公开(公告)号：EP1450153A4

公开(公告)日：2009-03-18

申请号：EP02783676

申请日：2002-11-28

Applicant: IBM

Inventor： UDA MITSURU ,  TERAKAWA KAZUNARI ,  SUZUKI AKIRA ,  MORITA CHIAKI ,  YAMADA YASUHARU ,  HAYAND TERUHIKO

IPC: G01N21/956 ,  G03F7/20 ,  H01L21/027 ,  H01L21/66

CPC classification number: G03F7/70616 ,  G01N21/956 ,  G03F7/70641

Abstract: The profile error (deviation) of a pattern having an uneven section is detected simply and highly accurately. A pattern (32) inspection device for detecting the profile error of a pattern having an uneven section, comprising a plate (30) to mount a pattern thereon, light sources (40, 42, 44) capable of changing angles of light beams applied to the pattern within a range of 15 to 75 degrees with respect to the top surface of the pattern, and light receivers (52, 54) capable of receiving light beams reflected from the pattern at angles within a range of 15 to 75 degrees, characterized in that the profile error of the pattern is detected from quantities of reflected light from edges between the top surfaces and the side surfaces of respective portions of the pattern.

公开(公告)号：AU2002349599A1

公开(公告)日：2003-06-10

申请号：AU2002349599

申请日：2002-11-28

Applicant: IBM

Inventor： SUZUKI AKIRA ,  MORITA CHIAKI ,  YAMADA YASUHARU ,  HAYANO TERUHIKO ,  UDA MITSURU ,  TERAKAWA KAZUNARI

IPC: G01N21/956 ,  G03F7/20 ,  H01L21/66 ,  H01L21/027

Abstract: Disclosed is a pattern inspection apparatus which easily and highly accurately detects a profile error (deviation) of at least one pattern having a cross section with projections and recesses. The inspection apparatus for the pattern 32 is for detecting the profile error of the pattern having a cross section with a projection and a recess. This inspection apparatus includes a plate 30 on which a pattern is mounted, light sources 40, 42 and 44 which can change angles of illuminating light emitted onto the pattern, within a range of 15 to 75 degrees with reference to the top surface of the pattern, and photodetectors 52 and 54 which can receive reflected light from the pattern at an angle within a range of 15 to 75 degrees with reference to the top surface of the pattern. The inspection apparatus is characterized by that the profile error of the pattern is detected based on an amount of the reflected light from an edge between the top surface and the side surface of each of the patterns.

公开(公告)号：AT514940T

公开(公告)日：2011-07-15

申请号：AT02783676

申请日：2002-11-28

Applicant: IBM

Inventor： UDA MITSURU ,  TERAKAWA KAZUNARI ,  SUZUKI AKIRA ,  MORITA CHIAKI ,  YAMADA YASUHARU ,  HAYAND TERUHIKO

IPC: G01N21/956 ,  G03F7/20 ,  H01L21/027 ,  H01L21/66

Abstract: Disclosed is a pattern inspection apparatus which easily and highly accurately detects a profile error (deviation) of at least one pattern having a cross section with projections and recesses. The inspection apparatus for the pattern 32 is for detecting the profile error of the pattern having a cross section with a projection and a recess. This inspection apparatus includes a plate 30 on which a pattern is mounted, light sources 40, 42 and 44 which can change angles of illuminating light emitted onto the pattern, within a range of 15 to 75 degrees with reference to the top surface of the pattern, and photodetectors 52 and 54 which can receive reflected light from the pattern at an angle within a range of 15 to 75 degrees with reference to the top surface of the pattern. The inspection apparatus is characterized by that the profile error of the pattern is detected based on an amount of the reflected light from an edge between the top surface and the side surface of each of the patterns.

公开(公告)号：JP2001050195A

公开(公告)日：2001-02-23

申请号：JP20772699

申请日：1999-07-22

Applicant: IBM

Inventor： KATO KATSUTOSHI ,  KOBAYASHI MASAKI ,  YAMADA YASUHARU ,  MORINO TAKAYUKI

IPC: G06F1/20 ,  F04D19/00 ,  F04D25/08 ,  F04D29/02 ,  F04D29/32 ,  F04D29/38 ,  F04D29/66

Abstract: PROBLEM TO BE SOLVED: To increase an air flow quantity in a condition in which a noise level is held within an allowable value by arranging adhesive materials on a root part which is brought into contact with a hub in a surface side and a back surface side of each blade, and appropriately differing each shape of blades, in a fan wherein a plurality of blades are mounted around the hub to be rotated. SOLUTION: In a fan 1, a plurality of blades 4 are mounted at equal clearances around a hub 3 fixed to a rotary shaft of a motor in a fan main body 2. In this case, adhesive materials 5 are arranged on a root part 4a which is brought into contact with a hub 3 of a surface side and a back surface side in the appropriate number of blades 4. Each shape of the blades 4 provided with the adhesive materials 5, and each shape of the blades 4 not provided with the adhesive materials 5, are differed from each other. Accordingly, a periodicity applied to pressure change of air is reduced by each shape of the blades 4, and noise is reduced. Even if the number of the blades 4 and rotating speed are increased for increasing an air supplying quantity, it is possible to hold a noise level of a fan 1 within an allowable value.

公开(公告)号：JP2009081439A

公开(公告)日：2009-04-16

申请号：JP2008245676

申请日：2008-09-25

Applicant: Internatl Business Mach Corp ,  インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Maschines Corporation

Inventor： SCHMIDT ROGER R ,  YAMADA YASUHARU ,  TAKAYOSHI JUNJI ,  PORTER DONALD W ,  TSUKAMOTO TAKASHI

IPC: H05K7/20 ,  F25B1/00 ,  G06F1/20 ,  H05K7/18

CPC classification number: H05K7/20827

Abstract: PROBLEM TO BE SOLVED: To provide a vapor-compression heat exchange system for progressing the cooling of an electronics rack. SOLUTION: A system 300 includes an evaporator coil 340 mounted to an outlet cover 330 fixed at the air outlet side of a rack 310 by a hinge, and refrigerant inlet and outlet plenums and an expansion valve 341 all of which are also mounted to the outlet cover and in fluid communication with the evaporator coil. The evaporator coil includes at least one heat exchange tube and a plurality of fins extending therefrom. Respective connect couplings connect the inlet and outlet plenums in fluid communication with a vapor-compression unit 350 which includes a compressor 351 and a condenser 352 disposed separate from the outlet door cover. The vapor-compression unit exhausts heat from a refrigerant circulating therethrough. COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：提供用于进行电子机架的冷却的蒸汽压缩热交换系统。 解决方案：系统300包括：蒸发器盘管340，其安装到通过铰链固定在齿条310的空气出口侧的出口盖330;以及制冷剂入口和出口增压室以及全部也安装在其上的膨胀阀 到出口盖并与蒸发器盘管流体连通。 蒸发器盘管包括至少一个热交换管和从其延伸的多个翅片。 各个连接联轴器连接入口和出口压气室与蒸汽压缩单元350流体连通，蒸汽压缩单元350包括与出口门盖分离设置的压缩机351和冷凝器352。 蒸汽压缩单元从循环的制冷剂排出热量。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2000277964A

公开(公告)日：2000-10-06

申请号：JP8168899

申请日：1999-03-25

Applicant: IBM

Inventor： NAKANISHI TORU ,  YAMADA YASUHARU ,  KUZUNO MASANORI ,  NISHIO TOSHIHIKO

IPC: H05K7/20 ,  G06F1/20

Abstract: PROBLEM TO BE SOLVED: To prevent the height from being increased to efficiency cool a heat generation object, while power consumption for cooling is saved for efficiently cooling the heat generating object of a CPU emitting a high temperature with the increase of power consumption for making performance high. SOLUTION: This cooling device 10 of a notebook personal computer is constituted by comprising a heat sink 14 which heat-conducts a part of heat emitted from the heat generating object 12 of the notebook personal computer to a position different from the heat generating object 12, a heat transfer means 16 which forcedly transfers the remainder of heat emitted from the heat generation object 12 to a position different from the heat generating object 12 and forcible heat generating means 22 and 28 which compulsorily radiate heat.