公开(公告)号：WO2006059330A2

公开(公告)日：2006-06-08

申请号：PCT/IL2005/001287

申请日：2005-12-01

Applicant: NOVA MEASURING INSTRUMENTS LTD. ,  LYUBCHIK, Yakov ,  SCHEINER, David ,  WINIK, Michael

Inventor： LYUBCHIK, Yakov ,  SCHEINER, David ,  WINIK, Michael

IPC: G02B17/06 ,  G02B17/02 ,  G01N21/956 ,  G01N21/21 ,  H01L21/66 ,  G01B11/02

CPC classification number: G02B21/16 ,  G01J1/04 ,  G01J1/0411 ,  G01J1/0414 ,  G01J1/0429 ,  G01J1/044 ,  G01J1/0455 ,  G01J1/0462 ,  G01N21/956 ,  G02B17/06 ,  G02B17/061 ,  G02B21/04

Abstract: A lens arrangement (10) is presented. The lens arrangement comprises a first element (12) having a concave reflective surface and defining an optical axis (OA) of the lens arrangement, and a second substantially flat and at least partially reflective element (14) spaced-apart from the first element along the optical axis. The second element is configured to allow light passage therethrough and is oriented with respect to the optical axis and the first element such that at a predetermined angle βof incidence of an input light beam onto the second element, the input light beam is reflected onto the reflective surface of the first element and reflected therefrom to pass through the second element.

Abstract translation: 呈现透镜装置（10）。 透镜装置包括具有凹面反射表面并限定透镜装置的光轴（OA）的第一元件（12）以及与第一元件沿着第一元件间隔开的第二基本上平坦且至少部分反射的元件（14） 光轴。 第二元件被配置为允许光通过其并相对于光轴和第一元件定向，使得在输入光束入射到第二元件上的预定角度β处，输入光束被反射到反射 第一元件的表面并由其反射以穿过第二元件。

公开(公告)号：WO2004036312A2

公开(公告)日：2004-04-29

申请号：PCT/DE0303381

申请日：2003-10-08

Applicant: INFINEON TECHNOLOGIES AG ,  AIXUV GMBH ,  DOMKE WOLF-DIETER ,  JUSCHKIN LARISSA ,  KRAGLER KARL ,  LEBERT RAINER ,  MEISEN MANFRED

Inventor： DOMKE WOLF-DIETER ,  JUSCHKIN LARISSA ,  KRAGLER KARL ,  LEBERT RAINER ,  MEISEN MANFRED

IPC: G01J1/42 ,  G03F7/00 ,  G03F7/20 ,  G21K1/10 ,  G21K5/04

CPC classification number: G21K5/04 ,  G01J1/044 ,  G01J1/429 ,  G03F7/70558 ,  G21K1/10

Abstract: The invention concerns an irradiation device for testing objects coated with light-sensitive paint, comprising a EUV radiation source, an optical system for filtering the radiation of the EUV radiation source, a chamber for receiving the object, as well as systems for intersecting the trajectory of the rays on the object. The invention also concerns a method for operating such a device. The invention aims at obtaining as quickly as possible an illumination at least partly simultaneous of several irradiation fields, with different doses, by using an inexpensive laboratory radiation source without resorting to complex optical systems. Therefor, the invention provides a device comprising a simplified and compact optical system, with closable diaphragm apertures located in front of the object to be irradiated and at least one control sensor placed on the trajectory of the rays and enabling the radiation dose to be measured.

Abstract translation: 本发明涉及涂覆有与EUV辐射源，用于过滤来自EUV辐射源，用于接收所述对象的腔室中的辐射的光学系统的感光涂层的物体进行检测照射的装置的装置，以及用于中断对象上的光束路径中。 此外，本发明涉及一种操作这种设备的方法。 为了允许使用便宜的实验室辐射源和没有复杂的光学系统中，多个与在最短的时间内不同的剂量辐照场的至少部分同时曝光，是具有简化和紧凑的光学系统的装置，在对象前面闭孔被照射和至少一个 提出布置在用于辐射剂量测量光束路径监视探测器。

公开(公告)号：WO1992016820A1

公开(公告)日：1992-10-01

申请号：PCT/US1992001320

申请日：1992-02-19

Applicant: OSD ENVIZION COMPANY

Inventor： OSD ENVIZION COMPANY ,  FERGASON, John, D. ,  FERGASON, Jeffrey, K.

IPC: G01J01/32

CPC classification number: G01J1/18 ,  A61F9/067 ,  G01J1/04 ,  G01J1/044 ,  G01J1/44 ,  G01J2001/0276 ,  G02F1/13306 ,  G02F1/13318

Abstract: A power supply circuit (14) for a liquid crystal welding lens (10) or shutter develops a relatively low voltage AC signal for driving or powering the liquid crystal shutter (10) to the clear state and two relatively higher or larger magnitude AC electrical signals for initially driving the shutter (10) to the dark state and then for maintaining the shutter (10) in the dark state; a variable frequency circuit (61) for varying the frequency of the driving signal to the shutter (10) to minimize power usage in the dark state and to avoid flicker in the clear state; and power saving and battery level indicator features are included.

公开(公告)号：JP5861108B2

公开(公告)日：2016-02-16

申请号：JP2011232813

申请日：2011-10-24

Applicant: パナソニックIPマネジメント株式会社

Inventor： 加藤 潤一 ,  神田 隆司 ,  佐伯 浩司 ,  万波 寛明 ,  廣渡 祐一郎 ,  栗原 伸一郎

IPC: H05B37/02

CPC classification number: H05B37/02 ,  G01J1/0228 ,  G01J1/044 ,  G01J1/44 ,  G01J5/0025 ,  G01J5/0834 ,  G01J5/34 ,  Y10T307/773

公开(公告)号：JP2013093114A

公开(公告)日：2013-05-16

申请号：JP2011232813

申请日：2011-10-24

Applicant: Panasonic Corp ,  パナソニック株式会社

Inventor： KATO JUNICHI ,  KANDA TAKASHI ,  SAEKI KOJI ,  MANNAMI HIROAKI ,  HIROWATARI YUICHIRO ,  KURIHARA SHINICHIRO

IPC: H05B37/02

CPC classification number: H05B37/02 ,  G01J1/0228 ,  G01J1/044 ,  G01J1/44 ,  G01J5/0025 ,  G01J5/0834 ,  G01J5/34 ,  Y10T307/773

Abstract: PROBLEM TO BE SOLVED: To provide an illumination controller capable of discriminating a fixed heater from a human body to control the illumination conditions of an illumination load.SOLUTION: An illumination system 1 includes an illumination load 2 and an illumination apparatus 3. The illumination apparatus 3 includes: a pyroelectric type sensor 5 that detects changes in infrared rays; a shutter 61 provided in front of a heat receiving surface so as to shield the radiation of infrared rays to the heat receiving surface of the pyroelectric type sensor 5; and an illumination controller 7 including a shutter controller 73 and an ON/OFF controller 76. The shutter controller 73 controls the shutter 61 so that the shutter 61 closes and opens in a short time after a hold-ON time of the illumination load 2 has elapsed. When the pyroelectric type sensor 5 detects no changes in the infrared rays before and after the shutter 61 opens/closes and when the hold-ON time elapses a predetermined times or a predetermined period of time without detecting any changes in infrared rays by the pyroelectric type sensor 5 during the hold-ON time, the ON/OFF controller 76 controls to turn off the illumination load 2.

Abstract translation: 要解决的问题：提供一种能够从人体识别固定加热器以控制照明负载的照明条件的照明控制器。 解决方案：照明系统1包括照明负载2和照明装置3.照明装置3包括：热电型传感器5，其检测红外线的变化; 设置在受热面前方的挡板61，以将红外线的辐射屏蔽到热电型传感器5的受热面上; 以及包括快门控制器73和开/关控制器76的照明控制器7.快门控制器73控制快门61，使得在照明负载2的保持打开时间之后，快门61在短时间内关闭并打开 过去。 当热电型传感器5不检测快门61打开/关闭之前和之后的红外线的变化，并且当保持 - 接通时间经过预定时间或预定时间段而没有检测到热电型的红外线的任何变化 传感器5在保持接通时间期间，ON / OFF控制器76控制关闭照明负载2.

版权所有：（C）2013，JPO＆INPIT

公开(公告)号：JP4602215B2

公开(公告)日：2010-12-22

申请号：JP2005297242

申请日：2005-10-12

Applicant: アドバンスド・マスク・インスペクション・テクノロジー株式会社 ,  株式会社トプコン

Inventor： 幸次 中嶋 ,  力 小川 ,  登 小林 ,  昌行 秀島 ,  博幸 長浜

IPC: G01J1/44

CPC classification number: G01J1/36 ,  G01J1/04 ,  G01J1/044 ,  G01J1/18

公开(公告)号：JP2007107942A

公开(公告)日：2007-04-26

申请号：JP2005297242

申请日：2005-10-12

Applicant: Advanced Mask Inspection Technology Kk ,  Topcon Corp ,  アドバンスド・マスク・インスペクション・テクノロジー株式会社 ,  株式会社トプコン

Inventor： KOBAYASHI NOBORU ,  OGAWA TSUTOMU ,  HIDESHIMA MASAYUKI ,  NAGAHAMA HIROYUKI ,  NAKAJIMA KOJI

IPC: G01J1/44

CPC classification number: G01J1/36 ,  G01J1/04 ,  G01J1/044 ,  G01J1/18

Abstract: PROBLEM TO BE SOLVED: To simplify an optical system and correct the sensitivity drift or linearity of a light reception element.
SOLUTION: A light quantity measuring apparatus is provided with an optical chopper 2 for interrupting incident signal light at prescribed periods while rotating; a reference light source 6 for irradiating reference light different from the signal light during the period in which the signal light is interrupted by the optical chopper 2; the light reception element 5 for receiving both the signal light and the reference light and measuring the light quantity of the signal light and the light quantity of the reference light; a correction operation circuit 13 for correcting the light quantity of the signal light on the basis of the light quantity of the reference light; and a correction value computation circuit 12 for computing a correction value by comparing a prescribed reference value with a light quantity value of the prescribed light. The correction operation circuit 13 corrects the light quantity of the signal light on the basis of the correction value.
COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：为了简化光学系统并校正光接收元件的灵敏度漂移或线性度。 光量测量装置设置有用于在旋转的同时中断入射信号光的光斩波器2; 参考光源6，用于在由光斩波器2中断信号光的时段期间照射与信号光不同的参考光; 光接收元件5，用于接收信号光和参考光，并测量信号光的光量和参考光的光量; 校正运算电路13，用于根据参考光的光量校正信号光的光量; 以及校正值计算电路12，用于通过将规定的参考值与规定的光的光量值进行比较来计算校正值。 校正运算电路13根据校正值校正信号光的光量。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2004527733A

公开(公告)日：2004-09-09

申请号：JP2002562955

申请日：2001-04-26

Applicant: スリーエム イノベイティブ プロパティズ カンパニー

Inventor： ダブリュ． クーンズ，デイビット ,  エム． クローゼン，トーマス ,  アール． バンフース，スティーブン ,  ダブリュ． リー，ショーン

IPC: G01J1/02 ,  G01J1/04

CPC classification number: G01J1/04 ,  G01J1/0204 ,  G01J1/0271 ,  G01J1/0425 ,  G01J1/044

Abstract: 本発明は空気圧で作動するエネルギー収集装置である。 この装置はエネルギー収集器をその上に有する支持部を備える。 シャッターが支持部に摺動可能に取付けられており、このシャッターは第１の「閉」位置と第２の「開」位置の間で移動できる。 シャッターは第１の位置で収集器を覆い、第２の位置で収集器を露出させる。 シャッターは第１と第２の位置のうちの１つに押しやられている。 チャンバがシャッターに隣接して配置されており、チャンバが加圧されると、加圧力がシャッターを押しやっている力に勝り、シャッターが第１の位置と第２の位置の間を移動する。

公开(公告)号：US20180329489A1

公开(公告)日：2018-11-15

申请号：US15593180

申请日：2017-05-11

Applicant: Microsoft Technology Licensing, LLC

Inventor： Raymond Kirk PRICE ,  Michael BLEYER ,  Denis DEMANDOLX

IPC: G06F3/01 ,  G02B27/01 ,  G02B27/00 ,  G06K9/00 ,  G01J1/44 ,  G01J1/04

CPC classification number: G06F3/013 ,  G01J1/044 ,  G02B27/0093 ,  G02B27/0172 ,  G06K9/00604 ,  G06K9/0061 ,  G06K9/2018 ,  G06K9/2027

Abstract: An eye-tracking system comprises one or more optical sources configured to emit infrared light with a narrow spectral linewidth toward an eye of a user and one or more shuttered optical sensors configured to receive infrared light reflected off the eye of the user. A controller is configured to pulse the one or more optical sources on and off, such that a pulse-on duration is less than a duration needed to fully thermalize each optical source. The controller is also configured to open the shuttered optical sensor for a detection duration based on the pulse-on duration. A conformation of the user's eye may be indicated based on infrared light received at the shuttered optical sensor during the detection duration.

公开(公告)号：US09970922B2

公开(公告)日：2018-05-15

申请号：US14924234

申请日：2015-10-27

Applicant: OLYMPUS CORPORATION

Inventor： Atsuhiro Tsuchiya ,  Hiroyuki Okahira ,  Koichiro Izumi

IPC: G01N33/483 ,  G01J1/02 ,  G01J1/04

CPC classification number: G01N33/4833 ,  G01J1/0271 ,  G01J1/044

Abstract: With the object of preventing deterioration of or damage to a photodetector caused by excessive light by more reliably preventing the excessive light from entering the photodetector, a microscope of the present invention is provided with a high-sensitivity detector, such as an HPD, a GaAsP, an EM-CCD or the like, that detects observation light coming from a specimen, a box-shaped casing that has an opening that allows contained items to be placed therein and removed therefrom and that covers the high-sensitivity detector, a door that can close off the opening of the casing, a switch that restricts light detection by the high-sensitivity detector by turning on and off a drive voltage to be applied to the high-sensitivity detector, and an opening restricting mechanism that allows the opening of the casing in the closed state imposed by the door to be opened only when the light detection by the high-sensitivity detector is restricted by the switch.