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公开(公告)号：KR1020040033600A
公开(公告)日：2004-04-28
申请号：KR1020020062752
申请日：2002-10-15
Applicant: 한국전자통신연구원
IPC: H01J1/30
Abstract: PURPOSE: An MIM(Metal/Insulator/Metal) emitter of field emission display and a method for manufacturing the same are provided to deposit an etch stopper on a tunneling insulation film of an MIM emitter through a simple process method. CONSTITUTION: A method for manufacturing an MIM(Metal/Insulator/Metal) emitter of field emission display comprises a step of patterning a lower electrode(116) on a substrate(110), a step of forming a tunneling insulation film(120) and a field insulation film(118) on the lower electrode, a step of forming an etch stopper(123) made of a ZnO thin film on the field insulation film and the tunneling insulation film, a step of etching a protection layer(126), a bus electrode(124), and a contact electrode(122) by forming the contact electrode, the bus electrode, and the protecting layer in order, a step of wet-etching the etch stopper, the contact electrode, the bus electrode, and the protecting layer as a mask, and a step of forming an upper electrode(128) on the tunneling insulation film.
Abstract translation: 目的：提供场发射显示器的MIM（金属/绝缘体/金属）发射体及其制造方法，以通过简单的工艺方法在MIM发射器的隧道绝缘膜上沉积蚀刻停止层。 构成：用于制造场发射显示器的MIM（金属/绝缘体/金属）发射体的方法包括在衬底（110）上图形化下电极（116）的步骤，形成隧道绝缘膜（120）和 在所述下电极上的场绝缘膜（118），在所述场绝缘膜和所述隧道绝缘膜上形成由ZnO薄膜制成的蚀刻停止器（123）的步骤，蚀刻保护层（126）的步骤， 总线电极（124）和接触电极（122），通过依次形成接触电极，总线电极和保护层，湿法蚀刻蚀刻停止器，接触电极，总线电极和 保护层作为掩模，以及在隧道绝缘膜上形成上电极（128）的步骤。
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公开(公告)号：KR1020030064599A
公开(公告)日：2003-08-02
申请号：KR1020020060108
申请日：2002-10-02
Applicant: 한국전자통신연구원
IPC: H05B33/04
CPC classification number: H01L51/56 , H01L51/0096 , H01L51/5253 , H01L2251/5338 , H01L2251/558
Abstract: PURPOSE: A flat panel display device and a method for forming a protective layer thereof are provided to maintain a lifetime and a characteristic by forming a protective layer in a low temperature process. CONSTITUTION: A flat panel display device is fabricated on a substrate(100). The flat panel display device formed on the substrate is transferred to a process chamber in order to form a protective layer(118). A plurality of precursors including elements of the protective layer are injected into the chamber. The protective layer of an inorganic insulating layer is formed under the temperature of 20 to 220°C by using an atomic layer deposition method using a surface reaction between the precursors. The flat panel display device is an organic electro-luminescent device including the first electrode(102), an electro-luminescent layer, and the second electrode(114). The protective layer is formed by stacking an organic insulating layer and a protective metal layer(116) to the inorganic insulating layer.
Abstract translation: 目的：提供一种平板显示装置及其保护层形成方法，以通过在低温工艺中形成保护层来保持寿命和特性。 构成：在基板（100）上制造平板显示装置。 形成在基板上的平板显示装置被转移到处理室以形成保护层（118）。 将包括保护层的元件的多个前体注入到腔室中。 通过使用前体之间的表面反应的原子层沉积法，在20〜220℃的温度下形成无机绝缘层的保护层。 平板显示装置是包括第一电极（102），电致发光层和第二电极（114）的有机电致发光器件。 通过将有机绝缘层和保护金属层（116）堆叠到无机绝缘层上形成保护层。
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公开(公告)号：KR1020030062077A
公开(公告)日：2003-07-23
申请号：KR1020020002498
申请日：2002-01-16
Applicant: 한국전자통신연구원
IPC: G01R19/00
Abstract: PURPOSE: A sensor for detecting distribution of voltages is provided to reduce a size and improve the mobility by forming the sensor for detecting distribution of voltages with an electro-luminescent device. CONSTITUTION: A sensor(20) for detecting distribution of voltages is formed with an electro-luminescent device. The electro-luminescent device includes a transparent substrate(21), a transparent electrode(22), the first insulating layer(23), a phosphor layer(24), and the second insulating layer(25). The transparent electrode is formed on the transparent substrate. The first voltage is applied to the transparent electrode. The first insulating layer is formed on the transparent electrode. The phosphor layer is formed on the first insulating layer in order to radiate the light by a voltage difference between the first voltage and the second voltage. The second insulating layer is formed on the phosphor layer.
Abstract translation: 目的：提供一种用于检测电压分布的传感器，通过形成用于利用电致发光装置检测电压分布的传感器来减小尺寸并提高移动性。 构成：用电子发光装置形成用于检测电压分布的传感器（20）。 电致发光元件包括透明基板（21），透明电极（22），第一绝缘层（23），荧光体层（24）和第二绝缘层（25）。 透明电极形成在透明基板上。 将第一电压施加到透明电极。 第一绝缘层形成在透明电极上。 荧光体层形成在第一绝缘层上，以便通过第一电压和第二电压之间的电压差来辐射光。 在荧光体层上形成第二绝缘层。
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公开(公告)号：KR100392363B1
公开(公告)日：2003-07-22
申请号：KR1020000082249
申请日：2000-12-26
Applicant: 한국전자통신연구원
IPC: C09K11/08
Abstract: PURPOSE: Provided are phosphor which emits blue, green, and red lights and is excellent in luminous property, and a method for producing the same. CONSTITUTION: The phosphor is produced by the steps of (i) vapor-depositing CaS raw material to substrate treated by desired process using chemical reaction of surface and vapor phase of precursors comprising thin film constituents; (ii) coating luminous center ions of transition metal or rare earth elements on the CaS materials by vapor deposition; and (iii) heat treating the coated CaS materials to dope the luminous center ion with the CaS materials. The luminous center ion is any one selected from the group consisting of Pb, Cu, Ce, Mn, Eu, Tb, Bi, Pr, Sm, Tm, and Yb.
Abstract translation: 目的：提供发出蓝色，绿色和红色光且发光性优异的荧光体及其制造方法。 构成：通过以下步骤生产所述磷光体：（i）将CaS原材料气相沉积到通过使用包含薄膜成分的前体的表面和气相的化学反应由所需工艺处理的基材; （ii）通过气相沉积在CaS材料上涂覆过渡金属或稀土元素的发光中心离子; 和（iii）热处理涂覆的CaS材料以用CaS材料掺杂发光中心离子。 发光中心离子是选自Pb，Cu，Ce，Mn，Eu，Tb，Bi，Pr，Sm，Tm和Yb中的任何一种。
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Patent Agency Ranking
公开(公告)号：KR1020020091640A
公开(公告)日：2002-12-06
申请号：KR1020010030473
申请日：2001-05-31
Applicant: 한국전자통신연구원
Abstract: PURPOSE: An electroluminescent display with a carbon-contained electron generation layer and a manufacturing method thereof are provided to reduce the driving voltage and improve the generation efficiency of high energy electron by dispersing a carbon nano-tube or a carbon fiber to a fluorescent material or between the fluorescent material and an insulating layer. CONSTITUTION: A lower insulating layer(13) is deposited on a structure of which a glass substrate(11) and a transparent electrode(12) are sequentially layered. An carbon-contained electron generation layer(14) is deposited on the lower insulating layer(13). A carbon nano-tube or a carbon fiber and a fluorescent material(15) is layered on the carbon-contained electron generation layer(14). An upper insulating layer(16) and a metal electrode(17) are sequentially deposited on the fluorescent material(15).
Abstract translation: 目的：提供具有含碳电子发生层的电致发光显示器及其制造方法，以通过将碳纳米管或碳纤维分散到荧光材料上来降低驱动电压并提高高能电子的发生效率，或 在荧光材料和绝缘层之间。 构成：将下绝缘层（13）沉积在依次层叠有玻璃基板（11）和透明电极（12）的结构上。 含碳电子发生层（14）沉积在下绝缘层（13）上。 碳纳米管或碳纤维和荧光材料（15）层叠在含碳电子发生层（14）上。 在荧光材料（15）上依次沉积上绝缘层（16）和金属电极（17）。
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公开(公告)号：KR1020020053975A
公开(公告)日：2002-07-06
申请号：KR1020000082249
申请日：2000-12-26
Applicant: 한국전자통신연구원
IPC: C09K11/08
CPC classification number: C09K11/55 , C09K11/7703 , C09K11/7718 , C09K11/7731 , C09K11/7746 , C09K11/7761 , H01J29/20 , Y02B20/181
Abstract: PURPOSE: Provided are phosphor which emits blue, green, and red lights and is excellent in luminous property, and a method for producing the same. CONSTITUTION: The phosphor is produced by the steps of (i) vapor-depositing CaS raw material to substrate treated by desired process using chemical reaction of surface and vapor phase of precursors comprising thin film constituents; (ii) coating luminous center ions of transition metal or rare earth elements on the CaS materials by vapor deposition; and (iii) heat treating the coated CaS materials to dope the luminous center ion with the CaS materials. The luminous center ion is any one selected from the group consisting of Pb, Cu, Ce, Mn, Eu, Tb, Bi, Pr, Sm, Tm, and Yb.
Abstract translation: 目的：提供发出蓝色，绿色和红色光并且发光性优异的荧光体及其制造方法。 构成：通过以下步骤制备荧光体：（i）通过使用包含薄膜成分的前体的表面和气相的化学反应将CaS原料气相沉积到通过所需方法处理的基底上; （ii）通过气相沉积在CaS材料上涂覆过渡金属或稀土元素的发光中心离子; 和（iii）用CaS材料热处理涂覆的CaS材料以掺合发光中心离子。 发光中心离子是选自Pb，Cu，Ce，Mn，Eu，Tb，Bi，Pr，Sm，Tm和Yb中的任一种。
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公开(公告)号：KR100327105B1
公开(公告)日：2002-03-09
申请号：KR1019990026897
申请日：1999-07-05
Applicant: 한국전자통신연구원
IPC: C23C16/48
Abstract: 본발명은원자층증착법또는화학증착법을이용하여 PbX(X=S 또는 Se) 박막을형성하는방법과 II-VI족화합물인 CaS, CaSe, SrS, SrSe, ZnS, ZnSe, BaS, BaSe, MgS, MgSe 모재료에상기 PbX(X=S, Se)를첨가하여형광체를제조하는방법에관한것이다. 본발명은특정한반응특성을나타내는 Pb-전구체를반응재료로이용하는바, 상기 Pb-전구체로서테트라알킬(tetraalkyl ; alkyl = methyl, ethyl, propyl, cyclohexyl, isopropyl) 납(lead) 또는테트라-아릴납(tetraaryl lead) 등과같은유기금속화합물을사용하고, 이를 HX(X=S 또는 Se)와반응시켜원자층증착법또는화학증착법으로매우균일한 PbX(X=S, Se) 박막을증착한다. 또한본 발명은 CaS, CaSe, SrS, SrSe, ZnS, ZnSe, BaS, BaSe, MgS 또는 MgSe 중어느하나또는이들이혼합된모재료와 PbX(X=S, Se)가일정한비가되도록증착을수행함으로써 Pb 농도를조절하면서형광체박막을성장하는방법이다. 특히본 발명은형광체제조시, 모재료에 Pb이온을선택적으로특정한상태로첨가함으로써색순도가매우우수한형광체를제조하며, 넓은농도범위의 Pb를포함하면서도색도와휘도가우수한형광체를제조하는것이다.
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公开(公告)号：KR100317989B1
公开(公告)日：2001-12-24
申请号：KR1019990062392
申请日：1999-12-27
Applicant: 한국전자통신연구원
Abstract: 본발명은원자층증착법이나화학증착법으로형성된 CaS:Pb 박막을형광막으로갖는직류구동형청색전계발광소자에관한것으로, 투명한유리기판과, 상기투명한유리기판위에형성된투명전극과, 상기투명전극위에형성된 CaS:Pb 의형광막과, 상기형광막위에형성된삽입박막및, 상기삽입박막위에형성된금속전극을포함하는구조를갖는것을특징으로하여구성된다. 이로부터, 본발명에의한직류구동형전계발광소자는종래기술에서이루지못한고순도, 고휘도의청색을발광하는효과가있으며, 특히, 교류구동형박막전계발광소자에비해훨씬낮은전압에서구동하면서충분한빛을발광하므로효율을상대적으로증가시킬수 있게된다.
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公开(公告)号：KR1020000021968A
公开(公告)日：2000-04-25
申请号：KR1019980041260
申请日：1998-09-30
Applicant: 한국전자통신연구원
IPC: H05B33/10
CPC classification number: H05B33/10 , C23C16/305
Abstract: PURPOSE: A methode for depositing a metal compound using a coordination compound combined with an electron donor type ligand as a precursor and a methode for manufacturing an electroluminescence element using the same are provided to deposit a metal compound thin film by using a coordination compound as a precursor. CONSTITUTION: A methode for depositing a metal compound using a coordination compound combined with an electron donor type ligand as a precursor and a methode for manufacturing an electroluminescence element using the same comprises the step of manufacturing a neutral ligand through a surface reaction and a meteorological reaction with a coordination compound and a sulfureted hydrogen(H2S) as a precursor.
Abstract translation: 目的：提供一种使用与电子给体型配体结合的配位化合物作为前体沉积金属化合物的方法和使用该方法制造电致发光元件的方法，通过使用配位化合物作为 前体。 构成：使用与电子给体型配体结合的配位化合物作为前体沉积金属化合物的方法和使用该方法制造电致发光元件的方法包括通过表面反应和气象反应制备中性配体的步骤 配位化合物和硫化氢（H2S）作为前体。
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