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公开(公告)号：KR101105449B1
公开(公告)日：2012-01-17
申请号：KR1020090096356
申请日：2009-10-09
Applicant: 한국표준과학연구원
Abstract: 본 발명은 물질의 두께 및 굴절률을 측정하는 시스템에 관한 것으로, 좀 더 자세히는, 펄스 레이저 광원을 이용함으로써, 연속 발진 레이저 광원이나, 적외선 광원을 이용하는 산출 시스템 보다 간단한 작업으로 정확도가 높은 물질의 두께 및 굴절률을 동시에 산출할 수 있는 기술에 관한 것이다.
본 발명에 따른 펄스레이저를 이용한 물질 두께 및 굴절률 측정 시스템은 주기적인 간격으로 발진하는 펄스 형태의 레이저를 제공하는 광조사부 및 상기 광조사부에서 나오는 레이저 광을 이용하여, 측정 물질의 간섭 신호를 측정하고, 이를 분석하여, 측정 물질의 두께 및 굴절률을 동시에 산출하는 스펙트럼 분석 간섭부로 구성되는 것을 특징으로 한다.
펄스 레이저, 웨이퍼, 두께, 굴절률-
公开(公告)号：KR1020110050979A
公开(公告)日：2011-05-17
申请号：KR1020090107607
申请日：2009-11-09
Applicant: 한국표준과학연구원
Abstract: PURPOSE: An apparatus for measuring three dimensional shape of a subject is provided to detect abnormality of a subject such as a semiconductor module by measuring the three dimensional shape of the subject without the movement of the subject and the camera. CONSTITUTION: An apparatus for measuring three dimensional shape of a subject comprises a camera(300). The camera photographs a subject(100) such as a semiconductor module. A defocus unit(1) is installed on the front side of the camera to defocus a subject image incident to the camera. The defocus unit changes the refractive index or focal distance of the light.
Abstract translation: 目的：提供一种用于测量被检体的三维形状的装置，以通过在被检体和照相机的移动的状态下测量被检体的三维形状来检测被检体（例如半导体模块）的异常。 构成：用于测量被检体的三维形状的装置包括照相机（300）。 相机拍摄诸如半导体模块的对象（100）。 散焦单元（1）安装在照相机的前侧以使入射到相机的被摄体图像散焦。 散焦单元改变光的折射率或焦距。
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公开(公告)号：KR1020080110234A
公开(公告)日：2008-12-18
申请号：KR1020070058731
申请日：2007-06-15
Applicant: 한국표준과학연구원
Abstract: A head module of an atomic force microscope is provided to measure the bending of a cantilever and z-axis movement displacement of a probe simultaneously. A scanner(53) is formed of a piezo-electric ceramic element. A cantilever(55) is mounted at an end of a parent plate(50) attached to the scanner. A probe(57) is positioned at an end of the cantilever. A diffraction grid(72) generates at least two or more diffracted light beams(62,64,66) for a laser beam(60) generated in an optical unit. Detectors(82,84) detect the diffracted beams.
Abstract translation: 提供原子力显微镜的头模块以同时测量探针的弯曲和探头的z轴运动位移。 扫描器（53）由压电陶瓷元件形成。 悬臂（55）安装在安装在扫描仪上的母板（50）的一端。 探针（57）位于悬臂的末端。 衍射栅格（72）产生用于在光学单元中产生的激光束（60）的至少两个或更多个衍射光束（62,66,66）。 检测器（82,84）检测衍射光束。
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公开(公告)号：KR1020080097625A
公开(公告)日：2008-11-06
申请号：KR1020070042722
申请日：2007-05-02
Applicant: 한국표준과학연구원
Abstract: A thermal expansion coefficient measuring interferometer and a method thereof are provided to measure thermal expansion coefficient more accurately by measuring the minute length change of a measurement object according to the temperature change. A thermal expansion coefficient measuring interferometer comprises a polarization beam splitter(220) and a plurality of corner cube prisms(232,234,236). The polarization beam splitter reflects and transmits a first beam and a second beam according to the polarization component so that the first beam is split into a third beam and a fourth beam and the second beam into a fifth beam and a sixth beam. The corner cube prism changes the beam path of the incident beam if at least one of the third beam and the sixth beam enters from the polarization beam splitter.
Abstract translation: 提供一种热膨胀系数测量干涉仪及其方法，通过根据温度变化测量测量对象的微小长度变化来更精确地测量热膨胀系数。 热膨胀系数测量干涉仪包括偏振分束器（220）和多个角立方棱镜（232,234,236）。 偏振分束器根据偏振分量反射和透射第一光束和第二光束，使得第一光束被分成第三光束，第四光束和第二光束分成第五光束和第六光束。 如果第三束和第六束中的至少一个从偏振分束器进入，则角隅棱镜改变入射光束的光束路径。
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