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    Small scale actuators and methods for their formation and use
    182.
    发明授权
    Small scale actuators and methods for their formation and use 有权
    小型执行器及其形成和使用的方法

    公开(公告)号：US07175772B2

    公开(公告)日：2007-02-13

    申请号：US10738827

    申请日：2003-12-16

    Applicant: Jerome M. Eldridge

    Inventor： Jerome M. Eldridge

    IPC: B81C1/00

    CPC classification number: F16K99/0001 ,  B81B2201/054 ,  F03G7/06 ,  F16K13/10 ,  F16K99/0011 ,  F16K99/0017 ,  F16K99/0036 ,  F16K99/0044 ,  F16K99/0061 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0084 ,  Y10T137/0318 ,  Y10T137/0497 ,  Y10T137/1797 ,  Y10T137/1812 ,  Y10T137/1827 ,  Y10T137/6606 ,  Y10T137/87764

    Abstract: An actuator assembly and method for making and using an actuator assembly. In one embodiment, the assembly includes an actuator body having an actuator channel with a first region and a second region. An actuator is disposed in the actuator channel and is movable when in a flowable state between a first position and a second position. A heater is positioned proximate to the actuator channel to heat the actuator from a solid state to a flowable state. A source of gas or other propellant is positioned proximate to the actuator channel to drive the actuator from the first position to the second position. The actuator has a higher surface tension when engaged with the second region of the channel than when engaged with the first region. Accordingly, the actuator can halt upon reaching the second region of the channel due to the increased surface tension between the actuator and the second region of the channel.

    Abstract translation: 一种用于制造和使用致动器组件的致动器组件和方法。 在一个实施例中，组件包括致动器主体，其具有带有第一区域和第二区域的致动器通道。 致动器设置在致动器通道中并且当处于第一位置和第二位置之间的可流动状态时可移动。 加热器位于致动器通道附近，以将致动器从固态加热到可流动状态。 气体源或其它推进剂的位置靠近致动器通道定位，以将致动器从第一位置驱动到第二位置。 当与通道的第二区域接合时，致动器具有比与第一区域接合时更高的表面张力。 因此，由于致动器和通道的第二区域之间的表面张力增大，致动器可能在到达通道的第二区域时停止。

    Method for producing and testing a corrosion-resistant channel in a silicon device
    183.
    发明授权
    Method for producing and testing a corrosion-resistant channel in a silicon device 有权
    在硅器件中生产和测试耐腐蚀通道的方法

    公开(公告)号：US07125739B2

    公开(公告)日：2006-10-24

    申请号：US10929145

    申请日：2004-08-27

    Applicant: James M. Harris ,  Sapna Patel

    Inventor： James M. Harris ,  Sapna Patel

    IPC: H01L21/00

    CPC classification number: H01L22/20 ,  B81B7/0012 ,  B81B2201/054 ,  B81B2201/058 ,  B81C99/0045 ,  B81C2203/038 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0034 ,  F16K99/0036 ,  F16K99/0059 ,  F16K2099/0074 ,  H01L21/02071 ,  H01L22/24 ,  H01L22/34

    Abstract: A method for producing a corrosion-resistant channel in a wetted path of a silicon device enables such device to be used with corrosive compounds, such as fluorine. A wetted path of a MEMS device is coated with either (1) an organic compound resistant to attack by atomic fluorine or (2) a material capable of being passivated by atomic fluorine. The device is then exposed to a gas that decomposes into active fluorine compounds when activated by a plasma discharge. One example of such a gas is CF4, an inert gas that is easier and safer to work with than volatile gases like ClF3. The gas will passivate the material (if applicable) and corrode any exposed silicon. The device is tested in such a manner that any unacceptable corrosion of the wetted path will cause the device to fail. If the device operates properly, the wetted path is deemed to be resistant to corrosion by fluorine or other corrosive compounds, as applicable.

    Abstract translation: 在硅装置的润湿路径中制造耐腐蚀通道的方法使得这种装置能够与诸如氟的腐蚀性化合物一起使用。 MEMS器件的润湿路径涂覆有（1）抗原子氟侵蚀的有机化合物或（2）能够被原子氟钝化的材料。 然后将该装置暴露于当通过等离子体放电激活时分解成活性氟化合物的气体。 这种气体的一个实例是CF 4 SO 3，惰性气体比诸如ClF 3 3的挥发性气体更容易和更安全地工作。 气体将钝化材料（如果适用）并腐蚀任何暴露的硅。 该装置以这样的方式被测试，使得湿润路径的任何不可接受的腐蚀将导致装置失效。 如果设备正常工作，则湿润路径被认为是耐氟或其他腐蚀性化合物的腐蚀，如适用的。

    Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
    187.
    发明授权
    Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods 失效
    微机电柔性膜静电阀装置及相关制造方法

    公开(公告)号：US06590267B1

    公开(公告)日：2003-07-08

    申请号：US09661997

    申请日：2000-09-14

    Applicant: Scott H. Goodwin-Johansson ,  Gary E. McGuire

    Inventor： Scott H. Goodwin-Johansson ,  Gary E. McGuire

    IPC: H01L2978

    CPC classification number: F16K99/0001 ,  B81B3/0021 ,  B81B2201/054 ,  B81B2203/0127 ,  B81B2203/04 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0028 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H2059/0081

    Abstract: A MEMS (Micro Electro Mechanical System) valve device driven by electrostatic forces is provided. This valve device can provide for fast actuation, large valve force and large displacements while utilizing minimal power. The MEMS valve device includes a substrate having an aperture formed therein, a substrate electrode, a moveable membrane that overlies the aperture and has an electrode element and a biasing element. Additionally, at least one resiliently compressible dielectric layer is provided to insure electrical isolation between the substrate electrode and electrode element of the moveable membrane. In operation, a voltage differential is established between the substrate electrode and the electrode element of the moveable membrane to move the membrane relative to the aperture to thereby controllably adjust the portion of the aperture that is covered by the membrane. Additional embodiments provide for the resiliently compressible dielectric layer to be formed on either or both the substrate electrode and the moveable membrane and provide for either or both the valve seat surface and the valve seal surface. In yet another embodiment the resiliently compressible dielectric layer(s) have a textured surface; either at the valve seat, the valve seal or at both surfaces. In another embodiment of the invention a pressure-relieving aperture is defined within the substrate and is positioned to underlie the moveable membrane. Alternatively, additional embodiments of the present invention provide for MEMS valve arrays driven by electrostatic forces. The MEMS valve array comprises a substrate having a plurality of apertures defined therein. A method for making the MEMS valve device is also provided.

    Abstract translation: 提供了由静电力驱动的MEMS（微机电系统）阀装置。 该阀装置可以提供快速致动，大的阀力和大的位移，同时利用最小的功率。 MEMS阀装置包括其中形成有孔的基板，基板电极，覆盖在孔上并具有电极元件和偏置元件的可移动膜。 此外，提供至少一个可弹性压缩介电层以确保基板电极和可移动​​膜的电极元件之间的电隔离。 在操作中，在基板电极和可移动​​膜的电极元件之间建立电压差以使膜相对于孔移动，从而可控地调节由膜覆盖的孔的部分。 另外的实施例提供了可弹性压缩的介电层，其形成在基板电极和可移动​​膜之一或两者上，并为阀座表面和阀密封表面中的一个或两者提供。 在另一个实施例中，弹性可压缩介电层具有纹理表面; 无论是在阀座，阀门密封件还是在两个表面。 在本发明的另一个实施例中，压力释放孔限定在衬底内并且被定位成可移动膜的下面。 或者，本发明的另外的实施例提供了由静电力驱动的MEMS阀阵列。 MEMS阀阵列包括其中限定有多个孔的基板。 还提供了制造MEMS阀装置的方法。

    Microelectromechanical valves including single crystalline material components
    190.
    发明授权
    Microelectromechanical valves including single crystalline material components 有权
    微电机阀包括单晶材料组分

    公开(公告)号：US06386507B2

    公开(公告)日：2002-05-14

    申请号：US09802260

    申请日：2001-03-08

    Applicant: Vijayakumar R. Dhuler ,  Mark David Walters

    Inventor： Vijayakumar R. Dhuler ,  Mark David Walters

    IPC: F16K3100

    CPC classification number: F15C5/00 ,  B81B3/0051 ,  B81B2201/031 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  B81C2203/031 ,  B81C2203/036 ,  F16K99/0001 ,  F16K99/0007 ,  F16K99/0009 ,  F16K99/0011 ,  F16K99/0036 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H2001/0042

    Abstract: A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate and a thermally actuated microactuator and associated components disposed on the substrate and formed as a unitary structure from a single crystalline material, wherein the associated components are actuated by the microactuator upon thermal actuation thereof. For example, the MEMS device may be a valve. As such, the valve may include at least one valve plate that is controllably brought into engagement with at least one valve opening in the microelectronic substrate by selective actuation of the microactuator. While the MEMS device can include various microactuators, the microactuator advantageously includes a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween. By heating the at least one arched beam of the microactuator, the arched beams will further arch such that the microactuator moves between a closed position in which the valve plate sealingly engages the valve opening and an open position in which the valve plate is at least partly disengaged from and does not seal the valve opening.

    Abstract translation: 提供了一种微电子机械（MEMS）装置，其包括微电子基板和热致动的微致动器以及设置在基板上并由单晶材料形成为单一结构的相关部件，其中相关部​​件由热致动器由微致动器致动 。 例如，MEMS器件可以是阀。 因此，阀可以包括至少一个阀板，该阀板通过选择性地致动微致动器而可控制地与微电子衬底中的至少一个阀开口接合。 虽然MEMS器件可以包括各种微致动器，微致动器有利地包括设置在基板上的一对间隔开的支撑件和在其间延伸的至少一个拱形梁。 通过加热微致动器的至少一个拱形梁，拱形梁将进一步拱起，使得微致动器在关闭位置之间移动，在该关闭位置中阀板密封地接合阀开口和打开位置，在该位置阀板至少部分地 与阀开口脱离并不密封。

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