公开(公告)号：CA2366999C

公开(公告)日：2009-01-06

申请号：CA2366999

申请日：2000-03-17

Applicant: INPUT OUTPUT INC

Inventor： MAXWELL PETER ,  STALNAKER W MARC ,  RINNE RAY ,  LAROO RICHARD ,  BALDERES DEMETRIOS ,  ALTMAN SJOERD ,  BEHN LAWRENCE P ,  DOMAGALSKI KLAUS ,  FABER KEES ,  GOLDBERG HOWARD D ,  YU LIANZHONG ,  MORGAN DAVID ,  BUIE THOMAS ,  MARSH JAMES L ,  SIGMAR AXEL ,  YU DULI ,  RUSHEFSKY LARRY ,  LEMKE GUIDO ,  IP MATTHEW ,  SELVAKUMAR ARJUN

IPC: G01D11/24 ,  G01P21/00 ,  B65D85/38 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01P15/18 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00

Abstract: A sensor apparatus (104) includes a plural different spatial direction axis of sensitivity positioned sensor package containing sensor module (305) supported by a planar surface (345) within a cavity (340) of a housing (205) coupled to a first end cap (210) by a PC-board connection (355). Housing (205) is further coupled to first end cap (210) by a first coupling member (315) and a second coupling member (320) and is also coupled to an opposite second end cap (215) by a third coupling member (320) and a fourth coupling member (325). Interface sealing members (330a, 330b, 330c, 330d) seal between housing (205 ) and first end cap (210). Interface sealing members (335a, 335b, 335c, 335d) seal between housing (205) and second end cap (215).

公开(公告)号：DE60033643D1

公开(公告)日：2007-04-12

申请号：DE60033643

申请日：2000-03-15

Applicant: INPUT OUTPUT INC

Inventor： SELVAKUMAR ARJUN ,  MARSH JAMES L ,  GOLDBERG HOWARD D ,  YU DULI ,  STALNAKER W MARC

IPC: G01P21/00 ,  H05K5/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84

Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).

公开(公告)号：CA2463900A1

公开(公告)日：2003-05-15

申请号：CA2463900

申请日：2002-10-18

Applicant: INPUT OUTPUT INC

Inventor： GOLDBERG HOWARD ,  YI TAECHUNG ,  SELVAKUMAR ARJUN ,  YU DULI

IPC: B81B3/00 ,  B81C1/00 ,  B81C3/00 ,  G02B6/12 ,  G02B6/35 ,  G02B26/08

Abstract: A digital optical switch apparatus and method for manufacture. The apparatus includes a mirror assembly (112) coupled to a top cap (110) and to a bottom cap (114).

公开(公告)号：NO20026151D0

公开(公告)日：2002-12-20

申请号：NO20026151

申请日：2002-12-20

Applicant: INPUT OUTPUT INC

Inventor： SELVAKUMAR ARJUN ,  YU DULI ,  YU LIANZHONG ,  JONES BEN W

IPC: B81B3/00 ,  B81C1/00 ,  G01P15/08 ,  G01P15/125 ,  G01V1/18 ,  G01P

Abstract: An accelerometer comprising a measuring mass (1405) for detecting acceleration, including a housing having a cavity, one or more spring mass assemblies (1400) positioned within the cavity, wherein each spring mass assembly (1400) includes a support structure (1410), including one or more resilient folded beams (1415a-1415d) coupled to the support structure (1410) and the measuring mass (1405) is coupled to the resilient folded beams (1415a-1415d), wherein one or more electrode patterns are coupled to the spring mass assembly (1400), wherein a top cap wafer, including a top capacitor electrode, is coupled to the measurement mass (1405), and a bottom cap wafer, including a bottom capacitor electrode, is also coupled to measurement mass (1405). The folded beams include circular cutouts so as to provide stress relief at connections between foot and leg positions of each folded beam.

公开(公告)号：CA2410909A1

公开(公告)日：2001-12-06

申请号：CA2410909

申请日：2001-05-29

Applicant: INPUT OUTPUT INC

Inventor： YU LIANZHONG ,  SCHMIDT MARTIN A ,  GOLDBERG HOWARD D ,  RIED ROBERT P ,  SELVAKUMAR ARJUN

IPC: G01P15/08 ,  G01P15/125 ,  G01V1/18 ,  G01P15/00

Abstract: An accelerometer (305) which comprises a measurement mass assembly having to p capacitor electrode (705), with one or more re-entrant openings or grooves (1405), a bottom capacitor electrode (805), with one or more re-entrant openings (1410), and/or a mass electrode pattern (910, 915), which also includes one or more re-entrant openings or grooves (1415, 1420). A re-entra nt opening or groove is an opening or groove formed in an element whereby the opening or groove is larger toward the center of the element than at the surface of the element. Re-entrant openings or grooves (1405, 1410, 1415, 1420) reduce fluid damping thereby reducing the amount of thermo-mechanical noise and permit increased sealing pressure of the accelerometer (305) there by lowering manufacturing costs and increasing production yields.

公开(公告)号：NO20014469A

公开(公告)日：2001-10-24

申请号：NO20014469

申请日：2001-09-14

Applicant: INPUT OUTPUT INC

Inventor： SELVAKUMAR ARJUN ,  MARSH JAMES L ,  GOLDBERG HOWARD D ,  YU DULI ,  STALNAKER W MARC

IPC: G01P21/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00

CPC classification number: G01P1/023 ,  B81B3/001 ,  B81B3/0072 ,  B81B7/0016 ,  B81B2201/0235 ,  G01D11/245 ,  G01D18/008 ,  G01N2001/021 ,  G01P15/0802 ,  G01P15/13 ,  G01P21/00 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/181 ,  G01V1/186 ,  H01L2224/48472 ,  H01L2924/0002 ,  H01L2924/00

公开(公告)号：NO20014464D0

公开(公告)日：2001-09-14

申请号：NO20014464

申请日：2001-09-14

Applicant: INPUT OUTPUT INC

Inventor： SELVAKUMAR ARJUN ,  GOLDBERG HOWARD D ,  YU DULI ,  IP MATTHEW ,  SCHMIDT MARTIN A ,  MARSH JAMES L ,  FUNG BING-FAI ,  SIMON PHILIP

IPC: G01P21/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00 ,  G01P

Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).

公开(公告)号：AU4503500A

公开(公告)日：2000-10-04

申请号：AU4503500

申请日：2000-03-16

Applicant: INPUT/OUTPUT INC

Inventor： SELVAKUMAR ARJUN ,  GOLDBERG HOWARD D ,  YU DULI ,  IP MATTHEW ,  SCHMIDT MARTIN A ,  MARSH JAMES L ,  FUNG BING-FAI ,  SIMON PHILIP

IPC: G01P21/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00

Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).

公开(公告)号：CA2463900C

公开(公告)日：2011-01-11

申请号：CA2463900

申请日：2002-10-18

Applicant: INPUT OUTPUT INC

Inventor： YU DULI ,  SELVAKUMAR ARJUN ,  GOLDBERG HOWARD ,  YI TAECHUNG

IPC: G02B26/08 ,  B81B3/00 ,  B81C1/00 ,  B81C3/00 ,  G02B6/12 ,  G02B6/35

Abstract: A digital optical switch apparatus and method for manufacture. The apparatus includes a mirror assembly (112) coupled to a top cap (110) and to a bottom cap (114).

公开(公告)号：CA2366320C

公开(公告)日：2010-05-11

申请号：CA2366320

申请日：2000-03-16

Applicant: INPUT OUTPUT INC

Inventor： SELVAKUMAR ARJUN ,  GOLDBERG HOWARD D ,  YU DULI ,  IP MATTHEW ,  SCHMIDT MARTIN A ,  MARSH JAMES L ,  FUNG BING-FAI ,  SIMON PHILIP

IPC: G01P15/02 ,  G01P21/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00

Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).