公开(公告)号：DE69002503D1

公开(公告)日：1993-09-09

申请号：DE69002503

申请日：1990-03-29

Applicant: CANON KK

Inventor： YAMANO AKIHIKO ,  NOSE HIROYASU ,  KAWASE TOSHIMITSU ,  MIYAZAKI TOSHIHIKO ,  OGUCHI TAKAHIRO

IPC: G01B7/28 ,  G01B11/02 ,  G01B21/20 ,  G01B7/34 ,  G01B11/24

公开(公告)号：CA1312952C

公开(公告)日：1993-01-19

申请号：CA578008

申请日：1988-09-21

Applicant: CANON KK

Inventor： KAWADE HISAAKI ,  KAWADA HARUKI ,  SAKAI KUNIHIRO ,  MATSUDA HIROSHI ,  MORIKAWA YUKO ,  YANAGISAWA YOSHIHIRO ,  KANEKO TETSUYA ,  KAWASE TOSHIMITSU ,  KUMOMI HIDEYA ,  NOSE HIROYASU ,  KAWAKAMI EIGO

IPC: G01N27/00 ,  G01Q60/16 ,  G01Q70/10 ,  G01Q70/14 ,  G01Q80/00 ,  G11B9/00 ,  H01J37/26 ,  H01J37/28

Abstract: A microprobe is provided which comprises a single crystal provided on a part of one main surface of a substrate or a part of a thin film formed on one main surface of the substrate. The microprobe may have a single crystal having an apex portion surrounded by facets having a specific plane direction and comprising a specific crystal face. The method for preparing the microprobe and an electronic device employing the microprobe also provided which is useful for recording and reproducing.

公开(公告)号：CA2060674A1

公开(公告)日：1992-08-09

申请号：CA2060674

申请日：1992-02-05

Applicant: CANON KK

Inventor： TAGAWA MASAHIRO ,  MIYAZAKI TOSHIHIKO ,  KAWASE TOSHIMITSU

IPC: G01B7/34 ,  G01Q10/00 ,  G11B9/00 ,  G11B9/08 ,  H01L41/09

Abstract: A driving apparatus for driving an object comprises a pair of piezoelectric elements, one of them being arranged on the one side of the object while the other of them on the other side of the object, and the respective electrode arrangement directions of the pair of piezoelectric elements being substantailly identical to each other, and a control circuit which applies a predetermined voltage across the outer electrodes of the pair of piezoelectric elements respectively, gives an equipotential to the inner electrodes thereof, and causes the pair of piezoelectric elements to drive the object by varying the value of the potential given to the inner electrodes. Hence, the increased amount of a voltage applied to one piezoelectric element is exactly identical to the decreased amount for the other so as to make the extended and contracted amounts of the piezoelectric elements on both sides of the object the same. Consequently, no useless stress is given to the piezoelectric elements for the prevention of the deterioration of the elements to implement a precise fine driving over a long period.

公开(公告)号：CA2049197C

公开(公告)日：1992-02-17

申请号：CA2049197

申请日：1991-08-14

Applicant: CANON KK

Inventor： KURODA RYO ,  KAWASE TOSHIMITSU ,  MIYAZAKI TOSHIHIKO ,  NOSE HIROYASU ,  SHINJO KATSUHIKO

IPC: G01B7/34 ,  G01B21/30 ,  G01N37/00 ,  G01Q10/04 ,  G01Q20/04 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q60/38 ,  G01Q70/06 ,  G01Q70/10 ,  G01Q70/14 ,  G01Q80/00 ,  G11B5/592 ,  G11B9/00 ,  G11B9/14 ,  H01J37/28 ,  H01L41/09

Abstract: A micro-displacement type information detection probe device capable of following all of the undulation on the .mu.m order, etc. and the periodical surface unevenness on the nm order, etc. of the recording medium or the substrate in performing recording, reproduction, etc. by use of tunnel current, etc. is provided. By forming a cantilever 701 of the first stage by extending the insulation layer laminated on the substrate, providing a layer structure 708 - 710 having a piezoelectric material sandwiched between the electrode members on the cantilever of the first stage, forming further a cantilever 702 of the second stage on the extension from the tip end of the first cantilever having said layer structure and also forming an information detection probe 703 at the free end of the cantilever of said second stage, and utilizing the reverse piezoelectric effect formed by application of a voltage between the electrodes of said layer structure, the cantilever 701 of the above first stage is displaced.

公开(公告)号：CA2049197A1

公开(公告)日：1992-02-17

申请号：CA2049197

申请日：1991-08-14

Applicant: CANON KK

Inventor： MIYAZAKI TOSHIHIKO ,  NOSE HIROYASU ,  KURODA RYO ,  KAWASE TOSHIMITSU ,  SHINJO KATSUHIKO

IPC: G01B7/34 ,  G01B21/30 ,  G01N37/00 ,  G01Q10/04 ,  G01Q20/04 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q60/38 ,  G01Q70/06 ,  G01Q70/10 ,  G01Q70/14 ,  G01Q80/00 ,  G11B5/592 ,  G11B9/00 ,  G11B9/14 ,  H01J37/28 ,  H01L41/09

Abstract: A micro-displacement type information detection probe device capable of following all of the undulation on the mu m order, etc. and the periodical surface unevenness on the nm order, etc. of the recording medium or the substrate in performing recording, reproduction, etc. by use of tunnel current, etc. is provided. By forming a cantilever 701 of the first stage by extending the insulation layer laminated on the substrate, providing a layer structure 708 - 710 having a piezoelectric material sandwiched between the electrode members on the cantilever of the first stage, forming further a cantilever 702 of the second stage on the extension from the tip end of the first cantilever having said layer structure and also forming an information detection probe 703 at the free end of the cantilever of said second stage, and utilizing the reverse piezoelectric effect formed by application of a voltage between the electrodes of said layer structure, the cantilever 701 of the above first stage is displaced.

公开(公告)号：CA2035996A1

公开(公告)日：1991-08-10

申请号：CA2035996

申请日：1991-02-02

Applicant: CANON KK

Inventor： NOSE HIROYASU ,  MIYAZAKI TOSHIHIKO ,  OGUCHI TAKAHIRO ,  SAKAI KUNIHIRO ,  KAWASE TOSHIMITSU

IPC: G11B9/00

公开(公告)号：CA2002187A1

公开(公告)日：1990-05-09

申请号：CA2002187

申请日：1989-11-03

Applicant: CANON KK

Inventor： NOSE HIROYASU ,  TAKAMATSU OSAMU ,  MIYAZAKI TOSHIHIKO ,  KAWASE TOSHIMITSU

IPC: G01B7/34 ,  G01B21/30 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q60/10 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/14 ,  H01J37/252 ,  H01J37/28 ,  H02N2/00

Abstract: A probe unit (Fig.1) is provided that is suitable for example for use in a scanning tunnel microscope or the like. The electrical probe contact (7) of this unit is centrally located and mounted upon a flexible member (4,5,6). The flexible member (4,5,6) is symmetrically supported (3) at its periphery and is constrained thus so that the electrical probe contact (7) can only move back and forth in a single direction. Flexure of the flexible member (4,5,6) may be driven by electrostatic or piezoelectric forces. Alternatively, the flexible member may include a layer of piezoelectric material, the elongation or contraction of which will cause flexure.

公开(公告)号：DE69824067D1

公开(公告)日：2004-07-01

申请号：DE69824067

申请日：1998-03-20

Applicant: CANON KK

Inventor： KAWASE TOSHIMITSU ,  NAKAMURA NAOTO

IPC: H01J29/92 ,  H01J29/90 ,  H01J31/12

Abstract: An image-forming apparatus comprises in a vacuum envelope an electron source including a plurality of electron-emitting devices and an image-forming member including a fluorescent layer and a high voltage anode layer disposed vis-a-vis the electron source. The envelope may preferably have a low resistance electroconductive member electrically connected to the ground by way of a low impedance ground connection line for by-passing large electric current which may occur upon electric discharge between the anode layer and the electron source and can possibly destroy the electron-emitting devices if flowing thereinto by way of the driving wires of the devices. The high voltage anode layer and/or the low resistance electroconductive. member is drawn out from the inside of the envelope to a recess formed in the outer surface of the envelope and is electrically connected to external wiring in the recess.

公开(公告)号：AT211814T

公开(公告)日：2002-01-15

申请号：AT97200263

申请日：1992-04-09

Applicant: CANON KK

Inventor： KURODA RYO ,  HATANAKA KATSUNORI ,  MIYAZAKI TOSHIHIKO ,  YAGI TAKAYUKI ,  KAWASE TOSHIMITSU ,  SHINJO KATSUHIKO

IPC: G01B21/30 ,  G01B7/34 ,  G01B9/02 ,  G01N37/00 ,  G01P15/08 ,  G01Q20/02 ,  G01Q60/08 ,  G01Q60/24 ,  G01Q60/40 ,  G01Q60/50 ,  G01Q60/56 ,  G01Q70/14 ,  G01Q80/00 ,  G01R33/038 ,  G11B9/00 ,  G11B9/14

Abstract: A cantilever unit comprises a cantilever for supporting a probe and a displacement amount detecting means, the displacement amount detecting means being integrated with the cantilever. An information processing apparatus comprises the cantilever unit and optionally an information recording medium stationed in close vicinity to the unit, wherein an information in the medium is reproduced at a signal on the basis of a displacement amount of the cantilever. An atomic force microscope and magnetic force microscope comprise the cantilever unit, respectively.

公开(公告)号：DE3856336D1

公开(公告)日：1999-07-01

申请号：DE3856336

申请日：1988-09-21

Applicant: CANON KK

Inventor： KAWADE HISAAKI ,  SAKAI KUNIHIRO ,  MORIKAWA YOKO ,  KANEKO TETSUYA ,  KUMOMI HIDEYA ,  KAWAKAMI EIGO ,  KAWADA HARUKI ,  MATSUDA HIROSHI ,  NOSE HIROYASU ,  YANAGISAWA YOSHIHIRO ,  KAWASE TOSHIMITSU

IPC: G01N27/00 ,  G01Q60/16 ,  G01Q70/10 ,  G01Q70/14 ,  G01Q80/00 ,  G11B9/00 ,  H01J37/26 ,  H01J37/28

Abstract: A microprobe (4) is provided which comprises a single crystal provided on a part of one main surface of a substrate or a part of a thin film (2) formed on one main surface of the substrate (1). The microprobe may have a single crystal having an apex portion (5) surrounded by facets having a specific plane direction and comprising a specific crystal face. The method for preparing the microprobe and an electronic device employing the microprobe also provided which is useful for recording and reproducing.