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公开(公告)号：KR101663644B1
公开(公告)日：2016-10-10
申请号：KR1020140150214
申请日：2014-10-31
Applicant: (재)한국나노기술원 , 한국과학기술연구원 , 아주대학교산학협력단
IPC: H01L31/107 , H01L31/0352 , H01L31/0304
Abstract: 본발명은상기목적을달성하기위한것으로서, 흡수층및 증폭층이각각분리되어형성된(separate absorption and multiplication) 애벌랜치포토다이오드에있어서, 상기흡수층은전계가걸린흡수층과도핑및 조성변화층의조합으로이루어지되, 상기도핑및 조성변화층은, 상기전계가걸린흡수층과비흡수층사이에형성되며, 상기전계가걸린흡수층의도핑농도보다상대적으로높은도핑농도를가지면서, 상기화합물반도체의조성을기판에대해 10% 오차범위내에서의격자부정합또는정합이유지되도록변형하여형성되는것을특징으로하는변형된도핑및 조성흡수층을이용한애벌랜치포토다이오드를기술적요지로한다. 이에의해, 도핑이되어있으면서조성변화가이루어진도핑및 조성변화층은소수캐리어의에너지밴드를가변함으로써전계를인가하여캐리어이동을돕게되어, 캐리어가증폭층으로도달하는속도를가속할수 있도록하여, 효율특성및 응답속도를더욱개선시키는이점이있다.
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公开(公告)号：KR1020160050574A
公开(公告)日：2016-05-11
申请号：KR1020140149039
申请日：2014-10-30
Applicant: 한국과학기술연구원 , (재)한국나노기술원 , 아주대학교산학협력단
IPC: H01L31/107 , H01L31/18
CPC classification number: H01L31/107 , H01L31/184 , H01L31/1844
Abstract: 포토다이오드는기판; 상기기판위에위치하는제 1 캐리어(carrier) 증폭층; 상기제 1 캐리어증폭층위에위치하는광자흡수층; 및상기광자흡수층위에위치하는제 2 캐리어증폭층;을포함할수 있다. 한편, 포토다이오드제조방법은기판위에제 1 캐리어증폭층을형성하는단계; 상기제 1 캐리어증폭층위에광자흡수층을형성하는단계; 및상기광자흡수층위에제 2 캐리어증폭층을형성하는단계;를포함할수 있다. 본발명의실시예들은두 종류의캐리어를모두이용하여신호를증폭함으로써전압이득및 단일광자검출의신뢰도를증대시킬수 있다.
Abstract translation: 本发明的目的是提供一种放大电子和空穴并具有高电压增益的光电二极管及其制造方法。 光电二极管包括：基板; 设置在所述基板上的第一载流子放大层; 设置在所述第一载流子放大层上的光子吸收层; 以及设置在光子吸收层上的第二载流子放大层。 制造光电二极管的方法包括以下步骤：在衬底上形成第一载流子放大层; 在所述第一载流子放大层上形成光子吸收层; 以及在所述光子吸收层上形成第二载流子放大层。 根据本发明的实施例，可以通过使用两种载体两者放大信号来提高电压增益和光子检测的可靠性。
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公开(公告)号：KR101184590B1
公开(公告)日：2012-09-21
申请号：KR1020110144196
申请日：2011-12-28
Applicant: 한국과학기술연구원
CPC classification number: B63B35/00 , B63H5/08 , G01N33/1886 , G01S15/08 , G01S15/93 , G05D1/0206 , H04Q9/02 , H04Q2209/40 , H04Q2209/50 , H04Q2209/84 , Y02A90/36
Abstract: PURPOSE: An unmanned boat for monitoring water resources is provided to accurately and smoothly obtain water resources about wide regions, escaping a range in which a driver can observe with naked eyes, in an unmanned state. CONSTITUTION: An unmanned boat for monitoring water resources(100) comprises a boat body(101), a propelling unit(140), a cruise unit(110), an observing unit, and a communication control unit(130). The propelling unit propels the boat body with a pair of propellers(141). The cruise unit provides information for setting a moving direction of the boat body. The observing unit detects water resources at a predetermined spot on a moving path of the boat body. The communication control unit controls the propelling unit, the cruise unit, and the observing unit, and transmits and receives the observed information with a control station.
Abstract translation: 目的：提供无人值守船只监测水资源，准确平稳地获取广域地区的水资源，逃离驾驶员用肉眼观察的范围，无人值守。 构成：用于监测水资源的无人船（100）包括船体（101），推进单元（140），巡航单元（110），观测单元和通信控制单元（130）。 推进单元用一对推进器推动船体（141）。 巡航单元提供用于设置船体移动方向的信息。 观察单元在船体的移动路径上的预定点检测水资源。 通信控制单元控制推进单元，巡航单元和观测单元，并且通过控制站发送和接收观测信息。
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公开(公告)号：KR1020110059006A
公开(公告)日：2011-06-02
申请号：KR1020090115590
申请日：2009-11-27
Applicant: 한국과학기술연구원
IPC: G01N21/61 , G01N21/3504
Abstract: PURPOSE: An infrared ray gas sensor is provided to increase light detection efficiency and sensitivity in spite of small amount of intake gas. CONSTITUTION: An infrared ray gas sensor comprises an optical cavity, a reflective mirror, a bolometer sensor(104) and a light source lamp(111). The optical cavity is formed in cylindrical or polygon shape. The optical cavity forms one or more inlet for toxic gas. A reflective pattern is formed in the optical cavity in order to diffuse reflect, scatter and multiple-reflect light from a light source lamp. The reflective mirror is installed in one end side of the inside of the optical cavity. The bolometer sensor establishes in the other end side of the inside of the light hollow. The light source lamp is located around the location near the reflective mirror between a non-cooling type bolometer sensor and the reflective mirror.
Abstract translation: 目的：提供红外线气体传感器，以增加光检测效率和灵敏度，尽管进气量少。 构成：红外线气体传感器包括光学腔，反射镜，测辐射热计传感器（104）和光源灯（111）。 光学腔形成圆柱形或多边形。 光学腔形成一个或多个有毒气体入口。 在光腔中形成反射图案，以便扩散来自光源灯的反射，散射和多反射光。 反射镜安装在光腔的内侧的一端侧。 测辐射热计传感器在光中空的内侧的另一端侧建立。 光源灯位于靠近反射镜的位置，位于非冷却型测辐射热计传感器和反射镜之间。
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15.发明公开나노채널이 집적된 3차원 금속 나노와이어 갭 전극을포함하는 바이오센서, 그 제작방법 및 상기 바이오센서를포함하는 바이오 디스크 시스템 失效包括纳米通道一体化三元金属纳米带隙电极的生物传感器，其制造方法和包含SIAD生物传感器的生物盘系统
公开(公告)号：KR1020090083689A
公开(公告)日：2009-08-04
申请号：KR1020080009649
申请日：2008-01-30
Applicant: 한국과학기술연구원
CPC classification number: B82Y15/00 , G01N27/3278 , G01N33/5438 , G01N33/553
Abstract: A biosensor is provided to detect electrical signal on a basis of real time, to perform detection of high efficiency and high-sensitivity, and to detect bio-materials from a low concentration sample or a small amount of sample. A biosensor comprises an upper plate part(200) in which a plurality of metal nanowires(210) is formed on the lower side and an inlet(310) injected with the bio-materials is equipped; a lower plate part(100) in which a plurality of metal nano wires(110) is formed on the upper side; a support part which supports so that the top and lower board parts are separated and forms nanochannel(300) of constant gap.
Abstract translation: 提供生物传感器，用于基于实时检测电信号，进行高效率和高灵敏度的检测，并从低浓度样品或少量样品中检测生物材料。 一种生物传感器包括：上板部件，其中在下侧形成有多个金属纳米线（210），并且装有注入了生物材料的入口（310）; 在上侧形成有多个金属纳米线（110）的下板部（100） 支撑部分，其支撑使得顶部和底部部件分离并形成具有恒定间隙的纳米通道（300）。
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Patent Agency Ranking
公开(公告)号：KR1020090074383A
公开(公告)日：2009-07-07
申请号：KR1020080000144
申请日：2008-01-02
Applicant: 한국과학기술연구원
IPC: G01R1/073
CPC classification number: G01R1/073 , G01R3/00 , G01R31/2601 , G01R31/2886 , H01L22/30
Abstract: A probe and a method for fabricating the same is provided to minimize stress applied to a probe structure in a planarization process by using a sacrificing layer made of metal. A probe apparatus is classified into a plurality of unit probe patterns, and each unit probe pattern is formed by a unit process. A unit probe pattern mask is formed on the space transformer(100) for the unit process, and the unit probe pattern(102a) is formed on the domain exposed by the unit probe pattern mask. The unit probe pattern mask is removed, and the sacrificial layer(104) of the metal material is formed on the whole of the result. The unit probe pattern and sacrificial layer are planarized, and the upper side of the unit probe pattern is exposed.
Abstract translation: 提供探针及其制造方法，以通过使用由金属制成的牺牲层来最小化在平坦化工艺中施加到探针结构的应力。 探针装置分为多个单位探针图案，并且通过单位处理形成每个单位探针图案。 在单位处理的空间变换器（100）上形成单位探针图案掩模，并且在由单位探针图案掩模曝光的区域上形成单位探针图案（102a）。 去除单元探针图案掩模，并且在整个结果上形成金属材料的牺牲层（104）。 单位探针图案和牺牲层被平坦化，并且单元探针图案的上侧被暴露。
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公开(公告)号：KR1020080011613A
公开(公告)日：2008-02-05
申请号：KR1020060072402
申请日：2006-07-31
Applicant: 한국과학기술연구원
IPC: H01L21/66
CPC classification number: G01R1/07314 , G01R3/00 , G01R31/2601
Abstract: A vertical probe for inspecting a semiconductor is provided to shorten an interval of semiconductor inspection time by inspecting a semiconductor chip with an irregular two-dimensional pad arrangement at a time. A vertical probe(300) includes a front end part(310) in contact with a pad of a semiconductor chip in operation and a support part(320) that supports the front end part and gives elasticity to the front end part. The support part is made of at least one support piece. The support part can be fixed to a fixing part(330) fixed to a ceramic substrate. The front end part can include a coupling part connected to the support part and a contact part incorporated with the coupling part wherein the contact part comes in contact with the pad of the semiconductor chip in operation. The contact part can come in line-contact with the pad of the semiconductor chip.
Abstract translation: 提供了用于检查半导体的垂直探针，以通过一次检查具有不规则二维衬垫布置的半导体芯片来缩短半导体检查时间的间隔。 垂直探针（300）包括与操作中的半导体芯片的焊盘接触的前端部（310）和支撑前端部并且向前端部赋予弹性的支撑部（320）。 支撑部分由至少一个支撑件制成。 支撑部可以固定在固定在陶瓷基板上的固定部（330）上。 前端部可以包括连接到支撑部分的联接部分和与联接部分结合的接触部分，其中接触部分在操作中与半导体芯片的焊盘接触。 接触部分可以与半导体芯片的焊盘成线接触。
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公开(公告)号：KR100785522B1
公开(公告)日：2007-12-13
申请号：KR1020060099611
申请日：2006-10-13
Applicant: 한국과학기술연구원
Abstract: A metal structure and a method for manufacturing a carbon nano tube using a replacement plating method are provided to form a metal structure of a nano size, to etch a three dimension metal structure with a uniform thickness and to control crystallization characteristic, by performing a selective etching process after performing the replacement plating process. A first metal layer(130) is formed on a substrate(110). A second metal layer(150) is formed on a predetermined location of the first metal layer by performing a replacement plating process to a part of the first metal layer using a second metal. One of the first metal layer or the second metal layer is etched selectively.
Abstract translation: 提供金属结构和使用替代电镀方法制造碳纳米管的方法以形成纳米尺寸的金属结构，以蚀刻具有均匀厚度的三维金属结构并通过执行选择性的方式来控制结晶特性 进行替换电镀处理后的蚀刻工序。 第一金属层（130）形成在基板（110）上。 通过使用第二金属对第一金属层的一部分进行替换电镀处理，在第一金属层的预定位置上形成第二金属层（150）。 选择性地蚀刻第一金属层或第二金属层中的一个。
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公开(公告)号：KR1020070069423A
公开(公告)日：2007-07-03
申请号：KR1020050131558
申请日：2005-12-28
Applicant: 한국과학기술연구원
CPC classification number: H04B10/85 , H04B10/25 , H04L9/0852
Abstract: A direct transmission-type quantum encryption system based on phase-stabilized optical fibers is provided to coat the optical fibers with liquid crystal polymer materials, thereby configuring a stabilized quantum encryption one-way transmission system without a phase shift. Optical fibers(70), which are portions corresponding to inner optical systems of a transmitter and a receiver, are coated with liquid crystal polymer material, having negative thermal expansivity, in certain thickness, so that a phase shift caused by room temperature can be automatically compensated by positive thermal expansivity of the existing optical fibers and the negative thermal expansivity.
Abstract translation: 提供了一种基于相位稳定光纤的直接传输型量子加密系统，用液晶聚合物材料涂覆光纤，从而构成了一个稳定的量子加密单向传输系统，无需相移。 作为与发送器和接收器的内部光学系统对应的部分的光纤（70）以特定厚度涂覆具有负热膨胀性的液晶聚合物材料，使得由室温引起的相移可以自动地 通过现有光纤的正热膨胀性和负热膨胀性来补偿。
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公开(公告)号：KR100687467B1
公开(公告)日：2007-02-27
申请号：KR1020050062177
申请日：2005-07-11
Applicant: 한국과학기술연구원
IPC: G01C9/06
Abstract: 본 발명은 경사각 측정 센서 및 그 제조방법에 관한 것으로, 특히 빔의 형태를 바꾸어 비선형성을 감소시키는 방법을 이용하여 선형성과 해상도를 향상시킨 경사각 측정 센서 및 그 제조방법에 관한 것이다.
본 발명의 경사각 측정 센서는 중력의 변화에 따라 반응하는 질량체; 상기 질량체의 변화에 따라 정전용량이 변하는 구동전극과 고정전극; 상기 질량체를 바닥에 고정시키기 위한 고정부; 및 상기 질량체와 고정부를 연결하는 지지빔;을 포함한다.
경사각 측정 센서, 정전용량 센서, 마이크로 머니싱 기법, 선형성, 해상도
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