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11.发明申请
公开(公告)号：WO2015171224A1
公开(公告)日：2015-11-12
申请号：PCT/US2015/024114
申请日：2015-04-02
Applicant: CHIRP MICROSYSTEMS, INC.
Inventor： SHELTON, Stefon , GUEDES, Andre , PRZYBYLA, Richard , KIANG, Meng-Hsiung , HORSLEY, David
CPC classification number: H03H9/174 , B06B1/0603 , H01L41/0926 , H01L41/0973 , H01L41/187 , H01L41/1873 , H01L41/1876 , H03H9/02244 , H03H9/178 , H03H2009/155 , H04R17/00
Abstract: A transducer includes first and second piezoelectric layers made of corresponding different first and second piezoelectric materials and three or more electrodes, implemented in two or more conductive electrode layers. The first piezoelectric layer is sandwiched between a first pair of electrodes and the second piezoelectric layer is sandwiched between a second pair of electrodes. The first and second pairs of electrodes contain no more than one electrode that is common to both pairs.
Abstract translation: 传感器包括由相应的不同的第一和第二压电材料制成的第一和第二压电层，以及三个或更多个电极，其实施在两个或多个导电电极层中。 第一压电层夹在第一对电极之间，第二压电层夹在第二对电极之间。 第一和第二对电极包含不超过一对两对电极。
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12.发明申请
公开(公告)号：WO2019099013A1
公开(公告)日：2019-05-23
申请号：PCT/US2017/062059
申请日：2017-11-16
Applicant: CHIRP MICROSYSTEMS, INC.
Inventor： GUEDES, Andre , GOERICKE, Fabian , SHELTON, Stefon , COSTELLO, Benedict , HORSLEY, David
IPC: B06B1/06 , H01L41/08 , H01L41/083 , H01L41/09
CPC classification number: H01L41/0973 , B06B1/0607 , H01L41/318 , H01L41/332
Abstract: A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. An actuating structure layer on a surface of the membrane includes a piezoelectric layer sandwiched between the membrane and an upper electrode layer. The actuating structure layer is patterned to selectively remove portions of the actuating structure from portions of the membrane to form a central portion proximate a center of the open cavity and three or more rib portions projecting radially outward from the central portion.
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公开(公告)号：WO2017070386A1
公开(公告)日：2017-04-27
申请号：PCT/US2016/057969
申请日：2016-10-20
Applicant: CHIRP MICROSYSTEMS, INC.
Inventor： KLINE, Mitchell , PRZYBYLA, Richard J. , HORSLEY, David
IPC: G01S7/491
CPC classification number: G01S7/524 , B06B1/0215 , G01S7/521 , G01S15/102 , G01S15/325
Abstract: An ultrasonic transmitter system includes a digital controller, bandpass pulse-width modulator (BP-PWM) unit, a digital to analog converter (DAC), and an ultrasound transducer. The controller generates pulse width and phase reference signals. The BP-PWM configured receives these signals generates a pulse width modulation (PWM) output characterized by a pulse width and a phase based on the pulse width and phase reference signals. The DAC) receives the PWM output from the BP-PWM unit and generates an output characterized by the pulse width and phase. The ultrasonic transducer receives the output from the DAC and generates an output sound pressure in response to the output from the DAC. An amplitude of the RMS sound pressure depends on the pulse width of the output from the DAC.
Abstract translation: 超声发射器系统包括数字控制器，带通脉宽调制器（BP-PWM）单元，数模转换器（DAC）和超声换能器。 控制器产生脉冲宽度和相位参考信号。 配置的BP-PWM接收这些信号，基于脉冲宽度和相位参考信号生成以脉冲宽度和相位为特征的脉宽调制（PWM）输出。 DAC）接收来自BP-PWM单元的PWM输出并产生一个由脉宽和相位表征的输出。 超声波换能器接收来自DAC的输出，并响应DAC的输出产生输出声压。 RMS声压的幅度取决于DAC输出的脉冲宽度。
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14.发明申请
公开(公告)号：WO2016073936A2
公开(公告)日：2016-05-12
申请号：PCT/US2015/059595
申请日：2015-11-06
Applicant: CHIRP MICROSYSTEMS
Inventor： PRZYBYLA, Richard , GUEDES, Andre , SHELTON, Stefon , KIANG, Meng-Hsiung , HORSLEY, David
IPC: H04R3/04
CPC classification number: G10K11/002 , G01S7/521 , G01S15/10 , G10K11/346 , H04R3/04 , H04R17/00 , H04R29/002 , H04R29/005 , H04R2201/003 , H04R2217/03
Abstract: A system and method use an array of ultrasonic transducers to emit and receive sound in a phased array fashion by using acoustic waveguides to achieve a desired acoustic radiation and reception pattern. A chip package attached to an acoustic transducer array includes acoustic waveguides coupled to acoustic ports. Each waveguide is coupled between a corresponding acoustic transducer and a corresponding acoustic port. A spacing of a pair of acoustic ports is different than a spacing of a corresponding pair of acoustic transducers.
Abstract translation: 系统和方法使用超声波换能器阵列通过使用声波导来以相控阵方式发射和接收声音以实现期望的声辐射和接收模式。 连接到声学换能器阵列的芯片封装包括耦合到声学端口的声波导。 每个波导耦合在相应的声学换能器与相应的声学端口之间。 一对声学端口的间距不同于相应一对声学换能器的间距。
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公开(公告)号：EP3383556A1
公开(公告)日：2018-10-10
申请号：EP15909912.6
申请日：2015-12-01
Applicant: Chirp Microsystems, Inc.
Inventor： SHELTON, Stefon , GUEDES, Andre , HORSLEY, David
IPC: B06B1/06
Abstract: A package design for a micromachined ultrasound transducer (MUT) utilizing curved geometry to control the presence and frequency of acoustic resonant modes is described. The approach consists of reducing in number and curving the reflecting surfaces present in the package cavity to adjust the acoustic resonant frequencies to locations outside the band of interest. The design includes a cavity characterized by a curved geometry and a MUT mounted to a side of a substrate facing the cavity with a sound emitting portion of the MUT facing an opening in the substrate. The substrate is disposed over an opening of the cavity with the substrate oriented such that the MUT located within the cavity.
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Patent Agency Ranking16.发明公开
公开(公告)号：EP3216231A2
公开(公告)日：2017-09-13
申请号：EP15856698.4
申请日：2015-11-06
Applicant: Chirp Microsystems, Inc.
Inventor： PRZYBYLA, Richard , GUEDES, Andre , SHELTON, Stefon , KIANG, Meng-Hsiung , HORSLEY, David
CPC classification number: G10K11/002 , G01S7/521 , G01S15/10 , G10K11/346 , H04R3/04 , H04R17/00 , H04R29/002 , H04R29/005 , H04R2201/003 , H04R2217/03
Abstract: A system and method use an array of ultrasonic transducers to emit and receive sound in a phased array fashion by using acoustic waveguides to achieve a desired acoustic radiation and reception pattern. A chip package attached to an acoustic transducer array includes acoustic waveguides coupled to acoustic ports. Each waveguide is coupled between a corresponding acoustic transducer and a corresponding acoustic port. A spacing of a pair of acoustic ports is different than a spacing of a corresponding pair of acoustic transducers.
Abstract translation: 系统和方法使用超声换能器阵列通过使用声波导来以相控阵方式发射和接收声音以实现期望的声辐射和接收模式。 连接到声学换能器阵列的芯片封装包括耦合到声学端口的声波导。 每个波导耦合在相应的声学换能器与相应的声学端口之间。 一对声学端口的间隔不同于相应的一对声学换能器的间隔。
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公开(公告)号：EP3365115B1
公开(公告)日：2020-09-30
申请号：EP16858243.5
申请日：2016-10-20
Applicant: Chirp Microsystems, Inc.
Inventor： KLINE, Mitchell , PRZYBYLA, Richard J. , HORSLEY, David
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公开(公告)号：EP3365115A1
公开(公告)日：2018-08-29
申请号：EP16858243.5
申请日：2016-10-20
Applicant: Chirp Microsystems, Inc.
Inventor： KLINE, Mitchell , PRZYBYLA, Richard J. , HORSLEY, David
CPC classification number: H02M3/07 , B06B1/0207 , H02M1/08 , H02M1/36 , H02M7/483 , H02M2001/0048 , H02M2001/007 , Y02B70/1491
Abstract: An ultrasound transducer may be driven by a driver circuit having one or more charge pumps and a multi-level inverter. The one or more charge pumps are configured to drive the ultrasound transducer only during output transitions of the inverter.
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19.发明公开PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS WITH LOW STRESS SENSITIVITY AND METHODS OF FABRICATION 审中-公开低应力灵敏度的压电微机械超声换能器及其制造方法
公开(公告)号：EP3233311A1
公开(公告)日：2017-10-25
申请号：EP15874212.2
申请日：2015-12-18
Applicant: Chirp Microsystems, Inc.
Inventor： GUEDES, Andre , PRZYBYLA, Richard , SHELTON, Stefon , KIANG, Meng-Hsiung , HORSLEY, David
CPC classification number: G01N29/2437 , B06B1/0651 , G01N2291/0427 , G10K13/00
Abstract: A piezoelectric micromachined ultrasonic transducer (pMUT) device may include a piezoelectric membrane transducer designed to have lower sensitivity to residual stress and reduced sensitivity to geometric variations arising from the backside etching process used to release the membrane. These designs allow some of its key feature to be adjusted to achieve desired characteristics, such as pressure sensitivity, natural frequency, stress sensitivity, and bandwidth.
Abstract translation: 压电微机械超声换能器（pMUT）装置可以包括压电膜换能器，该换能器被设计成对残余应力具有较低的灵敏度并且对由用于释放膜的背面蚀刻过程引起的对几何变化的敏感度降低。 这些设计允许调整其某些关键特性以实现所需特性，如压力灵敏度，固有频率，应力敏感度和带宽。
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公开(公告)号：EP3175490A1
公开(公告)日：2017-06-07
申请号：EP15827176.7
申请日：2015-07-31
Applicant: Chirp Microsystems Inc.
Inventor： HORSLEY, David , GUEDES, Andre , KIANG, Meng-Hsiung , PRZYBYLA, Richard , SHELTON, Stefon
CPC classification number: G01S15/10 , B06B1/0215 , B06B1/0292 , B06B1/0644 , B06B1/0651 , B06B2201/51 , B06B2201/55 , B06B2201/70 , B81B3/0021 , G01S7/521 , G01S7/524 , G01S7/527 , G01S15/04 , G01S15/46 , G01S15/87 , G01S2015/465
Abstract: A miniature rangefinder includes a housing, a micromachined ultrasonic transducer, and signal processing circuitry. The housing includes a substrate and a lid. The housing has one or more apertures and the micromachined ultrasonic transducer is mounted over an aperture. The micromachined ultrasonic transducer may function as both a transmitter and a receiver. An integrated circuit is configured to drive the transducer to transmit an acoustic signal, detect a return signal, and determine a time of flight between emitting the acoustic signal and detecting the return signal.
Abstract translation: 微型测距仪包括一个外壳，一个微机械超声波换能器和信号处理电路。 壳体包括基板和盖子。 壳体具有一个或多个孔，并且微机械超声换能器安装在孔上。 微机械超声波换能器既可以用作发射器又可以用作接收器。 集成电路被配置为驱动换能器发送声信号，检测返回信号并且确定在发射声信号和检测返回信号之间的飞行时间。
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