ABRASIVE MATERIAL HAVING A STRUCTURED SURFACE
    15.
    发明申请
    ABRASIVE MATERIAL HAVING A STRUCTURED SURFACE 审中-公开
    具有结构表面的磨料

    公开(公告)号:US20170008143A1

    公开(公告)日:2017-01-12

    申请号:US15113244

    申请日:2015-01-21

    CPC classification number: B24B37/26

    Abstract: To provide an abrasive material having a structured surface that is excellent in preventing adhesion and accumulation of foreign objects, and a manufacturing method thereof. The abrasive material of an embodiment of the present disclosure is an abrasive material having an abrasive layer with a structured surface with a plurality of three-dimensional elements arranged thereon, a surface treatment selected from the group consisting of fluoride treatment and silicon treatment being performed on at least a portion of the structured surface, and the fluoride treatment being selected from the group consisting of plasma treatment, chemical vapor deposition, physical vapor deposition, and fluorine gas treatment.

    Abstract translation: 提供具有优异的防止异物的附着和积聚的结构化表面的研磨材料及其制造方法。 本公开的实施方案的研磨材料是具有研磨层的研磨材料,所述研磨层具有布置在其上的多个三维元件的结构化表面,从由氟化物处理和硅处理组成的组中进行的表面处理在 所述结构化表面的至少一部分,所述氟化物处理选自等离子体处理,化学气相沉积,物理气相沉积和氟气处理。

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