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    FOLDED LONGITUDINAL TORSIONAL HINGE FOR GIMBALED MEMS MIRROR HINGE
    11.
    发明专利
    FOLDED LONGITUDINAL TORSIONAL HINGE FOR GIMBALED MEMS MIRROR HINGE 未知

    公开(公告)号：AU2003213165A1

    公开(公告)日：2003-09-09

    申请号：AU2003213165

    申请日：2003-02-18

    Applicant: GLIMMERGLASS NETWORKS INC

    Inventor： STAKER BRYAN P ,  BANYAI WILLIAM C

    IPC: B81B3/00 ,  G02B26/08 ,  G02B26/10 ,  G02B7/182

    Abstract: In a gimbaled micromachined micromirror array optimized for parallel-plate electrostatic operation, longitudinal-type gimbal hinge elements are provided in which a plurality of torsional longitudinal hinge elements are arranged in an array parallel to the axis of rotation and which are linked together by rigid lateral brace sections. In primary embodiment the hinge elements are arranged in a double gimbal configuration. Specific embodiments of the hinge elements are simple longitudinal, compound longitudinal, stacked simple longitudinal, and stacked compound longitudinal. The longitudinal hinges may be used with various types of mirrors including circular or rectilinear, recessed or nonrecessed, where the hinges are connected in either a symmetric or asymmetric configuration relative to one another, as hereinafter illustrated by way of a subset of examples. A preferred embodiment of a mirror structure suitable for an array structure according to the invention is a nonstacked compound longitudinal hinge symmetrically connected to a circular nonrecessed electrostatically-actuatable parallel plate mirror within a substantially circular ring hinged in substantially the same way to form a double gimbaled structure.

    CHARGING GUARD WITH PASCHEN STACKING
    12.
    发明专利
    CHARGING GUARD WITH PASCHEN STACKING 未知

    公开(公告)号：HK1139742A1

    公开(公告)日：2010-09-24

    申请号：HK10105875

    申请日：2010-06-11

    Applicant: GLIMMERGLASS NETWORKS INC

    Inventor： STAKER BRYAN P ,  FERNANDEZ ANDRES ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

    IPC: G02B20060101 ,  H01L20060101

    Abstract: A MEMS-based mirror is provided with trenches between adjacent electrodes in order to be able to withstand relatively high applied voltages, and thus has a substantially reduced exposure to uncontrolled surface potentials. The MEMS-based mirror, thus avoids voltage drifts and has an improved mirror position stability. The trench dimensions are selected such that the voltage applied between each adjacent pair of electrodes stays within predefined limits. An insulating layer, such as silicon dioxide, electrically isolates each pair of adjacent electrodes. Each insulting layer extends partially above an associated trench and is characterized by the same height and width dimensions.

    Mems structure with surface potential control
    16.
    发明专利
    Mems structure with surface potential control 未知

    公开(公告)号：AU2002361551A1

    公开(公告)日：2003-04-22

    申请号：AU2002361551

    申请日：2002-07-22

    Applicant: GLIMMERGLASS NETWORKS INC

    Inventor： FERNANDEZ ANDRES ,  MURAY LAWRENCE P ,  STAKER BRYAN P

    IPC: B81B3/00 ,  G02B26/08 ,  G02B26/00

    Abstract: In an electrostatically controlled apparatus, such as a MEMS array having cavities formed around electrodes and which is mounted directly on a dielectric substrate in which are embedded electrostatic actuation electrodes disposed in alignment with the individual MEMS elements, a mechanism is provided to controllably neutralize excess charge and establish a controlled potential between the MEMS elements and the electrostatic actuation electrodes.

    ARRAY OF GRADUATED PRE-TILTED MEMS MIRRORS
    17.
    发明申请
    ARRAY OF GRADUATED PRE-TILTED MEMS MIRRORS 审中-公开
    研磨抛光MEMS微镜阵列

    公开(公告)号：WO2008070764A3

    公开(公告)日：2008-09-12

    申请号：PCT/US2007086616

    申请日：2007-12-06

    Applicant: GLIMMERGLASS NETWORKS INC ,  STAKER BRYAN P ,  FERNANDEZ ANDRES ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

    Inventor： STAKER BRYAN P ,  FERNANDEZ ANDRES ,  KINDWALL ALEXANDER P ,  OWENS WINDSOR E

    IPC: G02B26/08 ,  G02B6/35

    CPC classification number: G02B6/3556 ,  G02B6/357 ,  G02B26/0841

    Abstract: An array of MEMS devices is formed on a planar substrate having in each of a plurality of annular regions or sectors a plurality of MEMS mirrors of substantially identical structure, wherein the MEMS mirrors in each region have an identical pre-tilt. The pre-tilt is achieved by embedding each dual-axis tiltable mirror within a pre-tilted microplatform or gimbal. In a specific embodiment, one microplatform of a preselected pre-tilt is provided for each micromirror and an underlying electrode is provided having a shape conforming with the pre-tilt. In a specific embodiment, the annular regions are contiguous elliptical or ovoidal regions. By pre-tilt, it is meant that the rest state or nonactuated state of the micro-mirror is such that a reflected beam from a fixed source is directed to the center of a target array.

    Abstract translation: 在平面基板上形成MEMS器件的阵列，其具有在多个环形区域或扇区中的每一个中具有基本相同结构的多个MEMS反射镜，其中每个区域中的MEMS反射镜具有相同的预倾斜。 预倾斜是通过将每个双轴可倾斜镜嵌入预倾斜的微平台或万向节来实现的。 在具体实施例中，为每个微反射镜提供预选的预倾角的一个微平台，并且提供具有与预倾斜一致的形状的底层电极。 在具体实施例中，环形区域是相邻的椭圆形或椭圆形区域。 通过预倾斜，意味着微镜的静止状态或非激活状态使得来自固定源的反射光束被引导到目标阵列的中心。

    MEMS STRUCTURE WITH SURFACE POTENTIAL CONTROL
    18.
    发明申请
    MEMS STRUCTURE WITH SURFACE POTENTIAL CONTROL 审中-公开
    具有表面电位控制的MEMS结构

    公开(公告)号：WO03031316A2

    公开(公告)日：2003-04-17

    申请号：PCT/US0223418

    申请日：2002-07-22

    Applicant: GLIMMERGLASS NETWORKS INC

    Inventor： MURAY LAWRENCE P ,  STAKER BRYAN P ,  FERNANDEZ ANDRES

    IPC: B81B3/00 ,  G02B26/08 ,  B81B

    CPC classification number: G02B26/0841 ,  B81B3/0086 ,  B81B2201/042

    Abstract: In an electrostatically controlled apparatus, such as a MEMS array having cavities formed around electrodes and which is mounted directly on a dielectric substrate in which are embedded electrostatic actuation electrodes disposed in alignment with the individual MEMS elements, a mechanism is provided to controllably neutralize excess charge and establish a controlled potential between the MEMS elements and the electrostatic actuation electrodes.

    Abstract translation: 在静电控制装置中，例如具有围绕电极形成的空腔的MEMS阵列，其直接安装在电介质基底上，其中嵌入的静电致动电极与各个MEMS元件对准设置，提供了可控地中和多余电荷的机构 并且在MEMS元件和静电致动电极之间建立受控电位。

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