Abstract:
PROBLEM TO BE SOLVED: To provide a spectral optical system which is suitable for detecting light having a specific wavelength area, and a spectral measuring apparatus using the same.SOLUTION: A spectral optical system is equipped with: a reflection member; a diffraction grating; and an input element. The reflection member has a recessed surface provided along a first circle having the center. The diffraction grating has an edge part, is provided in the projected shape along a second circle which is concentric with the first circle, light reflected on the recessed surface of the reflection member is made incident on the diffraction grating. The input element is arranged at a predetermined position to the reflection member and the diffraction grating so that diffraction light passes between input light input in the spectral optical system and the edge part of the diffraction grating. The diffraction light is the one which has a wavelength area of 600 nm or more and 1,100 nm or less, emitted from the diffraction grating, and reflected on the recessed surface.
Abstract:
PROBLEM TO BE SOLVED: To manufacture a minute tilt structure.SOLUTION: A method for manufacturing the tilt structure includes the steps of:forming a shaft section 13b on a substrate section 13a; forming a sacrificial film, from which an upper surface of the shaft section is exposed, and which has an upper surface continuous to the upper surface of the shaft section, on the substrate section 13a; providing a tilt structure film 7 to the upper surface of the shaft section and the upper surface of the sacrificial film; providing a thin film section 11 located on a corner section composed of the upper surface of the shaft section and a side surface of the shaft section to the tilt structure film by processing the tilt structure film 7 located on the corner section so as to have a thin film thickness;removing the sacrificial film between the tilt structure film 7 and the substrate section 13a; supplying a space between the tilt structure film and the substrate section with a fluid 18, removing the fluid 18 to thereby bend the tilt structure film in the thin film section 11, and bonding an end of the tilt structure film to the substrate section to thereby forming an acute angle by the substrate section and the tilt structure film.
Abstract:
PROBLEM TO BE SOLVED: To provide a light quantity measuring instrument capable of measuring properly a light to be measured of which the light quantity is fluctuated periodically, in a short time. SOLUTION: Charges generated and accumulated in a photodiode 128 in a measuring period are read in, a plurality of times, a control computation part 122 obtains pixel data D(1,i), D(2,i) to D(M,i) (i=1, 2, to N), in response to quantity of the charges Q(1,i), Q(2,i) to Q(M,i) generated and accumulated by the photodiodes 128, respectively, in a plurality of accumulation periods SP(1), SP(2) to SP(M) provided by dividing the measuring period MP. The control computation part 122 integrates the plurality of pixel data D(1,i), D(2,i) to D(M,i) and calculates pixel data D(1), D(2) to D(N), in response to quantity of the charges Q(1), Q(2) to Q(N) generated and accumulated by the photodiodes 128 in the measuring period MP. COPYRIGHT: (C)2009,JPO&INPIT