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    MEMS MIRRORS WITH PRECISION CLAMPING MECHANISM
    143.
    发明申请
    MEMS MIRRORS WITH PRECISION CLAMPING MECHANISM 审中-公开
    具有精密钳位机制的MEMS镜

    公开(公告)号：WO2002084374A1

    公开(公告)日：2002-10-24

    申请号：PCT/US2001/048079

    申请日：2001-12-13

    Applicant: ONIX MICROSYSTEMS

    Inventor： BEHIN, Behrang ,  DANEMAN, Michael ,  LIN, Chuang-Chia ,  KOBRIN, Boris ,  CHAPARALA, Murali ,  ZALEWSKI, Gary

    IPC: G02B26/08

    CPC classification number: G02B6/358 ,  B81B3/0054 ,  B81B2201/045 ,  B81B2203/058 ,  G02B6/122 ,  G02B6/32 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0841 ,  G02B2006/12104

    Abstract: A microelectromechanical (MEMS) apparatus has a base (206) and a flap (211) with a portion coupled to the base so that the flap may move out of the plane of the base between first and second position. The base may have a cavity (215) with largely vertical sidewalls that contact a portion of the flap when the flap is in the second position. Electrodes (216) may be placed on the vertical sidewalls and electrically isolated from the base to provide electrostatic clamping of the flap to the sidewall. An array of one or more of such structures may be used to form an optical switch. The apparatus may be made by a process involving etching one or more trenches in a backside of a base. The trench may be etched such that a crystal orientation of the base material defines an orientation of a sidewall.

    Abstract translation: 微机电（MEMS）装置具有基部（206）和翼片（211），其中部分联接到基部，使得翼片可以在第一和第二位置之间移动离开基部的平面。 基部可以具有空腔（215），其具有大的垂直侧壁，当瓣片处于第二位置时，该侧壁接触翼片的一部分。 电极（216）可以放置在垂直侧壁上并与基底电隔离以提供瓣片向侧壁的静电夹持。 可以使用一个或多个这样的结构的阵列来形成光学开关。 该设备可以通过涉及蚀刻底座背面中的一个或多个沟槽的工艺来制造。 可以蚀刻沟槽，使得基底材料的晶体取向限定侧壁的取向。

    TRANSITION METAL DIELECTRIC ALLOY MATERIALS FOR MEMS
    147.
    发明申请
    TRANSITION METAL DIELECTRIC ALLOY MATERIALS FOR MEMS 审中-公开
    用于MEMS的过渡金属电介质合金材料

    公开(公告)号：WO02016150A1

    公开(公告)日：2002-02-28

    申请号：PCT/US2001/041872

    申请日：2001-08-23

    IPC: B81B3/00 ,  B44C1/22 ,  H01L21/00

    CPC classification number: B81B3/0078 ,  B81B2201/045 ,  B81B2203/0118

    Abstract: Micromechanical devices are provided that are capable of movement due to a flexible portion. The micromechanical device can have a flexible portion (35) formed of a nitride of preferably an element from groups 3A to 6A of the periodic table (preferably from the first two rows of these groups) and a late transition metal (preferably from groups 8B or 1B of the periodic table). The micromechanical devices can be any device, particularly MEMS sensors or actuators preferably having a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or a micromirror part of an array for direct view and projection displays. The flexible portion is preferably formed by sputtering a target having a group 8B or 1B element and a group 3A to 6A element. The target can have other major consituents or impurities (e.g. additional group 3A to 6A element(s)). The target is reactively sputtered in a nitrogen ambient so as to result in a sputtered hinge. It is possible to form both stiff and/or flexible portions of the micromechanical device in this way.

    Abstract translation: 提供能够由于柔性部分而移动的微机械装置。 微机械装置可以具有柔性部分（35），该柔性部分（35）由优选来自周期表的组3A至6A的元素的氮化物（优选地来自这些基团的前两行）和后过渡金属（优选来自基团8B或 1B周期表）。 微机械装置可以是任何装置，特别是优选地具有诸如加速度计，直流继电器或RF开关，光交叉连接或光开关的柔性部分的MEMS传感器或致动器，或者用于直视图和投影显示器的阵列的微镜部分。 柔性部分优选通过溅射具有组8B或1B元素和组3A至6A元素的靶来形成。 靶可以具有其它主要成分或杂质（例如另外的3A至6A族元素）。 靶在氮气环境中反应溅射，从而产生溅射的铰链。 以这种方式可以形成微机械装置的刚性和/或柔性部分。

    BULK SILICON STRUCTURES WITH THIN FILM FLEXIBLE ELEMENTS
    148.
    发明申请
    BULK SILICON STRUCTURES WITH THIN FILM FLEXIBLE ELEMENTS 审中-公开
    具有薄膜柔性元件的大体积硅结构

    公开(公告)号：WO01094253A2

    公开(公告)日：2001-12-13

    申请号：PCT/US2001/017020

    申请日：2001-05-24

    IPC: B81B3/00 ,  G02B6/35 ,  G02B26/08

    CPC classification number: G02B6/3584 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/033 ,  B81C1/00182 ,  B81C1/00666 ,  B81C2201/0109 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/357 ,  G02B26/0841

    Abstract: A method for forming a suspend structure with thin film flexible elements is disclosed. In one embodiment, the method etches a trench in a bulk substrate around to be released components. The trench is filled with sacrificial material. The surface of the sacrificial material is planarized. Thin film hinge material is patterned and etched on the surface of the sacrificial material. The bulk substrate is then etched from the backside to pre-release the sacrificial material. The sacrificial material is etched to remove the sacrificial material, thus forming a suspended structure with thin film hinges.

    Abstract translation: 公开了一种用薄膜柔性元件形成悬挂结构的方法。 在一个实施例中，该方法蚀刻大块衬底中的沟槽以被释放的部件。 沟槽填充有牺牲材料。 牺牲材料的表面被平坦化。 在牺牲材料的表面上对薄膜铰链材料进行图案化和蚀刻。 然后从背面蚀刻大块衬底以预先释放牺牲材料。 牺牲材料被蚀刻以去除牺牲材料，从而形成具有薄膜铰链的悬挂结构。

    ROLLING SHUTTER OPTICAL SWITCH DEVICE WITH LATCH ELECTRODE AND SLITS IN SHUTTER
    149.
    发明申请
    ROLLING SHUTTER OPTICAL SWITCH DEVICE WITH LATCH ELECTRODE AND SLITS IN SHUTTER 审中-公开
    带切割电极和滑块的滚动快门光开关装置

    公开(公告)号：WO01067162A1

    公开(公告)日：2001-09-13

    申请号：PCT/US2001/007296

    申请日：2001-03-05

    IPC: B81B3/00 ,  G02B6/35 ,  G02B26/02 ,  G02B26/08

    CPC classification number: B81B3/0072 ,  B81B3/0008 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3564 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/02 ,  G02B26/0816

    Abstract: An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

    Abstract translation: 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。 在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。 在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。 在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。 可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。

    MICROMACHINED MEMBERS COUPLED FOR RELATIVE ROTATION BY TORSIONAL FLEXURE HINGES
    150.
    发明申请
    MICROMACHINED MEMBERS COUPLED FOR RELATIVE ROTATION BY TORSIONAL FLEXURE HINGES 审中-公开
    扭转微元元件与扭转挠曲元件相关的旋转

    公开(公告)号：WO00013210A2

    公开(公告)日：2000-03-09

    申请号：PCT/US1999/020218

    申请日：1999-09-02

    IPC: B81B3/00 ,  G01P9/04 ,  G02B6/32 ,  G02B6/35 ,  G02B6/36 ,  G02B26/08 ,  G02B26/10 ,  H04Q11/00 ,  H01L

    CPC classification number: H04Q11/0005 ,  B81B3/0051 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  G02B6/32 ,  G02B6/327 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  H04Q2011/003 ,  H04Q2011/0039 ,  H04Q2011/0043

    Abstract: A monolithically fabricated micromachined structure couples a reference frame (56) to a dynamic plate (58). Performance of torsional oscillators or scanners benefits greatly by coupling the frame (56) to the plate (58) with folded torsional flexure hinges (96) rather than torsion bars. A folded torsion flexure hinge (96) for supporting the plate (58) from the frame (56) is made up of three basic hinge segments (102a, 102b, 102c). Each basic hinge segment (102a, 102b, 102c) has a longitudinal axis (98) which is not oriented perpendicular to the rotation axis (62) of the plate (58). An intermediaire region (104) of the folded torsional flexure hinge (96) couples together immediately adjacent ends (106) of the basic hinge segments (102a, 102b, 102c). A basic hinge segment (102b) may include a torsion sensor (108) for measuring angular rotation of the plate (58) about axis (62) with respect to the frame (56).

    Abstract translation: 本发明涉及一种结构（52）的微机械加工在一个单片部件，耦合在动态板（58）或第二帧的参考帧（56），用于旋转所述板（58）或第二帧由 称为参考板（56）。 在扭转振荡器或图形的扫描仪（52）的效力是由耦合（56）到所述板（58）或与柔性铰链的第二框架（56）的框架扭曲，而不是大大提高 带有扭杆（54）。 附件（122），紧固件（142）或改进的驱动电路增强了扭转振荡器（52）的静电驱动稳定性。 大薄弯曲弯曲接头（96）和同位素纯硅增加了板（58）和框架（56）之间的导热性。 桥接与扭转弯曲接头（96）相邻的阻尼材料的槽（232）显着降低了动态构件的Q因子。 窄弯曲接头（96）的大部分（252）包括扭转传感器（108）。 包括致动部分（302）的动态元件（58）执行光束的切换。 反射涂层（76）电网电子，光电检测器（372），和菲涅耳透镜（376）提高了数字化仪图形（52）扭曲的光学效率。

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