公开(公告)号：EP2829512B1

公开(公告)日：2018-03-07

申请号：EP14177859.7

申请日：2014-07-21

Applicant: Atlantic Inertial Systems Limited

Inventor： Hawke, Tracey ,  Venables, Mark ,  Sturland, Ian ,  Eley, Rebecka

IPC: B81C1/00

CPC classification number: B81C1/00531 ,  B81B3/0064 ,  B81B2201/033 ,  B81B2203/033 ,  B81C1/00388 ,  B81C1/00619 ,  B81C2201/0112 ,  H01L21/3065 ,  H01L21/308

Abstract: A method of reactive ion etching a substrate 46 to form at least a first and a second etched feature (42, 44) is disclosed. The first etched feature (42) has a greater aspect ratio (depth:width) than the second etched feature (44). In a first etching stage the substrate (46) is etched so as to etch only said first feature (42) to a predetermined depth. Thereafter in a second etching stage, the substrate (46) is etched so as to etch both said first and said second features (42, 44) to a respective depth. A mask (40) may be applied to define apertures corresponding in shape to the features (42, 44). The region of the substrate (46) in which the second etched feature (44) is to be produced is selectively masked with a second maskant (50) during the first etching stage. The second maskant (50) is then removed prior to the second etching stage.

公开(公告)号：EP2861524A4

公开(公告)日：2016-07-06

申请号：EP13803842

申请日：2013-05-31

Applicant: PURDUE RESEARCH FOUNDATION

Inventor： CLARK JASON V

IPC: B81C99/00 ,  G01C19/56 ,  G01K11/00 ,  G01P15/08 ,  G01P15/097 ,  G01P15/125 ,  G01P21/00 ,  G01Q40/00

CPC classification number: G01P15/125 ,  B81B3/0051 ,  B81B2201/0235 ,  B81B2201/033 ,  B81C99/003 ,  B81C99/0045 ,  G01C19/5755 ,  G01K11/00 ,  G01P15/097 ,  G01P21/00 ,  G01P2015/0871 ,  G01Q20/00 ,  G01Q40/00

Abstract: Methods of measuring displacement of a movable mass in a microelectromechanical system (MEMS) include driving the mass against two displacement-stopping surfaces and measuring corresponding differential capacitances of sensing capacitors such as combs. A MEMS device having displacement-stopping surfaces is described. Such a MEMS device can be used in a method of measuring properties of an atomic force microscope (AFM) having a cantilever and a deflection sensor, or in a temperature sensor having a displacement-sensing unit for sensing a movable mass permitted to vibrate along a displacement axis. A motion-measuring device can include pairs of accelerometers and gyroscopes driven 90° out of phase.

Abstract translation: 在微机电系统（MEMS）中测量可移动质量块的位移的方法包括将驱动质量抵抗两个位移停止表面并测量诸如梳状物之类的感测电容器的对应差分电容。 描述了具有位移停止表面的MEMS器件。 这样的MEMS器件可以用于测量具有悬臂和偏转传感器的原子力显微镜（AFM）的性质的方法中，或者在具有位移感测单元的温度传感器中使用，该位移感测单元用于感测允许沿着 位移轴。 运动测量装置可以包括驱动90°异相的加速度计和陀螺仪对。

公开(公告)号：EP2038205B1

公开(公告)日：2016-04-06

申请号：EP07720006.1

申请日：2007-06-21

Applicant: Sun, Yu ,  Kim, Keekyoung

Inventor： Sun, Yu ,  Kim, Keekyoung

IPC: B81C99/00 ,  B25J9/10

CPC classification number: B81C99/002 ,  B25J9/104 ,  B81B2201/0292 ,  B81B2201/031 ,  B81B2201/033

公开(公告)号：EP2902358A1

公开(公告)日：2015-08-05

申请号：EP15153380.9

申请日：2015-01-30

Applicant: STMicroelectronics S.r.l.

Inventor： Carminati, Roberto ,  Conti, Sebastiano

IPC: B81B7/00 ,  G02B26/08

CPC classification number: B81B3/0062 ,  B81B3/0043 ,  B81B7/008 ,  B81B2201/018 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  G02B26/0841 ,  G03B21/142 ,  G03B21/2033 ,  G03B21/28

Abstract: The MEMS device has a suspended mass (31) supported via a pair of articulation arms (32) by a supporting region (33). An electrostatic driving system (36), coupled to the articulation arms (32), has mobile electrodes (38) and fixed electrodes (39) that are coupled to each other. The electrostatic driving system is formed by two pairs of actuation assemblies (36), arranged on opposite sides of a respective articulation arm (32) and connected to the articulation arm through connection elements (30). Each actuation assembly (36) extends laterally to the suspended mass (31) and has an auxiliary arm (37) carrying a respective plurality of mobile electrodes (38). Each auxiliary arm is parallel to the articulation arms (32). The connection elements (30) may be rigid or formed by linkages.

Abstract translation: MEMS器件具有经由支撑区域（33）经由一对关节臂（32）支撑的悬挂块（31）。 耦合到关节臂（32）的静电驱动系统（36）具有彼此耦合的移动电极（38）和固定电极（39）。 静电驱动系统由两对致动组件（36）形成，所述致动组件布置在相应的关节臂（32）的相对侧上，并通过连接元件（30）连接到关节臂。 每个致动组件（36）横向延伸到悬挂质量块（31），并且具有承载相应多个移动电极（38）的辅助臂（37）。 每个辅助臂平行于铰接臂（32）。 连接元件（30）可以是刚性的或通过连杆形成。

公开(公告)号：EP2318303B1

公开(公告)日：2013-12-11

申请号：EP09779758.3

申请日：2009-06-15

Applicant: Robert Bosch GmbH

Inventor： FRIEDRICH, Thomas ,  MEISEL, Daniel, Christoph ,  RAUDZIS, Carsten

IPC: B81B3/00 ,  H02N1/00

CPC classification number: B81B3/0037 ,  B81B2201/033 ,  H02N1/008

公开(公告)号：EP1542059B1

公开(公告)日：2013-04-24

申请号：EP02760638.3

申请日：2002-08-14

Applicant: FUJITSU LIMITED

Inventor： MI, Xiaoyu, c/o FUJITSU LIMITED ,  TSUBOI, Osamu, c/o FUJITSU LIMITED ,  UEDA, Satoshi, c/o FUJITSU LIMITED ,  SAWAKI, Ippei, c/o FUJITSU LIMITED

IPC: G02B26/10 ,  G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0841 ,  B81B3/007 ,  B81B2201/0235 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154 ,  B81B2203/058

公开(公告)号：EP2331453B1

公开(公告)日：2012-07-11

申请号：EP09781417.2

申请日：2009-08-03

Applicant: Robert Bosch GmbH

Inventor： FEYH, Ando

IPC: B81B7/00

CPC classification number: B81B7/007 ,  B81B2201/033 ,  B81B2207/095 ,  B81C2203/0118 ,  B81C2203/036 ,  Y10T29/49126

Abstract: The invention relates to a method for producing a micromechanical component (300) that comprises providing a first substrate (100), forming a microstructure (150) on the first substrate (100), wherein the microstructure (150) comprises a moving function element (151), providing a second substrate (200), and forming in the second substrate (200) an electrode (251) for capacitively measuring a deflection of the function element (151). The method further comprises connecting the first and the second substrates (100; 200), wherein a closed cavity which encloses the function element (151) is formed, and wherein the electrode (251) adjoins the cavity in an area of the function element (151).

公开(公告)号：EP1591824B1

公开(公告)日：2012-05-09

申请号：EP05008890.5

申请日：2005-04-22

Applicant: Panasonic Corporation

Inventor： Kurozuka, Akira ,  Mushika, Yoshihiro ,  Kajino, Osamu

IPC: G02B26/08 ,  H02N1/00 ,  B81B3/00

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/053 ,  B81B2203/058 ,  H02N1/008

Abstract: There has been a trade-off between the rigidity and the mass of a movable section of a microactuator, and also between the rigidity of the movable section and the electrostatic force. A microactuator 100 includes: a base 1; a first comb electrode 2 supported by the base 1; a movable section 6 having a second comb electrode 8 opposing the first comb electrode 2, and at least one reinforcement rib 9 protruding toward the base 1; and an elastic supporting member 3 for supporting the movable section 6 so as to allow the movable section 6 to be displaced with respect to the base 1. The height of the second comb electrode 8 is different from the height of the at least one reinforcement rib 9.

公开(公告)号：EP2351381A2

公开(公告)日：2011-08-03

申请号：EP09747927.3

申请日：2009-10-01

Applicant: Audio Pixels Ltd.

Inventor： COHEN, Yuval ,  KAPLAN, Shay ,  LEWIN, Daniel ,  SROMIN, Alex ,  BEN SIMON, Meir

IPC: H04R19/00

CPC classification number: H04R19/005 ,  B81B3/0021 ,  B81B2201/0257 ,  B81B2201/033 ,  B81B2203/053 ,  H02N1/006 ,  H04R1/005 ,  H04R1/403 ,  H04R3/002 ,  H04R3/007 ,  H04R3/12 ,  H04R7/18 ,  H04R19/02 ,  H04R31/00 ,  H04R2201/401

Abstract: Actuator apparatus comprising at least one moving elements, each comprising comb drive apparatus including at least first and second comb elements at least one of which is free to be in motion in a medium, and a controller controlling the motion responsive to an input signal representing a desired sound.

公开(公告)号：EP2216288A1

公开(公告)日：2010-08-11

申请号：EP07830931.7

申请日：2007-10-31

Applicant: Fujitsu Limited

Inventor： TSUBOI, Osamu ,  KOUMA, Norinao ,  MIZUNO, Yoshihiro ,  OKUDA, Hisao ,  SONEDA, Hiromitsu ,  MATSUMOTO, Tsuyoshi

IPC: B81B3/00

CPC classification number: B81B3/0086 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/058 ,  G02B26/0841

Abstract: A micro movable device suitable for suppressing deterioration of driving characteristics, and a micro movable device array including such a micro movable device are provided. The micro movable device (X1) of the present invention includes a movable portion including a first driving electrode, a second driving electrode for generating electrostatic attraction between the first driving electrode and the second driving electrode, a first conductor portion (22c) electrically connected to the first driving electrode, a second conductor portion (22b) electrically connected to the second driving electrode, and a third conductor portion (21a) which is not electrically connected to the first and the second driving electrodes and which is bonded to the first conductor portion (22c) via an insulating film (23) and bonded to the second conductor portion (22b) via the insulating film (23).

Abstract translation: 提供一种适用于抑制驱动特性劣化的微动移动装置，以及包括这种微动移动装置的微动移动装置阵列。 本发明的微型可移动装置（X1）包括可动部，包括第一驱动电极，用于在第一驱动电极和第二驱动电极之间产生静电吸引力的第二驱动电极，第一导体部分（22c），电连接到 第一驱动电极，与第二驱动电极电连接的第二导体部分（22b）和不与第一和第二驱动电极电连接并且连接到第一导体部分的第三导体部分（21a） （22c）经由绝缘膜（23）经由绝缘膜（23）接合到第二导体部（22b）。