Abstract:
A cathode configuration for emission of electrons has a reaction zone connected to an entrance opening for the supply of neutral particles. The opening communicates with the cathode configuration for the ionization of the neutral particles and an ion extraction system communicates with the reaction zone. Ions from the extraction system are sent to a detection system and a mechanism for the evacuation of the mass spectrometer arrangement. The cathode configuration includes a field emission cathode with an emitter surface, wherein at a short distance from this emitter surface, an extraction grid is disposed for the extraction of electrons, which grid substantially covers the emitter surface. The emitter surface encompasses herein at least partially a hollow volume such that a tubular structure is formed.
Abstract:
A novel, compact non-radioactive electron emitter is provided with a cylindrical shape and with an interior space (6), which forms a vacuum chamber. A substrate (7) forms the bottom of the arrangement with a plurality of field emitter tips (5) formed of carbon nanotubes in the interior space (6). The tips are fastened to the substrate. A layer structure forms the cover of the arrangement, having, from the outside towards the interior space (6), an electrode layer (13), which acts as a counterelectrode and is applied to a gas-impermeable and electron-permeable membrane (10). A substrate (11), which is left open in the form of a window (12) in the area above the field emitter tips (6), acts as a carrier substrate for the membrane (10) and the electrode layer (13). A circumferential wall (14) of the arrangement is formed by an electrically insulating material. The field emitter tips (5) and the electrode layer (13) are connected to a d.c. power source, so that the electrons exiting from the field emitter tips (5) are accelerated through the vacuum chamber, window (12) and the membrane (10) towards the electrode layer (13), pass through the electrode layer (13) and enter the ionization area (3) outside the electron emitter (1, 1′).
Abstract:
A device which employs an electron beam, for performing a desired function, includes an electron gun for generating the electron beam. The electron gun includes a barrel shaped rotatable structure having a plurality of annularly disposed electron sources. A curvature of a surface portion of the rotatable structure is shaped to optimize electric field concentrations. The rotatable structure further includes end portion protrusions.
Abstract:
An electron source includes a first electrode, a second electrode, a thermionic element interposed between and electrically isolated from the first electrode and the second electrode, and a guard electrode interposed between and electrically isolated from the first electrode and the second electrode. The thermionic element and the guard electrode may be at substantially the same voltage. Another electron source includes a first electrode, a second electrode, a thermionic element interposed between and electrically isolated from the first electrode and the second electrode, and a thermal expansion component interposed between and electrically isolated from the first electrode and the second electrode. The thermal expansion component may be heated to cause expansion. The heating may be cycled to cause alternating expansion and contraction.
Abstract:
A mass spectrometer and method of mass spectrometry in which polyatomic and doubly charged ion interferences are attenuated by establishing an electron population through which a beam of particles containing elemental sample ions and the interfering ions is passed such that the interfering ions preferentially undergo ion-electron recombination and thus dissociation to remove a significant number of the interfering ions. Means (30 or 32) for providing a population of electrons (34 or 36) in an ICP-MS (22) may comprise a magnetic field means such as an electric coil, or an electron generating device. The population of electrons has an electron number density (>1011 cm−3 to 1014 cm−3), a free electron energy (>0.01 eV to
Abstract translation:通过建立电子群减少多原子和双电荷离子干扰的质谱仪和质谱法,通过该质谱仪将含有元素样品离子和干扰离子的粒子束通过,使得干扰离子优先进行离子电子重组 并因此解离以除去大量的干扰离子。 用于在ICP-MS(22)中提供电子群体(34或36)的装置(30或32)可以包括诸如电线圈或电子产生装置的磁场装置。 电子群体具有电子数密度(> 10×10 -3 cm -3至10 14 cm -3 -3 / ),在低压(<10Torr)的区域中的自由电子能量(> 0.01eV至<5eV),使得通过电子群体的离子的预定路径长度(1-4cm), 干扰离子将优先通过解离复合过程减弱。 离子束(40)然后通过质量分析器(42),并且通过离子检测器(44)检测已经根据其质荷比分离的离子。
Abstract:
An improved quadrupole mass spectrometer is described. The improvement lies in the substitution of the conventional hot filament electron source with a cold cathode field emitter array which in turn allows operating a small QMS at much high internal pressures then are currently achievable. By eliminating of the hot filament such problems as thermally “cracking” delicate analyte molecules, outgassing a “hot” filament, high power requirements, filament contamination by outgas species, and spurious em fields are avoid all together. In addition, the ability of produce FEAs using well-known and well developed photolithographic techniques, permits building a QMS having multiple redundancies of the ionization source at very low additional cost.
Abstract:
An improved secondary electron spectrometer for measuring voltages occurring on a specimen, such as an integrated circuit chip, utilizing an electron probe has a grating structure for measuring the energy distribution of the secondary electrons independently of the angular distribution of the secondary electrons at the measuring point on the specimen. If the secondary electron spectrometer has an extraction electrode and a deceleration electrode, the grating structure is spherically symmetric.
Abstract:
A time of flight mass spectrometer wherein the ionizing electron beam is in axial alignment with the path of the ions produced thereby and wherein an electron multiplier is utilized to generate a high intensity electron beam for ionization. An open mesh control grid is utilized to control the axial dimension of the ionization region so that it can be maintained very small in order that the distance traveled by each of the ions to an ion detector at the opposite end of a drift tube is very nearly the same. This will result in a more accurate measurement of the mass of the ions since the difference in travel time to reception by the ion detector will be primarily because of difference in mass alone and not because of a difference in the distance traveled.
Abstract:
PURPOSE: An ionization source securing device of a mass spectrometer using a UV diode and a CEM is provided to secure the bulk of amplified electron beams by inducing the discharging of initial electrons through irradiating UV photons to the entrance of a CEM module. CONSTITUTION: An UV diode(110) emits an ultraviolet ray. A CEM(Channeltron Electron Multiplier) module(120) induces and amplifies the discharging of initial electrons and secures the bulk of electron beams at an exit(122). An electron integrating lens integrates an amplified electronic beam. An ion trap mass separator ionizes gas sample molecules with an injected electron beam. An ion detector detects an ion separated from an ion trap mass separator with a mass spectrum. The CEM module respectively applies negative voltage to a CEM module entrance(121) and a CEM module exit. The CEM module insulates using first and second insulators(123,124).