公开(公告)号：DE2828530A1

公开(公告)日：1979-01-11

申请号：DE2828530

申请日：1978-06-29

Applicant: IBM

Inventor： DILL FREDERICK HAYES ,  TIBBETTS RAYMOND EUGENE ,  WILCZYNSKI JANUSZ STANISLAW

IPC: H01L21/30 ,  G02B17/00 ,  G02B17/08 ,  G03F7/20 ,  H01L21/027 ,  G02B13/24

公开(公告)号：DE2430521A1

公开(公告)日：1975-01-23

申请号：DE2430521

申请日：1974-06-25

Applicant: IBM

Inventor： DILL FREDERICK HAYES ,  HAUGE PETER SWIFT

IPC: G01J4/04 ,  G01B11/06 ,  G01B11/27 ,  G01N21/21 ,  G02B5/30 ,  G01N21/00

Abstract: An automatic ellipsometer is disclosed which comprises a mechanical-optical, an electrical, and a digital (computer) component. The mechanical-optical component includes a light source, various polarizing elements (one of which spins continuously), necessary apertures, and a light detector. The electrical component includes a signal from the light detector, trigger pulses from an angular shaft encoder, and an analog-digital converter, and produces a string of digitized data in a form which can be read and analyzed by digital logical circuitry. The digital (computer) component comprises logic circuitry in sufficient quantity to store and execute a relatively simple data analysis program, there being suitably associated with the digital component, one or more print-out and/or display devices. To facilitate automation of ellipsometric operation, there is provided a sample alignment system which includes a spot-defining aperture in the incident light beam, a sample holder with capability for rotation about two perpendicular axes intersecting at the intersection of the axis of the light beam source and the axis of the detector, and a four-quadrant beam deviation detector located a convenient distance from the sample along the detector axis. In the operation of the system, the sample is properly oriented about two axes of rotation, and data in the form of light intensity transmitted through a continuously spinning analyzer in the reflected beam path is sampled at convenient angular intervals to provide data which is digitally coded, and the data then is numerically Fourier analyzed to enable extrapolated properties of the sample to be displayed or typed out. The entire sequence of operations, i.e., from sample insertion to type out or display is on the order of about 5-10 seconds.

公开(公告)号：DE3484987D1

公开(公告)日：1991-10-02

申请号：DE3484987

申请日：1984-11-09

Applicant: IBM

Inventor： DILL FREDERICK HAYES ,  GUPTA SATISH ,  WARTER PETER JAMES

IPC: G11C11/401 ,  G11C7/20 ,  G11C7/00

Abstract: A random access memory comprising cells (125) is rapidly reset (cleared) to a predetermined conditions (e.g. all ones), by providing an appropriate signal on a data-in lead (132), which sets line (135) to "1" (or "0") providing a signal on fast clear lead (130) which closes switches in a switch bank (138), which sets the bit lines (128) at the level of line (135), and sequentially energizing the word lines (124).

公开(公告)号：DE3479455D1

公开(公告)日：1989-09-21

申请号：DE3479455

申请日：1984-05-03

Applicant: IBM

Inventor： DILL FREDERICK HAYES ,  LING DANIEL TAJEN ,  MATICK RICHARD EDWARD ,  MCBRIDE DENNIS JAY

IPC: G06F13/36 ,  G06F13/40

公开(公告)号：DE2439795A1

公开(公告)日：1975-04-03

申请号：DE2439795

申请日：1974-08-20

Applicant: IBM

Inventor： DILL FREDERICK HAYES ,  HOEKSTRA JAN PIETER

IPC: H01L21/66 ,  H01L21/306 ,  H01L21/311 ,  H01L21/316

Abstract: 1448048 Etching INTERNATIONAL BUSINESS MACHINES CORP 30 July 1974 [21 Sept 1973] 33499/74 Heading B6J [Also in Division H1] An insulating layer 22 is etched from the surface of a photo-electric semi-conductor substrate 18 using a conductive etching solution 10, by a method comprising illuminating an area of the substrate 18 and detecting when a current path is established between the solution 10 and the substrate 18 through the area being etched. The substrate 18 may be silicon which is coated with silicon oxide layers 20, 22. A gasket 28 in a holder 14 ensures that only the layer 22 is exposed to the solution 10. One electrode 34 contacting the substrate 18 capacitively, or directly if the oxide layer 20 is absent, and another electrode 38 contacting the solution 10, are coupled to a current detector 40 which registers an output when the solution 10 reaches the substrate 18, whereupon the substrate 18 is removed either manually or by a servomechanism. The illumination consists of a chopped D.C. light beam.

公开(公告)号：DE1123497B

公开(公告)日：1962-02-08

申请号：DEJ0018725

申请日：1960-09-16

Applicant: IBM

Inventor： DILL FREDERICK HAYES

IPC: H03K3/315 ,  H03K3/45 ,  H03K17/58 ,  H03K17/80 ,  H03K19/16

Abstract: 953,176. Tunnel diode monostable circuits; controlled non-linear inductors. INTERNATIONAL BUSINESS MACHINES CORPORATION. Sept. 20, 1960 [Dec. 30, 1959], No. 32265/60. Headings H3B and H3T. A monostable circuit comprises a magnet core having one winding in series with a bias source, an input pulse source and a tunnel diode and a second winding connected in series with a bias source, the arrangement being such that normally the current through one winding establishes flux saturation of the core in one sense and upon the occurrence of a pulse in the input winding the condition of the tunnel diode is switched whereby flux saturation is temporarily established in the other sense. Fig. 3 shows an arrangement comprising a saturable core 1, a bias winding 4 in series with a bias current source 12, 13 and a second winding 2 connected in series with an input transformer 9, a tunnel diode 7 and bias source 5 and 6. In the normal condition, the tunnel diode operates in a region before the peak of its current voltage characteristic where the current through it is sufficiently high to saturate the core. An input pulse in winding 9 temporarily shifts the operating point of the diode to the region of the " valley " point where the current is so reduced that the bias current in winding 4 saturates the core in the opposite sense. Thereafter, the circuit returns to its initial condition so that a pulse is produced in output winding 3. The core may be of a square-loop type and a further tunnel diode may be connected in series with winding 4 (Fig. 4, not shown) in which case the diode 7 may be operated in the " valley " region and the additional diode on the slope up to the peak point. It is also stated that the circuit of Fig. 3 could be operated around the valley region instead of round the peak region. If two input windings are connected in series an " OR " or " AND " circuit may be provided, the latter relying on the threshold of the tunnel diode or a square loop core. In addition, if one input winding carries reference pulses a " NOT " circuit may be provided, an output being produced by the reference pulses only when they are not opposed by an input pulse.