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公开(公告)号：KR101390749B1
公开(公告)日：2014-05-07
申请号：KR1020120093835
申请日：2012-08-27
Applicant: 한국표준과학연구원
Abstract: 본발명은, 광대역의가간섭광을조사하는발광부와, 적어도하나의미세홀을구비하며상기발광부로부터입사되는광을상기미세홀의바닥면에서반사하는피측정물과, 상기발광부로부터입사되는광을반사하며상기미세홀의바닥면에서반사된광과간섭을일으키는기준광을형성하는기준면과, 상기미세홀의바닥면및 상기기준면에서반사된광을수광하여간섭신호로부터상기미세홀의깊이를측정하는광 검출기와, 광섬유커플러및 상기광섬유커플러에서분기되는제1 광섬유, 제2 광섬유, 제3 광섬유및 제4 광섬유를포함하며, 상기제1 광섬유는상기발광부와연결되며상기발광부로부터입사되는광을상기광섬유커플러를통해상기제2 광섬유및 상기제3 광섬유에전달하고, 상기제2 광섬유는상기제2 광섬유의단부가상기기준면에대응되도록배치되어상기기준면에광을조사하여상기기준면에서반사된광을수광하고, 상기제3 광섬유는상기제3 광섬유의단부가상기미세홀에대응되도록배치되어상기미세홀에광을조사하여상기미세홀의바닥면에서반사되는광을수광하고, 상기제4 광섬유는상기광 검출기에연결되며상기제2 광섬유및 상기제3 광섬유로부터입사되는광을상기광섬유커플러를통해상기광 검출기에전달하는것을특징으로하는미세홀깊이측정장치를제공한다.
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公开(公告)号：KR1020130128517A
公开(公告)日：2013-11-27
申请号：KR1020120052287
申请日：2012-05-17
Applicant: 한국표준과학연구원
Abstract: The present invention relates to a spectral apparatus and a method for measuring interference in real time using a comb generating and detecting device to accurately measure at least one among the surface shape, the inner surface shape, the thickness, and the position of target measuring objects without damage to the target measuring objects. Especially, the spectral apparatus for measuring the interference in real time comprises: a light source part for irradiating the broadband width of light; and at least one interferometer for measuring at least one among the surface shape, the inner surface shape, the thickness, and the position of the target measuring objects from the interference signals of the light irradiated from the light source and reflected from the target measuring objects; wherein the light source part has a febry-perot filter by which the broadband frequency of light in an infrared ray region outputted from a light source to the broadband optical frequency of comb.
Abstract translation: 本发明涉及一种使用梳状发生和检测装置实时测量干涉的光谱装置和方法，以精确地测量目标测量对象的表面形状，内表面形状，厚度和位置中的至少一个 不损坏目标测量对象。 特别地，用于实时测量干扰的光谱装置包括：用于照射光的宽带宽度的光源部分; 以及至少一个干涉仪，用于根据从光源照射的光并从目标测量对象反射的干涉信号测量目标测量对象的表面形状，内表面形状，厚度和位置中的至少一个干涉仪 ; 其特征在于，所述光源部具有发光二极管滤波器，通过所述滤波器，将从光源输出的红外线区域的光的宽带频率调制为梳状宽带光频率。
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公开(公告)号：KR101317630B1
公开(公告)日：2013-10-10
申请号：KR1020120039356
申请日：2012-04-16
Applicant: 한국표준과학연구원
CPC classification number: G01P5/248 , G01B9/0209 , G01F1/3227
Abstract: PURPOSE: An optical interference flow velocity meter for multi-dimensional flow velocity measurement stably measures flow velocity by high resolution and improves the precision of measurement even in low flow velocity. CONSTITUTION: An optical interference flow velocity meter for multi-dimensional flow velocity measurement includes a light generator (10), a light divider (20), a condenser (30), a light detector (40), and a flow velocity calculator (50). The light generator generates a laser. The light divider divides the laser generated from the light generator at a constant rate. The condenser concentrates the laser provided from the light divider in a pipe. The light detector detects electromagnetic intensity by a laser signal scattered through the fluid of the pipe. The flow velocity calculator calculates the velocity of the fluid by using the electromagnetic intensity detected from the light detector. [Reference numerals] (10) Light generator; (20) Light divider; (30) Condenser; (40) Light detector; (50) Flow velocity calculator
Abstract translation: 目的：用于多维流速测量的光学干涉流速计可以高分辨率稳定地测量流速，即使在低流速下也能提高测量精度。 构成：用于多维流速测量的光学干涉流速计包括光发生器（10），分光器（20），冷凝器（30），光检测器（40）和流速计算器（50） ）。 光发生器产生激光。 分光器以恒定的速率分割从发光器产生的激光。 冷凝器将从分光器提供的激光器集中在管道中。 光检测器通过散布在管道的流体中的激光信号来检测电磁强度。 流速计算器通过使用从光检测器检测的电磁强度来计算流体的速度。 （附图标记）（10）发光体; （20）分光器; （30）冷凝器; （40）光检测器; （50）流速计算器
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公开(公告)号：KR101179952B1
公开(公告)日：2012-09-10
申请号：KR1020100057993
申请日：2010-06-18
Applicant: 한국표준과학연구원
Abstract: 본 발명은 비접촉식 3차원 좌표 측정 장치 및 방법에 관한 것으로 보다 상세하게는 광원으로부터 조사되는 빛을 임의의 위치에 설치된 최소한 3개의 광검출기로 검출하여 광원의 정확한 위치를 측정하는 비접촉식 3차원 좌표 측정 장치에 관한 것이다.
이러한 본 발명의 비접촉식 3차원 좌표 측정 장치는 위치를 알고자하는 측정 대상물에 설치된 광원부와 ; 최대한 넓은 면적으로 빛이 퍼져나가게 하기 위한 확산소자와 ; 알려진 위치에 설치되고, 상기 광원으로부터 조사된 빛을 감지하는 최소한 3개의 광검출부와 ; 상기 광검출부에서 검출된 빛을 통해 광원부과 각 광검출부 사이의 거리를 측정하고, 측정된 거리로부터 광원의 위치를 산출하는 위치산출부를 포함하여 구성됨을 특징으로 한다.-
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Patent Agency Ranking
公开(公告)号：KR101566383B1
公开(公告)日：2015-11-05
申请号：KR1020140041462
申请日：2014-04-07
Applicant: 한국표준과학연구원
Abstract: 본발명은두께측정장치및 두께측정방법을제공한다. 이두께측정광학장치는복수의파장에서발진하는광대역레이저광원; 상기광대역레이저광원의출력광을제1 포트로제공받아제2 포트로제공하고제2 포트로제공받은광을제3 포트로출력하는광서큘레이터; 상기광서큘레이터의제2 포트로부터출력되는광의일부를투과시키고나머지를반사시키는광분할기; 및상기광분할기로부터제공된광을반사시키는미러를포함한다. 측정대상은상기광분할기와상기미러사이에배치되고, 상기측정대상은상기광분할기를투과한광의일부를반사시키고나머지를투과시키어상기미러에제공한다.
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公开(公告)号：KR101544968B1
公开(公告)日：2015-08-19
申请号：KR1020130078751
申请日：2013-07-05
Applicant: 한국표준과학연구원
IPC: G01B11/06
CPC classification number: G01B11/06 , G01B9/0201 , G01B9/02081 , G01B11/14 , G01N21/211 , G01N21/45 , G01N2021/213 , G01S17/36
Abstract: 본발명은두께측정장치및 두께측정방법을제공한다. 두께측정방법은제1 파장(λ)의제1 레이저빔을투명기판에조사시키고, 상기투명기판을투과한제1 레이저빔의세기를측정하는단계; 제2 파장(λ)의제2 레이저빔을상기투명기판을투과키고, 투과한제2 레이저빔의세기를측정하는단계; 및상기투명기판을투과한상기제1 레이저빔과상기제2 레이저빔을이용한리사주(Lissajous) 그래프에서회전각을추출하는단계;를포함한다. 상기제1 레이저빔의다중내부반사에의한이웃한레이들(rays) 사이의위상차이와상기제2 레이저빔의다중내부반사에의한이웃한레이들(rays) 사이의위상차이는π/2를유지한다.
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公开(公告)号：KR1020140004943A
公开(公告)日：2014-01-14
申请号：KR1020120072409
申请日：2012-07-03
Applicant: 한국표준과학연구원
Abstract: The present invention provides a device and a method for measuring the shape and depth of a hole. The present invention comprises: a light emitting part for irradiating broadband coherent light; an object to be measured having one or more holes and reflecting the light irradiated from the light emitting part on the surface with which the light is irradiated and the bottom surface of the holes; a beam splitter for splitting the light reflected from the object to be measured so as to head the reflected light to first and second paths; a first light detector for measuring the depth of the holes from interference signals by receiving the light reflected from the object to be measured and headed to the first path; and a second light detector for measuring the shape of the holes by receiving the light reflected from the object to be measured and headed to the second path.
Abstract translation: 本发明提供一种用于测量孔的形状和深度的装置和方法。 本发明包括：用于照射宽带相干光的发光部分; 要测量的物体具有一个或多个孔并将从发光部分照射的光照射在与其照射的表面和孔的底表面上; 分束器，用于分离从被测量物体反射的光，以将反射光照射到第一和第二路径; 第一光检测器，用于通过接收从待测物体反射的光并且朝向第一路径测量来自干扰信号的孔的深度; 以及第二光检测器，用于通过接收从待测物体反射的光并朝向第二路径测量孔的形状。
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公开(公告)号：KR101341804B1
公开(公告)日：2013-12-16
申请号：KR1020120051435
申请日：2012-05-15
Applicant: 한국표준과학연구원
IPC: G01D5/347
Abstract: 본발명은절대위치측정방법, 절대위치측정장치, 및스케일을제공한다. 이스케일은제1 폭을가지고제1 상태를나타내는제1 심볼(symbol), 상기제1 폭을가지고제2 상태를나타내는제2 심볼을이용하여 N 스테이지(stage)의선형피드백천이레지스터의시퀀스를가지고반복적으로배치된의사잡음코드(Pseudo-random-code)를대체하여형성된스케일패턴을포함한다. 제1 심볼은 2 개이상의제1 심볼영역들로분할되고, 제2 심볼은 2 개이상으로제2 심볼영역들로분할되고, 제1 심볼과상기제2 심볼이중첩되어동일한구조를가지는중첩영역이적어도하나는존재한다.
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公开(公告)号：KR1020130127709A
公开(公告)日：2013-11-25
申请号：KR1020120051435
申请日：2012-05-15
Applicant: 한국표준과학연구원
IPC: G01D5/347
CPC classification number: G01D5/34707 , G01D5/34776
Abstract: The present invention relates to an absolute position measuring method, an absolute position measuring apparatus, and a scale. The scale includes a scale pattern which is formed to replace a Pseudo random code, where linear feedback cloth at an N stage is repeatedly placed with the sequence of a register, using a first symbol for indicating a first state with a first width and a second symbol for indicating a second state with the first width. The first symbol is divided into at least two first symbol areas, and the second symbol is divided into at least two second symbol areas. In addition, at least one overlapping area exists with the same structure due to overlapping between the first symbol and the second symbol.
Abstract translation: 本发明涉及绝对位置测量方法，绝对位置测量装置和标尺。 缩放比例包括形成为代替伪随机码的缩放图案，其中使用用于指示具有第一宽度的第一状态的第一符号和第二宽度的第二符号来反复放置在N阶段的线性反馈布与寄存器的序列 用于指示具有第一宽度的第二状态的符号。 第一符号被划分为至少两个第一符号区域，并且第二符号被划分为至少两个第二符号区域。 此外，由于第一符号和第二符号之间的重叠，存在具有相同结构的至少一个重叠区域。
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