公开(公告)号：KR100475307B1

公开(公告)日：2005-03-11

申请号：KR1020020069882

申请日：2002-11-12

Applicant: 한국전자통신연구원

Inventor： 정문연 ,  신동호 ,  양해식 ,  김용신 ,  윤태환 ,  전치훈 ,  김윤태 ,  강승열 ,  이용의 ,  안성덕 ,  서경수

IPC: C12Q1/68

Abstract: 본 발명은 입사광을 특정 셀에 조사하여 DNA 등의 생체분자 혹은 고분자 어레이를 형성하기 위한 투과형 프로그래머블 마스크 및 이를 이용한 생체분자 혹은 고분자 어레이를 형성 방법에 관한 것이다.
프로그래머블 마스크의 단위 화소들 각각은 입사광의 진행을 방해하고 전기 영동에 의해 이동하는 전하를 띤 입자들을 구비하는 용액과 입자들의 배열을 변화시켜 입사광의 투과도를 조절하기 위해서, 입자들에 전압을 인가하기 위한 전극들을 구비하여 구성된다.

公开(公告)号：KR100451663B1

公开(公告)日：2004-10-08

申请号：KR1020020026698

申请日：2002-05-15

Applicant: 한국전자통신연구원

Inventor： 정문연 ,  양해식 ,  전치훈 ,  김윤태 ,  김용신 ,  신동호

IPC: C12Q1/68

CPC classification number: B01J19/0046 ,  B01J2219/00434 ,  B01J2219/00527 ,  B01J2219/00529 ,  B01J2219/00596 ,  B01J2219/00605 ,  B01J2219/00608 ,  B01J2219/00659 ,  B01J2219/00675 ,  B01J2219/00677 ,  B01J2219/00689 ,  B01J2219/00711 ,  B01J2219/00722 ,  B82Y30/00 ,  C40B40/06 ,  C40B60/14 ,  G02F1/133528 ,  G02F1/13454 ,  G02F1/13725 ,  G02F1/216 ,  G02F2203/12 ,  G03F7/70291 ,  G03F7/7035 ,  H01L27/146

Abstract: A programmable mask used in a photolithography process for fabricating a biomolecule array and a method for fabricating a biomolecule array using the same are disclosed. Particularly, a TFT-LCD type programmable mask for selectively transmitting incident light in accordance with an electrical signal applied thereto and a method for fabricating a biomolecule array using the same are provided. The ultraviolet light is selectively illuminated to a sample substrate so that the biomolecule array having high density can be fabricated.

Abstract translation: 公开了用于制造生物分子阵列的光刻工艺中使用的可编程掩模和使用其制造生物分子阵列的方法。 特别地，提供了用于根据施加到其上的电信号选择性地传输入射光的TFT-LCD型可编程掩模以及使用该TFT-LCD型可编程掩模制造生物分子阵列的方法。 紫外光被选择性地照射到样品基板，从而可以制造具有高密度的生物分子阵列。

公开(公告)号：KR100445744B1

公开(公告)日：2004-08-25

申请号：KR1020000086723

申请日：2000-12-30

Applicant: 한국전자통신연구원

Inventor： 전치훈 ,  최창억 ,  김윤태

IPC: B81B7/04

Abstract: PURPOSE: A microchannel array structure laid in silicon base plate and manufacturing method of the same are provided to minimize influence on physical and chemical qualities of a lower silicon base plate. CONSTITUTION: A structure includes microchannel arrays(102) laid in a silicon base plate(101) and formed by a plurality of super-fine microchannels integrated in high density; microchannel outer wall membranes(103) evenly deposited on the base plate and the microchannel arrays and interposed between the super-fine microchannels to partition the super-fine microchannels; and a heater or an electrode(104) and an electric connection pad(105) formed on uppers part of the microchannel outer wall membrane.

Abstract translation: 目的：提供一种放置在硅基板中的微通道阵列结构及其制造方法，以最小化对较低硅基板的物理和化学品质的影响。 组成：一种结构包括放置在硅基板（101）中并由多个高密度集成的超细微通道形成的微通道阵列（102） 均匀地沉积在基板和微通道阵列上并置于超细微通道之间以分隔超细微通道的微通道外壁膜（103） 以及形成在微通道外壁膜的上部上的加热器或电极（104）和电连接垫（105）。

公开(公告)号：KR100439423B1

公开(公告)日：2004-07-09

申请号：KR1020020002495

申请日：2002-01-16

Applicant: 한국전자통신연구원

Inventor： 고종수 ,  이대식 ,  이명래 ,  전치훈 ,  김윤태

IPC: H02K33/10

CPC classification number: H01H53/06 ,  B81B3/0021 ,  B81B2201/038 ,  B81B2203/0109 ,  B81B2203/051 ,  B81B2203/056 ,  B81B2203/058 ,  G02B6/266 ,  G02B6/3546 ,  G02B6/3572 ,  H01H1/0036 ,  H01H2001/0078

Abstract: The present invention relates to a micro-electromechanical actuator. An electromagnetic-type micro-electromechanical actuator of the present invention has a conductive beam formed in a micro electronic substrate on an upper side of a magnetic substance, so that the conductive beam can be moved toward an in-plane mode in parallel to the micro electronic substrate depending on a direction that current flows. Therefore, the micro-electromechanical actuator can be applied to most of electromagnetic micro-electromechanical systems that require an in-plane mode.

Abstract translation: 本发明涉及一种微机电致动器。 本发明的电磁型微机电致动器具有形成在磁性物质的上侧的微电子基板中的导电束，使得导电束能够平行于微型地移动到平面内模式 电子基板取决于电流流动的方向。 因此，微机电致动器可应用于需要面内模式的大多数电磁微机电系统。

公开(公告)号：KR1020040057002A

公开(公告)日：2004-07-01

申请号：KR1020020083753

申请日：2002-12-24

Applicant: 한국전자통신연구원

Inventor： 장원익 ,  정문연 ,  전치훈

IPC: G02B26/08

Abstract: PURPOSE: A MEMS type optical switch using a bimorph actuator and a displacement extension lever, and a fabricating method thereof are provided to improve the performance such as stability and extensibility by using the bimorph actuator and the displacement extension lever. CONSTITUTION: A MEMS type optical switch using a bimorph actuator and a displacement extension lever includes an actuator, a displacement extension lever, and a reflector. The actuator includes a pad, a heating bar, and a cooling bar. The heating bar and the cooling bar are connected to the pad. The displacement extension lever is connected to one end of the actuator in order to extend the rotatory power of the actuator to the displacement by using the electric potential difference between the heating bar and the cooling bar. The reflector is connected to the displacement extension lever in order to reflect an optical signal.

Abstract translation: 目的：提供使用双压电晶片致动器和位移延伸杆的MEMS型光开关及其制造方法，以通过使用双压电晶片致动器和位移延伸杆来提高诸如稳定性和可伸长性的性能。 构成：使用双压电晶片致动器和位移延伸杆的MEMS型光开关包括致动器，位移延伸杆和反射器。 致动器包括垫，加热棒和冷却棒。 加热棒和冷却条连接到焊盘。 位移延伸杆连接到致动器的一端，以通过使用加热棒和冷却杆之间的电位差将致动器的旋转动力延伸到位移。 反射器连接到位移延伸杆以反射光信号。

公开(公告)号：KR1020040050586A

公开(公告)日：2004-06-16

申请号：KR1020020078443

申请日：2002-12-10

Applicant: 한국전자통신연구원

Inventor： 최창억 ,  이명래 ,  김창규 ,  전치훈 ,  김윤태

IPC: G02B5/20

CPC classification number: G02B26/001 ,  G01J3/26 ,  G02B5/0833 ,  G02B6/29361 ,  G02B6/29389 ,  G02B6/29395

Abstract: PURPOSE: A variable wavelength optical filter and its fabrication method are provided, which have a Fabry-Perot structure using a mirror of high reflectivity stacked with a silicon film and an oxide film. CONSTITUTION: A bottom mirror(180) is formed by stacking silicon film and oxide film in sequence and a silicon film is stacked on the uppermost layer. A top mirror(182) is separated from the bottom mirror and is formed by stacking silicon films and oxide films in sequence, and a silicon film is stacked on the uppermost layer. A connection unit(155) connects the bottom mirror and the top mirror to a semiconductor substrate(100). And electrode pads(140,142) control a gap between the bottom mirror and the top mirror with electrostatic force.

Abstract translation: 目的：提供一种可变波长光学滤波器及其制造方法，其具有使用层叠有硅膜和氧化物膜的高反射率的镜面的法布里 - 珀罗结构。 构成：依次层叠硅膜和氧化膜形成底镜（180），在最上层层叠硅膜。 顶镜（182）与底镜分离，依次层叠硅膜和氧化膜形成，在最上层层叠硅膜。 连接单元（155）将底部反射镜和顶部反射镜连接到半导体衬底（100）。 并且电极焊盘（140,142）利用静电力来控制底部反射镜和顶部反射镜之间的间隙。

公开(公告)号：KR100420954B1

公开(公告)日：2004-03-02

申请号：KR1020020016686

申请日：2002-03-27

Applicant: 한국전자통신연구원

Inventor： 정문연 ,  류호준 ,  이명래 ,  전치훈 ,  김윤태

IPC: G02B26/00

Abstract: PURPOSE: An optical switching element, a fabricating method thereof, and an array structure thereof are provided to form the optical switching element by using an active matrix method and form a mirror portion by using an X-ray lithography method. CONSTITUTION: An optical switching element includes a substrate, a TFT(300), the first insulating layer, the first driving electrode(440), the second driving electrode(445a), an actuator, a support portion, and a mirror portion. The TFT(300) is formed on the substrate. The TFT(300) is coated with the first insulating layer. The first driving electrode(440) is connected to a drain of the TFT(300). The second driving electrode(445a) is formed at an upper portion of the first insulating layer. The actuator is formed with a conductive layer. The support portion is extended from the actuator. The mirror portion is formed on the support portion.

Abstract translation: 目的：提供光开关元件及其制造方法及其阵列结构，以通过使用有源矩阵方法形成光开关元件并通过使用X射线光刻方法形成镜部分。 构成：光开关元件包括基板，TFT（300），第一绝缘层，第一驱动电极（440），第二驱动电极（445a），致动器，支撑部分和镜面部分。 TFT（300）形成在基板上。 TFT（300）涂覆有第一绝缘层。 第一驱动电极（440）连接到TFT（300）的漏极。 第二驱动电极（445a）形成在第一绝缘层的上部。 致动器形成有导电层。 支撑部分从致动器延伸。 镜面部分形成在支撑部分上。

公开(公告)号：KR100413522B1

公开(公告)日：2004-01-03

申请号：KR1020010085040

申请日：2001-12-26

Applicant: 한국전자통신연구원

Inventor： 최창억 ,  이명래 ,  장원익 ,  류호준 ,  정문연 ,  전치훈 ,  김윤태

IPC: G02B26/08

Abstract: PURPOSE: A method for fabricating a buried inductor magnetically-induced optical switch is provided wherein it is easy and simple to process and assemble a substrate without assembling a number of substrates and optical components. CONSTITUTION: According to the method for fabricating an optical switch which changes a light path by being aligned vertically on a substrate(100) supporting a mirror(300) by a magnetic force of an inductor, a groove(210) where a mirror pocket(200) and the inductor are to be buried is formed on the substrate by etching a back of the substrate. The inductor wound with coil in parallel with the substrate is buried into the groove. Then, the mirror aligned to the mirror pocket and a torsion bar(110) supporting the mirror are formed in a body, by processing a front surface of the substrate, and then the mirror pocket is opened completely.

Abstract translation: 目的：提供一种用于制造埋入式电感器磁感应光开关的方法，其中在不组装基板和光学组件的情况下处理和组装基板容易且简单。 本发明的目的在于提供一种光电开关的制造方法，该光开关通过在通过电感器的磁力支承反射镜（300）的基板（100）上垂直取向来改变光路，其特征在于，槽（210） 通过蚀刻衬底的背面而在衬底上形成要埋入的感应器。 缠绕有与基板平行的线圈的电感器埋入凹槽中。 然后，通过对基板的前表面进行加工，将与镜槽对准的反射镜和支撑反射镜的扭杆（110）形成为一体，然后完全打开镜槽。

公开(公告)号：KR100411876B1

公开(公告)日：2003-12-24

申请号：KR1020000080895

申请日：2000-12-22

Applicant: 한국전자통신연구원

Inventor： 최창억 ,  장원익 ,  전치훈 ,  김윤태

IPC: B81C1/00

CPC classification number: F04B53/1077 ,  F04B19/24 ,  F04B43/043

Abstract: The present invention relates to a micro electro mechanical system (MEMS); and, more particularly, to a micro pump used in micro fluid transportation and control and a method for fabricating the same. The micro pump according to the present invention comprises: trenches formed in a silicon substrate in order to form a pumping region including a main pumping region and an auxiliary pumping region; channels formed on both sides of the pumping region; a flow prevention region having backward-flow preventing layers to resist a fluid flow; inlet/outlet regions formed at each of the channels which are disposed on both ends of the pumping region; an outer layer covering the trenches of the silicon substrate and opening portions of the inlet/outlet regions; and a thermal conducting layer formed on the outer layer and over the main pumping region so that a pressure of the fluid in the main pumping region is increased by the thermal conducting layer.

Abstract translation: 微机电系统技术领域本发明涉及一种微机电系统（MEMS）。 并且更具体地涉及用于微流体输送和控制的微型泵及其制造方法。 根据本发明的微型泵包括：形成在硅衬底中的沟槽，以便形成包括主泵区和副泵区的泵区; 通道形成在泵区的两侧; 具有阻止流体流动的防逆流层的防流区域; 在设置在泵区两端的每个通道处形成的入口/出口区; 覆盖硅衬底的沟槽和入口/出口区域的开口部分的外层; 以及形成在所述外层上并且位于所述主抽吸区域上方的导热层，使得所述主抽吸区域中的所述流体的压力通过所述导热层而增加。

公开(公告)号：KR1020020058609A

公开(公告)日：2002-07-12

申请号：KR1020000086723

申请日：2000-12-30

Applicant: 한국전자통신연구원

Inventor： 전치훈 ,  최창억 ,  김윤태

IPC: B81B7/04

CPC classification number: B81B7/04 ,  B81B2203/0338 ,  B81B2203/04 ,  B81C1/00063 ,  B81C1/00071 ,  B81C1/00119 ,  B81C1/00698

Abstract: PURPOSE: A microchannel array structure laid in silicon base plate and manufacturing method of the same are provided to minimize influence on physical and chemical qualities of a lower silicon base plate. CONSTITUTION: A structure includes microchannel arrays(102) laid in a silicon base plate(101) and formed by a plurality of super-fine microchannels integrated in high density; microchannel outer wall membranes(103) evenly deposited on the base plate and the microchannel arrays and interposed between the super-fine microchannels to partition the super-fine microchannels; and a heater or an electrode(104) and an electric connection pad(105) formed on uppers part of the microchannel outer wall membrane.

Abstract translation: 目的：提供放置在硅基板中的微通道阵列结构及其制造方法，以最小化对下硅基板的物理和化学特性的影响。 构成：一种结构包括放置在硅基板（101）中并由多个以高密度集成的超细微通道形成的微通道阵列（102） 微通道外壁膜（103）均匀地沉积在基板和微通道阵列上并置于超细微通道之间以分隔超细微通道; 以及形成在微通道外壁膜的上部的加热器或电极（104）和电连接垫（105）。