DYNAMIC ILLUMINATION IN OPTICAL INSPECTION SYSTEMS
    112.
    发明申请
    DYNAMIC ILLUMINATION IN OPTICAL INSPECTION SYSTEMS 审中-公开
    光学检测系统的动态照明

    公开(公告)号:WO2009156981A1

    公开(公告)日:2009-12-30

    申请号:PCT/IL2009/000572

    申请日:2009-06-09

    Abstract: An optical inspection system or tool can be configured to inspect objects using dynamic illumination where one or more characteristics of the illumination is/are adjusted to meet the inspection needs of different areas. For example, the illumination intensity may be increased or decreased as the tool inspects areas of memory and periphery features in a wafer die. In some embodiments, the adjustment can be based on data obtained during a pre-inspection setup sequence in which images taken based on illumination with varying characteristics are evaluated for suitability in the remainder of the inspection process.

    Abstract translation: 光学检查系统或工具可以被配置为使用动态照明来检查物体,其中调整照明的一个或多个特征以满足不同区域的检查需要。 例如,当工具检查晶片管芯中的存储器区域和外围特征时,可以增加或减小照明强度。 在一些实施例中,调整可以基于在预检查设置顺序期间获得的数据,其中基于具有变化特性的照明拍摄的图像被评估为在检查过程的其余部分中的适用性。

    共焦点顕微鏡、共焦点顕微鏡を用いた蛍光測定方法及び偏光測定方法
    113.
    发明申请
    共焦点顕微鏡、共焦点顕微鏡を用いた蛍光測定方法及び偏光測定方法 审中-公开
    COFOCAL MICROSCOPE,荧光测量方法和使用COFOCAL MICROSCOPE的极化光测量

    公开(公告)号:WO2004036284A1

    公开(公告)日:2004-04-29

    申请号:PCT/JP2003/011935

    申请日:2003-09-18

    Abstract: 共焦点顕微鏡及びそれを用いた蛍光測定方法及び偏光測定方法であって、照明光源(11)から偏光を、マイクロレンズアレイ(21)を上部に配置したマトリクス式液晶素子(22)及び対物レンズ(23)を介して被観察物(2)へ入射する入射光学系(10,10’)と、被観察物からの反射光又は蛍光を検出する検出光学系(30,30’)と、液晶素子(22)を制御する液晶制御部(52)とを備え、マイクロレンズアレイ(21)を透過したマイクロレンズ毎の光を、液晶素子(22)の各画素(22a)毎に透過させ、対物レンズ(23)にて被観察物(2)に複数の焦点(24)を結ぶと共に、液晶素子(22)の各画素を透過する光の偏光方向を液晶制御部(52)を用い各画素を透過する光の偏光方向を互いに直交するように制御する。

    Abstract translation: 一种共焦显微镜以及使用它的荧光测量方法和偏振光测量方法,所述显微镜包括用于将来自照明光源(11)的偏振光发射到观察对象(10,10')的入射光学系统(10,10' 2)通过其上设置有微透镜阵列(21)的矩阵型液晶元件(22)和物镜(23),检测光学系统(30,30'),用于检测来自物镜 观察或荧光,以及用于控制液晶元件(22)的液晶控制单元(52),其中通过微透镜阵列(21)的每个微透镜相关光都允许穿过每个像素( 22a),然后变成在观察对象物(2)上形成多个焦点(24)的物镜(23),并且通过各个像素的光的偏振方向 液晶元件(22)由液体控制 id水晶控制单元(52),以便彼此正交。

    POLARISATION MICROSCOPE
    116.
    发明申请

    公开(公告)号:US20180246307A1

    公开(公告)日:2018-08-30

    申请号:US15758546

    申请日:2016-09-07

    Abstract: A super-resolution scanning confocal polarisation contrast microscope is provided. The microscope has a laser light source (1), sample stage (10) for mounting a sample 6 and detector (8). A polarisation controller (3) is used to set the polarisation state of the light beam to any one of a defined set of different polarisation states. A spatial light modulator (5) modulates the light beam in amplitude and/or phase to focus a sub-diffraction-limit central spot on the sample together with unwanted sidebands. A scanning confocal scheme is used with a pin hole 9 in front of the detector (8) so that only that portion of the light is detected which has comes from the central spot, while rejecting light that has been scattered by the sample from the sidebands. Polarisation contrast images with sub-diffraction limit resolution can thus be acquired.

    IMAGING THROUGH SCATTERING MEDIA WITH HIGH SIGNAL TO NOISE RATIO AND RESOLUTION
    119.
    发明申请
    IMAGING THROUGH SCATTERING MEDIA WITH HIGH SIGNAL TO NOISE RATIO AND RESOLUTION 审中-公开
    通过具有高信号噪声比和分辨率的散射介质成像

    公开(公告)号:US20160356746A1

    公开(公告)日:2016-12-08

    申请号:US14913958

    申请日:2014-08-26

    Abstract: Systems and methods are disclosed to enhance three-dimensional photoacoustic imaging behind, through, or inside a scattering material. Embodiments of the invention can increase the optical fluence in an ultrasound transducer focus and/or enhance the optical intensity using wavefront shaping before the scatterer. The photoacoustic signal induced by an object placed behind the scattering medium can serve as feedback to optimize the wavefront, enabling one order of magnitude enhancement of the photoacoustic amplitude. Using the enhanced optical intensity, the object can be scanned in two dimensions and/or a spot can be scanned by re-optimizing the wavefront before post-processing of the data to reconstruct the image. The temporal photoacoustic signal provides information to reconstruct the third-dimensional information.

    Abstract translation: 公开了系统和方法来增强散射材料后面,通过或内部的三维光声成像。 本发明的实施例可以在散射体之前使用波前整形来增加超声波换能器焦点中的光能密度和/或增强光强度。 由放置在散射介质后面的物体引起的光声信号可以用作反馈以优化波前,使光声振幅能够提高一个数量级。 使用增强的光强度,可以在二维扫描物体和/或可以在对数据进行后处理以重构图像之前重新优化波阵面来扫描点。 时间光声信号提供重建第三维信息的信息。

    Rapid adaptive optical microscopy over large multicellular volumes
    120.
    发明授权
    Rapid adaptive optical microscopy over large multicellular volumes 有权
    快速自适应光学显微镜在大多细胞体积

    公开(公告)号:US09500846B2

    公开(公告)日:2016-11-22

    申请号:US14660906

    申请日:2015-03-17

    Abstract: Excitation light is focused to a focus within a sample and the focus is scanned within a volume in the sample with scanning optical elements. Signal light emitted from the focus is de-scanned, with the one or more scanning optical elements, onto a wavefront sensor as the focus is scanned within the volume. Based on the descanned signal light, an average aberration created by the volume of the sample of a wavefront of the excitation light is determined. A wavefront of the excitation light is corrected by an amount according to the determined average aberration while the focus is scanned within the volume, the signal light is imaged onto a photosensitive detector as the focus is scanned within the volume, and a wavefront of the imaged signal light is corrected by an amount according to the determined average aberration while the focus is scanned. These steps can be repeated for a plurality of different volumes in the sample, and an image of the sample can be generated based on the detected signal light from scanned foci within the different volumes.

    Abstract translation: 激发光聚焦到样品中的焦点,并用扫描光学元件在样品中的体积内扫描焦点。 当聚焦在体积内被扫描时,从焦点发出的信号光与一个或多个扫描光学元件一起被扫描到波前传感器上。 基于下拉信号光,确定由激发光的波前的样本的体积产生的平均像差。 当在体积内扫描焦点时,根据确定的平均像差校正激发光的波前,当体积内的焦点被扫描时,将信号光成像到光敏检测器上,并且成像的波前 当扫描焦点时,根据确定的平均像差校正信号光的量。 可以对样本中的多个不同体积重复这些步骤,并且可以基于来自不同体积内的扫描焦点的检测到的信号光来生成样本的图像。

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