公开(公告)号：US20120248959A1

公开(公告)日：2012-10-04

申请号：US13075325

申请日：2011-03-30

Applicant: Wolfram Buehler ,  Volker Drexel

Inventor： Wolfram Buehler ,  Volker Drexel

IPC: H01J61/52 ,  H01J29/64 ,  H01J29/46

CPC classification number: H01J3/022 ,  H01J1/148 ,  H01J1/3044 ,  H01J1/50 ,  H01J3/02 ,  H01J37/073 ,  H01J2237/06383 ,  H01J2237/24465 ,  H01J2237/24557

Abstract: An electron beam source includes a base and a tip fixed to the base and extending from the base. The tip includes a core and a coating applied to the core. The core has a surface that includes a first material. The coating includes a second material which is different from the first material. The second material forms a surface of the tip, and the second coating includes more than 30% by weight of a lanthanide element.

Abstract translation: 电子束源包括基部和固定到基部并从基部延伸的尖端。 尖端包括芯和施加到芯的涂层。 芯具有包括第一材料的表面。 涂层包括与第一材料不同的第二材料。 第二材料形成尖端的表面，第二涂层包含超过30重量％的镧系元素。

公开(公告)号：US08159118B2

公开(公告)日：2012-04-17

申请号：US11266032

申请日：2005-11-02

Applicant: Viktor A. Tymashov ,  Oleg L. Zhdanov ,  Sergiy I. Ryabenko ,  Andriy A. Tsepkalov ,  Steven M. Burns

Inventor： Viktor A. Tymashov ,  Oleg L. Zhdanov ,  Sergiy I. Ryabenko ,  Andriy A. Tsepkalov ,  Steven M. Burns

IPC: H01J37/00 ,  H05H1/00

CPC classification number: H01J37/3053 ,  H01J3/02 ,  H01J3/027 ,  H01J37/065 ,  H01J2237/06308 ,  H01J2237/14 ,  H01J2237/15 ,  H01J2237/3132

Abstract: An electron gun includes the following: a primary thermionic electron source, a secondary thermionic electron source and a focusing electrode disposed within a first housing that includes one or more reference members adjustably attached to a housing support connected to a first platform; an anode and one or more focusing coils disposed within a second housing comprising one or more insulating members adjustably connected to the first platform; and one or more deflection coils disposed within a third housing connected to the second housing and located opposite said first housing.

Abstract translation: 电子枪包括以下：初级热离子电子源，二次热离子电子源和聚焦电极，其设置在第一壳体内，该第一壳体包括一个或多个可调节地连接到连接到第一平台的壳体支撑件的参考构件; 阳极和设置在第二壳体内的一个或多个聚焦线圈，包括可调节地连接到第一平台的一个或多个绝缘构件; 以及设置在连接到第二壳体并且与第一壳体相对定位的第三壳体内的一个或多个偏转线圈。

公开(公告)号：US20080211376A1

公开(公告)日：2008-09-04

申请号：US12075067

申请日：2008-03-07

Applicant: Hiroshi Yasuda ,  Takeshi Haraguchi

Inventor： Hiroshi Yasuda ,  Takeshi Haraguchi

IPC: H01J29/48

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/02 ,  H01J29/48 ,  H01J37/063 ,  H01J37/075 ,  H01J2237/06316

Abstract: An electron gun having an electron source emitting electrons includes: an acceleration electrode which accelerates the electrons; an extraction electrode which has a spherical concave surface having the center on an optical axis and facing the electron emission surface, and which extracts an electron from the electron emission surface; and a suppressor electrode which suppresses electron emission from a side surface of the electron source. In the electron gun, an electric field is applied to the electron emission surface while the electron source is kept at a low temperature in such an extent that sublimation of a material of the electron source would not be caused, to cause the electron source to emit a thermal field emission electron.

Abstract translation: 具有发射电子的电子源的电子枪包括：加速电子的加速电极; 提取电极，其具有在光轴上具有中心并面向电子发射表面的球形凹面，并从电子发射表面提取电子; 以及抑制来自电子源的侧面的电子发射的抑制电极。 在电子枪中，电子源被施加到电子发射表面，同时电子源保持在低温，使得不会引起电子源的材料的升华，导致电子源发射 热场发射电子。

公开(公告)号：US07116064B1

公开(公告)日：2006-10-03

申请号：US10789662

申请日：2004-02-27

Applicant: Hans Peter Bluem

Inventor： Hans Peter Bluem

IPC: H05H7/00 ,  H05H9/00

CPC classification number: H01J3/02 ,  H05H7/18 ,  H05H15/00

Abstract: An electron gun includes a cathode, a cavity, and an energy input. The cavity resonates at a particular frequency, and the cathode generates an electron beam along its longitudinal axis when driven by resonant electromagnetic radiation of the particular frequency. The energy input introduces electromagnetic radiation of the particular frequency into the cavity along the longitudinal axis of the cathode.

Abstract translation: 电子枪包括阴极，空腔和能量输入。 空腔以特定频率谐振，当由特定频率的共振电磁辐射驱动时，阴极沿其纵向轴线产生电子束。 能量输入将特定频率的电磁辐射沿着阴极的纵轴引入空腔。

公开(公告)号：US06822241B2

公开(公告)日：2004-11-23

申请号：US10264599

申请日：2002-10-03

Applicant: David Schut ,  Alexander Govyadinov ,  Xioofeng Yang

Inventor： David Schut ,  Alexander Govyadinov ,  Xioofeng Yang

IPC: H01J306

CPC classification number: H01J3/02 ,  H01J3/022 ,  H01J3/18 ,  H01J29/481 ,  H01J29/62 ,  H01J2237/3175

Abstract: An emitter device including a focusing array with plural focusing columns to focus emissions from one or more emitters onto a target medium. Relative movement between the target medium and the focused emissions allows each focusing column to focus emissions over an area of the target medium encompassing the movement range. In a preferred embodiment, separate emitter, focusing array and target medium substrates are used. The focusing array may be moveable, or in a particularly preferred embodiment, is affixed to the emitter substrate, in which case the target medium substrate is movable or the focusing array includes beam direction control.

公开(公告)号：US06815875B2

公开(公告)日：2004-11-09

申请号：US09795240

申请日：2001-02-27

Applicant: Huei-Pei Kuo ,  Henryk Birecki ,  Si-Ty Lam ,  Steven Louis Naberhuis

Inventor： Huei-Pei Kuo ,  Henryk Birecki ,  Si-Ty Lam ,  Steven Louis Naberhuis

IPC: H01J102

CPC classification number: B82Y10/00 ,  G11B9/10 ,  G11B9/1409 ,  H01J3/02 ,  H01J2201/308

Abstract: An electron source includes a planar emission region for generating an electron emission, and a focusing structure for focusing the electron emission into an electron beam.

公开(公告)号：US20040141169A1

公开(公告)日：2004-07-22

申请号：US10699246

申请日：2003-10-30

Inventor： Marco Jan-Jaco Wieland ,  Bert Jan Kampherbeek ,  Alexander Hendrik Vincent van Veen ,  Pieter Kruit

IPC: G03B001/00

CPC classification number: H01J3/02 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/06 ,  H01J37/3177 ,  H01J2237/0435 ,  H01J2237/06308 ,  H01J2237/06375 ,  H01J2237/3045

Abstract: The invention relates to an electron beam exposure apparatus for transferring a pattern onto the surface of a target, comprising: a beamlet generator for generating a plurality of electron beamlets; a modulation array for receiving said plurality of electron beamlets, comprising a plurality of modulators for modulating the intensity of an electron beamlet; a controller, connected to the modulation array for individually controlling the modulators, an adjustor, operationally connected to each modulator, for individually adjusting the control signal of each modulator; a focusing electron optimal system comprising an array of electrostatic lenses wherein each lens focuses a corresponding individual beamlet, which is transmitted by said modulation array, to a cross section smaller than 300 nm, and a target holder for holding a target with its exposure surface onto which the pattern is to be transferred in the first focal plane of the focusing electron optical system.

Abstract translation: 本发明涉及一种用于将图案转印到目标表面上的电子束曝光装置，包括：用于产生多个电子束的小波发生器; 用于接收所述多个电子子束的调制阵列，包括用于调制电子束的强度的多个调制器; 连接到用于单独控制调制器的调制阵列的控制器，可操作地连接到每个调制器的调节器，用于单独调整每个调制器的控制信号; 聚焦电子最优系统，其包括静电透镜阵列，其中每个透镜将由所述调制阵列传输的相应单独的子束聚焦到小于300nm的横截面，以及用于将其曝光表面保持在其上的目标保持器 其图案将在聚焦电子光学系统的第一焦平面中转印。

公开(公告)号：US20030085645A1

公开(公告)日：2003-05-08

申请号：US09985737

申请日：2001-11-06

Applicant: Denki Kagaku Kogyo Kabushiki Kaisha

Inventor： Yoshinori Terui ,  Shinpei Hirokawa ,  Katsuyoshi Tsunoda

IPC: H01J029/46

CPC classification number: H01J3/02 ,  H01J1/148 ,  H01J1/15 ,  H01J37/065

Abstract: An electron gun comprising an electron emission cathode, a control electrode and an extractor wherein the electron emission cathode is mode of rare earth hexaboride and a tip of the electron emission cathode is located between the control electrode and the extractor.

Abstract translation: 一种电子枪，包括电子发射阴极，控制电极和提取器，其中电子发射阴极是稀土六硼化物的模式，电子发射阴极的尖端位于控制电极和提取器之间。

公开(公告)号：US06559586B1

公开(公告)日：2003-05-06

申请号：US09621575

申请日：2000-07-21

Applicant: Roger Casanova Alig ,  Dennis John Bechis ,  David Arthur New

Inventor： Roger Casanova Alig ,  Dennis John Bechis ,  David Arthur New

IPC: H01J2970

CPC classification number: H01J29/503 ,  H01J3/02 ,  H01J29/488 ,  H01J29/51 ,  H01J2229/481 ,  H01J2229/4813 ,  H01J2229/4834

Abstract: A cathode ray tube and a plural beam electron gun therefor include a main lens that comprises a tubular focus grid G5 and a conductive coating on the inner surface of the tube neck. The neck coating extends from the region of focus grid G5 towards the faceplate of the cathode ray tube. Preferably, the exit of the focus grid G5 is non-planar and is curved or undulated and focus grid G5 includes an aperture plate intermediate its entrance and exit. The aperture plate preferably has an elliptical center beam opening and connected-semi-elliptical outer-beam openings, to better converge and focus the outer and center electron beams. Also preferably, the focus grid G5 is centrally located in the tube neck and at least partly surrounded by the conductive neck coating.

Abstract translation: 一种阴极射线管及其多束电子枪包括：主透镜，其包括管状聚焦栅格G5和在管颈内表面上的导电涂层。 颈部涂层从聚焦栅格G5的区域朝向阴极射线管的面板延伸。 优选地，聚焦栅格G5的出口是非平面的并且是弯曲的或起伏的，并且聚焦栅格G5包括在其入口和出口之间的孔板。 孔板优选地具有椭圆形中心束开口和连接的半椭圆形外束开口，以更好地会聚和聚焦外部和中心电子束。 还优选地，焦点栅格G5位于管颈中心并且至少部分地被导电颈部涂层包围。

公开(公告)号：US20020175293A1

公开(公告)日：2002-11-28

申请号：US09866418

申请日：2001-05-25

Applicant: Siemens Information and Communication Networks, Inc.

Inventor： Kenneth Whitham

IPC: G21K001/08

CPC classification number: H01J3/02

Abstract: A radio frequency (RF) modulated electron gun includes a cathode, electrically coupled to operate as a source of charged particles, and a grid, positioned apart from the cathode. The grid and the cathode are electrically coupled to a grid voltage source and to a RF source. The grid voltage source places the grid at a first potential, and the RF source places the grid at a second potential selected to produce groups of the charged particles. The groups of charged particles are produced with each period of a signal received from the RF source.

Abstract translation: 射频（RF）调制电子枪包括电耦合以作为带电粒子源工作的阴极和与阴极隔开定位的栅极。 电网和阴极电耦合到电网电压源和RF源。 电网电压源将电网置于第一电位，并且RF源将电网放置在选择的第二电位以产生带电粒子组。 在从RF源接收的信号的每个周期产生带电粒子组。