MATERIAL STORAGE AND DISPENSING SYSTEM AND METHOD WITH DEGASSING ASSEMBLY
    12.
    发明申请
    MATERIAL STORAGE AND DISPENSING SYSTEM AND METHOD WITH DEGASSING ASSEMBLY 审中-公开
    材料储存和分配系统和方法与脱水装配

    公开(公告)号:WO2011046802A3

    公开(公告)日:2011-09-22

    申请号:PCT/US2010051786

    申请日:2010-10-07

    CPC classification number: B01D19/0036 B65D83/0055

    Abstract: The present disclosure relates to systems and methods which include a material receiving chamber for receiving a material (e.g., fluid containing medium) and an evacuable chamber configured to have vacuum applied thereto, and are configured to eliminate or at least reduce microbubble formation, eliminate or at least reduce unwanted diffusion of gas into the fluid containing medium being stored/dispensed, and/or remove at least a portion of gas or air bubbles entrained or dissolved in the fluid containing medium. Also disclosed are methods for controlling or reducing the concentration of gas in the material which may be subjected to external pressure during storage and/or dispensing.

    Abstract translation: 本公开涉及包括用于接收材料(例如,含有流体的介质)的材料接收室和被配置为具有施加到其上的真空的可抽空室的系统和方法,并且被配置为消除或至少减少微泡形成,消除或 至少减少气体进入储存/分配的含有流体的介质中的不期望的扩散,和/或去除夹带或溶解在含流体介质中的至少一部分气体或气泡。 还公开了用于控制或减少在储存和/或分配期间可能受到外部压力的材料中的气体浓度的方法。

    PERMEABLE GAS ASSEMBLY FOR GAS DELIVERY
    18.
    发明申请
    PERMEABLE GAS ASSEMBLY FOR GAS DELIVERY 审中-公开
    用于气体输送的透气性气体组件

    公开(公告)号:WO2004053367A2

    公开(公告)日:2004-06-24

    申请号:PCT/US0337735

    申请日:2003-11-24

    Inventor: TOM GLENN

    Abstract: A valve assembly for controlling gas delivery from a higher pressure fluid source to a lower pressure processing tool comprising a valve poppet movingly engageable with a valve seating member and a fluid permeable insert positioned between the valve poppet and the valve seating member that is unexposed to flowing fluid when the valve poppet is in a closed position thereby preventing fluid flow through the valve assembly and provides a diffusional path for transfer of all flowing fluid when the valve poppet is in an open position. The permeable insert can be inserted into the sealable and engageable surface of either the valve seat member or the valve poppet.

    Abstract translation: 一种用于控制从较高压力流体源到低压处理工具的气体输送的阀组件,其包括可与阀座构件移动地接合的阀提升阀和定位在阀提升阀和阀座构件之间的流体可渗透插入件,其不暴露于流动 当阀提升阀处于关闭位置时,流体流动,从而防止流体流过阀组件,并且当阀提升阀处于打开位置时提供用于传送所有流动流体的扩散路径。 可渗透插入件可以插入到阀座构件或阀提升阀的可密封和可接合的表面中。

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