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    Microelectromechanical valves including single crystalline material components
    121.
    发明授权
    Microelectromechanical valves including single crystalline material components 有权
    微电机阀包括单晶材料组分

    公开(公告)号：US06386507B2

    公开(公告)日：2002-05-14

    申请号：US09802260

    申请日：2001-03-08

    Applicant: Vijayakumar R. Dhuler ,  Mark David Walters

    Inventor： Vijayakumar R. Dhuler ,  Mark David Walters

    IPC: F16K3100

    CPC classification number: F15C5/00 ,  B81B3/0051 ,  B81B2201/031 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  B81C2203/031 ,  B81C2203/036 ,  F16K99/0001 ,  F16K99/0007 ,  F16K99/0009 ,  F16K99/0011 ,  F16K99/0036 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H2001/0042

    Abstract: A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate and a thermally actuated microactuator and associated components disposed on the substrate and formed as a unitary structure from a single crystalline material, wherein the associated components are actuated by the microactuator upon thermal actuation thereof. For example, the MEMS device may be a valve. As such, the valve may include at least one valve plate that is controllably brought into engagement with at least one valve opening in the microelectronic substrate by selective actuation of the microactuator. While the MEMS device can include various microactuators, the microactuator advantageously includes a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween. By heating the at least one arched beam of the microactuator, the arched beams will further arch such that the microactuator moves between a closed position in which the valve plate sealingly engages the valve opening and an open position in which the valve plate is at least partly disengaged from and does not seal the valve opening.

    Abstract translation: 提供了一种微电子机械（MEMS）装置，其包括微电子基板和热致动的微致动器以及设置在基板上并由单晶材料形成为单一结构的相关部件，其中相关部​​件由热致动器由微致动器致动 。 例如，MEMS器件可以是阀。 因此，阀可以包括至少一个阀板，该阀板通过选择性地致动微致动器而可控制地与微电子衬底中的至少一个阀开口接合。 虽然MEMS器件可以包括各种微致动器，微致动器有利地包括设置在基板上的一对间隔开的支撑件和在其间延伸的至少一个拱形梁。 通过加热微致动器的至少一个拱形梁，拱形梁将进一步拱起，使得微致动器在关闭位置之间移动，在该关闭位置中阀板密封地接合阀开口和打开位置，在该位置阀板至少部分地 与阀开口脱离并不密封。

    Microelectromechanical valves including single crystalline material components
    123.
    发明申请
    Microelectromechanical valves including single crystalline material components 有权
    微电机阀包括单晶材料组分

    公开(公告)号：US20010017358A1

    公开(公告)日：2001-08-30

    申请号：US09802260

    申请日：2001-03-08

    Inventor： Vijayakumar R. Dhuler ,  Mark David Walters

    IPC: F16K031/02

    CPC classification number: F15C5/00 ,  B81B3/0051 ,  B81B2201/031 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  B81C2203/031 ,  B81C2203/036 ,  F16K99/0001 ,  F16K99/0007 ,  F16K99/0009 ,  F16K99/0011 ,  F16K99/0036 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H2001/0042

    Abstract: A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate and a thermally actuated microactuator and associated components disposed on the substrate and formed as a unitary structure from a single crystalline material, wherein the associated components are actuated by the microactuator upon thermal actuation thereof. For example, the MEMS device may be a valve. As such, the valve may include at least one valve plate that is controllably brought into engagement with at least one valve opening in the microelectronic substrate by selective actuation of the microactuator. While the MEMS device can include various microactuators, the microactuator advantageously includes a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween. By heating the at least one arched beam of the microactuator, the arched beams will further arch such that the microactuator moves between a closed position in which the valve plate sealingly engages the valve opening and an open position in which the valve plate is at least partly disengaged from and does not seal the valve opening. The microactuator may further include metallization traces on distal portions of the arched beams to constrain the thermally actuated regions of arched beams to medial portions thereof. The valve may also include a latch for maintaining the valve plate in a desired position without requiring continuous energy input to the microactuator. An advantageous method for fabricating a MEMS valve having unitary structure single crystalline components is also provided.

    Abstract translation: 提供了一种微电子机械（MEMS）装置，其包括微电子基板和热致动的微致动器以及设置在基板上并由单晶材料形成为单一结构的相关部件，其中相关部​​件由热致动器由微致动器致动 。 例如，MEMS器件可以是阀。 因此，阀可以包括至少一个阀板，该阀板通过选择性地致动微致动器而可控制地与微电子衬底中的至少一个阀开口接合。 虽然MEMS器件可以包括各种微致动器，微致动器有利地包括设置在基板上的一对间隔开的支撑件和在其间延伸的至少一个拱形梁。 通过加热微致动器的至少一个拱形梁，拱形梁将进一步拱起，使得微致动器在关闭位置之间移动，在该关闭位置中阀板密封地接合阀开口和打开位置，在该位置阀板至少部分地 与阀开口脱离并不密封。 微致动器还可以包括在拱形梁的远侧部分上的金属化迹线，以将拱形梁的热致动区域约束到其中间部分。 阀还可以包括用于将阀板保持在期望位置的闩锁，而不需要连续的能量输入到微致动器。 还提供了一种用于制造具有单一结构单晶组件的MEMS阀的有利方法。

    In-plane MEMS thermal actuator and associated fabrication methods
    124.
    发明授权
    In-plane MEMS thermal actuator and associated fabrication methods 有权
    平面MEMS热致动器

    公开(公告)号：US06211598B1

    公开(公告)日：2001-04-03

    申请号：US09395068

    申请日：1999-09-13

    Applicant: Vijayakumar R. Dhuler ,  Edward Hill ,  Allen Cowen

    Inventor： Vijayakumar R. Dhuler ,  Edward Hill ,  Allen Cowen

    IPC: H02N1000

    CPC classification number: F16K99/0001 ,  B81B3/0024 ,  B81B2201/031 ,  F03G7/06 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0036 ,  F16K99/0042 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H1/0036 ,  H01H37/32 ,  H01H2037/008 ,  Y10S310/06

    Abstract: A MEMS thermal actuator device is provided that is capable of providing linear displacement in a plane generally parallel to the surface of a substrate. Additionally, the MEMS thermal actuator may provide for a self-contained heating mechanism that allows for the thermal actuator to be actuated using lower power consumption and lower operating temperatures. The MEMS thermal actuator includes a microelectronic substrate having a first surface and at least one anchor structure affixed to the first surface. A composite beam extends from the anchor(s) and overlies the first surface of the substrate. The composite beam is adapted for thermal actuation, such that it will controllably deflect along a predetermined path that extends substantially parallel to the first surface of the microelectronic substrate.

    Abstract translation: 提供了一种MEMS热致动器装置，其能够在大致平行于衬底的表面的平面中提供线性位移。 此外，MEMS热致动器可以提供独立的加热机构，其允许使用较低的功率消耗和较低的工作温度来致动热致动器。 MEMS热致动器包括具有固定到第一表面的第一表面和至少一个锚定结构的微电子衬底。 复合梁从锚固体延伸并且覆盖在基底的第一表面上。 组合梁适于热致动，使得其可沿着基本上平行于微电子衬底的第一表面延伸的预定路径可控地偏转。

    RECONFIGURABLE LITHOGRAPHIC STRUCTURES
    126.
    发明申请
    RECONFIGURABLE LITHOGRAPHIC STRUCTURES 审中-公开
    可重构光刻结构

    公开(公告)号：WO2009111737A1

    公开(公告)日：2009-09-11

    申请号：PCT/US2009/036391

    申请日：2009-03-06

    Applicant: THE JOHNS HOPKINS UNIVERSITY ,  GRACIAS, David, Hugo ,  LEONG, Timothy, Gar-ming

    Inventor： GRACIAS, David, Hugo ,  LEONG, Timothy, Gar-ming

    IPC: B81C1/00 ,  B81C3/00

    CPC classification number: B25J7/00 ,  B81B3/0024 ,  B81B3/0032 ,  B81B2201/031 ,  B81C99/002 ,  Y10T436/11

    Abstract: A lithographically structured device has an actuation layer and a control layer operatively connected to the actuation layer. The actuation layer includes a stress layer and a neutral layer that is constructed of materials and with a structure such that it stores torsional energy upon being constructed. The control layer is constructed to maintain the actuation layer substantially in a first configuration in a local environmental condition and is responsive to a change in the local environmental condition such that it permits a release of stored torsional energy to cause a change in a structural configuration of the lithographically structured device to a second configuration, the control layer thereby providing a trigger mechanism. The lithographically structured device has a maximum dimension that is less than about 10 mm when it is in the second configuration.

    Abstract translation: 光刻结构的器件具有可操作地连接到致动层的致动层和控制层。 致动层包括应力层和中性层，其由材料构成，并具有在构造时存储扭转能的结构。 控制层被构造成在局部环境条件下将致动层基本上保持在第一构型中并且响应于局部环境条件的改变，使得其允许释放存储的扭转能量以引起结构构造的变化 光刻结构的设备到第二配置，控制层由此提供触发机构。 光刻结构的装置在其处于第二构型时的最大尺寸小于约10mm。

    MEMS ACTUATOR
    127.
    发明申请
    MEMS ACTUATOR 审中-公开
    MEMS致动器

    公开(公告)号：WO2009045346A2

    公开(公告)日：2009-04-09

    申请号：PCT/US2008/011212

    申请日：2008-09-26

    Applicant: LUCENT TECHNOLOGIES INC. ,  AKSYUK, Vladimir, Anatolyevich ,  PARDO, Flavio ,  SIMON, Maria, Elina

    Inventor： AKSYUK, Vladimir, Anatolyevich ,  PARDO, Flavio ,  SIMON, Maria, Elina

    IPC: B81B3/00

    CPC classification number: H01H1/0036 ,  B81B3/0024 ,  B81B2201/031 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

    Abstract: Apparatus including substrate, pusher assembly, and flexor assembly adjacent to pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends of hot and cold pusher arms are anchored over substrate. Second ends of hot and cold pusher arms are coupled together and suspended for lateral displacement over substrate. Flexor assembly includes flexor arm, and conductor having actuator contact. First end of flexor arm is anchored over substrate. Pusher assembly is configured for causing lateral displacement of second end of flexor arm and of actuator contact over the substrate. Method includes providing apparatus and causing pusher assembly to laterally displace second end of flexor arm and actuator contact over substrate.

    Abstract translation: 装置包括邻近推动器组件的衬底，推动器组件和屈肌组件。 推杆组件包括热推和冷推臂。 热推和冷推臂的第一端固定在基板上。 热推动臂和冷推动臂的第二端联接在一起并悬挂以在基底上横向移位。 屈肌组件包括屈肌臂和具有致动器接触的导体。 屈肌臂的第一端锚定在基底上。 推动器组件被构造成用于引起屈肌臂的第二端和致动器在衬底上的接触的横向位移。 方法包括提供装置并使推动器组件横向移动屈肌臂的第二端和致动器接触在衬底上。

    MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO- AXIS FORCE SENSORS
    128.
    发明申请
    MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO- AXIS FORCE SENSORS 审中-公开
    具有双轴力传感器的基于MEMS的微型和纳米拖板

    公开(公告)号：WO2007147239A1

    公开(公告)日：2007-12-27

    申请号：PCT/CA2007/001090

    申请日：2007-06-21

    Applicant: SUN, Yu ,  KIM, Keekyoung

    Inventor： SUN, Yu ,  KIM, Keekyoung

    IPC: B81C1/00 ,  B81B3/00 ,  B82B3/00

    CPC classification number: B81C99/002 ,  B25J9/104 ,  B81B2201/0292 ,  B81B2201/031 ,  B81B2201/033

    Abstract: The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.

    Abstract translation: 本发明涉及一种微抓爪的设计和微细加工方法，其能够抓住大范围尺寸和双轴力感测能力的微型和纳米物体。 夹持运动由一个或多个电热致动器产生。 沿x和y方向的集成力传感器可以测量夹紧力以及沿着法向方向施加在微夹臂末端的力，并且分辨率低至纳摩顿。 微加工方法可实现致动器和力传感器的整体集成。

    SILICON MICROMACHINED OPTICAL DEVICE
    129.
    发明申请
    SILICON MICROMACHINED OPTICAL DEVICE 审中-公开
    硅微孔光学器件

    公开(公告)号：WO2002088804A1

    公开(公告)日：2002-11-07

    申请号：PCT/US2002/011095

    申请日：2002-04-05

    Applicant: UMACHINES, INC.

    Inventor： CHIU, Chen-Wei ,  AVAKIAN, Aramais ,  TSAO, Tom ,  JIANG, Fukang ,  DICKSON, Jeff ,  TAI, Yu-Chong

    IPC: G02B6/26

    CPC classification number: G02B6/3566 ,  B81B3/0051 ,  B81B2201/031 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/058 ,  B81C1/00214 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/3594

    Abstract: An apparatus at least partially intercepts a plurality of light beams propagating along a respective plurality of beam paths. The apparatus includes a single crystal silicon substrate (20) and an array including a plurality of modules. Each module (32) includes a reflector (40) comprising single crystal silicon and a reflector surface (42) lying in a reflector plane (44) substantially perpendicular to the substrate surface. Each module further includes a reflector support which mounts the reflector to move substantially within the reflector plane with a displacement component along the surface normal direction of the substrate surface. Each module further includes a reflector driver responsive to electrical current to selectively move the reflector between a first position and a second position.

    Abstract translation: 一种装置至少部分截取沿着相应的多个光束路径传播的多个光束。 该装置包括单晶硅衬底（20）和包括多个模块的阵列。 每个模块（32）包括反射器（40），其包括单晶硅和位于基本上垂直于衬底表面的反射器平面（44）中的反射器表面（42）。 每个模块还包括反射器支撑件，其将反射器安装成基本上在反射器平面内，沿着基板表面的法线方向具有位移分量。 每个模块还包括响应于电流的反射器驱动器，以在第一位置和第二位置之间选择性地移动反射器。

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