Abstract:
Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: • providing a substrate (4) component to be coated; • providing said component with a first diamond coating (2) doped with boron ; • providing said component with a second diamond coating (3); wherein : • said second diamond coating (3) is provided by CVD in a reaction chamber; during CVD deposition, during the last portion of the growth process, a controlled increase of the carbon content within the reaction chamber is provided, thereby providing an increase of the sp2/sp3 carbon (6) bonds up to an sp2 content substantially between 1% and 45%. Corresponding micromechanical components are also provided.
Abstract:
L'invention se rapporte à un procédé de fabrication (1) d'une pièce de micromécanique composite (41, 41') comportant les étapes suivantes : a) se munir (10) d'un substrat (9, 9') comportant une couche supérieure (21) et une couche inférieure (23) en matériau micro-usinable électriquement conductrices et solidarisées entre elles par une couche intermédiaire (22) électriquement isolante ; b) graver selon au moins un motif (26) dans la couche supérieure (21) jusqu'à la couche intermédiaire (22) afin de former au moins une cavité (25) dans le substrat (9, 9') ; c) recouvrir (16) la partie supérieure dudit substrat d'un revêtement (30) électriquement isolant ; d) graver (18) de manière directionnelle ledit revêtement et ladite couche intermédiaire afin de limiter leur présence uniquement au niveau de chaque paroi verticale (51, 52) formée dans ladite couche supérieure ; e) réaliser (5) une électrodéposition en connectant l'électrode à la couche conductrice inférieure (23) du substrat (9, 9') afin de former au moins une partie métallique (33, 43, 43') de ladite pièce ; f) libérer la pièce composite (41, 41') du substrat (9, 9'). L'invention concerne le domaine des pièces de micromécanique notamment pour des mouvements horlogers.
Abstract:
Le but de la présente invention est de produire des pièces en silicium par gravure du silicium comportant une ou des parties métalliques. Ce but est atteint par l'obtention d'une pièce mixte comprenant une partie métallique et une partie en silicium, caractérisée en ce que la partie en silicium comprend au moins une cavité traversante dans laquelle la partie métallique est électroformée
Abstract:
The present invention discloses a device (CD) for converting a first motion (x s ) into a second motion (Δy) responsive to said first movement (x s ) under a demagnification scale (i), comprising: a) an input portion (IP) being drivable in a rectilinear translation in a first direction (x) by an actuator (AC) causing said first motion (x s ); b) an output portion (OP) being movable by a converting blade (CB) causing said second motion (Δy) responsive to said first motion (x s ) in a second direction (y) substantially perpendicular to said first direction (x); and c) a converting section (CS) connecting said input portion (IP) to said output portion (OP); said converting section (CS) comprising an intermediate spring portion (ITP) and the converting blade (CB), c1) wherein said intermediate spring portion (ITP) comprises at least two parallel flexure blades (FB1, FB2); and c2) wherein said converting blade (CB) being substantially identical in shape to the a least two parallel flexure blades (FB1, FB2) and being offset from its neutral position by a predetermined amount (x 0 ) in the first direction (x) as compared to the neutral position of the at least two parallel flexure blades (FB1, FB2).
This device has a flexure-based structure that allows combining the advantages of classical actuators with accuracies in the micrometer range and the advantages of flexures to achieve nanometer accuracy.
Abstract:
A micro mechanical component of the present invention comprises a base, and at least one drive portion supported on the base and relatively driving to the base, in which the drive portion is formed from a diamond layer. Thus, because the drive portion has excellent mechanical strength and modulus of elasticity, the operational performance can be greatly improved as a micro mechanical component processed in a fine shape, from the conventional level. Further, because the drive portion exhibits excellent device characteristics under severe circumstances, the range of applications as a micro mechanical component can be widely expanded from the conventional range.