公开(公告)号：US20040202779A1

公开(公告)日：2004-10-14

申请号：US10764806

申请日：2004-01-26

Inventor： Donald A. Shiffler JR.

IPC: B05D005/12

CPC classification number: H01J1/304 ,  H01J2201/30446

Abstract: A method for making a field emission cold cathode for use in vacuum tubes. A carbon velvet material is coated with a low work function cesiated salt and bonded to a cathode surface. Alternatively, the carbon velvet material is bonded to the cathode surface before being coated with the cesiated salt. The coating may be applied by spraying the carbon velvet material with a cesiated salt solution, or by dipping the material into a crucible of molten cesiated salt. This abstract is provided to comply with the rules requiring an abstract, and is intended to allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning the claims.

Abstract translation: 一种制造用于真空管的场致发射冷阴极的方法。 碳丝绒材料涂覆有低功函数的切割盐并结合到阴极表面。 或者，碳纤维材料在被切割的盐被涂覆之前结合到阴极表面。 涂层可以通过用切丝的盐溶液喷洒碳丝绒材料，或通过将材料浸入熔融的澄清盐的坩埚中来施加。 提供该摘要以符合要求摘要的规则，并且旨在允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

公开(公告)号：US20040066127A1

公开(公告)日：2004-04-08

申请号：US10460052

申请日：2003-06-11

Inventor： Chien-Min Sung

IPC: H01J019/06 ,  H01J001/38 ,  H01J001/05 ,  H01J001/48 ,  H01J001/14

CPC classification number: H01J1/304 ,  C01B32/25 ,  H01J1/3048 ,  H01J9/025 ,  H01J2201/30446 ,  H01J2201/30457

Abstract: An amorphous diamond electrical generator having a cathode at least partially coated with amorphous diamond material and an intermediate member coupled between the cathode and an anode. The amorphous diamond material can have at least about 90% carbon atoms with at least about 20% of the carbon atoms bonded in a distorted tetrahedral coordination. The amorphous diamond coating has an energy input surface in contact with a base member of the cathode and an electron emission surface opposite the energy input surface. The electron emission surface can have an asperity height of from about 10 to about 1,000 nanometers and is capable of emitting electrons upon input of a sufficient amount of energy. The intermediate member can be coupled to the electron emission surface of the amorphous diamond coating such that the intermediate member has a thermal conductivity of less than about 100 W/mK and a resistivity of less than about 80 nullnull-cm at 20null C. The amorphous diamond electrical generator is a thermionic emission device having improved electron emission properties.

Abstract translation: 一种非晶金刚石发电机，其具有至少部分地涂覆有非晶金刚石材料的阴极和耦合在阴极和阳极之间的中间部件。 无定形金刚石材料可以具有至少约90％的碳原子，其中至少约20％的碳原子以变形的四面体配位键合。 无定形金刚石涂层具有与阴极的基底部件接触的能量输入表面和与能量输入表面相对的电子发射表面。 电子发射表面可以具有约10至约1000纳米的粗糙度高度，并且能够在输入足够量的能量时发射电子。 中间构件可以耦合到无定形金刚石涂层的电子发射表面，使得中间构件具有小于约100W / mK的热导率和在20℃下小于约80μΩ-cm的电阻率。 非晶金刚石发电机是具有改善的电子发射特性的热电子发射装置。

公开(公告)号：US06713312B2

公开(公告)日：2004-03-30

申请号：US10141586

申请日：2002-05-08

Applicant: Guy T. Blalock ,  Sanh D. Tang ,  Zhaohui Huang

Inventor： Guy T. Blalock ,  Sanh D. Tang ,  Zhaohui Huang

IPC: H01L2100

CPC classification number: H01J1/304 ,  H01J1/3044 ,  H01J31/127 ,  H01J2201/30446

Abstract: A method for fabricating field emitters from a conductive or semiconductive substrate. A layer of low work function material may be formed on the substrate. Emission tips that include such a low work function material may have improved performance. An etch mask appropriate for forming emission tips is patterned at desired locations over the substrate and any low work function material thereover. An anisotropic etch of at least the substrate is conducted to form vertical columns therefrom. A sacrificial layer may then be formed over the vertical columns. A facet etch of each vertical column forms an emission tip of the desired shape. If a sacrificial layer was formed over the vertical columns prior to formation of emission tips therefrom, the remaining material of the sacrificial layer may be utilized to facilitate the removal of any redeposition materials formed during the facet etch.

Abstract translation: 一种用于从导电或半导体衬底制造场致发射体的方法。 可以在基板上形成低功函数材料层。 包括这种低功函数材料的排放尖端可能具有改进的性能。 适合于形成发射尖端的蚀刻掩模被图案化在衬底上的所需位置和其上的任何低功函数材料。 进行至少衬底的各向异性蚀刻以形成垂直柱。 然后可以在垂直列上形成牺牲层。 每个垂直柱的刻面蚀刻形成所需形状的发射尖端。 如果在形成发射尖端之前在垂直列上形成牺牲层，则牺牲层的剩余材料可用于促进去除在刻面蚀刻期间形成的任何再沉积材料。

公开(公告)号：US06692323B1

公开(公告)日：2004-02-17

申请号：US09483409

申请日：2000-01-14

Applicant: Behnam Moradi ,  Tian Zhang ,  John Lee

Inventor： Behnam Moradi ,  Tian Zhang ,  John Lee

IPC: H01J902

CPC classification number: H01J1/3044 ,  H01J2201/30426 ,  H01J2201/30446 ,  H01J2329/00

Abstract: A structure and method are provided to inhibit degradation to the electron beam of a field emitter device by coating the field emitter tip with a substance or a compound. The substance or compound acts in the presence of outgassing to inhibit such degradation. In one embodiment, the substance or compound coating the field emitter tip is stable in the presence of outgassing. In another embodiment, the substance or compound decomposes at least one matter in the outgassing. In yet another embodiment, the substance or compound neutralizes at least one matter in the outgassing. In a further embodiment, the substance or compound brings about a catalysis in the presence of outgassing.

Abstract translation: 提供了一种结构和方法，通过用物质或化合物涂覆场致发射极尖端来抑制场发射器件的电子束的劣化。 物质或化合物在除气的作用下起作用以抑制这种降解。 在一个实施方案中，涂覆场发射器尖端的物质或化合物在除气的存在下是稳定的。 在另一个实施方案中，物质或化合物在除气中分解至少一种物质。 在另一个实施方案中，物质或化合物在除气中中和至少一种物质。 在另一个实施方案中，物质或化合物在除气的存在下引起催化。

公开(公告)号：US06683399B2

公开(公告)日：2004-01-27

申请号：US09681703

申请日：2001-05-23

Applicant: Donald A. Shiffler, Jr.

Inventor： Donald A. Shiffler, Jr.

IPC: H01J1906

CPC classification number: H01J1/304 ,  H01J2201/30446

Abstract: A field emission cold cathode for use in vacuum tubes. A carbon velvet material is coated with a low work function cesiated salt and bonded to a cathode surface. The cathode will emit electrons when an electric field is applied. The carbon velvet material is comprised of high aspect ratio carbon fibers embedded perpendicular to a base material.

Abstract translation: 用于真空管的场致发射冷阴极。 碳丝绒材料涂覆有低功函数的切割盐并结合到阴极表面。 当施加电场时，阴极将发射电子。 碳丝绒材料由垂直于基材的高纵横比碳纤维组成。

公开(公告)号：US20030025431A1

公开(公告)日：2003-02-06

申请号：US09917663

申请日：2001-07-31

Inventor： Pehr Pehrsson ,  James Butler

IPC: H01J001/02 ,  H01J001/14 ,  H01J001/30

CPC classification number: B82Y10/00 ,  H01J1/3044 ,  H01J1/312 ,  H01J9/022 ,  H01J9/025 ,  H01J2201/30446 ,  H01J2201/30457

Abstract: A method for fabricating an electron emitter is provided. This emitter structure may be used to form individual emitters or arrays of emitters. The method is comprised of implanting energetic ions into a diamond lattice to form cones or other continuous regions of damaged diamond. These regions are more electrically conducting than the surrounding diamond lattice, and have locally sharp tips at or near the point of entry of the ion into the diamond. The tips may then also be additionally coated with a layer of a wide band-gap semiconductor. An electrically conducting material may also be placed in proximity to the tips to generate an electric field sufficient to extract electrons from the conducting tips into either the region above the surface, or into the wide band-gap semiconductor layer in contact with the tips. Electrical contact is made to the electrically conducting damage tracks and the electrical circuit may be completed with an electrically conducting material on the surface of the wide band-gap semiconductor or diamond, or in the ambient above the surface of the emitter. The surface of the wideband gap semiconductor or diamond may be chemically modified to enhance the emission of electrons from the surface.

Abstract translation: 提供一种制造电子发射器的方法。 该发射器结构可以用于形成发射器的单独发射器或阵列。 该方法包括将能量离子注入到金刚石晶格中以形成损坏金刚石的锥体或其它连续区域。 这些区域比周围的金刚石晶格更具导电性，并且在离子进入金刚石的位置处或附近具有局部尖锐的尖端。 然后可以另外涂覆一层宽带隙半导体的尖端。 还可以将导电材料放置在靠近尖端处以产生足以将电子从导电尖端引入到表面上方的区域中的电场，或者与尖端接触的宽带隙半导体层中。 对导电损伤轨道进行电接触，并且电路可以在宽带隙半导体或金刚石的表面上或在发射器表面上的环境中的导电材料完成。 宽带隙半导体或金刚石的表面可以被化学修饰以增强从表面发射电子。

公开(公告)号：US20020175609A1

公开(公告)日：2002-11-28

申请号：US09681703

申请日：2001-05-23

Inventor： Donald A. Shiffler JR.

IPC: H01J001/05

CPC classification number: H01J1/304 ,  H01J2201/30446

Abstract: PRS0729A field emission cold cathode for use in vacuum tubes. A carbon velvet material is coated with a low work function cesiated salt and bonded to a cathode surface. The cathode will emit electrons when an electric field is applied. The carbon velvet material is comprised of high aspect ratio carbon fibers embedded perpendicular to a base material.

Abstract translation: PRS0729A真空管用场致冷阴极。 碳丝绒材料涂覆有低功函数的切割盐并结合到阴极表面。 当施加电场时，阴极将发射电子。 碳丝绒材料由垂直于基材的高纵横比碳纤维组成。

公开(公告)号：US20020127750A1

公开(公告)日：2002-09-12

申请号：US10141586

申请日：2002-05-08

Inventor： Guy T. Blalock ,  Zhaohui Huang ,  Sanh D. Tang

IPC: H01L021/00

CPC classification number: H01J1/304 ,  H01J1/3044 ,  H01J31/127 ,  H01J2201/30446

Abstract: A method for fabricating field emitters from a conductive or semiconductive substrate. A layer of low work function material may be formed on the substrate. Emission tips that include such a low work function material may have improved performance. An etch mask appropriate for forming emission tips is patterned at desired locations over the substrate and any low work function material thereover. An anisotropic etch of at least the substrate is conducted to form vertical columns therefrom. A sacrificial layer may then be formed over the vertical columns. A facet etch of each vertical column forms an emission tip of the desired shape. If a sacrificial layer was formed over the vertical columns prior to formation of emission tips therefrom, the remaining material of the sacrificial layer may be utilized to facilitate the removal of any redeposition materials formed during the facet etch.

公开(公告)号：US06281626B1

公开(公告)日：2001-08-28

申请号：US09271138

申请日：1999-03-17

Applicant: Osamu Nakamura ,  Shigemi Suzuki ,  Yuichi Mori ,  Hironori Hirama

Inventor： Osamu Nakamura ,  Shigemi Suzuki ,  Yuichi Mori ,  Hironori Hirama

IPC: H01J130

CPC classification number: H01J9/022 ,  H01J1/30 ,  H01J17/066 ,  H01J61/0675 ,  H01J2201/30446

Abstract: An yttrium film is formed on the surface of a substrate made of an Ni—Cr-based material by deposition or sputtering using resistance heating or an electron beam. The yttrium film is heated in an inert gas atmosphere containing a very small amount of hydrogen to hydrogenate yttrium. The resultant yttrium hydride is excellent as a cold emission material for a cold emission electrode and can be used for a cold emission discharge fluorescent tube.

Abstract translation: 通过使用电阻加热或电子束的沉积或溅射在由Ni-Cr基材料制成的基板的表面上形成钇膜。 将钇膜在含有非常少量氢的惰性气体气氛中加热以氢化钇。 所得的氢化钇作为冷发射电极的冷发射材料是优异的，可用于冷发射放电荧光管。

公开(公告)号：US20010006321A1

公开(公告)日：2001-07-05

申请号：US09754273

申请日：2001-01-05

Inventor： Jun-hee Choi ,  Seung-nam Cha ,  Hang-woo Lee

IPC: H01J001/16 ,  H01L023/48 ,  H01L023/52 ,  H01L029/40

CPC classification number: H01J1/3044 ,  H01J9/025 ,  H01J2201/30407 ,  H01J2201/30446

Abstract: A field emission device (FED) and a method for fabricating the FED are provided. The FED includes micro-tips with nano-sized surface features. Due to the micro-tips as a collection of a large number of nano-tips, the FED is operable at low gate turn-on voltages with high emission current densities, thereby lowering power consumption.

Abstract translation: 提供场发射装置（FED）和制造FED的方法。 FED包括具有纳米尺寸表面特征的微型尖端。 由于微尖作为大量纳米尖端的集合，所以FED可在具有高发射电流密度的低栅极导通电压下工作，从而降低功耗。