公开(公告)号：AT514940T

公开(公告)日：2011-07-15

申请号：AT02783676

申请日：2002-11-28

Applicant: IBM

Inventor： UDA MITSURU ,  TERAKAWA KAZUNARI ,  SUZUKI AKIRA ,  MORITA CHIAKI ,  YAMADA YASUHARU ,  HAYAND TERUHIKO

IPC: G01N21/956 ,  G03F7/20 ,  H01L21/027 ,  H01L21/66

Abstract: Disclosed is a pattern inspection apparatus which easily and highly accurately detects a profile error (deviation) of at least one pattern having a cross section with projections and recesses. The inspection apparatus for the pattern 32 is for detecting the profile error of the pattern having a cross section with a projection and a recess. This inspection apparatus includes a plate 30 on which a pattern is mounted, light sources 40, 42 and 44 which can change angles of illuminating light emitted onto the pattern, within a range of 15 to 75 degrees with reference to the top surface of the pattern, and photodetectors 52 and 54 which can receive reflected light from the pattern at an angle within a range of 15 to 75 degrees with reference to the top surface of the pattern. The inspection apparatus is characterized by that the profile error of the pattern is detected based on an amount of the reflected light from an edge between the top surface and the side surface of each of the patterns.

公开(公告)号：JP2007003364A

公开(公告)日：2007-01-11

申请号：JP2005184323

申请日：2005-06-24

Applicant: Internatl Business Mach Corp ,  インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Maschines Corporation

Inventor： UDA MITSURU ,  YAMASHITA HIROSHI ,  KOHAYASE ATSUSHI

IPC: G01M11/00 ,  G02B5/20

CPC classification number: G01N21/95 ,  G01N21/86 ,  G01N2021/9511

Abstract: PROBLEM TO BE SOLVED: To detect flatness (unevenness) of the surface of an over-coat layer on colored pixel layer of the color filter, with high precision. SOLUTION: An inspecting device includes a light source 34, placed on an upside nearly perpendicular to the surface of a plate 30 to emit brightline spectrum corresponding to the colored microparticles of a color filter 32, and a photoreceiver 36 placed obliquely above the plate surface to receive the reflected light from the color filter 32 on the plate 30 during inspection time with a spectral sensitivity corresponding to brightline spectrum of the light source, and a detecting means 44 where color signals corresponding to the aforementioned spectral sensitivity output from the photoreceiver is used to create a luminance distribution of the color and then the flatness (unevenness) is detected of the surface of an over-coat layer. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：以高精度检测滤色器的有色像素层上的外涂层的表面的平坦度（不均匀性）。 解决方案：检查装置包括光源34，其放置在几乎垂直于板30的表面的上侧上，以发射对应于滤色器32的有色微粒的光线光谱;以及光接收器36，其倾斜地放置在 板表面，以在检测时间期间接收来自板30上的滤色器32的反射光，其中对应于光源的光线谱的光谱灵敏度;以及检测装置44，其中对应于从光接收器输出的上述光谱灵敏度的色信号 用于产生颜色的亮度分布，然后检测到外涂层的表面的平坦度（不均匀性）。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2000258128A

公开(公告)日：2000-09-22

申请号：JP5366099

申请日：1999-03-02

Applicant: IBM

Inventor： UDA MITSURU ,  SHINOHARA MASAKI

IPC: G01B9/02 ,  G01B11/06

Abstract: PROBLEM TO BE SOLVED: To visually inspect film thickness unevenness with high accuracy by improving the coherence between light rays reflected by the surfaces of a film and a substrate by projecting light having an intensity peak having a specific half-value width or smaller upon the substrate. SOLUTION: A light source section S the intensity peak of which has a half-value width of

公开(公告)号：JPH11281971A

公开(公告)日：1999-10-15

申请号：JP4987098

申请日：1998-03-02

Applicant: Internatl Business Mach Corp ,  インターナショナル・ビジネス・マシーンズ・コーポレイション

Inventor： SHINOHARA MASAKI ,  UDA MITSURU

IPC: G09F9/35 ,  G02F1/13 ,  G02F1/1333 ,  G02F1/1335 ,  G02F1/1343 ,  G02F1/136 ,  G02F1/1368

CPC classification number: G02F1/13439 ,  G02F1/133553 ,  G02F1/136 ,  G02F2001/133357

Abstract: PROBLEM TO BE SOLVED: To give a flat light reflection face to reduce the loss of reflected light due to diffraction.
SOLUTION: An active matrix type reflection liquid crystal element is provided with an array substrate having switching elements corresponding to picture elements and an array of picture element electrodes 32 connected to switching elements, and a counter substrate which has a transparent electrode facing the array of picture element electrodes 32 with a liquid crystal layer between them. Each picture element electrode 32 is formed so as to have an array of electrode studs, namely, split electrodes 68, Areas between studs are filled with an insulating material 64. The surface of the stud array is smoothed by chemical and mechanical polishing treatment. A dielectric light reflection film is provided on the flat surface of the stud array, and a liquid crystal molecule orienting film is provided on this film.
COPYRIGHT: (C)1999,JPO

Abstract translation: 要解决的问题：给出平坦的光反射面以减少由于衍射引起的反射光的损失。 解决方案：有源矩阵型反射液晶元件设置有具有对应于像素的开关元件和连接到开关元件的像素电极32的阵列的阵列基板，以及具有面向图案阵列的透明电极的对置基板 元件电极32之间具有液晶层。 每个像素电极32形成为具有电极柱的阵列，即分离电极68，螺柱之间的区域填充有绝缘材料64.通过化学和机械抛光处理来平滑螺柱阵列的表面。 在螺柱阵列的平坦表面上设置电介质光反射膜，并且在该膜上设置液晶分子取向膜。

公开(公告)号：JPH08248425A

公开(公告)日：1996-09-27

申请号：JP1769295

申请日：1995-02-06

Applicant: IBM

Inventor： UDA MITSURU ,  SHINOHARA MASAKI ,  NISHIDA MAMORU

IPC: G02F1/1335 ,  G02F1/1339 ,  G02F1/1362

Abstract: PURPOSE: To provide a liquid crystal display device improved in display luminance by improving the numerical aperture of a sub-pixel and a manufacturing method for the device in the projection type liquid crystal display device using a reflection type liquid crystal light valve and a manufacturing method for the device. CONSTITUTION: According to the above manufacturing method, the liquid crystal display device is constructed by forming a light absorbing layer 26 on a semiconductor substrate 1, forming plural light reflecting films 32 on the light absorbing layer 26 through an insulating film 28, forming an insulating film 36 on the whole surface, applying positive photoresist to the whole surface on the insulating film 36 to form a resist layer, applying exposure to the resist layer from above to form a mask, with the resist layer left on the areas among plural self-aligning light reflecting films 32, and etching the insulating film 36 by the mask to form a column-like spacer 34 on the plural light reflecting films 32.

公开(公告)号：DE69530425T2

公开(公告)日：2003-12-18

申请号：DE69530425

申请日：1995-05-29

Applicant: IBM

Inventor： SHINOHARA MASAMI ,  UDA MITSURU ,  ENAMI KUNIO

IPC: G02F1/1339 ,  H04N9/31 ,  G02F1/13

Abstract: The present invention relates to a projection type liquid crystal display device and a method for the manufacture thereof. It is the object of the present invention to provide a liquid crystal display device having pillar-shape spacers formed in pixel array regions with improved display properties by preventing the degradation of contrast and the occurrence of residual images, and a method for the manufacture of such a liquid crystal display device. In the liquid crystal display device comprising three liquid crystal light valves for displaying images corresponding to red (R), green (G) and blue (B), and having a plurality of pillar-shape spacers for maintaining a prescribed cell gap formed in their pixel array regions, a plurality of pillar-shape spacers formed in their pixel array regions are provided at locations which do not overlap with each other when images are projected on the screen.

公开(公告)号：AU2002349599A1

公开(公告)日：2003-06-10

申请号：AU2002349599

申请日：2002-11-28

Applicant: IBM

Inventor： SUZUKI AKIRA ,  MORITA CHIAKI ,  YAMADA YASUHARU ,  HAYANO TERUHIKO ,  UDA MITSURU ,  TERAKAWA KAZUNARI

IPC: G01N21/956 ,  G03F7/20 ,  H01L21/66 ,  H01L21/027

Abstract: Disclosed is a pattern inspection apparatus which easily and highly accurately detects a profile error (deviation) of at least one pattern having a cross section with projections and recesses. The inspection apparatus for the pattern 32 is for detecting the profile error of the pattern having a cross section with a projection and a recess. This inspection apparatus includes a plate 30 on which a pattern is mounted, light sources 40, 42 and 44 which can change angles of illuminating light emitted onto the pattern, within a range of 15 to 75 degrees with reference to the top surface of the pattern, and photodetectors 52 and 54 which can receive reflected light from the pattern at an angle within a range of 15 to 75 degrees with reference to the top surface of the pattern. The inspection apparatus is characterized by that the profile error of the pattern is detected based on an amount of the reflected light from an edge between the top surface and the side surface of each of the patterns.

公开(公告)号：DE69530425D1

公开(公告)日：2003-05-22

申请号：DE69530425

申请日：1995-05-29

Applicant: IBM

Inventor： SHINOHARA MASAMI ,  UDA MITSURU ,  ENAMI KUNIO

IPC: G02F1/1339 ,  H04N9/31 ,  G02F1/13

Abstract: The present invention relates to a projection type liquid crystal display device and a method for the manufacture thereof. It is the object of the present invention to provide a liquid crystal display device having pillar-shape spacers formed in pixel array regions with improved display properties by preventing the degradation of contrast and the occurrence of residual images, and a method for the manufacture of such a liquid crystal display device. In the liquid crystal display device comprising three liquid crystal light valves for displaying images corresponding to red (R), green (G) and blue (B), and having a plurality of pillar-shape spacers for maintaining a prescribed cell gap formed in their pixel array regions, a plurality of pillar-shape spacers formed in their pixel array regions are provided at locations which do not overlap with each other when images are projected on the screen.