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    INFORMATION PROCESSOR
    123.
    发明专利
    INFORMATION PROCESSOR 失效

    公开(公告)号：JPH04149658A

    公开(公告)日：1992-05-22

    申请号：JP27121890

    申请日：1990-10-08

    Applicant: CANON KK

    Inventor： NAKAMURA TAKU ,  KADOSAWA TSUNEAKI ,  KOGA EIJI ,  OZAWA KUNITAKA ,  WATANABE HITOSHI

    IPC: G06F15/16 ,  G06F15/17 ,  G06F15/177

    Abstract: PURPOSE:To attain the transfer of data between processors by securing a constitution where each processor refers to the address information on the source data or the destination data shown by the operand of a data transfer instruction and decides the specific one of processors to which the referred data belongs. CONSTITUTION:The program stored in a memory 21 is sent to an instruction decoder 22 through a bus 28, and the interpreted result is sent to an instruction executing part 23 and executed there. Meanwhile each processor refers to the address information on the source data or the destination data shown by the operand of a data transfer instruction and decides the specific one of processors to which the source or destination data belongs. Thus the data can be transferred between processors.

    EXPOSURE DEVICE
    124.
    发明专利
    EXPOSURE DEVICE 失效

    公开(公告)号：JPH03187211A

    公开(公告)日：1991-08-15

    申请号：JP32586789

    申请日：1989-12-18

    Applicant: CANON KK

    Inventor： OTA HIROHISA ,  MORI MAKIKO ,  OZAWA KUNITAKA ,  UZAWA SHUNICHI ,  NOSE TETSUSHI

    IPC: G03F9/00 ,  H01L21/027 ,  H01L21/30

    Abstract: PURPOSE:To improve exposure accuracy by detecting AF set error from an ideal position of an exposure surface in advance and to correct AA detection value by AA detection error corresponding to the AF detection value. CONSTITUTION:A device is provided with an AA detection means to detect relative position relation between an exposure substrate 1 and an original plate 8 by position relation between an AA mark 201 on a substrate formed on the exposure substrate 1 and an AA mark 203 on the original plate 8 formed on the original plate; an AF detection means to detect position deviation from an ideal exposure plane of exposure object surface before AA detection; and a correction means to correct the AA detection value based on the AF detection value. Thereby, it is possible to correct the AA detection value in accordance with the AF detection value (AA detection gap) and to carry out AA more accurately, thereby improving exposure accuracy.

    MECHANISM CONTROLLER
    125.
    发明专利
    MECHANISM CONTROLLER 失效

    公开(公告)号：JPH0364195A

    公开(公告)日：1991-03-19

    申请号：JP19795689

    申请日：1989-08-01

    Applicant: CANON KK

    Inventor： MORI TETSUZO ,  UDA KOJI ,  OZAWA KUNITAKA ,  UZAWA SHUNICHI

    IPC: H04Q9/00 ,  H01L21/027

    Abstract: PURPOSE:To reduce quantity of wiring between a mechanism section and a control section by providing a communication means between the mechanism section and the control section. CONSTITUTION:A mechanism section 110 and a control section 109 are tied by communication means A, B. That is, the communication means A comprising a transmission section 103, a communication line 107 and a reception section 104 and the communication means B comprising a transmission section 105, a communication line 108 and a reception section 106 are provided, and the communication means A is used to send information from the mechanism section 110 to the control section 109 and the communication means B is used to send information from the control section 109 to the mechanism section 110. Thus, the information is sent and received without requiring lots of wirings between the mechanism section 110 and the control section 109.

    X-RAY EXPOSURE DEVICE
    126.
    发明专利
    X-RAY EXPOSURE DEVICE 失效

    公开(公告)号：JPH0353199A

    公开(公告)日：1991-03-07

    申请号：JP18608089

    申请日：1989-07-20

    Applicant: CANON KK

    Inventor： AMAMIYA MITSUAKI ,  KUROSAWA HIROSHI ,  UDA KOJI ,  OZAWA KUNITAKA ,  TERAJIMA SHIGERU ,  UZAWA SHUNICHI

    IPC: G01T1/29 ,  G21K5/00 ,  G21K5/04 ,  H01L21/027 ,  H01L21/30 ,  H05H13/04

    Abstract: PURPOSE:To efficiently perform exposure of high precision by controlling the exposure time based on measurement results of the orbiting electron current quantity measuring means of a synchrotron orbit radiation (SOR) ring and an X-ray intensity measuring means corresponding to the exposure area. CONSTITUTION:Electrons are supplies from an injector 10 to an SOR ring 1 with a shutter 7 closed and are accelerated to generate the radiation. Thereafter, an exposure intensity measuring instruction is outputted from a CPU 16, and an X-ray detector 6 is fed into the exposure area through an X-ray detector control part 14 by an X-ray detector driving part 12 to measure the intensity of X rays in the exposure area. The quantity of current of orbiting electrons is measured by an ammeter 17 simultaneously with measurement of the detector 6, and the measured current value is sent to the unit 16 through a signal processing part 18. The unit 16 calculates the intensity of X-ray for exposure based on the measured intensity of X rays. The exposure time is calculated and set in accordance with a set exposure and an X-ray mask 8 and a wafer 8 are aligned. Thereafter, an exposure instruction is issued to a shutter control part 15 by the unit 16 to start the exposure.

    ELECTRONIC CONTROLLER AND MANUFACTURE THEREOF
    128.
    发明专利
    ELECTRONIC CONTROLLER AND MANUFACTURE THEREOF 失效

    公开(公告)号：JPH02183361A

    公开(公告)日：1990-07-17

    申请号：JP213989

    申请日：1989-01-10

    Applicant: CANON KK

    Inventor： KADOSAWA TSUNEAKI ,  NAKAMURA TAKU ,  KOGA EIJI ,  HAGIWARA SATOSHI ,  KAWAI TOMOAKI ,  OZAWA KUNITAKA

    IPC: G06F15/16

    Abstract: PURPOSE:To improve the control efficiency of a whole multi-CPU by respectively storing a global variable to be most frequently accessed by the CPU, to which plural memories are connected. CONSTITUTION:Plural CPUs 12-14 shares the various types of control and plural memories 15-17 respectively store the global variable to be most frequently accessed by the connecting CPUs 12-14. Thus, the respective CPUs 12-14 can directly access the global variable, which is most frequently accessed by the CPU itself, from the memory of the CPU itself and the control efficiency of the whole multi-CPU is improved. When the global variable can not be directly accessed, the access is requested to the CPU, which can directly access the global variable, through a communication line 11. Thus, the CPU control is efficiently executed as a whole electronic controller.

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