公开(公告)号：DE60237318D1

公开(公告)日：2010-09-23

申请号：DE60237318

申请日：2002-12-05

Applicant: IBM

Inventor： HUANG WU-SONG ,  LI WENJIE ,  MOREAU WAYNE ,  MEDEIROS DAVID E ,  PETRILLO KAREN E ,  LANG ROTBERT N ,  ANGELOPOULOS MARIE

IPC: G03F7/004 ,  G03F7/039 ,  G03F7/30

公开(公告)号：SG71852A1

公开(公告)日：2000-04-18

申请号：SG1998003973

申请日：1998-10-02

Applicant: IBM

Inventor： ANGELOPOULOS MARIE ,  BUCCHIGNANO JAMES JOSEPH ,  PETRILLO KAREN E

IPC: G03C1/89 ,  G03F7/004 ,  G03F7/038 ,  H01B1/12 ,  H05K1/09

Abstract: The present invention is an electrically conductive polymeric composition of matter having a controlled pH and structures fabricated therewith and methods of fabrication thereof having: a surface; a plurality of layer on the surface; at least one of the plurality of layers is formed from an energy sensitive material; at least another layer is formed from an electrically conductive polymer; the electrically conductive polymer contains acid functionality; and the electrically conductive polymer has a predetermined pH. The pH is controlled by additives mixed in with the electrically conductive polymer or by constituents on the electrically conductive polymer. The electrically conductive polymer is preferably a top layer. The structures are useful for lithography in microelectronic fabrication to avoid the effects of charging on resist from electron beams. The compositions are also useful in applications as static dissipation, electromagnetic interference shielding, corrosion protection, electroplating, and wiring.