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公开(公告)号：US08441639B2
公开(公告)日：2013-05-14
申请号：US12872988
申请日：2010-08-31
Applicant: Daniel Kandel , Vladimir Levinski , Alexander Svizher , Joel Seligson , Andrew Hill , Ohad Bachar , Amnon Manassen , Yung-Ho Alex Chuang , Ilan Sela , Moshe Markowitz , Daria Negri , Efraim Rotem
Inventor： Daniel Kandel , Vladimir Levinski , Alexander Svizher , Joel Seligson , Andrew Hill , Ohad Bachar , Amnon Manassen , Yung-Ho Alex Chuang , Ilan Sela , Moshe Markowitz , Daria Negri , Efraim Rotem
CPC classification number: G01N21/47 , G01B11/02 , G01B11/0641 , G01B2210/56 , G01N21/211 , G01N21/9501 , G01N21/956 , G01N2021/4792 , G01N2201/06113 , G01N2201/105 , G03F7/70625 , G03F7/70633
Abstract: Various metrology systems and methods are provided.
Abstract translation: 提供了各种计量系统和方法。
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公开(公告)号：US07920262B2
公开(公告)日：2011-04-05
申请号：US12211918
申请日：2008-09-17
Applicant: Gorden W. Videen , Karri Olavi Muinonen
Inventor： Gorden W. Videen , Karri Olavi Muinonen
IPC: G01N21/00
CPC classification number: G01N21/21 , G01N15/0205 , G01N21/47 , G01N21/53 , G01N21/9501 , G01N2015/03 , G01N2021/4709 , G01N2201/0697 , G01N2201/105
Abstract: A system for measuring backscattered light from a sample is given. Light is output from a light source towards a rotating mirror, and then reflected by the rotating mirror towards the sample. The sample reflects backscattered light back towards the rotating mirror, which, having moved during the time it took for the light to propagate from the mirror to the sample and back, reflects the backscattered light to a detector located at a physical separation from the light source. The detected backscattered light may be analyzed to determine various properties of the sample.
Abstract translation: 给出了用于测量来自样品的反向散射光的系统。 光从光源向旋转镜输出，然后由旋转镜向样品反射。 样品将反向散射光反射回旋转镜，旋转镜已经在光从镜子传播到样品和背部所花费的时间内移动，将反向散射光反射到位于与光源物理分离的检测器 。 可以分析检测到的反向散射光以确定样品的各种性质。
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公开(公告)号：US20100315629A1
公开(公告)日：2010-12-16
申请号：US12724192
申请日：2010-03-15
Applicant: Kevin J. Knopp , Robert L. Green , Brendon D. Tower , Christopher D. Brown , Gregory H. Vander Rhodes
Inventor： Kevin J. Knopp , Robert L. Green , Brendon D. Tower , Christopher D. Brown , Gregory H. Vander Rhodes
CPC classification number: G01N21/17 , G01J3/02 , G01J3/0232 , G01J3/0262 , G01J3/0264 , G01J3/0272 , G01J3/0289 , G01J3/0291 , G01J3/42 , G01J3/44 , G01J3/4412 , G01N21/47 , G01N21/4738 , G01N21/55 , G01N21/59 , G01N21/65 , G01N2021/3595 , G01N2201/0221 , G01N2201/0612 , G01N2201/062 , G01N2201/105 , G01N2201/125
Abstract: Disclosed are apparatus, kits, methods, and systems that include a radiation source configured to direct radiation to a sample; a detector configured to measure radiation from the sample; an electronic processor configured to determine infotmation about the sample based on the measured radiation; a housing enclosing the source, the detector, and the electronic processor, the housing having a hand-held form factor; an arm configured to maintain a separation between the sample and the housing, the arm including a first end configured to connect to the housing and a second end configured to contact the sample; and a layer positioned on the second end of the arm, the layer being configured to contact the sample and to transmit at least a portion of the radiation from the sample to the detector.
Abstract translation: 公开了包括被配置为将辐射引导到样品的辐射源的装置，试剂盒，方法和系统; 检测器，被配置为测量来自样品的辐射; 配置为基于所测量的辐射来确定关于样本的信息的电子处理器; 包围所述源，所述检测器和所述电子处理器的外壳，所述外壳具有手持外形尺寸; 臂被配置为保持样品和壳体之间的分离，所述臂包括构造成连接到壳体的第一端和被配置为接触样品的第二端; 以及位于所述臂的第二端上的层，所述层被配置为接触所述样品并将所述辐射的至少一部分从所述样品透射到所述检测器。
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公开(公告)号：US20100110420A1
公开(公告)日：2010-05-06
申请号：US12604052
申请日：2009-10-22
Applicant: Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
Inventor： Neil Judell , Ian Thomas Kohl , Songping Gao , Richard Earl Bills
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变极化，偏振继电器组件被布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。 它们还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的变化来改变输出狭缝的宽度。
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公开(公告)号：US20100110419A1
公开(公告)日：2010-05-06
申请号：US12570527
申请日：2009-09-30
Applicant: Richard Earl Bills , Neil Judell , Klaus Reinhard Freischlad , James Peter McNiven
Inventor： Richard Earl Bills , Neil Judell , Klaus Reinhard Freischlad , James Peter McNiven
IPC: G01N21/88
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.
Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 光学收集和检测系统在前四分之一区域中具有用于收集从工件表面反射的光的光通道组件，以及用于收集从表面散射的光的前收集器和翼收集器，以大大提高测量能力 系统。 光通道组件具有可切换的边缘排除掩模和用于改进反射光检测的反射光检测系统。
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Patent Agency Ranking
126.发明授权公开(公告)号：US07522287B2
公开(公告)日：2009-04-21
申请号：US11350954
申请日：2006-02-10
Applicant: Eiji Takahashi , Hiroyuki Takamatsu , Masato Kannaka , Naokazu Sakoda , Tsutomu Morimoto
Inventor： Eiji Takahashi , Hiroyuki Takamatsu , Masato Kannaka , Naokazu Sakoda , Tsutomu Morimoto
CPC classification number: G01N21/171 , G01N21/031 , G01N2021/1712 , G01N2021/178 , G01N2201/105
Abstract: A liquid sample is irradiated with excitation light and measurement light, and a measurement position at which a traveling path of the measurement light passes through an excitation section of the excitation light in the sample is changed while the sample is being irradiated with the excitation light and the measurement light. Then, the phase change of the measurement light is measured for each measurement by optical interferometry on the basis of the measurement light after the measurement light passes through the sample. The measurement position is changed by, for example, scanning the excitation light, moving the sample, moving a lens that collects the excitation light in the sample so as to change the light-collecting position (focal position) in the sample, etc.
Abstract translation: 用激发光和测量光照射液体样品，并且在样品被激发光照射的同时改变测量光的行进路径通过样品中的激发光的激发部分的测量位置，以及 测量灯。 然后，基于测量光通过样品后的测量光，通过光学干涉测量对每次测量测量测量光的相位变化。 通过例如扫描激发光，移动样品，移动收集样品中的激发光的透镜来改变测量位置，以便改变样品中的聚光位置（焦点位置）等。
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127.发明申请SYSTEM AND METHOD FOR CONTROLLING LIGHT SCATTERED FROM A WORKPIECE SURFACE IN A SURFACE INSPECTION SYSTEM 有权用于控制表面检查系统中工件表面散射的光的系统和方法公开(公告)号：US20080304057A1
公开(公告)日：2008-12-11
申请号：US12142850
申请日：2008-06-20
Applicant: Richard Earl Bills , James Peter McNiven
Inventor： Richard Earl Bills , James Peter McNiven
IPC: G01N21/88
CPC classification number: G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4738 , G01N21/474 , G01N21/55 , G01N21/88 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/4707 , G01N2021/4711 , G01N2021/4792 , G01N2021/556 , G01N2021/8809 , G01N2021/8848 , G01N2021/8864 , G01N2021/8877 , G01N2021/8896 , G01N2201/0612 , G01N2201/105 , G06T7/0004 , G06T2207/30148 , Y10T29/49826
Abstract: In one embodiment, a surface analyzer system comprises a radiation targeting assembly to target a radiation beam onto a surface; and a scattered radiation collecting assembly that collects radiation scattered from the surface. The radiation targeting assembly generates primary and secondary beams. Data collected from the reflections of the primary and secondary beams may be used in a dynamic range extension routine, alone or in combination with a power attenuation routine.
Abstract translation: 在一个实施例中，表面分析器系统包括将辐射束对准到表面上的辐射瞄准组件; 以及收集从表面散射的辐射的散射的辐射收集组件。 辐射瞄准组件产生主光束和次光束。 从主波束和次波束的反射中收集的数据可以单独使用或者与功率衰减程序组合在动态范围扩展程序中使用。
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128.发明申请公开(公告)号：US20060181708A1
公开(公告)日：2006-08-17
申请号：US11350954
申请日：2006-02-10
Applicant: Eiji Takahashi , Hiroyuki Takamatsu , Masato Kannaka , Naokazu Sakoda , Tsutomu Morimoto
Inventor： Eiji Takahashi , Hiroyuki Takamatsu , Masato Kannaka , Naokazu Sakoda , Tsutomu Morimoto
IPC: G01N21/59
CPC classification number: G01N21/171 , G01N21/031 , G01N2021/1712 , G01N2021/178 , G01N2201/105
Abstract: A liquid sample is irradiated with excitation light and measurement light, and a measurement position at which a traveling path of the measurement light passes through an excitation section of the excitation light in the sample is changed while the sample is being irradiated with the excitation light and the measurement light. Then, the phase change of the measurement light is measured for each measurement by optical interferometry on the basis of the measurement light after the measurement light passes through the sample. The measurement position is changed by, for example, scanning the excitation light, moving the sample, moving a lens that collects the excitation light in the sample so as to change the light-collecting position (focal position) in the sample, etc.
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129.发明授权公开(公告)号：US07034270B2
公开(公告)日：2006-04-25
申请号：US10798013
申请日：2004-03-11
Applicant: Hiroshi Sasaki
Inventor： Hiroshi Sasaki
IPC: G02B7/04
CPC classification number: G01N21/6458 , G01N2021/1774 , G01N2021/3137 , G01N2021/3174 , G01N2021/6417 , G01N2021/6471 , G01N2201/06113 , G01N2201/067 , G01N2201/105 , G02B21/0032 , G02B21/16
Abstract: In case of irradiating a sample with laser beam, dispersing light emitted from the sample to a spectrum, and fetching and detecting from a wavelength band extraction portion light in at least one band area from the dispersed spectrum, when at least one of a plurality of optical elements arranged between the sample and the dispersive element is switched, a positional relationship between the wavelength band extraction portion and a spectrum image formation position which is displaced in a dispersion direction due to a change in angle of light entering the dispersive element.
Abstract translation: 在用激光束照射样品的情况下，将从样品发射的光分散到光谱中，并且从波长带提取部分中获取并检测来自分散光谱的至少一个带区域中的光，当多个 布置在样品和分散元件之间的光学元件被切换，波长带提取部分与由于进入分散元件的光的角度的变化而在色散方向上移位的光谱图像形成位置之间的位置关系。
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公开(公告)号：JP2018523133A
公开(公告)日：2018-08-16
申请号：JP2018510315
申请日：2016-05-04
Applicant: ケーエルエー−テンカー コーポレイション
Inventor： サリバン ジェミー , チュリン エフゲニー
IPC: G01B11/06 , H01L21/66 , G02B3/00 , G02B5/18 , G01N21/956
CPC classification number: G01N21/8806 , G01N21/9501 , G01N21/956 , G01N21/95607 , G01N2021/8848 , G01N2201/0635 , G01N2201/104 , G01N2201/105 , G01N2201/106 , G02B21/002 , G02B21/006 , G02B21/06 , G02B26/101 , G02B27/0905 , G02B27/0944 , G02B27/1086 , G02B27/123 , G02B27/425 , G02F1/33
Abstract: 斜角マルチビームスポット走査ウェハ検査システムにおいて複数のビームラインを生成するシステムは、照射ビームを走査するように構成されたビーム走査装置と、サンプルの表面に対して斜角で配向し、光軸がサンプル上で第1の走査方向と垂直な対物レンズと、対物レンズとビーム走査装置との間に位置決めされた1つ以上の光学素子とを備える。1つ以上の光学素子は、ビームを2本以上のオフセットビームに分割して、これら2本以上のオフセットビームが第1の方向と垂直な少なくとも第2の方向に分離されるようにする。さらに、1つ以上の光学素子は、2本以上のオフセットビームの位相特性を修正して、走査中に、2本以上のオフセットビームがサンプル上で同時に焦点が合うようにする。
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