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161.发明公开Micromechanical component comprising a diamond layer, and production process 失效Mikromechanische Struktur mit Diamantschicht und Herstellungsverfahren
公开(公告)号：EP1271155A1
公开(公告)日：2003-01-02
申请号：EP02020310.5
申请日：1995-03-21
Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Inventor： Shiomi, Hiromu, Itami Works of Sumitomo Electric , Nishibayashi, Yoshiki c/o Itami Works of Sumitomo , Shikata, Shin-ichi c/o Itami Works of Sumitomo
CPC classification number: G01P15/0802 , B81B3/007 , B81B2201/0235 , B81B2201/0264 , B81B2201/034 , B81B2201/035 , B81B2201/054 , B81B2203/0118 , B81B2203/04 , B81C1/0015 , B81C1/00682 , B81C2201/0109 , G01H3/08 , G01H11/00 , G01H11/06 , G01P15/125 , G01P2015/0828
Abstract: A micro mechanical component, in particular an accelerometer, of the present invention comprises a diamond base, and a diamond cantilever supported on the base and relatively driving to the base. A process for producing a micromechanical component involves forming of a dummy layer promoting the growth of diamond, depositing a diamond layer by vapor phase synthesis (CVD), and removing said dummy layer.
Abstract translation: 本发明的微机械部件，特别是加速度计包括金刚石基座和支撑在基座上并相对地驱动到基座的金刚石悬臂。 制造微机械部件的方法包括形成促进金刚石生长的虚拟层，通过气相合成（CVD）沉积金刚石层，以及去除所述虚设层。
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162.发明授权THERMAL ARCHED BEAM MICROELECTROMECHANICAL DEVICES AND ASSOCIATED FABRICATION METHODS 有权具有热ARC遍历和相关方法微机械装置
公开(公告)号：EP1008161B1
公开(公告)日：2002-07-10
申请号：EP98944626.5
申请日：1998-08-28
Applicant: JDS Uniphase Corporation
Inventor： DHULER, Vijayakumar, R. , WOOD, Robert, L. , MAHADEVAN, Ramaswamy
CPC classification number: F16K99/0001 , B81B3/0024 , B81B3/0054 , B81B2201/031 , B81B2201/054 , B81B2203/0109 , B81B2203/051 , F03G7/06 , F15C5/00 , F16K99/0011 , F16K99/0034 , F16K99/0044 , F16K2099/0071 , F16K2099/0074 , F16K2099/008 , G02B6/3803 , G02B6/4226 , H01H1/0036 , H01H9/14 , H01H61/00 , H01H61/02 , H01H67/26 , H01H2001/0042 , H01H2001/0047 , H01H2001/0068 , H01H2061/006 , Y10T29/49105
Abstract: A MEMS actuator is provided that produces significant forces and displacements while consumming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause futher arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.
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163.发明授权MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS 有权ELASTOMERISCHE MIKROPUMPEN-在MIKROVENTILSYSTEME
公开(公告)号：EP1065378B1
公开(公告)日：2002-04-03
申请号：EP00305389.9
申请日：2000-06-27
Applicant: California Institute of Technology
Inventor： Unger, Marc A. , Chou, Hou-Pu , Thorsen, Todd A. , Scherer, Axel , Quake, Stephen R.
CPC classification number: B29C51/00 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L2300/0861 , B01L2300/0887 , B01L2300/123 , B01L2400/046 , B01L2400/0481 , B01L2400/0655 , B33Y80/00 , B81B5/00 , B81B2201/036 , B81B2201/054 , B81C1/00119 , B81C2201/019 , B81C2201/034 , C12Q1/6874 , F04B43/043 , F15C1/06 , F15C5/00 , F16K11/20 , F16K13/00 , F16K31/126 , F16K99/0001 , F16K99/0015 , F16K99/0046 , F16K99/0048 , F16K99/0051 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0094 , Y10T137/0491 , Y10T137/0497 , Y10T137/2224 , Y10T137/87249 , Y10T156/10 , Y10T428/24479 , Y10T428/24744 , C12Q2535/125
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164.发明公开THERMAL ARCHED BEAM MICROELECTROMECHANICAL DEVICES AND ASSOCIATED FABRICATION METHODS 有权具有热ARC遍历和相关方法微机械装置
公开(公告)号：EP1008161A1
公开(公告)日：2000-06-14
申请号：EP98944626.5
申请日：1998-08-28
Applicant: MCNC
Inventor： DHULER, Vijayakumar, R. , WOOD, Robert, L. , MAHADEVAN, Ramaswamy
CPC classification number: F16K99/0001 , B81B3/0024 , B81B3/0054 , B81B2201/031 , B81B2201/054 , B81B2203/0109 , B81B2203/051 , F03G7/06 , F15C5/00 , F16K99/0011 , F16K99/0034 , F16K99/0044 , F16K2099/0071 , F16K2099/0074 , F16K2099/008 , G02B6/3803 , G02B6/4226 , H01H1/0036 , H01H9/14 , H01H61/00 , H01H61/02 , H01H67/26 , H01H2001/0042 , H01H2001/0047 , H01H2001/0068 , H01H2061/006 , Y10T29/49105
Abstract: A MEMS actuator is provided that produces significant forces and displacements while consumming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause futher arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.
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165.发明公开Micro mechanical component and production process thereof 失效Mikromechanisches Bauelement und Verfahren zur Herstellung desselben。
公开(公告)号：EP0674181A2
公开(公告)日：1995-09-27
申请号：EP95104148.2
申请日：1995-03-21
Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Inventor： Shiomi, Hiromu, c/o Itami Works of Sumimoto Elec. , Nishibayahi. Yoshiki, c/o Itami Works of Sumimoto , Shikata, Shin-ichi, c/o Itami Works of Sumimoto
CPC classification number: G01P15/0802 , B81B3/007 , B81B2201/0235 , B81B2201/0264 , B81B2201/034 , B81B2201/035 , B81B2201/054 , B81B2203/0118 , B81B2203/04 , B81C1/0015 , B81C1/00682 , B81C2201/0109 , G01H3/08 , G01H11/00 , G01H11/06 , G01P15/125 , G01P2015/0828
Abstract: A micro mechanical component of the present invention comprises a base, and at least one drive portion supported on the base and relatively driving to the base, in which the drive portion is formed from a diamond layer. Thus, because the drive portion has excellent mechanical strength and modulus of elasticity, the operational performance can be greatly improved as a micro mechanical component processed in a fine shape, from the conventional level. Further, because the drive portion exhibits excellent device characteristics under severe circumstances, the range of applications as a micro mechanical component can be widely expanded from the conventional range.
Abstract translation: 本发明的微型机械部件包括底座以及至少一个驱动部分，其支撑在基座上并相对地驱动到基座，驱动部分由金刚石层形成。 因此，由于驱动部具有优异的机械强度和弹性模量，因此从传统的水平，作为微细的机械部件处理成微细的机械部件，可以大大提高其操作性能。 此外，由于驱动部在恶劣的环境下表现出优异的装置特性，所以作为微机械部件的应用范围可以从传统的范围得到广泛的扩展。
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Patent Agency Ranking
公开(公告)号：US20240279048A1
公开(公告)日：2024-08-22
申请号：US18568850
申请日：2022-06-15
Applicant: Water Stuff & Sun GmbH
Inventor： Johan BEJHED
CPC classification number: B81B1/006 , F16K99/0015 , G05D7/005 , B81B2201/054 , B81B2201/058 , B81B2201/10 , B81B2203/0338 , B81B2207/03 , F16K2099/008
Abstract: A fluid-control device comprises a stack of wafers in which flow components are provided as micro-electro-mechanical systems—MEMS. The flow components are selected from fluid-control components and/or fluid-monitor components. The fluid-control device has a first flow component that is encircled, in a main plane of the stack of wafers, by a second flow component.
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公开(公告)号：US20180353977A1
公开(公告)日：2018-12-13
申请号：US15781358
申请日：2016-10-07
Applicant: MEDSPRAY B.V.
CPC classification number: B05B1/14 , B05B1/3006 , B05B11/0005 , B05B15/55 , B65D83/7535 , B81B2201/054 , F16K7/17
Abstract: The present invention relates to a spray device, comprising a spray nozzle body (2) and a substantially planar membrane layer (6) suspended over a nozzle cavity (3) to generate microjets, especially for pharmaceutical applications, in particular preservative free formulations. The nozzle body (2,8) contains a microbial barrier, particularly a microvalve (23,24) between a fluid supply channel (9) and said cavity (3).
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公开(公告)号：US20180179657A1
公开(公告)日：2018-06-28
申请号：US15573408
申请日：2016-05-12
Inventor： Guillaume Lamblin , Damien Lenoble , Kevin Menguelti , Vincent Rogé
CPC classification number: C25D11/022 , B81B2201/054 , B81B2203/0315 , B81C1/00031 , B81C1/00047 , B81C2201/0114 , C23C14/16 , C23F17/00 , C25D11/024 , C25D11/04 , C25D11/26 , F16K27/00
Abstract: The invention presents a method for producing micro- or nano-structures of an anodized valve metal on a substrate. The method allows for accurate production of the structures, involves a small number of steps and is highly repeatable.
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公开(公告)号：US20170151560A1
公开(公告)日：2017-06-01
申请号：US15429706
申请日：2017-02-10
Applicant: RHEONIX, INC.
Inventor： Peng Zhou , Lincoln C. Young
CPC classification number: F16K7/12 , B01F5/0683 , B01F5/0688 , B01F11/0071 , B01F13/0059 , B01F2215/0034 , B01L3/502707 , B01L3/50273 , B01L3/502738 , B01L2200/12 , B01L2300/0816 , B01L2300/0861 , B01L2300/0867 , B01L2300/0887 , B01L2400/0481 , B01L2400/0487 , B01L2400/06 , B01L2400/0638 , B01L2400/0655 , B01L2400/084 , B29C65/4895 , B29C66/004 , B29C66/54 , B29C66/5412 , B29C66/71 , B29K2025/00 , B29K2025/04 , B29K2033/08 , B29K2069/00 , B29K2101/12 , B29L2031/7496 , B29L2031/7506 , B29L2031/756 , B81B3/0021 , B81B2201/036 , B81B2201/054 , B81B2203/0127 , B81C1/00103 , B81C1/00158 , F04B43/028 , F04B43/043 , F04B43/06 , F15C1/08 , F16K99/0001 , F16K99/0015 , F16K99/0021 , F16K99/0034 , F16K99/0055 , F16K99/0057 , F16K99/0059 , F16K2099/0074 , F16K2099/0076 , F16K2099/0078 , F16K2099/008 , F16K2099/0084 , F16K2099/0094 , Y10T29/49405 , Y10T137/212 , Y10T137/2202 , Y10T137/2218 , Y10T137/8593 , Y10T137/85978 , Y10T156/1002 , Y10T156/1043 , B29K2033/12 , B29K2025/06
Abstract: Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.
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公开(公告)号：US20160053916A1
公开(公告)日：2016-02-25
申请号：US14713332
申请日：2015-05-15
Applicant: DunAn Microstaq, Inc.
Inventor： Parthiban Arunasalam , Chen Yang , E. Nelson Fuller , Joe A. Ojeda, SR. , Gengxun Kara Gurley
CPC classification number: B81B7/0061 , B81B2201/054 , B81B2203/0307 , B81B2203/0315 , F16K99/0011 , F16K99/0028 , F16K99/0044 , F16K2099/008
Abstract: A plate is adapted for use in a microvalve and includes a displaceable member configured for movement between a closed position, wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve. The displaceable member includes an elongated arm portion, a plurality of actuator ribs connected through a central spine to the elongated arm portion, and a hinge portion. The actuator ribs have a first portion and a second portion, the first portion having a first end and a second end, the second end of the first portion connected to the central spine, the second portion having a first end and a second end, the second end of the second portion connected to the central spine. A channel is formed in the plate. A plurality of elongated openings are formed in the plate and define the actuator ribs, each elongated opening having longitudinally extending side edges. One of the elongated openings separates each rib in the second portion of ribs from an adjacent rib or the plate. The channel and a longitudinally extending side edge of one of the elongated openings separate the second portion of the actuator ribs from the plate and define an electrical isolation region.
Abstract translation: 板适于用于微型阀，并且包括可移位构件，其构造成在关闭位置之间移动，其中可移位构件防止通过微型阀的流体连通和打开位置，其中可移位构件不阻止流体通过微型阀连通 。 可移动构件包括细长的臂部分，通过中心脊连接到细长臂部分的多个致动器肋和铰链部分。 致动器肋具有第一部分和第二部分，第一部分具有第一端和第二端，第一部分的第二端连接到中心脊，第二部分具有第一端和第二端， 第二部分的第二端连接到中心脊。 在板中形成通道。 多个细长的开口形成在板中并限定致动器肋，每个细长的开口具有纵向延伸的侧边缘。 一个细长的开口将肋的第二部分中的每个肋与相邻的肋或板分开。 一个细长开口的通道和纵向延伸的侧边缘将致动器肋的第二部分与板分隔开并限定电隔离区。
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