公开(公告)号：US08159107B2

公开(公告)日：2012-04-17

申请号：US11757331

申请日：2007-06-01

Applicant: Harold L. Stalford

Inventor： Harold L. Stalford

IPC: H01L41/08

CPC classification number: H02N10/00 ,  B81B3/0024 ,  B81B2201/031 ,  B81B2201/034 ,  B81B2201/037 ,  B81B2201/051 ,  H02K7/00 ,  H02N1/002 ,  H02N11/006

Abstract: A micro rotary machine may include a micro actuator and a micro shaft coupled to the micro actuator. The micro shaft comprises a horizontal shaft and is operable to be rotated by the micro actuator. A micro tool is coupled to the micro shaft and is operable to perform work in response to motion of the micro shaft.

Abstract translation: 微型旋转机器可以包括微型致动器和耦合到微型致动器的微型轴。 微型轴包括水平轴，并且可由微型致动器旋转。 微型工具联接到微型轴，并且可操作以响应于微型轴的运动而执行工作。

公开(公告)号：US07760065B2

公开(公告)日：2010-07-20

申请号：US11772039

申请日：2007-06-29

Applicant: Arman Gasparyan ,  John VanAtta Gates, II ,  Maria Elina Simon

Inventor： Arman Gasparyan ,  John VanAtta Gates, II ,  Maria Elina Simon

IPC: H01H71/18 ,  H01H61/00

CPC classification number: H01H1/0036 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2201/031 ,  H01H37/00 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2061/006 ,  H01H2061/008

Abstract: The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.

Abstract translation: 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括​​具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。

公开(公告)号：US07155911B2

公开(公告)日：2007-01-02

申请号：US11107787

申请日：2005-04-18

Applicant: Kia Silverbrook

Inventor： Kia Silverbrook

IPC: F01B29/10

CPC classification number: B41J2/1645 ,  B41J2/14427 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1648 ,  B81B3/007 ,  B81B2201/031 ,  B81B2201/036 ,  B81B2201/052 ,  Y10T29/42 ,  Y10T29/49083 ,  Y10T29/49401

Abstract: A thermal bend actuator (6) is provided with a group of upper arms (23, 25, 26) and a group of lower arms (27, 28) which are non planar, so increasing the stiffness of the arms. The arms (23, 25, 26,27,28) may be spaced transversely of each other and do not overly each other in plan view, so enabling all arms to be formed by depositing a single layer of arm forming material

Abstract translation: 热弯曲致动器（6）设置有一组上臂（23,25,26）和一组非平面的下臂（27,28），因此增加了臂的刚度。 臂（23,25,26,27,28）可以彼此横向间隔开，并且在平面图中不会彼此过多，因此能够通过沉积单层臂形成材料来形成所有臂

公开(公告)号：US06800912B2

公开(公告)日：2004-10-05

申请号：US10147300

申请日：2002-05-17

Applicant: Mehmet Ozgur

Inventor： Mehmet Ozgur

IPC: H01L2984

CPC classification number: H01H1/0036 ,  B81B2201/014 ,  B81B2201/031 ,  B81C1/00246 ,  B81C2203/0735 ,  H01H61/00 ,  H01H2061/006

Abstract: A monolithically integrated, electromechanical microwave switch, capable of handling signals from DC to millimeter-wave frequencies, and an integrated electromechanical tunable capacitor are described. Both electromechanical devices include movable beams actuated either by thermo-mechanical or by electrostatic forces. The devices are fabricated directly on finished silicon-based integrated circuit wafers, such as CMOS, BiCMOS or bipolar wafers. The movable beams are formed by selectively removing the supporting silicon underneath the thin films available in a silicon-based integrated circuit technology, which incorporates at least one polysilicon layer and two metallization layers. A cavity and a thick, low-loss metallization are used to form an electrode above the movable beam. A thick mechanical support layer is formed on regions where the cavity is located, or substrate is bulk-micro-machined, i.e., etched.

Abstract translation: 描述了能够处理从DC到毫米波频率的信号的单片集成的机电微波开关，以及集成的机电可调电容器。 两个机电装置都包括通过热机械或静电力而致动的可移动梁。 这些器件直接在成品硅基集成电路晶片上制造，例如CMOS，BiCMOS或双极晶片。 可移动光束通过选择性地去除在基于硅的集成电路技术中可获得的薄膜下面的支撑硅而形成，该技术包括至少一个多晶硅层和两个金属化层。 使用空腔和厚的低损耗金属化在可动梁的上方形成电极。 在空腔所在的区域上形成厚的机械支撑层，或者衬底被体微加工，即蚀刻。

公开(公告)号：US20040097066A1

公开(公告)日：2004-05-20

申请号：US10663983

申请日：2003-09-17

Applicant: Corporation for National Research Initiatives

Inventor： Mehmet Ozgur

IPC: H01L021/4763

CPC classification number: H01H1/0036 ,  B81B2201/014 ,  B81B2201/031 ,  B81C1/00246 ,  B81C2203/0735 ,  H01H61/00 ,  H01H2061/006

Abstract: A monolithically integrated, electromechanical microwave switch, capable of handling signals from DC to millimeter-wave frequencies, and an integrated electromechanical tunable capacitor are described. Both electromechanical devices include movable beams actuated either by thermo-mechanical or by electrostatic forces. The devices are fabricated directly on finished silicon-based integrated circuit wafers, such as CMOS, BiCMOS or bipolar wafers. The movable beams are formed by selectively removing the supporting silicon underneath the thin films available in a silicon-based integrated circuit technology, which incorporates at least one polysilicon layer and two metallization layers. A cavity and a thick, low-loss metallization are used to form an electrode above the movable beam. A thick mechanical support layer is formed on regions where the cavity is located, or substrate is bulk-micro-machined, i.e., etched.

Abstract translation: 描述了能够处理从DC到毫米波频率的信号的单片集成的机电微波开关，以及集成的机电可调电容器。 两个机电装置都包括通过热机械或静电力而致动的可移动梁。 这些器件直接在成品硅基集成电路晶片上制造，例如CMOS，BiCMOS或双极晶片。 可移动光束通过选择性地去除在基于硅的集成电路技术中可获得的薄膜下面的支撑硅而形成，该技术包括至少一个多晶硅层和两个金属化层。 使用空腔和厚的低损耗金属化在可动梁的上方形成电极。 在空腔所在的区域上形成厚的机械支撑层，或者衬底被体微加工，即蚀刻。

公开(公告)号：US06691513B1

公开(公告)日：2004-02-17

申请号：US10222124

申请日：2002-08-16

Applicant: Edward S. Kolesar

Inventor： Edward S. Kolesar

IPC: F01B2910

CPC classification number: B81B3/0024 ,  B81B2201/031 ,  F03G7/06 ,  H01H1/0036 ,  H01H2061/006 ,  H01H2061/008

Abstract: A system and method for providing an improved micro-electro-mechanical (MEMS) electrothermal actuator is disclosed. In prior art electrothermal actuators an electric current passes through a narrow arm and returns through a wide arm. The larger current density in the narrow arm heats the narrow arm so that it expands more than the wide arm. The differential expansion of the hot narrow arm and the cold wide arm deflects the end of the cold wide arm. The present invention provides an additional hot arm to provide a return path for the electric current so that the cold arm does not conduct electric current. The present invention optimizes power consumption, tip deflection and generated force. A bidirectional thermal beam actuator is also disclosed.

Abstract translation: 公开了一种用于提供改进的微电机械（MEMS）电热致动器的系统和方法。 在现有技术的电热致动器中，电流通过窄臂并通过宽臂返回。 窄臂中较大的电流密度加热了窄臂，使其比宽臂扩张。 热的窄臂和冷的宽臂的差动膨胀使冷宽臂的端部偏转。 本发明提供了一种额外的热臂，以提供电流的返回路径，使得冷臂不传导电流。 本发明优化了功耗，尖端偏转和产生的力。 还公开了双向热束致动器。

公开(公告)号：US06675578B1

公开(公告)日：2004-01-13

申请号：US09575436

申请日：2000-05-22

Applicant: Michael J. Sinclair

Inventor： Michael J. Sinclair

IPC: F01B2910

CPC classification number: F03G7/06 ,  B81B3/0051 ,  B81B2201/031 ,  B81B2203/051 ,  H01H1/0036 ,  H01H61/00 ,  H01H2061/006

Abstract: An in-plane thermal buckle-beam microelectrical mechanical actuator is formed on a planar substrate of semiconductor material, for example. The actuator includes first and second anchors secured to the substrate and a floating center beam positioned between the first and second anchors and movable relative to the substrate. Symmetric first and second sets of elongated thermal half-beams are secured between opposite sides of the floating center beam and the respective first and second anchors. The half-beams are formed of semiconductor material, such as polysilicon. A current source directs electrical current through the thermal half beams via the anchors to impart thermal expansion of the thermal half-beams and hence linear motion of the floating center beam generally parallel to the substrate. In one implementation, the half-beams are configured at a bias angle to give the floating beam an affinity for in-plane motion. An actuator of the present invention with such bias angles can give the actuator an overall chevron configuration.

Abstract translation: 例如，在半导体材料的平面基板上形成有平面内的热扣梁微电机械致动器。 致动器包括固定到基板的第一和第二锚固件以及位于第一和第二锚固件之间并可相对于基板移动的浮动中心梁。 对称的第一和第二组细长的热半光束被固定在浮动中心光束的相对侧和相应的第一和第二锚定器之间。 半波束由诸如多晶硅的半导体材料形成。 电流源通过锚定器引导电流通过热半束，以赋予热半光束的热膨胀，并因此使浮动中心光束与基底平行的线性运动。 在一个实施方案中，半波束被配置为偏置角，以使浮动波束对于平面内运动具有亲和力。 具有这种偏置角度的本发明的致动器可以使致动器具有整体人字形配置。

公开(公告)号：US20030200748A1

公开(公告)日：2003-10-30

申请号：US10136703

申请日：2002-04-30

Applicant: ADC Telecommunications, Inc.

Inventor： Susan C. Bromley ,  Bradley J. Nelson ,  Karl Vollmers ,  Arunkumar Subramanian ,  Eniko Enikov ,  Kamal Deep Mothilal

IPC: H02N010/00

CPC classification number: B81B3/0024 ,  B81B2201/031 ,  F03G7/06 ,  H01H1/0036 ,  H01H61/04 ,  H01H2001/0068 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

Abstract: An actuator having a hot-arm and a cold-arm wherein the hot-arm and cold-arm are vertically offset from one another. The hot-arm is heated to cause the actuator to move both vertically and horizontally. When used as a relay, an electrostatic force latches the actuator when the electrodes are brought in close proximity to one another.

Abstract translation: 具有热臂和冷臂的致动器，其中热臂和冷臂彼此垂直偏移。 热臂被加热，使致动器垂直和水平移动。 当用作继电器时，当电极彼此靠近时，静电力将致动器锁定。

公开(公告)号：US20020195674A1

公开(公告)日：2002-12-26

申请号：US10217714

申请日：2002-08-13

Applicant: 3M Innovative Properties Company

Inventor： Billy L. Weaver ,  Douglas P. Goetz ,  Kathy L. Hagen ,  Mike E. Hamerly ,  Robert G. Smith ,  Silva K. Theiss

IPC: H01L029/82

CPC classification number: G02B6/358 ,  B81B3/0024 ,  B81B3/0037 ,  B81B2201/031 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81B2203/053 ,  B82Y15/00 ,  G02B6/352 ,  G02B6/3576 ,  H01G5/18 ,  H01H1/0036 ,  H01H61/04 ,  H01H2061/006 ,  H01H2061/008

Abstract: A micrometer sized, single-stage, vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. A member mechanically and electrically couples the free ends of the hot and cold arms such that the member moves away from the substrate when current is applied to at least the hot arm. The hot arm can optionally include a grounding tab to minimize thermal expansion of the cold arm.

Abstract translation: 微米尺寸的单级垂直热致动器，其能够将微米尺寸的光学器件重复并快速地移动离开衬底的表面。 垂直热致动器构造在基板的表面上。 至少一个热臂具有锚固在表面上的第一端和位于表面上方的自由端。 冷臂具有锚固在表面上的第一端和自由端。 冷臂相对于表面位于热臂上方。 机构和电气耦合热臂和冷臂的自由端，使得当电流施加到至少热臂时，构件远离基板移动。 热臂可以可选地包括接地片，以最小化冷臂的热膨胀。

公开(公告)号：US06438954B1

公开(公告)日：2002-08-27

申请号：US09845188

申请日：2001-04-27

Applicant: Douglas P. Goetz ,  Mike E. Hamerly ,  Daniel B. Pendergrass ,  Robert G. Smith ,  Silva K. Theiss ,  Billy L. Weaver

Inventor： Douglas P. Goetz ,  Mike E. Hamerly ,  Daniel B. Pendergrass ,  Robert G. Smith ,  Silva K. Theiss ,  Billy L. Weaver

IPC: F01B2910

CPC classification number: B81B3/0021 ,  B81B2201/031 ,  B81B2203/0307 ,  B81B2203/051 ,  B81B2203/053 ,  H01G5/18 ,  H01G5/40 ,  H01H2061/008

Abstract: A micrometer sized multi-directional thermal actuator capable of repeatable and rapid displacement in a substantially horizontal direction, a substantially vertical direction, and/or a combination thereof. The multi-directional thermal actuator constructed on a surface of a substrate includes three or more beams each cantilevered from one or more anchors at a first end to extend generally parallel to the surface of the substrate. A member mechanically and electrically couples the distal ends of the beams. Application of current to a circuit comprising combinations of any two or more of the beams displaces the member in one of three or more non-parallel radial directions, respectively.

Abstract translation: 一种千分尺尺寸的多方向热致动器，其能够在基本上水平的方向，基本上垂直的方向上重复和快速地移动，和/或它们的组合。 构造在基板的表面上的多向热致动器包括三个或更多个梁，每个梁在第一端处从一个或多个锚固件悬臂延伸，以大致平行于基板的表面延伸。 机械和电气耦合梁的远端的部件。 将电流施加到包括任何两个或更多个光束的组合的电路中，分别使构件在三个或更多个非平行的径向方向之一中移位。