Etching method for manufacturing substrate structure having thick electrically conductive layer, and substrate structure having thick electrically conductive layer

    公开(公告)号:US11895778B2

    公开(公告)日:2024-02-06

    申请号:US17552907

    申请日:2021-12-16

    CPC classification number: H05K3/061 H05K1/0207 H05K2201/0166

    Abstract: An etching method for manufacturing a substrate structure having a thick electrically conductive layer, and a substrate structure having a thick electrically conductive layer are provided. The etching method includes providing an electrically insulating substrate structure including a thermally conductive and electrically insulating layer, an electrically conductive layer, and a non-photosensitive polymer masking layer, removing one part of the non-photosensitive polymer masking layer and one part of the electrically conductive layer by a machining process to form at least one electrically conductive recess having the electrically conductive layer exposed, forming a predetermined thickness ratio between a thickness of the electrically conductive recess and a thickness of the electrically conductive layer, removing a reserved part of the electrically conductive layer between a bottom wall of the electrically conductive recess and a bottom surface of the electrically conductive layer, and removing a remaining part of the non-photosensitive polymer masking layer.

    MULTI-LAYER WIRING BOARD AND METHOD OF MANUFACTURING MULTI-LAYER WIRING BOARD
    116.
    发明申请
    MULTI-LAYER WIRING BOARD AND METHOD OF MANUFACTURING MULTI-LAYER WIRING BOARD 审中-公开
    多层接线板及制造多层接线板的方法

    公开(公告)号:US20110232942A1

    公开(公告)日:2011-09-29

    申请号:US13069741

    申请日:2011-03-23

    Inventor: Hiroyuki UEMATSU

    Abstract: A multi-layer wiring board includes a substrate; a land including a first conductive member arranged on the substrate; a second conductive member that is deposited on a surface of the first conductive member, which is a surface distant from the substrate; and a stress relaxation layer arranged between the first conductive member and the second conductive member; and a connection portion that makes contact with the land and that is electrically connected to the land.

    Abstract translation: 多层布线基板包括基板; 包括布置在所述基板上的第一导电构件的平台; 第二导电构件,其沉积在所述第一导电构件的表面上,所述第一导电构件是远离所述衬底的表面; 以及布置在所述第一导电构件和所述第二导电构件之间的应力松弛层; 以及与该焊盘接触并且与该焊盘电连接的连接部。

    METHOD OF MANUFACTURING ELECTRONIC DEVICE
    119.
    发明申请
    METHOD OF MANUFACTURING ELECTRONIC DEVICE 审中-公开
    制造电子器件的方法

    公开(公告)号:US20100203713A1

    公开(公告)日:2010-08-12

    申请号:US12733595

    申请日:2008-09-05

    Abstract: An object of this invention is to provide a method for manufacturing an electronic device wherein a conductor layer is uniformly formed on a substrate having a super large area. In the method for manufacturing the electronic device, a metal film for forming a gate electrode is selectively embedded in a transparent resin film formed on a substrate, and the metal film is formed by sputtering directly on the substrate at the gate electrode portion, and on an insulating coat film on portions other than the gate electrode portion. The metal film on the insulating coat film is removed by chemical liftoff with removal of the insulating coat film by etching.

    Abstract translation: 本发明的目的是提供一种电子器件的制造方法,其中导体层均匀地形成在具有超大面积的基片上。 在电子设备的制造方法中,用于形成栅电极的金属膜选择性地嵌入到形成在基板上的透明树脂膜中,并且金属膜通过在栅电极部分处直接溅射在基板上而形成, 在除了栅电极部分之外的部分上的绝缘涂膜。 通过化学剥离除去绝缘涂膜上的金属膜,通过蚀刻除去绝缘涂膜。

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