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公开(公告)号：KR1020100087791A
公开(公告)日：2010-08-06
申请号：KR1020090006775
申请日：2009-01-29
Applicant: (주)펨트론 , 전북대학교산학협력단
Abstract: PURPOSE: A birefringence measuring method and apparatus using off-axis digital holography are provided to enable measurement of a large object such as LCD glass and minimize causes of noise. CONSTITUTION: A birefringence measuring apparatus using off-axis digital holography comprises a first photographing unit(50), a second photographing unit(60), a light source(10), a first beam splitter(20), a reference mirror(30), a second beam splitter(21), a reflection mirror(40), a third beam splitter(22), a vertical linear polarizer(51), a horizontal linear polarizer(61), and a controller. The light source generates a linear polarized beam having a polarization direction of 45°. The first beam splitter outputs the linear polarized beam by dividing it into a measurement beam route and a reference beam route. The reference mirror is arranged to incline to the reference beam route in order to apply off-axis technique. The second beam splitter faces the linear polarized beam to a reference mirror. The reflection mirror reflects the linear polarized beam to a measurement object(100). The third beam splitter outputs the measurement beam by dividing it into the first photographing unit and the second photographing unit. The vertical linear polarizer passes the vertical polarization component of interference light and outputs it to the first photographing unit. The horizontal linear polarizer passes through the horizontality polarization component of interference light and outputs it to the second photographing unit. The controller calculates the level of birefringence on the measurement object.
Abstract translation: 目的：提供使用离轴数字全息术的双折射测量方法和装置，以便能够测量诸如LCD玻璃的大型物体并且最小化噪声的原因。 构成：使用离轴数字全息术的双折射测量装置包括第一拍摄单元（50），第二拍摄单元（60），光源（10），第一分束器（20），参考反射镜（30） ，第二分束器（21），反射镜（40），第三分束器（22），垂直线偏振器（51），水平线性偏振器（61）和控制器。 光源产生偏振方向为45°的线偏振光束。 第一分束器通过将线偏振光束分成测量光束路径和参考光束路径来输出。 参考镜被布置成倾斜到参考光束路径以便应用离轴技术。 第二分束器将线偏振光束面对参考反射镜。 反射镜将线偏振光束反射到测量对象（100）。 第三分束器通过将测量光束分成第一拍摄单元和第二拍摄单元来输出测量光束。 垂直线偏振器通过干涉光的垂直偏振分量并将其输出到第一拍摄单元。 水平线性偏振器通过干涉光的水平偏振分量并将其输出到第二拍摄单元。 控制器计算测量对象上的双折射水平。
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公开(公告)号：KR100867302B1
公开(公告)日：2008-11-06
申请号：KR1020080034784
申请日：2008-04-15
Applicant: (주)펨트론 , 전북대학교산학협력단
IPC: G03H5/00
Abstract: A 3D measurement device using digital holography is provided to complement a demerit in measurement speed the existing on-axis method has and a demerit in lateral resolution, thereby satisfying the measurement speed and the lateral resolution. An optical source unit(10) emits light toward a light splitting unit(20). The optical source unit comprises a light source(11), a fixing member(13) and a light source polarizing plate(12). The light source emits laser light of short wavelength. A He-Ne laser is used as a light source. If laser light having short wavelength is emitted, another type laser can be applied.
Abstract translation: 提供了使用数字全息术的3D测量装置，以补偿现有的轴上方法具有的测量速度和横向分辨率的缺点，从而满足测量速度和横向分辨率。 光源单元（10）向分光单元（20）发射光。 光源单元包括光源（11），固定构件（13）和光源偏振板（12）。 光源发出短波长的激光。 氦氖激光器用作光源。 如果发射具有短波长的激光，则可以应用另一种类型的激光。
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公开(公告)号：KR1020170031642A
公开(公告)日：2017-03-21
申请号：KR1020160117279
申请日：2016-09-12
Applicant: 전북대학교산학협력단 , 보드 오브 리전츠, 더 유니버시티 오브 텍사스 시스템
CPC classification number: G01J3/2889 , G01J2003/283 , G02B5/3033 , G02B27/283
Abstract: 본발명에따른고속분광편광측정장치는, 광대역백색광을평행광으로변환시키고, 상기평행광의크기를조절하여측정물을향하여평행광을조사하는평행광모듈; 상기측정물을투과한평행광의광경로를빔 스플리터로직행경로와변조경로로나누고, 변조경로로나뉘어진평행광을편광자를통하여편광상태를변조시키고, 직행경로로의평행광과변조경로의평행광을수광하고듀얼스펙트럼감지모듈로조사하는편광변조모듈; 상기편광변조모듈로부터입사된평행광을빔 스플리터로분리하고, 분리된평행광을각각 s선형편광상태와 p선형편광상태로편광하고, 듀얼분광기로연결하여각각편광된평행광의간섭스펙트럼을스냅샷으로측정하는듀얼스펙트럼감지모듈; 상기듀얼스펙트럼감지모듈이측정한스냅샷의측정값을기초로하여분광정보를갖는스토크스벡터를계산하는컴퓨터장치; 를포함할수 있으며, 스냅샷방식으로측정함으로써기존발명과대비하여수십배 이상의고속측정이가능하여다이나믹한측정이필요한반도체나디스플레이생산공정인라인모니터링분야에큰 효과를가져올수 있다. 또한, 본발명의고속분광편광측정장치의구성을변형함으로써, 고속분광타원계측기및 고속분광반사계측기의구성도도출해낼수 있다.
Abstract translation: 快速分光偏振计测装置，并转换成光平行于光学模块的并行宽带白光用于通过调整根据本发明的平行光的尺寸朝向照射测量对象的平行光; 该测量给出一个作为通过水传递到直线路径和调制路径到光束分离器平行光的光路，通过并行光偏振器由调制路径分为偏振状态和，平行调节为平行光，并且调制路径直线路径， 偏振调制模块，用于接收光并照射双频谱感测模块; 分离的平行光入射的偏振调制模块作为分束器，每个s直线偏振光透过的分开的平行光状态和对具有线性偏振状态，和偏振，通过连接一个双分光计镜头捕捉的各偏振平行光的干涉光谱 双频谱感测模块，用于测量电池的功率; 一种计算装置，用于基于由双频谱感测模块测量的快照的测量值来计算具有频谱信息的斯托克斯矢量; 它可以包括，并且通过测量的快照的方法可能导致在需要半导体或显示器制造过程中在线监控，一个快速测量是可能通过比现有发明的测量量值的动态几个数量级的较大的效果。 此外，通过修饰本发明的高速分光偏振测量装置的结构，它获得的高速椭圆偏振光谱仪和高速光谱反射计haenaelsu的结构图。
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公开(公告)号：KR1020120087436A
公开(公告)日：2012-08-07
申请号：KR1020110008620
申请日：2011-01-28
Applicant: 전북대학교산학협력단
CPC classification number: Y02E10/60
Abstract: PURPOSE: A cooling system of a vehicle using solar light is provided to cool the indoor space of a vehicle through eco-friendly method though the engine of a vehicle is stopped, by using the power generated by a solar light battery plate. CONSTITUTION: A cooling system of a vehicle using solar light comprises a solar light battery panel(10), a power supply(20), and a thermoelectric element(40). The solar light battery panel is installed in the roof of a vehicle and converses solar energy into electric energy. The power supply uses the power charged in a storage battery. One side of the thermoelectric element absorbs heat and the other side develops a fever. The cooling air generator(41) of one side of the thermoelectric element supplies cold air to the inner space of a vehicle through a radiating fan(47) and the hot air generator(45) of the other side of the thermoelectric element exhausts hot air to the outside of a vehicle through the radiating fan.
Abstract translation: 目的：通过使用太阳能电池板产生的电力，通过使用太阳能灯的车辆的冷却系统，通过环境友好的方法，通过车辆的发动机停止来冷却车辆的室内空间。 构成：使用太阳光的车辆的冷却系统包括太阳能电池板（10），电源（20）和热电元件（40）。 太阳能电池板安装在车顶，将太阳能转化为电能。 电源使用蓄电池中充电的电源。 热电元件的一侧吸热，另一侧发热。 热电元件一侧的冷却空气发生器（41）通过散热风扇（47）将冷空气供给到车辆的内部空间，热电元件另一侧的热空气发生器（45）排出热空气 通过散热风扇到达车辆的外部。
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公开(公告)号：KR101139178B1
公开(公告)日：2012-04-26
申请号：KR1020110100104
申请日：2011-09-30
Applicant: 디아이티 주식회사 , (주)펨트론 , 전북대학교산학협력단
Abstract: PURPOSE: A 3-dimensional measurement apparatus using digital holography is provided to minimize the generation of optical noise and improve the precision of a product by simplifying structure and lowering manufacturing cost. CONSTITUTION: A 3-dimensional measurement apparatus(100) using digital holography comprises a first photographing unit(110), a second photographing unit(120), an optical source(101), a first beam splitter(121), a second beam splitter(122), a first band pass filter(131), a second band pass filter(132), and a controller. The first photographing unit and the second photographing unit obtain one shot digital hologram. The optical source emits the white light including the wavelength components in a range of ultraviolet-visible ray. The first beam splitter reflects composite light including reference light and measurement light toward an object(140). The second beam splitter transmits the composite light through the first photographing unit. The first band pass filter is placed on the optical path between the first photographing unit and the second beam splitter. The second band pass filter is placed on the optical path between the second beam splitter and the second photographing unit.
Abstract translation: 目的：提供使用数字全息术的三维测量装置，通过简化结构并降低制造成本，最大限度地减少光学噪声的产生并提高产品的精度。 构成：使用数字全息术的三维测量装置（100）包括第一拍摄单元（110），第二拍摄单元（120），光源（101），第一分束器（121），第二分束器 （122），第一带通滤波器（131），第二带通滤波器（132）和控制器。 第一拍摄单元和第二拍摄单元获得一次数字全息图。 光源发射包括紫外 - 可见光范围内的波长分量的白光。 第一分束器将包括参考光和测量光的复合光反射到物体（140）。 第二分束器通过第一拍摄单元传输复合光。 第一带通滤波器被放置在第一拍摄单元和第二分束器之间的光路上。 第二带通滤波器被放置在第二分束器和第二拍摄单元之间的光路上。
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Patent Agency Ranking
公开(公告)号：KR100947030B1
公开(公告)日：2010-03-11
申请号：KR1020080030655
申请日：2008-04-02
Applicant: 한국과학기술원 , 전북대학교산학협력단
Abstract: 본 발명은 칼라필터를 이용한 3차원 두께와 형상의 측정장치 및 그 측정방법에 관한 것으로써, 더욱 상세하게는 시편에서 반사되어 나오는 측정광과 차단필터를 통과하고 나온 기준광의 간섭신호를 이용하여 시편의 두께와 형상에 관한 정보를 얻을 수 있는 3차원 두께와 형상의 측정장치에 관한 것이다. 본 발명에 따른 칼라필터를 이용한 3차원 두께와 형상의 측정장치는 광대역의 파장을 가지는 광을 출사하는 광원부; 광을 제 1측정광과 제 1기준광으로 분리시키는 빔분할기와; 제 1측정광을 시편에 조사받게 하는 시편부; 제 1기준광을 특정파장 영역만 선별하여 통과시키는 칼라필터를 포함하는 기준부; 시편부 및 기준부로부터 출사된 제2측정광과 제 2기준광에 대한 신호를 검출하는 검출부; 및 검출부로부터 나온 신호에 대하여 신호처리 및 제어하는 신호처리 제어부;를 포함하여 구성되어 있는 것을 특징으로 한다.
음향광학변조필터, 칼라필터, 3차원 두께, 듀얼 분광, 박막-
公开(公告)号：KR1020090105288A
公开(公告)日：2009-10-07
申请号：KR1020080030655
申请日：2008-04-02
Applicant: 한국과학기술원 , 전북대학교산학협력단
Abstract: PURPOSE: A device for measuring 3-dimensional thickness and shape using a color filter and a measuring method thereof are provided to obtain information about the thickness and the shape of a specimen from diffraction signals passed through a reference part and information about the thickness of the specimen from diffraction signals passed through a measuring part by separating the reference part and the measuring part. CONSTITUTION: A device for measuring 3-dimensional thickness and shape using a color filter comprises an optical source part, a beam splitter, a specimen part, a reference part, the detection part, and the signal processing control part. An optical source part(20) irradiates the beam having broadband wavelength. The beam splitter divides the beam into a first measurement beam(8a) and a first reference beam. The first measurement beam is irradiated on the specimen part(30). The reference part(40) comprises a color filter(41) selecting a specific wavelength region and passing the specific wavelength region. The detection part(60) detects the signals on a second measurement beam(8b) and a second reference beam incident from the specimen part and the reference part. The signal processing control part processes and controls the signals from the detection part.
Abstract translation: 目的：提供一种使用滤色器测量3维厚度和形状的装置及其测量方法，以通过参考部分的衍射信号获得关于样本的厚度和形状的信息以及关于厚度的信息 来自衍射信号的样品通过分离参考部件和测量部件而通过测量部件。 构成：使用滤色器测量三维厚度和形状的装置包括光源部分，分束器，样本部分，参考部分，检测部分和信号处理控制部分。 光源部（20）照射宽带波长的光束。 分束器将光束分成第一测量光束（8a）和第一参考光束。 第一测量光束照射在样本部分（30）上。 参考部分（40）包括选择特定波长区域并通过特定波长区域的滤色器（41）。 检测部（60）检测第二测量光束（8b）和从样本部分和参考部分入射的第二参考光束的信号。 信号处理控制部分处理和控制来自检测部分的信号。
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公开(公告)号：KR100906508B1
公开(公告)日：2009-07-07
申请号：KR1020080055066
申请日：2008-06-12
Applicant: (주)펨트론 , 전북대학교산학협력단
Abstract: A 3D measurement system using digital holography is provided to improve measuring speed and lateral resolution and to minimize the test space for reflective sample. A 3D measurement system using digital holography comprises a first wave plate(30) which performs right-hand circular polarization of the beam linearly polarized by 45°, a beam separation/composition unit(20) dividing the polarized beam into a reference beam and a measurement beam, a second wave plate(31) making the reference beam of P-type waveform and the reference beam of S-type waveform with a phase difference of 90° incident to the beam separation/composition unit, a first polarizer(32) making the measurement beam of P-type waveform and the measurement beam of S-type waveform with a phase difference of 0° incident to the beam separation/composition unit, and interference beam separation units(40) separating an interference beam from the beam separation/composition unit into first and second interference beam.
Abstract translation: 提供了使用数字全息术的3D测量系统，以提高测量速度和横向分辨率，并使反射样品的测试空间最小化。 使用数字全息术的3D测量系统包括执行线偏振45°的光束的右旋圆偏振的第一波片（30），将偏振光束分成参考光束的光束分离/合成单元（20） 测量光束，使得P型波形的参考光束和入射到光束分离/合成单元的90°的相位差的S型波形的参考光束的第二波片（31），第一偏振器（32） 使P型波形的测量光束和入射到光束分离/合成单元的相位差为0°的S型波形的测量光束，以及将干涉光束与光束分离分离的干涉光束分离单元（40） /组合单元转换成第一和第二干涉光束。
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公开(公告)号：KR100838586B1
公开(公告)日：2008-06-19
申请号：KR1020070104273
申请日：2007-10-17
Applicant: (주)펨트론 , 전북대학교산학협력단
CPC classification number: G03B35/24 , G02B27/2292 , G02B27/28 , G03H1/0005 , G03H1/0443
Abstract: A 3D measurement apparatus using digital holography and a 3D measurement method thereof are provided to solve a measurement speed problem of an on-axis method and a horizontal resolution problem of an off-axis method. A 3D measurement apparatus using digital holography includes first and second imaging units(23,24), a beam source(10), a beam splitter(13), a first wave plate(18), a prism unit(19), and a second wave plate(20). The beam splitter splits the beam emitted from the beam source into reference beam and measuring beam to enter a reference surface(3) and a measurement object(1) respectively. The first wave plate polarizes the reference beam and the measuring beam to right circularly polarized beam and left circularly polarized beam so that the reference beam and the measuring beam interfere with each other to form interference beam. The prism unit splits the interference beam into first interference beam and second interference beam with a phase difference of 180 degrees. The second wave plate is interposed between one of the first and second imaging units and the prism unit and delays a phase of one of the first interference beam and the second interference beam so that the first interference beam and the second interference beam have a phase difference of 90 degrees.
Abstract translation: 提供了使用数字全息术的3D测量装置及其3D测量方法来解决轴上方法的测量速度问题和离轴方法的水平分辨率问题。 使用数字全息术的3D测量装置包括第一和第二成像单元（23,24），光束源（10），分束器（13），第一波片（18），棱镜单元（19）和 第二波片（20）。 分束器将从光束源发射的光束分成参考光束和测量光束，分别进入参考表面（3）和测量对象（1）。 第一波片将参考光束和测量光束偏振到右圆偏振光束和左圆偏振光束，使得参考光束和测量光束彼此干涉以形成干涉光束。 棱镜单元将干涉光束分成第一干涉光束和第二干涉光束，相位差为180度。 第二波片介于第一和第二成像单元之一和棱镜单元之间，并且延迟第一干涉波束和第二干涉波束之一的相位，使得第一干涉波束和第二干涉波束具有相位差 90度。
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