PHOTOLITHOGRAPHY MASK USING SERIFS AND METHOD THEREOF
    123.
    发明公开
    PHOTOLITHOGRAPHY MASK USING SERIFS AND METHOD THEREOF 失效
    与SERIF状辅助模式和相关方法的光掩模

    公开(公告)号:EP0902915A1

    公开(公告)日:1999-03-24

    申请号:EP97926582.0

    申请日:1997-05-27

    Inventor: CHEN, J., Fung

    CPC classification number: G03F1/36 G03F7/70433

    Abstract: There is disclosed a photolithography mask and method of making the same that utilizes serifs to increase to correspondence between an actual circuit design and the final circuit pattern on a semiconductor wafer. The mask uses a plurality of serifs having a size determined by a resolution limit of the optical exposure tool used during the fabrication process. The serifs are positioned on the corner regions of the mask such that a portion of surface area for each of the serifs overlaps the corner regions of the mask. The size of the serifs is about one-third the resolution limit of said optical exposure tool. About 33 to about 40 percent of the total surface area of the serifs overlap the corner regions of the mask.

    TWO STAGE FLASH ANALOG-TO-DIGITAL SIGNAL CONVERTER
    124.
    发明公开
    TWO STAGE FLASH ANALOG-TO-DIGITAL SIGNAL CONVERTER 失效
    双级并联模拟数字转换器

    公开(公告)号:EP0706731A1

    公开(公告)日:1996-04-17

    申请号:EP94921895.0

    申请日:1994-05-02

    IPC: H03M1

    CPC classification number: H03M1/204 H03M1/365

    Abstract: A two-stage flash analog-to-digital signal converter is described. The first stage has a voltage divider network and a set of amplifiers that perform an initial interpolation. The initial interpolation results are directly coupled, i.e., no resistive or capacitive elements, to a second stage comprising a set of comparators having multiple inputs. The multiple inputs of the second stage comparators are weightily coupled to the first stage amplifiers in a manner so as to cause the second stage comparators to generate a digital representation of the analog signal.

    IMPROVED MASK FOR PHOTOLITHOGRAPHY
    125.
    发明公开
    IMPROVED MASK FOR PHOTOLITHOGRAPHY 失效
    面具光刻。

    公开(公告)号:EP0620931A1

    公开(公告)日:1994-10-26

    申请号:EP93903571.0

    申请日:1993-01-15

    CPC classification number: G03F1/36 G03F7/70433 G03F7/70441

    Abstract: Est décrit un perfectionnement pour réduire les effets de proximité, consistant à ajouter, dans le motif de masque, des lignes minces appelées barres d'égalisation d'intensité. Ces barres d'égalisation ont pour fonction d'ajuster les gradients d'intensité des bords isolés du motif de masque, afin qu'ils correspondent aux gradients d'intensité des bords très rapprochés. Ces barres d'égalisation sont placées parallèlement aux bords isolés de telle manière que l'égalisation des gradients d'intensité s'effectue sur tous les bords isolés du motif de masque. En outre, les barres d'égalisation sont destinées à présenter une largeur notablement inférieure à la résolution de l'outil de sensibilisation. Par conséquent, lesdites barres qui sont présentes dans le motif de masque produisent des motifs de résist qui disparaissent complètement au dléveloppement lorsqu'une énergie de sensibilisation nominale est utilisée pendant l'exposition du photorésist.

    ARRAY ELEMENT RIGGING COMPONENT, SYSTEM AND METHOD
    130.
    发明公开
    ARRAY ELEMENT RIGGING COMPONENT, SYSTEM AND METHOD 审中-公开
    组件系统和方法进行组装数组元素

    公开(公告)号:EP2628311A1

    公开(公告)日:2013-08-21

    申请号:EP11831898.9

    申请日:2011-10-13

    CPC classification number: H04R1/026 H04R1/403 H04R27/00

    Abstract: Disclosed herein is a rigging component and method for connecting an array element in an array. The rigging component includes an elongate housing connectable to an array element; a connection link disposed within, and slidably extendable from, one end of the housing; a conduit extending into the housing from its opposite end, the conduit dimensioned to receive another connection link extending from an adjacent rigging component; and at least one latching device associated with the conduit for releasably retaining the other connection link within the conduit. Further disclosed is a system for connecting an array element in an array. The system comprises at least one rigging component having a connection link extendable to be locked at a single fixed distance and at least one rigging component having a connection link extendable to be locked at one of a plurality of fixed distances.

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