Abstract:
PURPOSE: A reflective reticle chuck and a reflective illumination system including the same, a method for increasing the flatness of a reflective reticle, and a method for manufacturing a semiconductor device are provided to accurately control the flatness of the reflective reticle, thereby increasing productivity. CONSTITUTION: A reflective reticle chuck includes a non fluid flowing part(141) and a fluid flowing part(145). The non fluid flowing part is an outer area and the fluid flowing part is a central area. The fluid flowing part is made of cells. A flat frame is fixed to an edge area. Cells comprise an elevator. Some frames are expanded between cells.
Abstract:
PURPOSE: A fuel cell system and a control method thereof are provided to raise temperature economically and rapidly until a stack of the fuel cell system can perform normal operation by heating a stack of the fuel cell system through a heat medium using heat energy generated from a carbon monoxide remover. CONSTITUTION: A fuel cell system comprises: a forming device(20) which generates reformed gas and includes a reformer(23) and a carbon monoxide remover; and a stack(30) which generates energy by receiving the reformed gas generated from the reformer. A control method of a fuel cell system comprises initial startup and normal startup. The initial startup heats a heat medium using at least one between heat energy generated as a reformer is operated and heat energy generated as the CO gas removal device is operated. The normal startup increases the stack to the normal operation temperature using the heated heat medium.