公开(公告)号：EP3028021A2

公开(公告)日：2016-06-08

申请号：EP14744323.8

申请日：2014-07-25

Applicant: Pyreos Ltd.

Inventor： GIEBELER, Carsten ,  CONWAY, Neil

IPC: G01J5/34

CPC classification number: H01L31/1884 ,  G01J1/44 ,  G01J5/023 ,  G01J5/024 ,  G01J5/046 ,  G01J5/34 ,  G01J2005/345 ,  H01L37/02 ,  H01L37/025 ,  H01L41/316

Abstract: The invention relates to a method for producing a microsystem (1) having pixels, comprising the following steps: providing a silicon wafer; producing a thermal silicon oxide layer on the surface of the silicon wafer as a base layer (5) having a thickness between 200 nm and 1000 nm by oxidizing the silicon wafer; producing a thin silicon oxide layer directly on the base layer (5) as a substrate layer (6) having a thickness of 100 nm to 700 nm by means of a thermal deposition method; producing a platinum layer directly on the substrate layer (6) by means of a thermal deposition method, which platinum layer has a thickness of 40 nm to 200 nm, whereby an intermediate product comprising the silicon wafer, the base layer (5), the substrate layer (6), and the platinum layer is produced; cooling the intermediate product to room temperature; structuring the platinum layer in a pixel-like manner by removing superfluous areas of the platinum layer, whereby bottom electrodes (8, 12) of the pixels (7, 8) are formed in shape of pixels on the substrate layer (5) by the remaining areas of the platinum layer; removing material on the side of the silicon wafer facing away from the base layer (5), such that a frame (3) remains and a membrane (4) formed by the base layer (5) and the substrate layer (6) is tensioned by the frame (3); finishing the microsystem (1).

公开(公告)号：EP2205950B1

公开(公告)日：2014-01-15

申请号：EP08802708.1

申请日：2008-09-29

Applicant: Pyreos Ltd.

Inventor： GIEBELER, Carsten ,  RETTIG, Uwe ,  SCHREITER, Matthias

IPC: G01J5/10 ,  G01J5/12 ,  G01J5/34 ,  H01L27/16 ,  H01L31/101 ,  H01L37/00

CPC classification number: H01L31/101 ,  G01J5/02 ,  G01J5/024 ,  G01J5/0245 ,  G01J5/04 ,  G01J5/046 ,  G01J5/06 ,  G01J5/34 ,  H01L37/02 ,  Y10T29/49007

公开(公告)号：EP2205950A1

公开(公告)日：2010-07-14

申请号：EP08802708.1

申请日：2008-09-29

Applicant: Pyreos Ltd.

Inventor： GIEBELER, Carsten ,  RETTIG, Uwe ,  SCHREITER, Matthias

IPC: G01J5/10 ,  G01J5/12 ,  G01J5/34 ,  H01L27/16 ,  H01L31/101 ,  H01L37/00

CPC classification number: H01L31/101 ,  G01J5/02 ,  G01J5/024 ,  G01J5/0245 ,  G01J5/04 ,  G01J5/046 ,  G01J5/06 ,  G01J5/34 ,  H01L37/02 ,  Y10T29/49007

Abstract: The invention relates to a device (1) for detecting heat radiation, comprising a membrane (101) and at least two detector elements (11), both of which are configured to convert heat radiation to an electrical signal, said detector elements being attached to the membrane and located adjacent to one another, wherein at least one heat dissipation path (104) is provided on the side of the membrane facing the detector elements or the side of the membrane facing away from the detector elements, said heat dissipation path having a greater heat conducting capacity than the membrane and being connected to the detector elements in a heat-conductive manner via the membrane, such that heat from the detector elements may be dissipated by the heat dissipation path, whereby the response time of the detector elements is high, and wherein at least one heat barrier (105) is provided that is integrated into the membrane, said heat barrier having a lower level of heat conductivity than the membrane and extending between the detector elements, preventing the conduction of heat in the membrane from one detector element to the other detector element, whereby the crosstalk between the detector elements is low.

公开(公告)号：EP3928065A1

公开(公告)日：2021-12-29

申请号：EP20708043.3

申请日：2020-02-17

Applicant: Pyreos Ltd.

Inventor： PHAIR, John ,  ECKART, Lutz

IPC: G01J1/42 ,  G01J5/04 ,  G01J5/34

公开(公告)号：EP3587617B1

公开(公告)日：2020-08-05

申请号：EP19190316.0

申请日：2013-06-12

Applicant: Pyreos Ltd.

Inventor： GIEBELER, Carsten ,  SCHREITER, Matthias ,  STEINKOPFF, Thorsten ,  WERSING, Wolfram

IPC: C23C14/00 ,  C23C14/08 ,  C23C14/02 ,  G01J5/34 ,  H01L37/02 ,  H01L37/04 ,  H01L41/316

公开(公告)号：EP2517247B1

公开(公告)日：2018-09-26

申请号：EP10796386.0

申请日：2010-12-21

Applicant: Pyreos Ltd.

Inventor： LAIRD, Ron ,  FREEBORN, Scott ,  STEWART, Archie, Shaw

IPC: H01L27/146 ,  H01L23/00 ,  H05K3/34 ,  H01L31/101 ,  H01L31/18 ,  H01L31/0203

CPC classification number: H01L27/1465 ,  H01L24/48 ,  H01L27/14618 ,  H01L27/14636 ,  H01L27/14649 ,  H01L27/1469 ,  H01L31/0203 ,  H01L31/101 ,  H01L31/18 ,  H01L2224/48 ,  H01L2924/00014 ,  H01L2924/15312 ,  H05K3/34 ,  H05K3/341 ,  H05K2201/09036 ,  H05K2201/10318 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

公开(公告)号：EP3209195A1

公开(公告)日：2017-08-30

申请号：EP15784697.3

申请日：2015-10-23

Applicant: Pyreos Ltd.

Inventor： GIEBELER, Carsten ,  VARGAS LLANAS, Hugo

IPC: A61B5/00 ,  G01N21/552

CPC classification number: A61B5/681 ,  A61B5/0015 ,  A61B5/0075 ,  A61B5/443 ,  A61B5/4875 ,  A61B5/6824 ,  A61B5/6831 ,  G01N21/552

Abstract: The invention relates to a skin measuring device for the spectroscopic measurement of the skin of a body part. The skin measuring device is provided with a press-on frame (3) which has a window (5) and with an ATR infrared spectrometer (8) which has an ATR crystal (9) that is secured to the press-on frame (3) and comprises a sample carrier (10). The sample carrier is arranged in the window (5) and is thus engaged with the press-on frame (3) and faces the same direction as the flat face of the press-on frame (3). This skin measuring device is also provided with a surrounding means (6) which is designed to surround the body part and thereby support the skin measuring device (1) on the body part. By means of the surrounding means (6), the surface of the flat face of the press-on frame (3) is pressed against the skin of the body part in a comfortably wearable manner when the skin measuring device (1) is worn, whereby the sample carrier (10) is contacted by the skin, and thus the spectroscopic measurement of the skin can be carried out by the ATR spectrometer (8).

Abstract translation: 提供了用于对身体部位的皮肤进行分光测量的皮肤测量设备。 皮肤测量装置具有带窗户和平坦面的按压框架。 该皮肤测量装置具有ATR红外光谱仪，该ATR红外光谱仪包括固定到压紧框架上的ATR晶体，并具有布置在窗口中并且面向与按压平面相同的方向的样品台 帧。 包围装置围绕身体部位，并由此支撑身体部位上的皮肤测量装置。 压在框架的平坦面的表面在一个舒适地穿戴式的方式压靠在本体盘的皮肤由环绕装置时，皮肤测量装置被佩戴，使得样品台是在与皮肤分光接触 由ATR光谱仪测量。

公开(公告)号：EP3005564A1

公开(公告)日：2016-04-13

申请号：EP14725696.0

申请日：2014-05-22

Applicant: Pyreos Ltd.

Inventor： GIEBELER, Carsten ,  BROWN, Spyros ,  CHAMBERLAIN, Tim ,  HURWITZ, Jonathan Ephraim David

IPC: H03K17/945 ,  G06F3/01 ,  G06F3/03

CPC classification number: G06F3/017 ,  G06F3/012 ,  G06F3/0308 ,  G06F3/041 ,  H03K17/943 ,  H03K17/945 ,  H03K2217/94106 ,  H03K2217/94112

Abstract: A switch actuation system (100) for actuating a switch (103) using four possible types (111 to 114) of non-tactile translational gesture to be executed with a heat-emitting part (115), comprising: a gesture sensor (1) configured to detect heat emitted by the part (115), using at least four adjacently arranged pixels (21 to 24), and for each pixel (21 to 24), each of which contains a thin film of pyroelectric material, to emit a signal (51 to 54) with a signal excursion (58) that corresponds to the temporal variation in the intensity of the heat detected by the thin films in the pixels (21, 22, 23, 24); a signal analysis unit (101) by means of which the execution of one of the types (111 to 114) of translational gesture can be determined from the temporal sequence of signal excursions (58); and an actuator (104) which is controlled by the signal analysis unit (101) and actuates the switch (103) when the execution of one of the types (111 to 114) of translational gesture is detected; wherein four of the pixels (21 to 24) are disposed in respective corners of a convex quadrilateral (11), one diagonal (12) of which is substantially parallel to the longitudinal direction (31) and the other diagonal (13) of which is substantially parallel to the transverse direction (32).

公开(公告)号：EP2356414A1

公开(公告)日：2011-08-17

申请号：EP09752758.4

申请日：2009-09-29

Applicant: Pyreos Ltd.

Inventor： GIEBELER, Carsten

IPC: G01J5/00 ,  G01J5/04 ,  G01J5/08 ,  G01J5/10

CPC classification number: G01J5/0014 ,  G01J5/04 ,  G01J5/045 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0846 ,  G01J5/0862 ,  G01J5/10

Abstract: The invention relates to an infrared light detector that comprises a first substrate (2), which comprises a sensor chip (8) having an irradiation surface (9) that can be irradiated with infrared light which can be converted into an electrical signal by the sensor chip, and a second substrate (3), which comprises a window (10) that is arranged directly adjacent to the irradiation surface and is provided to remove infrared light of a predefined wavelength, wherein the dimensions of the window and the distance (12) thereof to the irradiation surface are dimensioned in such a way that the infrared light allowed through by the window completely hits the sensor chip.

公开(公告)号：EP2223343A1

公开(公告)日：2010-09-01

申请号：EP08801500.3

申请日：2008-07-30

Applicant: Pyreos Ltd.

Inventor： WRIGHT, Jeffrey

IPC: H01L31/0203 ,  G01J5/04

CPC classification number: G01J5/04 ,  G01J5/0285 ,  G01J5/045 ,  H01L27/14618 ,  H01L2924/0002 ,  H01L2924/00

Abstract: The invention relates to an apparatus for detecting thermal radiation, having a substrate, a protective housing which is fitted on the substrate and which has an electrically conductive material and having a top which faces away from the substrate and contains an aperture, and a stack, fitted on the substrate inside the protective housing, with at least one detector support having at least one thermal detector element for converting the thermal radiation into an electrical signal, at least one circuit carrier having at least one read circuit for reading the electrical signal, and at least one cover for covering the detector element, wherein the detector support is arranged between the circuit carrier and the cover, the detector support and the cover are arranged on one another such that the detector element of the detector support and the cover have at least one first stack cavity of the stack between them, said stack cavity being bounded by the detector support and by the cover, the circuit carrier and the detector support are arranged on one another such that the detector support and the circuit carrier have at least one second stack cavity of the stack between them, said second stack cavity being bounded by the circuit carrier and by the detector support, and the first stack cavity and/or the second stack cavity are evacuated or can be evacuated, and wherein the stack has a stack top which faces the substrate and by means of which the stack engages with the aperture, so that the stack top is accessible from outside the protective housing. The apparatus can be used in motion sensors, presence sensors and thermal image cameras.