
    发明公开
    SYSTEM, APPARATUS, AND METHOD FOR SPECTRAL FILTERING 审中-公开

    公开(公告)号：US20230194342A1

    公开(公告)日：2023-06-22

    申请号：US17915936

    申请日：2022-04-13

    Applicant: Verity Instruments, Inc.

    Inventor： Chris D. Pylant ,  Timothy C. Michals ,  John D. Corless

    IPC: G01J3/02

    CPC classification number: G01J3/0275 ,  H01L22/10

    Abstract: The disclosure provides improved processing of optical data by identifying anomalous signals in the electrical data representing the optical data. The improved processing can also include modifying the identified anomalous signal data to provide a truer representation of the optical data. The disclosed processing can be used by various systems and apparatuses for processing spectral data corresponding to the optical data. The improved processing canbe used to improve the monitoring of semiconductor processes and, therefore, improve the overall semiconductor processes. In one example, a method of processing spectral data includes: (1) receiving temporally separated spectral data samples, and (2) identifying one or more anomalous signals in an intermediate one of the temporally separated spectral data samples based on at least one preceding and at least one subsequent ones of the spectral data samples.

    SPECTROMETER, AND APPARATUS AND METHOD FOR ESTIMATING BIO-INFORMATION
    104.
    发明公开
    SPECTROMETER, AND APPARATUS AND METHOD FOR ESTIMATING BIO-INFORMATION 审中-公开

    公开(公告)号：US20230194341A1

    公开(公告)日：2023-06-22

    申请号：US17723815

    申请日：2022-04-19

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Sung Hyun NAM ,  Woo Chang LEE

    IPC: G01J3/02 ,  G01J3/18

    CPC classification number: G01J3/0275 ,  G01J3/0202 ,  G01J3/0229 ,  G01J3/18

    Abstract: A spectrometer includes: a dispersive element configured to split light; a detector comprising a plurality of pixels configured to receive the split light; an optical mask disposed in an optical path of the light between the dispersive element and the detector and comprising a plurality of light transmitting portions and a plurality of light blocking portions which are arranged alternately; and a driver configured to control a position of the optical mask or a position of the detector, and change a light incident area of each of the plurality of pixels to receive the light incident on the plurality of light transmitting portions of the optical mask.

    High speed spectroscopic sensor assembly and system
    109.
    发明授权
    High speed spectroscopic sensor assembly and system 有权
    高速光谱传感器组装及系统

    公开(公告)号：US09557216B2

    公开(公告)日：2017-01-31

    申请号：US14909213

    申请日：2014-07-31

    Applicant: TSI, Inc.

    Inventor： Steven G. Buckley ,  Kenneth R. Farmer ,  Darrick L. Niccum

    IPC: G01N21/00 ,  G01J3/02 ,  B07C5/342 ,  G01J3/443 ,  G01N21/71 ,  G01D5/26 ,  G01D5/48 ,  G01J3/12

    CPC classification number: G01J3/0275 ,  B07C5/342 ,  G01D5/26 ,  G01D5/48 ,  G01J3/0248 ,  G01J3/0289 ,  G01J3/12 ,  G01J3/443 ,  G01N21/718 ,  G01N21/85

    Abstract: A laser-based spectroscopy system that combines a distance/proximity standoff sensor, a high-repetition rate laser spectroscopy system, and software with a decision-making algorithm embedded in a processing unit which in combination performs selective firing of the laser when the target object is within an interrogation zone. In a related embodiment, the system provides selective sorting of spectroscopic signals based on information from the standoff signal and from information contained in the spectral signals themselves. The laser emission can be actively controlled while keeping the laser firing, thereby preserving the thermal stability and hence the power of the laser; and the standoff sensor information and the spectral information can be combined to determine the proper relative weighting or importance of each piece of spectral information.

    Abstract translation: 一种基于激光的光谱系统，其将距离/接近距离传感器，高重复率激光光谱系统和软件与嵌入在处理单元中的决策算法组合，所述处理单元在目标物体上组合执行激光的选择性点火 在询问区内。 在相关实施例中，系统基于来自间隔信号的信息和从包含在频谱信号本身中的信息提供对光谱信号的选择性分类。 可以在保持激光烧制的同时主动地控制激光发射，从而保持激光的热稳定性和因此的功率; 并且可以组合对立传感器信息和光谱信息以确定每条光谱信息的适当的相对权重或重要性。

    Discrete frequency spectroscopy and instrumentation
    110.
    发明授权
    Discrete frequency spectroscopy and instrumentation 有权
    离散频谱和仪器仪表

    公开(公告)号：US08593630B2

    公开(公告)日：2013-11-26

    申请号：US12900172

    申请日：2010-10-07

    Applicant: Rohit Bhargava ,  Brian T. Cunningham

    Inventor： Rohit Bhargava ,  Brian T. Cunningham

    IPC: G01J3/40

    CPC classification number: G01J3/12 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0275 ,  G01J3/0286 ,  G01J3/0289 ,  G01N21/35

    Abstract: Described herein are spectrometers comprising one or more wavelength-selective filters, such as guided mode resonance filters. Some of the spectrometers described herein are configured for obtaining absorbance spectra in a discrete fashion by measuring absorbances of a sample at multiple discrete wavelengths or wavelength bands. In another aspect, methods are also provided for obtaining spectra, images and chemical maps of samples in a discrete fashion.

    Abstract translation: 这里描述的是包括一个或多个波长选择性滤波器的光谱仪，例如导模谐振滤波器。 这里描述的一些光谱仪被配置为通过测量在多个离散波长或波长带上的样品的吸光度以离散的方式获得吸收光谱。 在另一方面，还提供了用于以离散方式获得样品的光谱，图像和化学图谱的方法。

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