Abstract:
A manufacturing method of a porous thin film is provided to enable the porous thin film to be applied to an SOFC(Solid Oxide Fuel Cell) operated at high temperatures, and to obtain excellent adhesion with a substrate by manufacturing a porous thin film having a porous structure even at high temperatures, and the porous thin film manufactured by the same is provided. A manufacturing method of a porous thin film comprises: depositing reactive gas together with a thin film material using a thin film deposition process to form a thin film; removing the reactive gas from the thin film through heat treatment; and crystallizing the thin film to obtain a porous thin film. The thin film deposition process is one selected from sputtering, vapor deposition, ion plating, and PLD(Pulsed Laser Deposition) methods.
Abstract:
An electrolyte-electrode composite powder for a fuel cell and a fabrication method thereof are provided to obtain electrolyte-electrode composite powder by using a simplified process without an expensive starting material and additional high temperature process. A fabrication method of an electrolyte-electrode composite powder for a fuel cell comprises a step for manufacturing the electrode solution dissolved with an starting material of the electrode material used for an electrode of a fuel battery or a functional layer; a step for manufacturing the electrode - electrolyte solution by adding an amino acid to the electrode solution and uniformly dispersing the electrolyte powder which is not dissolved in the electrode solution; and a step for manufacturing the electrolyte-electrode composite powder by performing spontaneous combustion.
Abstract:
PURPOSE: A system for in-situ electrochemical monitoring of chemical mechanical planarization is provided to be capable of observing polishing speed and the electrical chemical change of slurry and a semiconductor wafer in real time. CONSTITUTION: A system for in-situ electrochemical monitoring of chemical mechanical planarization is provided with an operation electrode(1) attached to a wafer chuck(2), a reference electrode(3) contacting the polishing slurry supplied to the center portion of a polishing pad(8), and a reverse electrode(4) contacting the slurry at the peripheral portion of the polishing pad. Preferably, the operation electrode is attached to the lateral portion of the wafer chuck. Preferably, the operation electrode has a curved contact part corresponding to the contact portion of the wafer chuck.
Abstract:
PURPOSE: Provided is a method for producing a reaction bonding silicon carbide, which supplies melted silicon effectively regardless of the form, size and thickness of the reaction bonding silicon carbide, prevents the cohesion of the melted silicon, and supplies the melted silicon uniformly. CONSTITUTION: The method comprises the steps of: preparing a silicon supplying specimen composed of a silicon powder and a thermosetting resin selected from the group consisting of a phenol resin, a furfuryl alcohol resin and an epoxy resin as a binding agent; preparing a silicon carbide/carbon filling body; contacting the silicon supplying specimen to one side of the filling body in a reaction bonding furnace; and heat treating at the temperature higher than the melting point of the silicon under vacuum or an inert atmosphere to infiltrate the melted silicon in the silicon supplying specimen into the inside of the filling body.
Abstract:
PURPOSE: A method for preparing powder granules by liquid condensation process is provided to economically prepare uniform granules without defects, and a method for compacting powder granules by liquid condensation process is provided to freely change compaction density of granules and improve compactibility of powder granules. CONSTITUTION: The method comprises the processes of preparing slurry by mixing powder and binder with solvent(13) soluble for the binder; dropping the slurry into solvent insoluble for the binder, thereby fixing the binder so that the binder is prevented from coming out of the surface of droplets, and causing replacement between the soluble solvent and insoluble solvent inside the droplets on the surface of dropped slurry droplets, thereby condensing the droplets; and completely removing residual solvent by drying the separated droplets after separating condensed droplets from the insoluble solvent. The method for compacting powder granules by liquid condensation process comprises the processes of preparing slurry by mixing powder to be compacted and binder with solvent soluble for the binder; dropping the slurry into solvent insoluble for the binder, thereby fixing the binder so that the binder is prevented from coming out of the surface of droplets, and causing replacement between the soluble solvent and insoluble solvent inside the droplets on the surface of dropped slurry droplets, thereby condensing the droplets; completely removing residual solvent by drying the separated droplets after separating condensed droplets from the insoluble solvent; preparing green compact by pressing the dried granules in mold; and degreasing the binder by heating the green compact.
Abstract:
PURPOSE: A slurry for a tungsten CMP (chemical mechanical polishing) is provided, which shows an excellent dispersion stability of nano-sized ceramic particles in an aqueous solution and a high polishing efficiency. CONSTITUTION: The slurry comprises 5-25 wt% of a polishing agent; 1-5 wt% of an oxidizing agent; 0.4-4 wt% of an oxidation accelerator; and 1-10 wt% of an oxidation acceleration stabilizer, and is stable at pH 3-5. Preferably the polishing agent is 5-10 wt% of nano-sized alumina or 5-25 wt% of nano-sized silica, and has an average particle size of 200 nm or less; the oxidizing agent is hydrogen peroxide; the oxidation accelerator is 0.05-0.5 M Fe(NO3)3; and the oxidation acceleration stabilizer is 1-10 wt% of citric acid, 0.5-5 wt% of malonic acid or 0.6-6 wt% of oxalic acid.
Abstract:
본 발명은 전해질 분말 주위에 입자 형상의 전극 분말을 균일하게 분포시키거나, 혹은 전극 분말을 코어로 하고 그 주위에 입자 형상의 전해질 물질을 균일하게 분포시켜, 전극 특성 및 전극/전해질의 결합력을 더욱 향상시킨 연료 전지용 전극-전해질 복합체 분말 및 그 제조 방법을 제공한다. 본 발명에 의하면, 고가의 전극용 출발 물질 및 고온 공정을 사용하지 않고 간단한 공정으로 전극-전해질 복합체 분말을 제조하며, 그로부터 전극의 미세 구조를 효과적으로 제어함으로써 전극의 열적, 기계적 및 전기 화학적 성능을 향상시킬 수 있다. 복합체 분말, 자발 연소, 삼상 계면, 연료극, 공기극, 기능성 층, 글리신
Abstract:
A calcium-cobalt oxide anode material is provided to ensure capacity higher than that of a conventional carbon material, stable cycle property, and excellent lithium ion conductivity. A calcium-cobalt oxide anode material has a composition of the chemical formula 1: [(Ca_(3-x).A_x)(Co_(4-y).B_y)O_9. In the chemical formula 1, A is an inert element selected from Bi, Gd and Na; and B is the transition elements selected from Fe, Ni, Mn and Cu, and 0