公开(公告)号：KR1020070098789A

公开(公告)日：2007-10-05

申请号：KR1020077009899

申请日：2005-10-12

Applicant: 더 프록터 앤드 갬블 캄파니 ,  이노베이티브 메저먼트 솔루션즈 인코퍼레이티드

Inventor： 소테리존펠프스 ,  하라밀로호르헤에르난 ,  라플레르패트리샤앨리슨

IPC: G01N21/27 ,  G01N27/00

CPC classification number: G01N21/274 ,  A61B5/0088 ,  A61B5/441 ,  A61B2560/0233 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/0224 ,  G01J3/42 ,  G01J3/447 ,  G01N21/25

Abstract: Methods and apparatus for measuring an electromagnetic radiation response property associated with a substrate (210) and calibrating an electromagnetic measurement device (100) are disclosed. The methods and apparatus generate electromagnetic waves and capture a portion of the generated waves after the waves pass through a first polarized filter (236), reflect from a substrate (210), and pass through a second polarized filter (204) arranged in a cross polar arrangement with respect to the first polarized filter. In addition, the apparatus captures electromagnetic waves that pass through an attenuating filter (206) and reflect from one or more calibration standards (208). Digital data is determined from the captured electromagnetic waves. The digital data is used to recalibrate the apparatus.

Abstract translation: 公开了用于测量与衬底（210）相关联并校准电磁测量装置（100）的电磁辐射响应特性的方法和装置。 所述方法和装置在波通过第一偏振滤光器（236）之后产生电磁波并捕获一部分所产生的波，从基板（210）反射，并且穿过布置成十字形的第二偏振滤光器（204） 相对于第一偏振滤光器的极化布置。 此外，该装置捕获通过衰减滤波器（206）并从一个或多个校准标准（208）反射的电磁波。 从捕获的电磁波确定数字数据。 数字数据用于重新校准设备。

公开(公告)号：KR1020050075094A

公开(公告)日：2005-07-20

申请号：KR1020040002880

申请日：2004-01-15

Applicant: 한국표준과학연구원

Inventor： 제갈원 ,  조현모 ,  조용재 ,  이윤우

IPC: G01N21/21

CPC classification number: G01J3/447 ,  G01J4/04 ,  G01N21/211 ,  G01N21/15 ,  G01N23/2076 ,  G03H2222/17

Abstract: An ellipsometry system and method using spectral imaging are provided. The ellipsometry system includes a light source group for projecting a white light collimated to a multi-point region defined on the surface of a sample, a light analysis group for polarizing a reflected white light to analyze it, and a spectral imaging group for dispersing and imaging the polarized white light. The white light collimated to the multi-point region is input to the spectral imaging group and dispersed by a light dispersing means by wavelengths such that the dispersed lights are imaged on one axis of an imaging plane by the points forming the multi-point region and imaged on the other axis of the imaging plane by wavelengths, to obtain optical data having information about the physical property of the points and wavelengths. Accordingly, a large amount of data can be obtained by wavelengths and points to improve rapidity and reliability of measurement.

公开(公告)号：KR1020040047844A

公开(公告)日：2004-06-05

申请号：KR1020047004093

申请日：2002-09-19

Applicant: 카펠라 포토닉, 인코포레이티드

Inventor： 와일드제프리피. ,  폴린킨파벨 ,  티몬스마이클제이. ,  가레트마크에치.

IPC: G02B6/26

CPC classification number: G02B6/4215 ,  G01J3/0224 ,  G01J3/2803 ,  G01J3/447 ,  G01J2003/2866 ,  G02B6/2713 ,  G02B6/2793 ,  G02B6/2931 ,  G02B6/4213 ,  G02B6/4225 ,  G02B6/4227

Abstract: 본 발명은 기준 신호와 함께 다중 파장 광학 신호를 파장에 의해 소정의 상대적 배치를 갖는 스펙트럼 어레이의 기준 스펙트럼 성분 다수의 스펙트럼 채널로 공간적으로 분리하기 위해 회절 격자와 같은 파장 분산 수단을 사용하는 신규의 방법 및 장치를 제공한다. 소정의 위치에서 기준 스펙트럼 성분을 정렬함으로써, 스펙트럼 채널은, 예를 들면 스펙트럼 어레이에 따라 위치된 빔 수신 소자의 어레이 상에서, 지정된 위치로 동시에 충돌한다. 기준 스펙트럼 성분은 서보 제어에 의해 소정의 위치에서 더 유지되고, 이에 의해 지정된 위치에서 스펙트럼 채널이 정렬된 채로 유지되는 것을 보장한다. 본 발명은 스펙트럼 파워 모니터와 광학 멀티플렉서/디멀티플렉서를 포함하는 WDM 광학 네트워킹 어플리케이션용의 새로운 라인의 서보 기반의 광학 시스템을 제공한다.

公开(公告)号：KR1020030055960A

公开(公告)日：2003-07-04

申请号：KR1020010086094

申请日：2001-12-27

Applicant: 안일신 ,  오혜근

Inventor： 안일신 ,  오혜근

IPC: G01J4/00

CPC classification number: G01J4/04 ,  G01J3/447 ,  G01N21/211 ,  G01N2021/213

Abstract: PURPOSE: An ellipsometer for a fixed incidence surface is provided to reduce measuring time and remove experimental error in a calibration process by preventing a surface direction of a sample from moving and to measure information of reflectance in addition to two variables measured by a general ellipsometer by comparing reflection of a standard sample and a measuring sample. CONSTITUTION: An ellipsometer comprises a light source(100), a polarized light generator(102), a support frame(104) of a sample, a polarized light analyzer(106) and a detector(108). The polarized light generator is rotated by a motor driving apparatus(110). Light from the light source has a specific polarized condition by passing through the polarized light generator. The polarized condition of light is changed again by being reflected on the sample. The polarized light analyzer passes polarized light in a specific direction. Luminosity of light is changed into an electric signal by the detector. The electric signal is evaluated by an A/D converter(112) and a wave form is analyzed by a computer. Consequently, a calibration process is removed and experimental error is removed.

Abstract translation: 目的：提供固定入射表面的椭偏仪，以减少测量时间，并通过防止样品的表面方向移动来消除校准过程中的实验误差，并测量除通过一般椭偏仪测量的两个变量之外的反射率信息 比较标准样品和测量样品的反射。 构成：椭偏仪包括光源（100），偏振光发生器（102），样品的支撑框架（104），偏振光分析仪（106）和检测器（108）。 偏振光发生器由电机驱动装置（110）旋转。 来自光源的光通过偏振光发生器具有特定的偏振状态。 通过在样品上反射来再次改变光的偏振条件。 偏振光分析仪通过特定方向的偏振光。 光的亮度由检测器变成电信号。 电信号由A / D转换器（112）评估，波形由计算机分析。 因此，去除了校准过程并消除了实验误差。

公开(公告)号：DE1572899B

公开(公告)日：1970-03-26

申请号：DE1572899D

申请日：1967-06-15

Applicant: ZEISS CARL FA

Inventor： MAECHLER MEINRAD

IPC: G01J3/447

CPC classification number: G01J3/447

公开(公告)号：EP3344971A1

公开(公告)日：2018-07-11

申请号：EP16760360.4

申请日：2016-08-29

Applicant: Apple Inc.

Inventor： ARBORE, Mark Alan ,  SIMON, David I. ,  KANGAS, Miikka M. ,  BISHOP, Michael J. ,  HILLENDAHL, James ,  CHEN, Robert

IPC: G01N21/27 ,  G01N21/47 ,  G01J3/08 ,  G02B26/04 ,  G01N21/49 ,  G01N21/21 ,  G01N21/35

CPC classification number: G01N21/276 ,  G01J3/0286 ,  G01J3/32 ,  G01J3/36 ,  G01J3/42 ,  G01J3/433 ,  G01J3/447 ,  G01N21/21 ,  G01N21/35 ,  G01N21/474 ,  G01N21/4785 ,  G01N21/49 ,  G01N2021/4709 ,  G01N2021/4778 ,  G01N2201/0221 ,  G01N2201/12707 ,  G01N2201/12723

Abstract: This relates to systems and methods for measuring a concentration and type of substance in a sample at a sampling interface. The systems can include a light source, optics, one or more modulators, a reference, a detector, and a controller. The systems and methods disclosed can be capable of accounting for drift originating from the light source, one or more optics, and the detector by sharing one or more components between different measurement light paths. Additionally, the systems can be capable of differentiating between different types of drift and eliminating erroneous measurements due to stray light with the placement of one or more modulators between the light source and the sample or reference. Furthermore, the systems can be capable of detecting the substance along various locations and depths within the sample by mapping a detector pixel and a microoptics to the location and depth in the sample.

公开(公告)号：EP3136156A1

公开(公告)日：2017-03-01

申请号：EP16185366.8

申请日：2016-08-23

Applicant: Luceo Co., Ltd.

Inventor： ICHIMOTO, Kiyoshi ,  YOSHIMURA, Kensho ,  SAKASHITA, Ryuichi ,  HONDA, Umehiko ,  HANASHIMA, Masakazu ,  SEO, Kazuhiro

IPC: G02B27/28 ,  H01S3/106 ,  G02B7/00 ,  G01J3/12 ,  G01J3/02

CPC classification number: G02B26/007 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/12 ,  G01J3/447 ,  G01J2003/1213 ,  G02B5/3083 ,  G02B7/006 ,  G02B27/288 ,  H01S3/1062

Abstract: A wavelength tunable filter (200) selectively transmitting light of any desired wavelength within the range of 450 nm to 1100 nm without using a band pass filter is disclosed. The wavelength tunable filter (200) comprises a plurality of polarizers (101a to 101f) and a plurality of units between the adjacent polarizers (101 a to 101f) on a common optical axis (111) in a housing (201). Each unit has, in order from light incident side, a quartz birefringent plate (102), an ultra-wide band 1/4 waveplate (103) and an ultra-wide band 1/2 waveplate (104). The ultra-wide band 1/2 waveplate (104) is accommodated in a cylindrical rotatable body (303; 403; 503) and it is rotated by a rotating mechanism.

Abstract translation: 公开了一种波长可调滤波器（200），其不使用带通滤波器选择性地透射450nm至1100nm范围内的任何所需波长的光。 波长可调滤波器（200）包括多个偏振器（101a至101f）以及在壳体（201）中的公共光轴（111）上的相邻偏振器（101a至101f）之间的多个单元。 每个单元具有从光入射侧起的顺序为石英双折射板（102），超宽带1/4波片（103）和超宽带1/2波片（104）。 超宽带1/2波片（104）容纳在圆筒状的旋转体（303; 403; 503）中，并通过旋转机构旋转。

公开(公告)号：EP3056880A2

公开(公告)日：2016-08-17

申请号：EP15175050.2

申请日：2015-07-02

Applicant: Lighthaus Photonics, PTE. Ltd.

Inventor： PHUA, Poh Boon

IPC: G01J3/02 ,  G01J3/453

CPC classification number: G01J3/0272 ,  G01J3/0202 ,  G01J3/0205 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/447 ,  G01J3/4531 ,  G01J3/4532

Abstract: A spectrometer (10) for measuring a spectral signature of an object comprises fringe generating optics (12) for use with a camera (65) and a processor. The fringe generating optics are formed of front optics (45) and birefringent optics (55). The front optics comprises a diffuser adapted to receive light from the object. The birefringent optics is adapted to receive light from the diffuser and to generate interference fringes. The camera is adapted to receive the interference fringes and the processor generates the spectral signature of the object. This spectrometer is an improved Fourier transform spectrometer suitable for use with digital cameras, such as cameras found in mobile devices.

Abstract translation: 用于测量物体的光谱特征的光谱仪（10）包括用于照相机（65）和处理器的条纹发生光学装置（12）。 边缘发生光学器件由前部光学器件（45）和双折射光学器件（55）形成。 前部光学器件包括适于接收来自物体的光的漫射器。 双折射光学器件适于接收来自漫射器的光并产生干涉条纹。 照相机适合于接收干涉条纹并且处理器产生物体的光谱特征。 该光谱仪是一款适用于数码相机的改进型傅里叶变换光谱仪，例如移动设备中的相机。

公开(公告)号：EP2539853A4

公开(公告)日：2016-07-20

申请号：EP11746963

申请日：2011-02-24

Applicant: VOROTEC LTD

Inventor： VOROTEC LTD

IPC: G06K9/46 ,  G01J3/02 ,  G01J3/28 ,  G01J3/447 ,  G01J4/04 ,  G01N21/21 ,  G02B5/20 ,  G02B5/30 ,  G02B27/28

CPC classification number: G02B27/288 ,  G01J3/0224 ,  G01J3/2803 ,  G01J3/447 ,  G02B5/201 ,  G02B5/3025

Abstract: A method, system and polarization filter for analyzing polarization properties of light are described, the method comprising: receiving image data from a plurality of image sensor cells, the image sensor cells comprised in an image sensing system; separating from the received image data polarization information and scene image data of a scene being captured; and processing the polarization information to deduce information. Additionally, a polarization filter for analyzing polarization properties of light is described, the polarization filter comprising an array of polarization cells in various directions of polarization, the polarization filter comprising a core array of at least horizontal polarization filter cell, vertical polarization filter cell, no-polarization filter cell and circular polarization filter cell.

公开(公告)号：EP3035013A1

公开(公告)日：2016-06-22

申请号：EP15198314.5

申请日：2015-12-07

Applicant: Palo Alto Research Center, Incorporated

Inventor： HEGYI, Alex ,  MARTINI, Joerg ,  KIESEL, Peter ,  BIEGELSEN, David K.

IPC: G01J3/45 ,  G01J3/453 ,  G01J3/02

CPC classification number: G01J3/447 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/0289 ,  G01J3/2823 ,  G01J3/45 ,  G01J3/4531 ,  G02B5/04 ,  G02B5/3083 ,  G02B27/283 ,  G02B27/286

Abstract: An optical device includes a waveplate sandwiched between first and second polarizers and is arranged to receive light emanating from an object or object image that is in motion relative to the optical device. A detector array includes one or more detector elements and is optically coupled to receive light from the second polarizer. Each detector element of the detector array provides an electrical output signal that varies according to intensity of the light received from the second polarizer. The intensity of the light is a function of relative motion of the object or the object image and the optical device and contains spectral information about an object point of the object.

Abstract translation: 光学装置包括夹在第一和第二偏振器之间的波片，并且布置成接收从相对于光学装置运动的物体或物体图像发出的光。 检测器阵列包括一个或多个检测器元件，并被光耦合以接收来自第二偏振器的光。 检测器阵列的每个检测器元件提供根据从第二偏振器接收的光的强度而变化的电输出信号。 光的强度是物体或物体图像和光学装置的相对运动的函数，并且包含关于物体的物点的光谱信息。