公开(公告)号：FR2276625A1

公开(公告)日：1976-01-23

申请号：FR7515556

申请日：1975-05-09

Applicant: IBM

Inventor： DORAN SAMUEL ,  PERKINS MERLYN H

IPC: E01C11/26 ,  H01J37/153 ,  H01J37/21 ,  H01J37/244 ,  H01J37/30 ,  H01J37/305 ,  H01L21/027 ,  H05B3/36 ,  H05B3/56 ,  G05D3/02 ,  H01L21/70

Abstract: A beam of charged particles is deflected in a closed path such as a square, for example, over a cross wire grid at a constant velocity by an X Y deflection system. A small high frequency jitter is added at both axes of deflection to cause oscillation of the beam at 45 DEG to the X and Y axes. From the time that the leading edge of the oscillating beam passes over the wire until the trailing edge of the beam passes over the wire, an envelope of the oscillations produced by the jitter is obtained. A second envelope is obtained when the leading edge of the beam exits from being over the wire until the trailing edge of the beam ceases to be over the wire. Thus, a pair of envelopes is produced as the beam passes over each wire of the grid. The number of pulses exceeding ten per cent of the peak voltage in the eight envelopes produced by the beam completing a cycle in its closed path around the grid are counted and compared with those counted during the previous cycle of the beam moving in its closed path over the grid. As the number of pulses decreases, the quality of the focus of the beam increases so that correction signals are applied to the focus coil in accordance with whether the number of pulses is increasing or decreasing.

公开(公告)号：CA1041178A

公开(公告)日：1978-10-24

申请号：CA231509

申请日：1975-07-15

Applicant: IBM

Inventor： HALL ALAN V ,  PERKINS MERLYN H ,  PFEIFFER HANS C ,  WEBER EDWARD V ,  WOODARD OLLIE C

IPC: H01J37/305 ,  H01J37/147 ,  H01J37/304 ,  H01L21/027 ,  H01J37/31

Abstract: METHOD AND APPARATUS FOR CONTROLLING BRIGHTNESS AND ALIGNMENT OF A BEAM OF CHARGED PARTICLES A beam of charged particles has its alignment and brightness alternately controlled in accordance with the current of the beam. The measurements of the current and any corrections for alignment or brightness are made when the beam is not applied to a target. In operation the beam is applied to the target for a predetermined period of time. When the beam is not applied to the target it's positioning on the target is aligned and the brightness of the beam is controlled. This aligning and controlling occurs during a predetermined period of time between the periods of time when the beam is actually applied to the target. Apparatus for maintaining the substantially uniform current density of the beam of charge particles is also provided.

公开(公告)号：CA1040274A

公开(公告)日：1978-10-10

申请号：CA225411

申请日：1975-04-22

Applicant: IBM

Inventor： DORAN SAMUEL K ,  PERKINS MERLYN H

IPC: C22B9/18 ,  B22D23/10 ,  C22B9/193 ,  H01J37/30

Abstract: METHOD AND SYSTEM FOR CORRECTING AN ABERRATION OF A BEAM OF CHARGED PARTICLES A beam of charged particles is deflected in a closed path such as a square, for example, over a cross wire grid at a constant velocity by an X Y deflection system. A small high frequency jitter is added at both axes of deflection to cause oscillation of the beam at 45.degree. to the X and Y axes. From the time that the leading edge of the oscillating beam passes over the wire until the trailing edge of the beam passes over the wire, an envelope of the oscillations produced by the jitter is obtained. A second envelope is obtained when the leading edge of the beam exits from being over the wire until the trailing edge of the beam ceases to be over the wire. Thus, a pair of envelopes is produced as the beam passes over each wire of the grid. The number of pulses exceeding ten per cent of the peak voltage in the eight envelopes produced by the beam completing a cycle in its closed path around the grid are counted and compared with those counted during the previous cycle of the beam moving in its closed path over the grid. As the number of pulses decreases, the quality of the focus of the beam increases so that correction signals are applied to the focus coil in accordance with whether the number of pulses is increasing or decreasing.

公开(公告)号：AU8138075A

公开(公告)日：1976-11-25

申请号：AU8138075

申请日：1975-05-21

Applicant: IBM

Inventor： DORAN SAMUEL K ,  PERKINS MERLYN H

IPC: E01C11/26 ,  H01J37/153 ,  H01J37/21 ,  H01J37/244 ,  H01J37/30 ,  H01J37/305 ,  H01L21/027 ,  H05B3/36 ,  H05B3/56 ,  H01J29/46 ,  G01R13/22

Abstract: A beam of charged particles is deflected in a closed path such as a square, for example, over a cross wire grid at a constant velocity by an X Y deflection system. A small high frequency jitter is added at both axes of deflection to cause oscillation of the beam at 45 DEG to the X and Y axes. From the time that the leading edge of the oscillating beam passes over the wire until the trailing edge of the beam passes over the wire, an envelope of the oscillations produced by the jitter is obtained. A second envelope is obtained when the leading edge of the beam exits from being over the wire until the trailing edge of the beam ceases to be over the wire. Thus, a pair of envelopes is produced as the beam passes over each wire of the grid. The number of pulses exceeding ten per cent of the peak voltage in the eight envelopes produced by the beam completing a cycle in its closed path around the grid are counted and compared with those counted during the previous cycle of the beam moving in its closed path over the grid. As the number of pulses decreases, the quality of the focus of the beam increases so that correction signals are applied to the focus coil in accordance with whether the number of pulses is increasing or decreasing.

公开(公告)号：DE2525205A1

公开(公告)日：1976-02-12

申请号：DE2525205

申请日：1975-06-06

Applicant: IBM

Inventor： PERKINS MERLYN H ,  HALL ALAN V ,  PFEIFFER HANS C ,  WEBER EDWARD V ,  WOODARD OLLIE C

IPC: H01J37/305 ,  H01J37/147 ,  H01J37/304 ,  H01L21/027 ,  H01J37/24 ,  G06K15/20

Abstract: A beam of charged particles has its alignment and brightness alternately controlled in accordance with the current of the beam. The measurements of the current and any corrections for alignment or brightness are made when the beam is not applied to a target.

公开(公告)号：DE2521591A1

公开(公告)日：1976-01-15

申请号：DE2521591

申请日：1975-05-15

Applicant: IBM

Inventor： DORAN SAMUEL K ,  PERKINS MERLYN H

IPC: E01C11/26 ,  H01J37/153 ,  H01J37/21 ,  H01J37/244 ,  H01J37/30 ,  H01J37/305 ,  H01L21/027 ,  H05B3/36 ,  H05B3/56 ,  H01J3/12 ,  H01J37/00

Abstract: A beam of charged particles is deflected in a closed path such as a square, for example, over a cross wire grid at a constant velocity by an X Y deflection system. A small high frequency jitter is added at both axes of deflection to cause oscillation of the beam at 45 DEG to the X and Y axes. From the time that the leading edge of the oscillating beam passes over the wire until the trailing edge of the beam passes over the wire, an envelope of the oscillations produced by the jitter is obtained. A second envelope is obtained when the leading edge of the beam exits from being over the wire until the trailing edge of the beam ceases to be over the wire. Thus, a pair of envelopes is produced as the beam passes over each wire of the grid. The number of pulses exceeding ten per cent of the peak voltage in the eight envelopes produced by the beam completing a cycle in its closed path around the grid are counted and compared with those counted during the previous cycle of the beam moving in its closed path over the grid. As the number of pulses decreases, the quality of the focus of the beam increases so that correction signals are applied to the focus coil in accordance with whether the number of pulses is increasing or decreasing.

公开(公告)号：CA879051A

公开(公告)日：1971-08-24

申请号：CA879051D

Applicant: IBM

Inventor： GIEDD GARY R ,  PERKINS MERLYN H

公开(公告)号：CA716018A

公开(公告)日：1965-08-17

申请号：CA716018D

Applicant: IBM

Inventor： PERKINS MERLYN H ,  GIEDD GARY R ,  BEHRNDT MARIANNE E ,  WEED DONALD S