Abstract:
PROBLEM TO BE SOLVED: To provide an electrically programmable fuse structure for IC, and its manufacturing method. SOLUTION: This electrically programmable fuse has a first terminal part and second terminal part that are interconnected with fuse and elements. The first terminal part and second terminal part exist in different heights to the support surface of the fuse structure. The interconnecting fuse element connects the height difference between the height of the first terminal part and the second terminal part. While the first terminal part and second terminal part are oriented to be parallel with the support surface, the fuse element include a part oriented to be a right angle to the support surface, and also include at least one right-angled curvature portion that connects at least one of the first terminal element and second terminal element and the part of the fuse element oriented to be right angle. COPYRIGHT: (C)2007,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a field-effect transistor having a substantially isolated body. SOLUTION: This field-effect transistor as an insulated gate field-effect transistor 10 has a device region 17, formed on a semiconductor material-made substantially electrically isolated region contact a semiconductor substrate 16 via a neck region 13 capable of exchanging charged carriers with the semiconductor substrate 16. The device region 17 of the transistor 10 is isolated from the electric contact to the substrate 16 at a surface other than that of the neck region 13.
Abstract:
PROBLEM TO BE SOLVED: To provide a method of forming semiconductor devices having wafer back-side capacitors.SOLUTION: A method includes the following steps of: preparing an SOI substrate having a buried insulating layer inserted between a front-side active silicon layer and a back-side bulk silicon layer; forming on the front side of the SOI substrate an integrated circuit including a buried contact plug extending from the front side of the SOI substrate while penetrating through the buried insulating layer; performing back-side etching process to form a trench in the bulk silicon layer and expose an end part of the buried contact plug to the back side surface of the buried insulating layer; and forming in a trench a capacitor including a first capacitor plate, a second capacitor plate, and a capacitor dielectric layer inserted between the first and second capacitor plates. The first capacitor plate is formed to contact with the exposed end part of the buried contact plug.
Abstract:
PROBLEM TO BE SOLVED: To provide an apparatus and method for mitigating a leakage current of a semiconductor device before catastrophic leakage current runaway occurs.SOLUTION: A leakage current shift monitor unit 20 is electrically connected to an output node of a leakage current target unit 10 and collects leakage currents from a selected target semiconductor device for two consecutive predefined temporal periods and measures the difference between the collected leakage currents. A comparator 40 receives and compares the outputs of the current shift monitor unit 20 and a reference voltage generator 30. The comparator 40 propagates an alert signal to the leakage current target unit 10 when the leakage voltage output from the leakage current shift monitor unit 20 exceeds the reference voltage, that is, a condition that indicates that the leakage current is about to approach catastrophic runaway levels. This alert signal attains leak mitigation also including a repair voltage to be applied to a gate of the target semiconductor device.
Abstract:
PROBLEM TO BE SOLVED: To provide an interconnect structure having a barrier-redundancy constituent, and a method of forming the interconnect structure. SOLUTION: A via diffusion barrier 30 exists on a portion of a conductive line 20. A conductive material 54 existing on a portion having no barrier 30 on the conductive line 20 provides an electrical path between a conductive line diffusion barrier 22 and the via diffusion barrier 30. Accordingly, an internal barrier-redundancy constituent is formed, using the conductive material 54, the conductive line diffusion barrier 22 and the via diffusion barrier 30. This electrical path to be provided by the barrier-redundancy constituent can avoid a sudden circuit open resulted from EM failure of the via bottom. Thus, after the EM failure is detected by a monitoring device, the barrier-redundancy constituent for providing a sufficient time for chip replacement or system operation adjustment is provided to the interconnect structure. COPYRIGHT: (C)2007,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a method for designing an analog or mixed-signal semiconductor integrated circuit, for example, a circuit for matching device characteristics. SOLUTION: The method includes a circuit layout pattern and layout method for making it possible to match circuit parts accurately or proportionally by uniformly distributing the circuit parts so that the circuit parts are not affected by an environment or a process variation or an influence is kept to a minimum and, thereby improving the performance of an analog and mixed-signal circuit. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To obtain an active FET body device capable of balancing high-speed electric charges, decreasing off-current, and increasing on-current. SOLUTION: This embodiment comprises a silicon substrate 2, a silicon dioxide layer 3, a monocrystal silicon layer 4, a silicon dioxide layer 5, a spacer 13 of N+ doped polysilicon, a conformal layer 15 of a conductive diffusion preventing substance, a metal silicide layer 16, a CVD silicon dioxide layer 17, an insulator spacer 18, a silicon oxide layer 19, and a polysilicon 21. In an off-state, a gate contact with a body holds the body at a low word line level. In this state, a threshold takes a larger value. In addition to a voltage added to the N+ part 13 of a gate conductor, a potential from the body to a source rises. As a result, if the device is turned on, Vt lowers. By the effects of a dynamic Vt fall accompanied by a low off-current, this embodiment is suitable for a device using a very low voltage.
Abstract:
PROBLEM TO BE SOLVED: To provide a structure related to a semiconductor memory cell whose size is less than 4.5F2 in a case where F denotes the minimum dimension of a lithography techinique, and a manufacturing method thereof. SOLUTION: A semiconductor memory cell comprises a memory capacitor 12 formed in a trench, a transfer device formed in a mesa region which extends on the substantial arc of the periphery of the trench and is electrically isolated, and a buried strap which electrically connects the transfer device to the memory capacitors, wherein the transfer device comprises a controlled conduction channel located at a prescribed position on the arc removed from the buried strap.
Abstract:
A wafer structure (10) suitable for the formation of semiconductor devices thereon and having a buried interconnect structure for interconnection of desired ones of the semiconductor devices according to a predetermined interconnection pattern and a method of making the same is disclosed. The wafer structure comprises a primary substrate (20) having a first thickness appropriate for the formation of the desired semiconductor devices. The primary substrate further comprises a) conductive interconnection pads (24) of a second thickness formed on a bottom surface of the primary substrate according to the predetermined interconnection pattern, b) first isolation pads (22) of a third thickness formed on the bottom surface of the primary substrate between the conductive interconnection pads, and c) interconnection pad caps (28) of a fourth thickness formed upon the surface of the interconnection pads opposite from the primary substrate, wherein the interconnection pad caps comprise a material suitable for wafer bonding, and further wherein the total thickness of the second thickness and the fourth thickness equals the third thickness. The structure further comprises a secondary substrate (30) having an oxide layer (32) thereon bonded to the interconnection pad caps and the first isolation pads of the primary wafer.